Description
Ultratech Spare Parts Ultratech® wafer stepper Ultratech lithography tools
Valid time: Subject to prior sale without notice. This is only for end user. Appreciate your time.
| 1 | Part Number STAGE |
| DESC : Camera CCD, Monochrome, M2244i, with power supply | |
| MODEL: 4700 6700 Titan Saturn | |
| 2 | Part Number 0606-100006-RF |
| DESC : Chuck 6 inch Round Frosty | |
| MODEL: 1000 1100 | |
| 3 | Part Number 0503-300700 |
| DESC : HP Comparator board for model 990, 1000 | |
| MODEL: 1000 990 | |
| 4 | Part Number MVSJIG-1500 |
| DESC : MVS laser alignment jig for model 1500/1700/1900 steppers | |
| MODEL: 1700 | |
| 5 | Part Number 01-15-04744 |
| DESC : Rotary Actuator ASSY for reticle transport robot | |
| MODEL: 4700 6700 Titan Saturn | |
| 6 | Part Number 2529-000017 |
| DESC : TUBING GREEN 1/4 X 1/8 | |
| 7 | Part Number 01-20-03651 |
| DESC : WTC Motor Asy 2244i | |
| MODEL: 4700 6700 Titan Saturn | |
| 8 | Part Number 0564-700601 |
| DESC : Alignment Detector, Left HAM, .31 | |
| MODEL: 1100 1500 1700 | |
| 9 | Part Number 0564-700609 |
| DESC : Alignment Detector, Left HAM, .40 | |
| MODEL: 1100 1500 1700 | |
| 10 | Part Number 0564-700603 |
| DESC : Alignment Detector, Left VAM, .31 | |
| MODEL: 1100 1500 1700 | |
| 11 | Part Number 0564-700611 |
| DESC : Alignment Detector, Left VAM, .40 | |
| MODEL: 1100 1500 1700 | |
| 12 | Part Number 0564-700600 |
| DESC : Alignment Detector, Right HAM, .31 | |
| MODEL: 1100 1500 1700 | |
| 13 | Part Number 0564-700608 |
| DESC : Alignment Detector, Right HAM, .40 | |
| MODEL: 1500 1700 | |
| 14 | Part Number 0564-700602 |
| DESC : Alignment Detector, Right VAM, .31 | |
| MODEL: 1100 1500 1700 | |
| 15 | Part Number 0564-700610 |
| DESC : Alignment Detector, Right VAM, .40 | |
| MODEL: 1100 1500 1700 | |
| 16 | Part Number 0508-648795 |
| DESC : Coupling, spring | |
| MODEL: 1000 1100 1500 1700 990 | |
| 17 | Part Number 0606-446203 |
| DESC : Crossmask, 100um leg x 40um window | |
| MODEL: 1000 990 | |
| 18 | Part Number 0606-446201 |
| DESC : Crossmask, 70 & 60um leg x 30um window | |
| MODEL: 1000 990 | |
| 19 | Part Number 0606-446202 |
| DESC : Crossmask, 70 & 60um leg x 40um window | |
| MODEL: 1000 990 | |
| 20 | Part Number CMT-1100 |
| DESC : Crossmask Alignment Tool | |
| MODEL: 1100 1500 1700 | |
| 21 | Part Number 0556-690100 |
| DESC : Crossmask assembly, 1100, Left HAMS | |
| MODEL: 1100 | |
| 22 | Part Number 0556-690200 |
| DESC : Crossmask assembly, 1100, right HAMS | |
| MODEL: 1100 | |
| 23 | Part Number 0564-700633 |
| DESC : Crossmask assembly, Left HAMS .31 | |
| MODEL: 1500 1700 | |
| 24 | Part Number 0564-700641-100 |
| DESC : Crossmask assembly, Left HAMS .40NA, 100um | |
| MODEL: 1500 1700 | |
| 25 | Part Number 0564-700632 |
| DESC : Crossmask assembly, Right HAMS .31, included crossmask glued onto holder. | |
| MODEL: 1500 1700 | |
| 26 | Part Number 0564-700640 |
| DESC : Crossmask assembly, Right HAMS .40 | |
| MODEL: 1500 1700 | |
| 27 | Part Number 0564-700640-100 |
| DESC : Crossmask assembly, Right HAMS .40NA, 100um | |
| MODEL: 1500 1700 | |
| 28 | Part Number 0556-690100-70 |
| DESC : Crossmask assy, 70um, .31NA, Left HAMS | |
| MODEL: 1100 | |
| 29 | Part Number 0556-698200-70 |
| DESC : Crossmask assy, 70um, .31NA, Right HAMS | |
| MODEL: 1100 | |
| 30 | Part Number 0564-700633-100 |
| DESC : Crossmask assy, Left HAMS .31, 100um leg | |
| MODEL: 1500 1700 | |
| 31 | Part Number 0564-700632-100 |
| DESC : Crossmask assy, Right HAMS .31, 100um leg | |
| MODEL: 1500 1700 | |
| 32 | Part Number 0506-353610 |
| DESC : Crossmask Clamp | |
| MODEL: 1000 990 | |
| 33 | Part Number 0506-353500 |
| DESC : Crossmask holder assembly, left side, includes crossmask | |
| MODEL: 1000 990 | |
| 34 | Part Number 0506-353600 |
| DESC : Crossmask holder assembly, right side, includes crossmask | |
| MODEL: 1000 990 | |
| 35 | Part Number 0506-353587 |
| DESC : Crossmask Slider Mounting Plate, Left | |
| MODEL: 1000 990 | |
| 36 | Part Number 0506-353588 |
| DESC : Crossmask Slider Mounting Plate, Right | |
| MODEL: 1000 990 | |
| 37 | Part Number 0506-353588 |
| DESC : Crossmask Slider Mounting Plate, Right | |
| MODEL: 1000 990 | |
| 38 | Part Number 0606-446200 |
| DESC : Crossmasks 140×40, comes in a set of 2. | |
| MODEL: 1000 990 | |
| 39 | Part Number TEK-620 |
| DESC : CRT Monitor, Refurbished. 90 day warranty | |
| MODEL: 1000 1100 990 | |
| 40 | Part Number 0556-697500 |
| DESC : Detector assembly, HAMS, Left | |
| MODEL: 1100 | |
| 41 | Part Number 0556-697400 |
| DESC : Detector assembly, HAMS, Right | |
| MODEL: 1100 | |
| 42 | Part Number ENG |
| DESC : Engineering / Tooling charge | |
| MODEL: 1100 | |
| 43 | Part Number 7000-05822060 |
| DESC : Fiber optic cable for 1700 MVS system | |
| MODEL: 1500 1700 | |
| 44 | Part Number 57-08-04660 |
| DESC : Filter, Mist, Seprtr, MVS, Air Sup | |
| MODEL: 1500 1700 | |
| 45 | Part Number 2901-000001 |
| DESC : Leader CRT scope | |
| MODEL: 1000 1100 1500 1700 990 | |
| 46 | Part Number 01-08-00159 |
| DESC : Left WAS window motor assembly | |
| MODEL: 1500 1700 | |
| 47 | Part Number CV-M531 |
| DESC : Machine Vision Camera, model 1500/1700 MVS | |
| MODEL: 1500 1700 | |
| 48 | Part Number 1004-010101 |
| DESC : Magnet for crossmask and aperture | |
| MODEL: 1000 1100 1500 1700 990 | |
| 49 | Part Number 01-08-03191-01 |
| DESC : MVS filter, 550nm, green | |
| MODEL: | |
| 50 | Part Number MVS-OBJECTIVE-2244 |
| DESC : MVS Objective and bellows for 2244 body steppers. Old style | |
| MODEL: 4700 6700 Titan Saturn | |
| 51 | Part Number 1563-700427 |
| DESC : OES Tilt Window PC Board | |
| MODEL: 1500 1700 2700 | |
| 52 | Part Number 1563-700427S |
| DESC : OES Tilt Window PC Board | |
| MODEL: 1500 1700 2700 | |
| 53 | Part Number 1026-536400 |
| DESC : PMT Bellows assy | |
| MODEL: 1000 990 | |
| 54 | Part Number 1026-001513 |
| DESC : PMT Coupling | |
| MODEL: 1000 1100 1500 1700 990 | |
| 55 | Part Number 0506-098123 |
| DESC : PMT Mux board | |
| MODEL: 1000 990 | |
| 56 | Part Number 0506-270301 |
| DESC : PMT Photomultiplier Tube | |
| MODEL: 1000 990 | |
| 57 | Part Number 0506-270300 |
| DESC : PMT Power Supply Socket | |
| MODEL: 1000 990 | |
| 58 | Part Number 2510-000022 |
| DESC : PMT Window Belt | |
| MODEL: 1000 990 | |
| 59 | Part Number CV-M531-PS |
| DESC : Power supply for Machine Vision Camera, model 1500/1700 MVS | |
| MODEL: 1500 1700 990 | |
| 60 | Part Number 01-08-00158 |
| DESC : Right WAS window motor assembly | |
| MODEL: 1500 1700 | |
