Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR
TYTAN Furnace systems can be used for all conventional atmospheric pressure processes employed in the semiconductor industry. Processes run at temperatures above 1150°C require a thicker wall quartz tube, a SiC liner for the tube, SiC wafer boats, and SiC cantilever rods.