| 61 | Part Number SUPER6 |
| DESC : Ball bushing bearing for autoloader guide rails in cassette plate | |
| MODEL: 1000 1100 1500 1700 | |
| 62 | Part Number E0-120-016-125-0S |
| DESC : WAS spring for left/right pods | |
| MODEL: 1000 1100 1500 1700 990 | |
| 63 | Part Number 0556-617600 |
| DESC : WAS window assembly rebuild | |
| MODEL: 1100 1500 1700 | |
| 64 | Part Number 2509-000040 |
| DESC : 1″ Leveling screw for manual and autoloader, swivel head | |
| MODEL: 1000 1100 1500 1700 990 | |
| 65 | Part Number 2509-000040-15 |
| DESC : 1.5″ Leveling screw for manual and autoloader, swivel head | |
| MODEL: 1000 1100 1500 1700 990 | |
| 66 | Part Number SETSCREW-PULLEY 2-56 |
| DESC : 3/32 x 2/56 set screw for automation autoloader pulleys | |
| MODEL: 1000 1100 1500 1700 990 | |
| 67 | Part Number CMX486SLC-66 |
| DESC : 486-66 processor board for Intelligent Autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 68 | Part Number 10-05-00369 |
| DESC : 6″ Automation Gate | |
| MODEL: 1000 1100 1500 1700 990 | |
| 69 | Part Number DM-5210 |
| DESC : A/D board, Intelligent autoloader, modified | |
| MODEL: 1000 1100 1500 1700 990 4700 | |
| 70 | Part Number 2502-000015 |
| DESC : Adjustable X bash bearing assy | |
| MODEL: 1000 1100 1500 1700 990 | |
| 71 | Part Number ALHSTAND |
| DESC : Autoloader Height Stand | |
| MODEL: 1000 1100 1500 1700 990 | |
| 72 | Part Number AUTO-R |
| DESC : Autoloader refurbishment, Smart or Automation” | |
| MODEL: 1000 1100 1500 1700 990 | |
| 73 | Part Number 8001-000006 |
| DESC : Autoloader Exchange, 4″ automation / 4″ automation | |
| MODEL: 1000 1100 1500 1700 990 | |
| 74 | Part Number SEI-385 |
| DESC : Automation autoloader I/O board | |
| MODEL: 1000 1100 1500 1700 990 | |
| 75 | Part Number 0532-567400 |
| DESC : Automation Autoloader, 6″, Refurbished | |
| MODEL: 1000 1100 1500 1700 990 | |
| 76 | Part Number 4210-000001 |
| DESC : Automation Board, M380 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 77 | Part Number SA-AXLE-X |
| DESC : Axle, .125″” diameter, Smart autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 78 | Part Number AA-AXLE-XX |
| DESC : Axle, .187″ diameter, for automation autoloader (XX= length of axle in inches) | |
| MODEL: 1000 1100 1500 1700 990 | |
| 79 | Part Number AA-AXLEBEARING |
| DESC : Axle bearing for automation autoloader. .OD .312 ID .187, flanged, shielded .109 wide | |
| MODEL: 1000 1100 1500 1700 990 | |
| 80 | Part Number SA-AXLEBEARING |
| DESC : Axle bearing, Smart autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 81 | Part Number AP-X-X-X-X |
| DESC : Axle Pulley assembly for all autoloaders. See notes to build part number | |
| MODEL: 1000 1100 1500 1700 990 | |
| 82 | Part Number AP-A-D-2-N-187 |
| DESC : Axle pulley, automation, delrin, double pulley, no taper, .187 ID | |
| MODEL: 1000 1100 1500 1700 990 | |
| 83 | Part Number AP-A-D-1-N-187 |
| DESC : Axle pulley, automation, delrin, single pulley, no taper, .187 ID | |
| MODEL: 1000 1100 1500 1700 990 | |
| 84 | Part Number AP-A-D-1-T-187 |
| DESC : Axle pulley, automation, delrin, single pulley, tapered, .187 ID | |
| MODEL: 1000 1100 1500 1700 990 | |
| 85 | Part Number AXLERETAINER-X |
| DESC : Axle retainer, stainless steel, with set screw | |
| MODEL: 1000 1100 1500 1700 990 | |
| 86 | Part Number MA3M10 |
| DESC : Banner modulated photoelectric amplifier | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 87 | Part Number 3806-000028 |
| DESC : Banner sensor | |
| MODEL: 1000 1100 1500 1700 990 | |
| 88 | Part Number 2502-000022 |
| DESC : Bearing, top and bottom elevator leadscrew, Automation Autoloader, 0.5 OD x 0.25 ID | |
| MODEL: 1000 1100 1500 1700 990 | |
| 89 | Part Number 7001-200006 |
| DESC : Belt Kit for 5″ and 4″ UTS Smart autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 90 | Part Number 7001-200003 |
| DESC : Belt Kit for 6″ Smart autoloader with HTS input belt drive | |
| MODEL: 1000 1100 1500 1700 990 | |
| 91 | Part Number 7001-200005 |
| DESC : Belt Kit for 6″ UTS Automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 92 | Part Number 7001-200007 |
| DESC : Belt Kit for 6″ UTS Smart autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 93 | Part Number 02-01-00568 |
| DESC : Belt Sprocket Pulley for elevator motor | |
| MODEL: 1000 1100 1500 1700 990 | |
| 94 | Part Number 5106-000009 |
| DESC : Capacitive wafer sensor, Smart Autoloaders | |
| MODEL: 1000 1100 1500 1700 990 | |
| 95 | Part Number 1002-353300 |
| DESC : Conveyer pulley, input drive, automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 96 | Part Number 2509-000074 |
| DESC : Dashpot for automation gate | |
| MODEL: 1000 1100 1500 1700 990 | |
| 97 | Part Number AUTO-DBU-S |
| DESC : Double belt upgrade, Smart 6″ loaders only | |
| MODEL: 1000 1100 1500 1700 990 | |
| 98 | Part Number 7001-200002 |
| DESC : Easy Belt Change Mod | |
| MODEL: 1000 1100 1500 1700 990 | |
| 99 | Part Number 3806-0000235 |
| DESC : Elevator Limit Sensor, 12″ wire output | |
| MODEL: 1000 1100 1500 1700 990 | |
| 100 | Part Number 4805-000008 |
| DESC : Elevator Limit Sensor, Pin interface | |
| MODEL: 1000 1100 1500 1700 990 | |
| 101 | Part Number SSP-A-D-1-N-0-D4.0 |
| DESC : Elevator Shoulder screw pulley assembly, Automation, Delrin, 1 pulley, 0.4″ diameter | |
| MODEL: 1000 1100 1500 1700 990 | |
| 102 | Part Number 1032-573700 |
| DESC : Elevator/Belt stepper motor for Automation Autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 103 | Part Number 1002-373700 |
| DESC : Elevator/Belt stepper motor for Smart Autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 104 | Part Number 03-08-01012 |
| DESC : Lower Flat find board for automation autoloaders, 3″, 4″, 5″, 6″, long version | |
| MODEL: 1000 1100 1500 1700 990 | |
| 105 | Part Number IA-A-UFF |
| DESC : Upper Flat find board for automation autoloaders, 4″, 5″, 6″ | |
| MODEL: 1000 1100 1500 1700 990 | |
| 106 | Part Number 7001-200004 |
| DESC : EP Belt Kit for 5″,4″, 3″ UTS Automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 107 | Part Number 7001-200004-P |
| DESC : EP Belt Kit for 5″,4″, 3″ UTS Automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 108 | Part Number 7001-200001 |
| DESC : EP Belt Kit for 6″, 5″, 4″ Smart/Automation autoloaders with SEI dual belt input slot | |
| MODEL: 1000 1100 1500 1700 990 | |
| 109 | Part Number 1002-346300 |
| DESC : Foot bracket for autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 110 | Part Number 2502-000112 |
| DESC : Gate Bearing Assembly, Automation Loader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 111 | Part Number 2502-000012 |
| DESC : Gate Bearing, Smart Loader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 112 | Part Number 1004-342860 |
| DESC : Gate lift spring for automation autoloaders | |
| MODEL: 1000 1100 1500 1700 990 | |
| 113 | Part Number 3806-000031 |
| DESC : Gate sensor, Automation, with Plug | |
| MODEL: 1000 1100 1500 1700 990 | |
| 114 | Part Number 3806-000032 |
| DESC : Gate sensor plug, Automation | |
| MODEL: 1000 1100 1500 1700 990 | |
| 115 | Part Number 0552-681900 |
| DESC : gate solenoid, Automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 116 | Part Number 0552-681900-C |
| DESC : gate solenoid, Automation autoloader,with cable | |
| MODEL: 1000 1100 1500 1700 990 | |
| 117 | Part Number 0512-470000 |
| DESC : gate solenoid, Smart | |
| MODEL: 1000 1100 1500 1700 990 | |
| 118 | Part Number GENCOBOT-4-3L |
| DESC : Genmark gencobot model 4/3L Classic | |
| MODEL: 4700 6700 Titan Saturn | |
| 119 | Part Number 02-02-02942-REVK |
| DESC : Genmark pnumatic prealigner | |
| MODEL: 4700 6700 Titan Saturn | |
| 120 | Part Number IDE-CONTROLLER |
| DESC : IDE vibration controller | |
| MODEL: 4700 6700 Titan Saturn | |
| 121 | Part Number 1002-322400 |
| DESC : Idler pulley, input drive, automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 122 | Part Number 01-15-04354 |
| DESC : Illuminator Controller UTS 3062 | |
| MODEL: 4700 6700 Titan Saturn | |
| 123 | Part Number 1002-376600 |
| DESC : Indexer Pulley Motor, 0.75″ OD | |
| MODEL: 1000 1100 1500 1700 990 | |
| 124 | Part Number OP132 |
| DESC : Infrared LED for lower flat find boards on Smart Autoloaders | |
| MODEL: 1000 1100 1500 1700 990 | |
| 125 | Part Number INTELL-A |
| DESC : Intelligent Autoloader upgrade kit for Automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 126 | Part Number INTELL-S |
| DESC : Intelligent Autoloader upgrade kit for Smart autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 127 | Part Number AA-PBL |
| DESC : Lamp for automation loader illuminated push button switch | |
| MODEL: 1000 1100 1500 1700 990 | |
| 128 | Part Number IA-S-LFF |
| DESC : Lower Flat Find board, Extended range, Smart loaders | |
| MODEL: 1000 1100 1500 1700 990 | |
| 129 | Part Number 0553-701405 |
| DESC : Lower Flat Find LED for Smart autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 130 | Part Number 0553-701404 |
| DESC : Lower Flat Find, M371-1, for Smart loaders | |
| MODEL: 1000 1100 1500 1700 990 | |
| 131 | Part Number INTELLI-01 |
| DESC : Main baseboard , intelligent autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 132 | Part Number UFFB-A-350 |
| DESC : Mounting block for automation upper flat find boards, .35″ thick | |
| MODEL: 1000 1100 1500 1700 990 | |
| 133 | Part Number UFFB-S-350 |
| DESC : Mounting block for Smart upper flat find boards, .35″ thick | |
| MODEL: 1000 1100 1500 1700 990 | |
| 134 | Part Number 01-15-03775 |
| DESC : MVS Controller for 2244i/4700/Titan | |
| MODEL: 4700 6700 Titan Saturn | |
| 135 | Part Number 2504-000059 |
| DESC : O-Ring* | |
| MODEL: 1000 1100 1500 1700 990 | |
| 136 | Part Number 2504-110029 |
| DESC : O-ring, 029, Blk, 6″ automation loader output side | |
| MODEL: 1000 1100 1500 1700 990 | |
| 137 | Part Number 2504-110039 |
| DESC : O-ring, 039, Blk, 6″ automation loader output side | |
| MODEL: 1000 1100 1500 1700 990 | |
| 138 | Part Number 2504-110043 |
| DESC : O-ring, 043, Blk, 6″ automation loader output side | |
| MODEL: 1000 1100 1500 1700 990 | |
| 139 | Part Number 2504-000058 |
| DESC : O-Ring, 2-042 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 140 | Part Number 2504-000057 |
| DESC : O-Ring, Clear, 2-039 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 141 | Part Number 2108-000302 |
| DESC : Output Sensor (SPY), Automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 142 | Part Number SE-302T |
| DESC : Patlite Tower LED light red, amber, green | |
| MODEL: 1000 1100 1500 1700 990 | |
| 143 | Part Number 19-15-04330 |
| DESC : Pnumatic Controller | |
| MODEL: 4700 6700 Titan Saturn | |
| 144 | Part Number 7001-300006 |
| DESC : Polyurathane Belt Kit for 6″ | |
| MODEL: 1000 1100 1500 1700 990 | |
| 145 | Part Number A14108 |
| DESC : power plug, female | |
| MODEL: 1000 1100 1500 1700 990 | |
| 146 | Part Number A14208 |
| DESC : power plug, male | |
| MODEL: 1000 1100 1500 1700 990 | |
| 147 | Part Number 02-20-02942 |
| DESC : Precision automated transfer system, pneumatic | |
| MODEL: 4700 6700 Titan Saturn | |
| 148 | Part Number 1002-353200 |
| DESC : Pulley, Output drive, automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 149 | Part Number 01-15-02243G1 |
| DESC : Reticle Library Assembly | |
| MODEL: 4700 6700 Titan Saturn | |
| 150 | Part Number 01-15-03735 |
| DESC : Reticle / Prism Cooler Controller | |
| MODEL: 4700 6700 Titan Saturn | |
| 151 | Part Number 01-15-04937D |
| DESC : Reticle Transport | |
| MODEL: 4700 6700 Titan Saturn | |
| 152 | Part Number 1002-353400 |
| DESC : Reversing pulley, input drive, automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 153 | Part Number 0513-491400 |
| DESC : Sensor, Output, Model 379 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 154 | Part Number 0513-467000 |
| DESC : Smart Autoloader Controller Board, M370 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 155 | Part Number 1014-001003 |
| DESC : Smart Autoloader, Refurbished | |
| MODEL: 1000 1100 1500 1700 990 | |
| 156 | Part Number INTELLUG |
| DESC : Socket upgrade for intelligent autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 157 | Part Number SP-A-B-1-N-2 |
| DESC : Standoff Pulley assembly, Automation, brass, 1 pulley, 0.2″ standoff | |
| MODEL: 1000 1100 1500 1700 990 | |
| 158 | Part Number SP-A-B-1-N-4 |
| DESC : Standoff Pulley assembly, Automation, brass, 1 pulley, 0.4″ standoff | |
| MODEL: 1000 1100 1500 1700 990 | |
| 159 | Part Number SP-A-D-1-N-4 |
| DESC : Standoff Pulley assembly, Automation, delrin, 1 pulley, 0.4″ standoff | |
| MODEL: 1000 1100 1500 1700 990 | |
| 160 | Part Number SP-A-D-2-N-2 |
| DESC : Standoff Pulley assembly, Automation, delrin, 2 pulley, 0.2″ standoff | |
| MODEL: 1000 1100 1500 1700 990 | |
| 161 | Part Number TECH5936 |
| DESC : Stepper motor controller for Intelligent Autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 162 | Part Number 370-EPROM-11 |
| DESC : Summit Smart autoloader controller firmware | |
| MODEL: 1000 1100 1500 1700 990 | |
| 163 | Part Number 370-EPROM-12 |
| DESC : Summit Smart autoloader controller firmware | |
| MODEL: 1000 1100 1500 1700 990 | |
| 164 | Part Number 370-EPROM-20 |
| DESC : Summit Smart autoloader controller firmware | |
| MODEL: 1000 1100 1500 1700 990 | |
| 165 | Part Number 370-EPROM-14 |
| DESC : Summit Smart autoloader controller firmware eprom, Input side only | |
| MODEL: 1000 1100 1500 1700 990 | |
| 166 | Part Number 19-159-015 |
| DESC : Switch, illuminated push button for automation autoloader, with cable ( not shown ) | |
| MODEL: 1000 1100 1500 1700 990 | |
| 167 | Part Number 0512-533500 |
| DESC : Switch, push button assembly for Smart autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 168 | Part Number TAZMO |
| DESC : Tazmo robotic autoloader with 3″,4″,5″,6″, 8″ flatfind. 4″ and 8″ handles | |
| MODEL: 1000 1100 1500 1700 990 | |
| 169 | Part Number 1010-345234 |
| DESC : Teflon side strips for smart / automation autoloader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 170 | Part Number IA-GTC100FE |
| DESC : Touchscreen portion of Intelligent Autoloader touchscreen assy. | |
| MODEL: 1000 1100 1500 1700 990 | |
| 171 | Part Number 4210-000003 |
| DESC : Upper Flat Find, 3″ Automation | |
| MODEL: 1000 1100 1500 1700 990 | |
| 172 | Part Number 0553-678500 |
| DESC : Upper Flat find board, Automation loader, 4″, 5″, 6″ wafers | |
| MODEL: 1000 1100 1500 1700 990 | |
| 173 | Part Number IA-S-UFF |
| DESC : Upper Flat Find board, Extended range, for 5″ + 6″ Smart loaders | |
| MODEL: 1000 1100 1500 1700 990 | |
| 174 | Part Number 0513-473500 |
| DESC : Upper flat find board, smart, 4″, 5″, 6″ | |
| MODEL: 1000 990 | |
| 175 | Part Number 4210-000002 |
| DESC : Upper Flat Find, M390 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 176 | Part Number 0541-958712 |
| DESC : Vibration isolators for autoloader motor | |
| MODEL: 1000 1100 1500 1700 990 | |
| 177 | Part Number 9826DD-3-5 |
| DESC : 3.5″ disk drive upgrade for HP 9826 computer | |
| MODEL: 1000 1100 990 | |
| 178 | Part Number 0514-493874 |
| DESC : 3.5″ Double Side Double Density | |
| MODEL: 1000 1100 990 | |
| 179 | Part Number 34-08-00423 |
| DESC : 3.5″ SCSI internal floppy disk drive for HP 362 series computers | |
| MODEL: 1000 1100 1500 1700 | |
| 180 | Part Number 0514-493874 |
| DESC : 5.25″ Diskette for HP9826 computer | |
| MODEL: 1000 1100 990 | |
| 181 | Part Number 30V40MA |
| DESC : Computer POWER Lamp for 2244i body steppers | |
| MODEL: 4700 6700 Titan Saturn | |
| 182 | Part Number 09131-9826 |
| DESC : DISK DRIVE 5.25 HP 9826 | |
| MODEL: 1000 1100 990 | |
| 183 | Part Number LX350PLUS |
| DESC : Epson 80 column printer | |
| MODEL: 1100 1500 1700 | |
| 184 | Part Number 98622-66501 |
| DESC : GPIO Board | |
| MODEL: 1000 1100 990 | |
| 185 | Part Number 2244HD |
| DESC : Hard disk SCSI drive for 2244i series computers | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 186 | Part Number A1094-69012 |
| DESC : Hard disk SCSI drive for HP362 computers | |
| MODEL: 1000 1100 1500 1700 | |
| 187 | Part Number PCHDIDE |
| DESC : Hard disk ATA/133 Maxtor 40Gig drive for PC Controller series computers | |
| MODEL: 1000 1100 1500 1700 | |
| 188 | Part Number 362-PS-R |
| DESC : HP 362 computer power supply repair | |
| MODEL: 1000 1100 1500 1700 | |
| 189 | Part Number HP362-MONITOR |
| DESC : HP 362 computer system monitor | |
| MODEL: 1000 1100 1500 1700 | |
| 190 | Part Number 34-08-01261 |
| DESC : HP 362 computer system with 500mb hard drive,3.5″ scsi, GPIO, HPIB | |
| MODEL: 1000 1100 1500 1700 | |
| 191 | Part Number HP362-TOWER |
| DESC : HP 362 computer tower, 20″ wide x 40″ deep | |
| MODEL: 1000 1100 1500 1700 | |
| 192 | Part Number HP362-UMBILICAL |
| DESC : HP 362 computer tower umbilical cable | |
| MODEL: 1000 1100 1500 1700 | |
| 193 | Part Number 32-08-04001 |
| DESC : HP 362 Keyboard | |
| MODEL: 1000 1100 1500 1700 990 | |
| 194 | Part Number A1473-66510 |
| DESC : HP 362 motherboard | |
| MODEL: 1000 1100 1500 1700 990 | |
| 195 | Part Number HP-982ZAQ16 |
| DESC : HP 9826 Computer, includes GPIO board, HPL board. | |
| MODEL: 1000 1100 990 | |
| 196 | Part Number 09826-69553 |
| DESC : HP 9826 Power Supply Card | |
| MODEL: 1000 1100 990 | |
| 197 | Part Number 09826-66571 |
| DESC : HP 9826 Video Driver | |
| MODEL: 1100 1500 1700 | |
| 198 | Part Number HP-9836 |
| DESC : HP 9836 Computer | |
| MODEL: 1000 1100 1500 1700 990 | |
| 199 | Part Number 09826-66562 |
| DESC : HP9826, Disk Drive Controller Board | |
| MODEL: 1000 1100 990 | |
| 200 | Part Number 09131-DD |
| DESC : HP9826, Disk Drive Door | |
| MODEL: 1000 1100 990 | |
| 201 | Part Number 98261-66542 |
| DESC : HP9826 HPL 2.0 System | |
| MODEL: 1000 1100 990 | |
| 202 | Part Number 0000-002464 |
| DESC : HP9826, Key for 9826 | |
| MODEL: 1000 1100 990 | |
| 203 | Part Number 0000-002463 |
| DESC : HP9826, Key switch for 9826 | |
| MODEL: 1000 1100 990 | |
| 204 | Part Number 09836-66510 |
| DESC : HP9826 Main Memory and OS Board | |
| MODEL: 1000 1100 990 | |
| 205 | Part Number 09826-69525 |
| DESC : HP9826 Memory Board, 1 Meg RAM | |
| MODEL: 1000 1100 990 | |
| 206 | Part Number 09826-69524 |
| DESC : HP9826 Memory Board, 256K RAM | |
| MODEL: 1000 1100 990 | |
| 207 | Part Number 09826-66501 |
| DESC : HP9826 Motherboard | |
| MODEL: 1000 1100 990 | |
| 208 | Part Number 9826-PWRSW |
| DESC : HP9826 Power Switch Assembly | |
| MODEL: 1000 1100 990 | |
| 209 | Part Number HPID |
| DESC : HPL 2.0 Operating system with matching HP-ID Module | |
| MODEL: 1000 1100 1500 1700 | |
| 210 | Part Number HPID-MODULE |
| DESC : Universal HP-ID Module | |
| MODEL: 1000 1100 1500 1700 | |
| 211 | Part Number 1004-101020 |
| DESC : 15 amp circuit breaker, located on utility panel | |
| MODEL: 1000 1100 990 | |
| 212 | Part Number CABLE-A-SD |
| DESC : 20 pin ribbon cable from autoloader to system driver board, 14′ with connectors | |
| MODEL: 1000 1100 1500 1700 990 | |
| 213 | Part Number 1004-101012 |
| DESC : 24V Power relay on utility panel | |
| MODEL: 1000 1100 990 | |
| 214 | Part Number 1054-897454 |
| DESC : 24V Transformer | |
| MODEL: 1000 1100 1500 1700 990 | |
| 215 | Part Number 0503-230600 |
| DESC : 32 bit board | |
| MODEL: 1000 990 | |
| 216 | Part Number 0553-700340 |
| DESC : 32 bit board, universal | |
| MODEL: 1000 1100 1500 1700 990 | |
| 217 | Part Number 03-08-00090 |
| DESC : 944 Servo Board | |
| MODEL: 1100 1500 1700 | |
| 218 | Part Number 0553-701156 |
| DESC : Air Gage Amplifier | |
| MODEL: 4700 6700 Titan Saturn | |
| 219 | Part Number 03-08-00862 |
| DESC : Air Probe Edge Switch Board | |
| MODEL: 1100 1500 1700 | |
| 220 | Part Number 0553-626000 |
| DESC : Alignment Controller Board | |
| MODEL: 1100 1500 1700 | |
| 221 | Part Number 0503-326600 |
| DESC : Autophoto Board | |
| MODEL: 1000 990 | |
| 222 | Part Number 03-20-01321 |
| DESC : BD. Alignment Analog | |
| MODEL: 4700 6700 Titan Saturn | |
| 223 | Part Number 03-20-02294 |
| DESC : BD.Breakout l General I/O | |
| MODEL: 4700 6700 Titan Saturn | |
| 224 | Part Number 03-20-02288 |
| DESC : BD. Cassette Breakout | |
| MODEL: 4700 6700 Titan Saturn | |
| 225 | Part Number 03-20-02123 |
| DESC : BD. I/O Robot | |
| MODEL: 4700 6700 Titan Saturn | |
| 226 | Part Number 03-20-01995 |
| DESC : BD. Stage ASH 5 Axis | |
| MODEL: 4700 6700 Titan Saturn | |
| 227 | Part Number 03-15-02088 |
| DESC : BD. Trans. Combo | |
| MODEL: 4700 6700 Titan Saturn | |
| 228 | Part Number 03-20-01961 |
| DESC : BD. Trans. Focus ASH 5 Axis | |
| MODEL: 4700 6700 Titan Saturn | |
| 229 | Part Number 03-20-02040-02 |
| DESC : BD. Trans. Focus Driver ASH 5 Axis, Rev X2 | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 230 | Part Number 03-15-02066 |
| DESC : BD. Trans, Laser, 6-Axis | |
| MODEL: 4700 6700 Titan Saturn | |
| 231 | Part Number 03-20-01299 |
| DESC : BD. Transition Alignment ASH | |
| MODEL: 4700 6700 Titan Saturn | |
| 232 | Part Number 03-20-01705 |
| DESC : BD. Transition, General I/O | |
| MODEL: 4700 6700 Titan Saturn | |
| 233 | Part Number 03-20-01124 |
| DESC : BD. Transition, Stage ASH | |
| MODEL: 4700 6700 Titan Saturn | |
| 234 | Part Number 03-20-01130-02 |
| DESC : BD. Transition, Stage Motor Driver | |
| MODEL: 4700 6700 Titan Saturn | |
| 235 | Part Number 03-20-01600 |
| DESC : BD. Transition Stepper Motor Driver | |
| MODEL: 4700 6700 Titan Saturn | |
| 236 | Part Number 03-15-02702 |
| DESC : BD. Trnsn. Step Mot/Cooler, ASH | |
| MODEL: 4700 6700 Titan Saturn | |
| 237 | Part Number 03-15-02049 |
| DESC : BD. WAS Breakout | |
| MODEL: 4700 6700 Titan Saturn | |
| 238 | Part Number 03-20-03996 |
| DESC : BD. WTC Berakout | |
| MODEL: 4700 6700 Titan Saturn | |
| 239 | Part Number 0536-496900 |
| DESC : Binary interface cable | |
| MODEL: 1000 990 | |
| 240 | Part Number 1037A |
| DESC : Binary Interface card, Excel | |
| MODEL: 1000 1100 1500 1700 990 | |
| 241 | Part Number 0513-496700 |
| DESC : Binary Interface Card, HP | |
| MODEL: 1000 1100 1500 1700 990 | |
| 242 | Part Number 03-20-01588 |
| DESC : BRD. Trans..Multiplxer | |
| MODEL: 4700 6700 Titan Saturn | |
| 243 | Part Number 0556-700342 |
| DESC : Cable extender for card cage | |
| MODEL: 1500 1700 | |
| 244 | Part Number 1001-438281 |
| DESC : Card cage fan, 2 fans per assembly | |
| MODEL: 1000 1100 1500 1700 990 | |
| 245 | Part Number CN0170 |
| DESC : CENTENT CN0170 2AXIS step motor motion controler | |
| MODEL: 4700 6700 Titan Saturn | |
| 246 | Part Number VPM4214-01 |
| DESC : Cognex PCB | |
| MODEL: 4700 6700 Titan Saturn | |
| 247 | Part Number 1038U |
| DESC : Comparator Board, Excel, for 1100, 1500, 1700 | |
| MODEL: 1100 1500 1700 | |
| 248 | Part Number 1038A |
| DESC : Comparator Board, Excel, for 900, 1000 | |
| MODEL: 1000 990 | |
| 249 | Part Number 1054-897453 |
| DESC : EMI Filter | |
| MODEL: 1000 1100 1500 1700 990 | |
| 250 | Part Number 1036A |
| DESC : Fast Pulse converter, Excel | |
| MODEL: 1000 1100 1500 1700 990 | |
| 251 | Part Number 10764-60008 |
| DESC : Fast Pulse converter, HP | |
| MODEL: 1000 1100 1500 1700 990 | |
| 252 | Part Number 03-20-01955 |
| DESC : Focus A/D 5 Axis PCB | |
| MODEL: 4700 6700 Titan Saturn | |
| 253 | Part Number 0553-628000 |
| DESC : Focus amplifier board / Control board | |
| MODEL: 1100 1500 1700 | |
| 254 | Part Number 03-20-01967 |
| DESC : Focus control ASH. 5 Axis | |
| MODEL: 4700 6700 Titan Saturn | |
| 255 | Part Number 03-20-01989 |
| DESC : Focus Driver. 5 Axis | |
| MODEL: 4700 6700 Titan Saturn | |
| 256 | Part Number 03-20-01082 |
| DESC : General I/O Board | |
| MODEL: 4700 6700 Titan Saturn | |
| 257 | Part Number 03-20-01933 |
| DESC : General I/O Board | |
| MODEL: 4700 6700 Titan Saturn | |
| 258 | Part Number 10895-60001 |
| DESC : HP 10895A Laser Axis | |
| MODEL: 4700 6700 Titan Saturn | |
| 259 | Part Number LIS-31-15 |
| DESC : LAMBDA -15v Power Supply | |
| MODEL: 4700 6700 Titan Saturn | |
| 260 | Part Number LND-W-152 |
| DESC : LAMBDA +/- 12-15v Power SUPPLY | |
| MODEL: 1000 1100 1500 1700 990 | |
| 261 | Part Number 03-15-02149 |
| DESC : Laser Distr, I Line | |
| MODEL: 4700 6700 Titan Saturn | |
| 262 | Part Number POWERSWITCHASSY |
| DESC : Main System PWR. Main Laser PWR. | |
| MODEL: 4700 6700 Titan Saturn | |
| 263 | Part Number VG-640 |
| DESC : Matrox 1986 | |
| MODEL: 4700 6700 Titan Saturn | |
| 264 | Part Number 5560-12602 |
| DESC : model 5560 step motor driver | |
| MODEL: 4700 6700 Titan Saturn | |
| 265 | Part Number 5560-12598 |
| DESC : model5560step motor driver-left | |
| MODEL: 4700 6700 Titan Saturn | |
| 266 | Part Number 03-20-01403-02 |
| DESC : Module, Stepper motor, ASH Rev C | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 267 | Part Number 01-W3839B01A |
| DESC : Motorola MVME 712/M | |
| MODEL: 4700 6700 Titan Saturn | |
| 268 | Part Number 01-W3336B01A |
| DESC : Motorola MVME147SA-1 | |
| MODEL: 4700 6700 Titan Saturn | |
| 269 | Part Number 03-15-02860 |
| DESC : MVS interface 2244I | |
| MODEL: 4700 6700 Titan Saturn | |
| 270 | Part Number 0553-615900 |
| DESC : Optical Edge Switch Board | |
| MODEL: 1100 1500 1700 | |
| 271 | Part Number 0553-627300 |
| DESC : Optical Edge Switch Board, X axis | |
| MODEL: 1100 1500 1700 | |
| 272 | Part Number 0553-627200 |
| DESC : Optical Edge Switch Board, Y axis | |
| MODEL: 1100 1500 1700 | |
| 273 | Part Number PS-630-6V-3-5AH |
| DESC : Power Sonic battery for 1500 1700 steppers | |
| MODEL: 1500 1700 | |
| 274 | Part Number 03-15-02305 |
| DESC : Photo Preamp PCB | |
| MODEL: 4700 6700 Titan Saturn | |
| 275 | Part Number PSN-15 |
| DESC : Power supply +/- 15V | |
| MODEL: 1000 1100 1500 1700 990 | |
| 276 | Part Number PSN-24N |
| DESC : Power supply -24V | |
| MODEL: 1000 1100 1500 1700 990 | |
| 277 | Part Number PSN-24P |
| DESC : Power supply +24V | |
| MODEL: 1100 1500 1700 990 | |
| 278 | Part Number PSN-5 |
| DESC : Power Supply 5 Volt | |
| MODEL: 1000 1100 1500 1700 990 | |
| 279 | Part Number TITANPSR |
| DESC : Power supply rack for 2244i body steppers | |
| MODEL: 4700 6700 Titan Saturn | |
| 280 | Part Number 03-20-01379 |
| DESC : Power Supply Universal Microelectronics | |
| MODEL: 4700 6700 Titan Saturn | |
| 281 | Part Number 1004-101010 |
| DESC : Power switch assembly | |
| MODEL: 1000 1100 1500 1700 990 | |
| 282 | Part Number 11-20-04722 |
| DESC : Quantum Lighting ProDrive | |
| MODEL: 4700 6700 Titan Saturn | |
| 283 | Part Number 03-15-02890 |
| DESC : Reticle LIB. Box Sensor PCB | |
| MODEL: 4700 6700 Titan Saturn | |
| 284 | Part Number 03-15-04607 |
| DESC : Reticle LIB Breakout PCB | |
| MODEL: 4700 6700 Titan Saturn | |
| 285 | Part Number 0513-470700 |
| DESC : Rhor Motor controller, M311 | |
| MODEL: 1000 1100 990 | |
| 286 | Part Number EH3111-S39 |
| DESC : Solenoid, Predyne, 3 way, 24VDC, 2watt, 150psi, 3/64×3/64 , no stud | |
| MODEL: 1500 1700 Saturn | |
| 287 | Part Number EH3117-06BD-B-G1-204 |
| DESC : Solenoid, Predyne, 3 way, 24VDC, 2watt, 150psi, 3/64×3/64 , no stud | |
| MODEL: 1500 1700 Saturn | |
| 288 | Part Number EH3112-MM |
| DESC : Solenoid, Predyne, 3 way, NC 24VDC, 2watt, 100psi, 1/16×1/16 Manifold mount w/ 10/32 threaded stud | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 289 | Part Number EH3112-S34 |
| DESC : Solenoid, Predyne, 3 way, NC 24VDC, 2watt, 100psi, 1/16×1/16 Manifold mount w/ 10/32 threaded stud | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 290 | Part Number EH3117-06MM-B-G1-204 |
| DESC : Solenoid, Predyne, 3 way, NC 24VDC, 2watt, 150psi, 3/64×3/64 Manifold mount w/ 10/32 threaded stud | |
| MODEL: 1500 1700 Saturn | |
| 291 | Part Number 03-08-00096 |
| DESC : spr, 944 Motor Driver Brd | |
| MODEL: 1100 1500 1700 | |
| 292 | Part Number 03-08-00038 |
| DESC : Stage Motor Amplifier Board | |
| MODEL: 1100 1500 1700 | |
| 293 | Part Number 0503-203800 |
| DESC : Stage Motor Amplifier Board, M140 | |
| MODEL: 1000 990 | |
| 294 | Part Number 0513-555000 |
| DESC : Stage Servo board, fast, M151, M152 | |
| MODEL: 1000 990 | |
| 295 | Part Number 0503-265702 |
| DESC : Stage Servo Board, Slow, M150 | |
| MODEL: | |
| 296 | Part Number 0503-265702 |
| DESC : Stage Servo Board, Slow, M150 | |
| MODEL: | |
| 297 | Part Number 03-06-00213 |
| DESC : Stepper Motor Controller Board | |
| MODEL: 1100 1500 1700 | |
| 298 | Part Number 03-20-00954 |
| DESC : Stepper Motor MUX PCB | |
| MODEL: 4700 6700 Titan Saturn | |
| 299 | Part Number 03-20-00933-03 A1 |
| DESC : Stage Driver Board Switching Power Supply | |
| MODEL: 4700 6700 Titan Saturn | |
| 300 | Part Number 0523-528100 |
| DESC : System Driver Board | |
| MODEL: 1000 990 | |
| 301 | Part Number 0553-662600 |
| DESC : System Driver Board | |
| MODEL: 1100 1500 1700 | |
| 302 | Part Number 07-08-00125 |
| DESC : Thermistor | |
| MODEL: | |
| 303 | Part Number 03-15-00302 |
| DESC : Trans Driver Stepper WAS PCB | |
| MODEL: 4700 6700 Titan Saturn | |
| 304 | Part Number 03-20-03342 |
| DESC : Transition GIO #2, Drive Breakout board | |
| MODEL: 4700 6700 Titan Saturn | |
| 305 | Part Number 03-15-00308 |
| DESC : Trasnsition ASH. Stepper WAS PCB | |
| MODEL: 4700 6700 Titan Saturn | |
| 306 | Part Number 03-20-00870 |
| DESC : VME Combo PCB | |
| MODEL: 4700 6700 Titan Saturn | |
| 307 | Part Number 03-20-00784 |
| DESC : VME Slave Processor | |
| MODEL: 4700 6700 Titan Saturn | |
| 308 | Part Number 0556-604800 |
| DESC : Air Gage Assembly, model 1100 | |
| MODEL: 1100 | |
| 309 | Part Number 01-08-00572 |
| DESC : Air Gage Assembly, model 1500-1700 | |
| MODEL: 1100 | |
| 310 | Part Number 03-06-00035 |
| DESC : Air Gauge Controller Board | |
| MODEL: 1100 1500 1700 | |
| 311 | Part Number 0553-700813 |
| DESC : Air Gage Sensor Board | |
| MODEL: 1100 1500 1700 Titan | |
| 312 | Part Number 0553-701156 |
| DESC : Air Gauge Amplifier Board | |
| MODEL: 1100 1500 1700 | |
| 313 | Part Number 0500-700000 |
| DESC : Aperture Cooling Plate | |
| MODEL: 1000 1100 | |
| 314 | Part Number 2602-000032 |
| DESC : Filter, focus monitor | |
| MODEL: 1000 990 | |
| 315 | Part Number 0526-576100 |
| DESC : Focus Adjust Valve, porter style | |
| MODEL: 1000 990 | |
| 316 | Part Number 2533-000030 |
| DESC : Metering valve | |
| MODEL: 1000 990 | |
| 317 | Part Number 0556-636401 |
| DESC : Focus Control Cable | |
| MODEL: 1100 1500 1700 | |
| 318 | Part Number 2510-000001 |
| DESC : Focus Control stepper motor belt, 112 teeth | |
| MODEL: 1000 990 | |
| 319 | Part Number 0556-636400 |
| DESC : Focus Amplifier Cable | |
| MODEL: 1100 1500 1700 | |
| 320 | Part Number 0503-319200 |
| DESC : Focus I/O board M191-1 | |
| MODEL: 1000 990 | |
| 321 | Part Number 0516-537100 |
| DESC : Focus Monitor, Clean | |
| MODEL: 1000 990 | |
| 322 | Part Number 4210-203000 |
| DESC : Focus Monitor Ref. Model 250 | |
| MODEL: 1000 990 | |
| 323 | Part Number 4210-203100 |
| DESC : Focus Monitor Ref. Model 250-1 | |
| MODEL: 1000 990 | |
| 324 | Part Number 0526-568100 |
| DESC : Focus regulator Lower Fairchild | |
| MODEL: 1000 990 | |
| 325 | Part Number 01-02-00272-01 |
| DESC : Focus Regulator Upper fairchild | |
| MODEL: 1000 990 | |
| 326 | Part Number 1025-001001 |
| DESC : Pressure transducer for focus gage assembly | |
| MODEL: 1100 1500 1700 | |
| 327 | Part Number 0526-570200-C |
| DESC : Solenoid, Clean, Universal, 2 way | |
| MODEL: 1000 990 | |
| 328 | Part Number 0526-570300-C |
| DESC : Solenoid, Clean, Universal, 3 way | |
| MODEL: 1000 990 | |
| 329 | Part Number 0526-570300-L |
| DESC : Solenoid, Clean, Upper diaphragm large orifice | |
| MODEL: 1000 990 | |
| 330 | Part Number 0509-485100 |
| DESC : Pressure switch for Focus system | |
| MODEL: 1000 990 | |
| 331 | Part Number 5106-000001 |
| DESC : Vacuum switch | |
| MODEL: 1000 990 | |
| 332 | Part Number 01-08-00562 |
| DESC : Actinic shutter assembly | |
| MODEL: 1500 1700 | |
| 333 | Part Number 01-06-00199 |
| DESC : Actinic Shutter Assembly model 1100 | |
| MODEL: 1000 1100 990 | |
| 334 | Part Number 0524-560900 |
| DESC : Actinic Shutter Assy, Series II | |
| MODEL: 1000 | |
| 335 | Part Number 1584-953485 |
| DESC : Actinic shutter cylinder | |
| MODEL: 1000 990 | |
| 336 | Part Number 1064-700111 |
| DESC : Actinic Shutter Filter, 2″ square | |
| MODEL: 1500 1700 | |
| 337 | Part Number 1024-562200 |
| DESC : Actinic Shutter Filter , .758″ square | |
| MODEL: 1000 990 | |
| 338 | Part Number 1024-562211 |
| DESC : Actinic Shutter Filter , .988″ square | |
| MODEL: 1100 | |
| 339 | Part Number 01-08-00549 |
| DESC : Actinic shutter motor | |
| MODEL: 1500 1700 | |
| 340 | Part Number 04-18-02827 |
| DESC : Assy, 2000/3000 Exposure shutter | |
| MODEL: 4700 6700 Titan Saturn | |
| 341 | Part Number 1054-610000 |
| DESC : Blast Shield for model 1100 stepper | |
| MODEL: 1100 | |
| 342 | Part Number 1064-700108 |
| DESC : Blast Shield, IR coated | |
| MODEL: 1500 1700 2700 4700 Titan | |
| 343 | Part Number 14-15-04319 |
| DESC : Blast Shield, IR coated | |
| MODEL: 4700 6700 Titan Saturn | |
| 344 | Part Number 6805-000008 |
| DESC : Ceramic standoff for pigtail end of lamp, 0.625L x 0.387D x 6/32 thread | |
| MODEL: 1100 1500 1700 | |
| 345 | Part Number 6805-000001 |
| DESC : Ceramic standoff for top end of lamp, .75L x 0.5D x 8/32 thread | |
| MODEL: 1000 1100 1500 1700 990 | |
| 346 | Part Number 1004-284600 |
| DESC : Cold Mirror | |
| MODEL: 1000 990 | |
| 347 | Part Number 0554-700584 |
| DESC : Ellipsoidal Mirror for model 1100 | |
| MODEL: 1100 | |
| 348 | Part Number 0564-700462 |
| DESC : Ellipsoidal Mirror for model 1500, 1700 | |
| MODEL: 1500 1700 | |
| 349 | Part Number 1054-603500 |
| DESC : Ellipsoidal Mirror for model 900, 1000, 990 | |
| MODEL: 1000 990 | |
| 350 | Part Number 0564-700237 |
| DESC : Exposure shutter, model 1500/1700, Scissors type (requires 01-08-00545 pen motor shutter driver box) | |
| MODEL: 1500 1700 2700 | |
| 351 | Part Number 1001-438282 |
| DESC : Fan Exhaust Blower fan | |
| MODEL: 1000 1100 1500 1700 990 | |
| 352 | Part Number APER-320-1670 |
| DESC : Field aperture for model 1000, cast lens | |
| MODEL: 1000 990 | |
| 353 | Part Number APER-320-169 |
| DESC : Field aperture for model 1000, shoebox lens | |
| MODEL: 1000 990 | |
| 354 | Part Number 01-08-00587-10 |
| DESC : Field aperture for model 1500, 30mm x 15mm fieldsize | |
| MODEL: 1500 1700 | |
| 355 | Part Number 0383-001-01 |
| DESC : I line probe for Nikon Steppers | |
| MODEL: | |
| 356 | Part Number 0524-100201 |
| DESC : Illuminator Photocell for monitoring exposure energy | |
| MODEL: 1000 990 | |
| 357 | Part Number 0506-277300 |
| DESC : Illuminator Power Cable | |
| MODEL: 1000 990 | |
| 358 | Part Number 1001-502148 |
| DESC : Lamp Exhaust hose fitting | |
| MODEL: 1000 990 | |
| 359 | Part Number 0554-700523 |
| DESC : Lamp interconnect cable | |
| MODEL: 1100 1500 1700 | |
| 360 | Part Number HA-UPR500-A |
| DESC : Lamp Power Supply, model HA500-A | |
| MODEL: 1000 1100 1500 1700 990 | |
| 361 | Part Number 2203-000002-C |
| DESC : Lamp Power Supply, model HA-UPR500-C | |
| MODEL: 1000 1100 1500 1700 990 Saturn | |
| 362 | Part Number HA-UPR500-CLE |
| DESC : Lamp Power Supply, model HA-UPR500-CLE | |
| MODEL: 1000 1100 1500 1700 990 Saturn | |
| 363 | Part Number SUV-2001CIL |
| DESC : Lamp, Ushio | |
| MODEL: 1000 990 | |
| 364 | Part Number USH1002FA |
| DESC : Lamp, Ushio | |
| MODEL: | |
| 365 | Part Number USH1002FAL |
| DESC : Lamp, Ushio | |
| MODEL: | |
| 366 | Part Number USH1003FA |
| DESC : Lamp, Ushio | |
| MODEL: | |
| 367 | Part Number USH200-DP |
| DESC : Lamp, Ushio | |
| MODEL: | |
| 368 | Part Number USH350-DP |
| DESC : Lamp, Ushio | |
| MODEL: 990 | |
| 369 | Part Number USH510FU |
| DESC : Lamp, Ushio for 1100, 1500, 1600, 1700 | |
| MODEL: 1100 1500 1700 990 | |
| 370 | Part Number USH500FU |
| DESC : Lamp, Ushio for model 900, 990, 1000 | |
| MODEL: 1000 990 | |
| 371 | Part Number GR200 |
| DESC : Light intensity meter, GRLabs. Compatible with OAI Model 306 | |
| MODEL: | |
| 372 | Part Number 04-08-03405 |
| DESC : Light pipe assy for 1500, 39×18 field size, with homoginizer | |
| MODEL: 1500 1700 | |
| 373 | Part Number 1064-700105 |
| DESC : Light Pipe Coupling lens | |
| MODEL: 1500 1700 2700 | |
| 374 | Part Number 1064-700106 |
| DESC : Light pipe Diffuser | |
| MODEL: 1500 1700 | |
| 375 | Part Number 1064-700104 |
| DESC : Light pipe homogenizer for model 1500 lightpipe ( flys eye ) | |
| MODEL: 1500 1700 | |
| 376 | Part Number 0554-608400 |
| DESC : Light Pipe Assembly, Model 1100 | |
| MODEL: 1100 | |
| 377 | Part Number LP-001 |
| DESC : Light Pipe Rotation | |
| MODEL: 1000 1100 1500 1700 990 | |
| 378 | Part Number MVL-1500-1700 |
| DESC : Machine Vision lamp (MVS) | |
| MODEL: 1500 1700 | |
| 379 | Part Number USH-500MB |
| DESC : Mercury lamp for aligners | |
| MODEL: | |
| 380 | Part Number APER-MVS-NW-39X10 |
| DESC : MVS quartz aperture, clear opening 42.5mm x 13.5mm, use for 39mm x 10mm fieldsize | |
| MODEL: 1000 1500 1700 Saturn | |
| 381 | Part Number 01-06-00188 |
| DESC : Pen motor for actinic shutter and white light assembly | |
| MODEL: 1000 1100 990 | |
| 382 | Part Number 1004-284601 |
| DESC : Reheat mirror | |
| MODEL: 1100 | |
| 383 | Part Number 3803-000004 |
| DESC : Reheat Mirror | |
| MODEL: 1000 990 | |
| 384 | Part Number 0504-376800 |
| DESC : Shutter bumper for model 900 stepper | |
| MODEL: 1100 1500 1700 | |
| 385 | Part Number 01-08-00545 |
| DESC : Shutter driver box for scissors style shutter, 1 connector for exp and actinic shutters | |
| MODEL: 1500 1700 | |
| 386 | Part Number 0503-398200 |
| DESC : Shutter Driver, M200 | |
| MODEL: 1000 990 | |
| 387 | Part Number 4210-224000 |
| DESC : Shutter Driver, M240 | |
| MODEL: 1000 1100 990 | |
| 388 | Part Number 4501-000008 |
| DESC : Solenoid/pre shutter Ledex | |
| MODEL: 1000 1100 990 | |
| 389 | Part Number 1064-700107-GH |
| DESC : UV Cutoff Filter, G&H line, model 1500/1700 | |
| MODEL: 1500 1700 2700 4700 Titan | |
| 390 | Part Number 1064-700107-GHI |
| DESC : UV Cutoff Filter, G&H&I line | |
| MODEL: 1700 2700 4700 Titan | |
| 391 | Part Number 1064-700107-I |
| DESC : UV Cutoff Filter, I Line | |
| MODEL: 1500 1700 990 2700 4700 Titan | |
| 392 | Part Number 1054-605300 |
| DESC : UV Cutoff Filter model 1100 | |
| MODEL: 1100 | |
| 393 | Part Number 1004-292401 |
| DESC : UV Cutoff Filter, Model 990, 1000 | |
| MODEL: 1000 | |
| 394 | Part Number 01-06-00189 |
| DESC : Vibration damping material for pen motor shutter | |
| MODEL: 1100 1500 1700 990 | |
| 395 | Part Number USH-1003FAL |
| DESC : Xenon Mercury Lamp | |
| MODEL: Titan | |
| 396 | Part Number 05-08-04649 |
| DESC : 5501B Laser Adapter Cable. Adapts 5501B/1001-A laser to stepper wired with one laser plug for 5517B Laser | |
| MODEL: 1000 1100 1500 1700 990 2700 4700 6700 Titan Saturn | |
| 397 | Part Number 05-08-04648 |
| DESC : 5517B Laser Adapter Cable, Adapts 5517B laser to stepper wired with two laser plugs for 5501B Laser | |
| MODEL: 1000 1100 1500 1700 990 2700 4700 6700 Titan Saturn | |
| 398 | Part Number 3806-000004 |
| DESC : Beam splitter for laser system | |
| MODEL: 1000 1100 1500 1700 990 | |
| 399 | Part Number 5517B |
| DESC : Hewlett Packard 5517B Laser transducer | |
| MODEL: 1000 1100 1500 1700 990 2700 4700 6700 Titan Saturn | |
| 400 | Part Number 1012A |
| DESC : Interferometer Cube, excel | |
| MODEL: 1000 1100 1500 1700 990 | |
| 401 | Part Number 1012-340293 |
| DESC : Interferometer Cube, X, Titan series | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 402 | Part Number 1054A |
| DESC : Laser cable assembly, fast pulse to laserhead | |
| MODEL: 1000 1100 1500 1700 990 | |
| 403 | Part Number 1031A |
| DESC : Laser Receiver, Excel | |
| MODEL: 1000 1100 1500 1700 990 | |
| 404 | Part Number 10780C |
| DESC : Laser Receiver, Hewlett Packard | |
| MODEL: 1000 1100 1500 1700 990 | |
| 405 | Part Number 1001-A |
| DESC : Laser Transducer, Excel. Compatible with HP5501B ( two connectors) | |
| MODEL: 1000 1100 1500 1700 990 | |
| 406 | Part Number 1001B |
| DESC : Laser Transducer, Excel | |
| MODEL: 1000 1100 1500 1700 990 | |
| 407 | Part Number 1001C-OPT3-HO5 |
| DESC : Laser Transducer, Excel. Equivilent to HP5517-C, 3mm beam, power output greater than 240 uW | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 408 | Part Number 1001-F |
| DESC : Laser Transducer, Excel. Equivilent to HP5517-B laser head ( one connector ) | |
| MODEL: 1500 1700 2700 4700 6700 Titan Saturn | |
| 409 | Part Number 5517-B |
| DESC : Laser Transducer, HP | |
| MODEL: 1000 1100 1500 1700 990 | |
| 410 | Part Number HP5517-C |
| DESC : Laser Transducer, HP | |
| MODEL: 1000 1100 1500 1700 990 | |
| 411 | Part Number EML-RLA |
| DESC : Manual Loader for 2″ through 8″ wafers. Order top plate separately | |
| MODEL: 1000 1100 1500 1700 990 | |
| 412 | Part Number EML-TP-3 |
| DESC : Enhanced Manual Loader Top Plate, 3″ | |
| MODEL: 1000 1100 1500 1700 990 | |
| 413 | Part Number EML-TP-4 |
| DESC : Enhanced Manual Loader Top Plate, 4″ | |
| MODEL: 1000 1100 1500 1700 990 | |
| 414 | Part Number EML-TP-5 |
| DESC : Enhanced Manual Loader Top Plate, 5″ | |
| MODEL: 1000 1100 1500 1700 990 | |
| 415 | Part Number EML-TP-6 |
| DESC : Enhanced Manual Loader Top Plate, 6″ | |
| MODEL: 1000 1100 1500 1700 990 | |
| 416 | Part Number EML-TP-RC-8 |
| DESC : Enhanced Manual Loader Top Plate, 8″ round chuck (6.9″ diameter) | |
| MODEL: 1000 1100 1500 1700 990 | |
| 417 | Part Number EML-TPM |
| DESC : Enhanced Manual Loader Top Plate U Mount | |
| MODEL: 1000 1100 1500 1700 990 | |
| 418 | Part Number EML-TP-2-3 |
| DESC : Enhanced Multi-Manual Loader Top Plate, 2″ + 4″ slots | |
| MODEL: 1000 1100 1500 1700 990 | |
| 419 | Part Number UTS-TP-6 |
| DESC : Ultratech Manual Loader Top Plate, 6″ | |
| MODEL: 1000 1100 1500 1700 990 | |
| 420 | Part Number 1000-104785 |
| DESC : Autoloader Crate, Intelligent | |
| MODEL: 1000 1100 1500 1700 990 | |
| 421 | Part Number 1000-104785 |
| DESC : Autoloader Crate, standard | |
| MODEL: 1000 1100 1500 1700 990 | |
| 422 | Part Number BM-901011 |
| DESC : Dampning Air Bag, 4.25″ mount hole spacing | |
| MODEL: 1000 1100 1500 1700 990 | |
| 423 | Part Number 05-08-04667 |
| DESC : Cable, Replacement, 1500 Pneum | |
| MODEL: 1500 1700 | |
| 424 | Part Number EVALUATION |
| DESC : Evaluation | |
| MODEL: 1000 1100 1500 1700 990 | |
| 425 | Part Number FABCELL |
| DESC : FAB CELL Floor mounting pads for stepper feet | |
| MODEL: 1000 1100 1500 1700 990 | |
| 426 | Part Number A-240L-LAMP |
| DESC : Fiber-Lite A-240L 150 Watt lamp for MVS | |
| MODEL: 4700 6700 Titan Saturn | |
| 427 | Part Number 63092 |
| DESC : FILTER MICRO MIST SEPARATOR 1500 | |
| MODEL: 1500 | |
| 428 | Part Number 1129116 |
| DESC : FILTER REGULATOR 1500 | |
| MODEL: 1500 | |
| 429 | Part Number 0566-123546 |
| DESC : Flexture for edge switch assembly | |
| MODEL: 1100 1500 1700 | |
| 430 | Part Number 1000-104786 |
| DESC : Granite Rock Repair | |
| MODEL: 1000 1100 1500 1700 990 | |
| 431 | Part Number 401-37 |
| DESC : Humphery 4 way micro solenoid valve w/plug | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 432 | Part Number 401 |
| DESC : Humphery micro solenoid valve | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 433 | Part Number 2244-IDF-VCA |
| DESC : IDF Base Frame Voice Coil Assy | |
| MODEL: 4700 6700 Titan Saturn | |
| 434 | Part Number 04-15-01900X5 |
| DESC : Illuminator Lamp Housing | |
| MODEL: 4700 6700 Titan Saturn | |
| 435 | Part Number LNR-BFL-U |
| DESC : Lens Exchange, Used | |
| MODEL: 1500 1700 | |
| 436 | Part Number LNR-BFL |
| DESC : Lens Refurbishment | |
| MODEL: 1500 1700 | |
| 437 | Part Number LNR-WFL |
| DESC : Refurbished 1.0 um lens for model 990/1000/1100 steppers | |
| MODEL: 1000 1100 990 | |
| 438 | Part Number LNR-WFL1100 |
| DESC : 1.0 um model 1100 widefield lens, Refurbished. | |
| MODEL: 1100 | |
| 439 | Part Number 0502-981476 |
| DESC : Loader table plexiglas printer shield replacement kit | |
| MODEL: 1000 990 | |
| 440 | Part Number 0502-981475 |
| DESC : Loader Table Refurbishment | |
| MODEL: 1000 1100 990 | |
| 441 | Part Number 5107-000001 |
| DESC : Micro Switch with actuator | |
| MODEL: 1000 1100 1500 1700 990 | |
| 442 | Part Number 0658-624178 |
| DESC : New left, right and front cardcage panels. | |
| MODEL: 1000 1100 990 | |
| 443 | Part Number 58-08-04682 |
| DESC : Multiconnector manifold assembly | |
| MODEL: 1500 1700 | |
| 444 | Part Number MINI-SP-512 |
| DESC : Practical Peripherals Printer Microbuffer | |
| MODEL: 1100 1500 1700 | |
| 445 | Part Number 0526-568210 |
| DESC : Pressure Regulator, 0-100psi | |
| MODEL: 1000 990 | |
| 446 | Part Number 0526-568211 |
| DESC : Pressure Regulator, 0-100psi | |
| MODEL: 1000 990 | |
| 447 | Part Number 0526-568310 |
| DESC : Pressure Regulator, 0-60psi, for focus monitor / Focus system set to 45 psi | |
| MODEL: 1000 990 | |
| 448 | Part Number 57-08-04659 |
| DESC : Pressure Transducer, MVS Focus | |
| MODEL: 1500 1700 | |
| 449 | Part Number 2902-000021 |
| DESC : Printer, 32 column HPIB printer for model 900 thru 1000 steppers. (This printer does not have a top cover) | |
| MODEL: 1000 990 | |
| 450 | Part Number 2902-000025 |
| DESC : Printer Cable for 1100 systems | |
| MODEL: 1100 | |
| 451 | Part Number 6666-000004 |
| DESC : Printer Ink Ribbons Cartridge | |
| MODEL: 1000 990 | |
| 452 | Part Number 6666-000005 |
| DESC : Printer Ink Ribbons Cartridge | |
| MODEL: 1100 1500 1700 | |
| 453 | Part Number 6666-000003 |
| DESC : Printer Ink Ribbons spool | |
| MODEL: 1000 990 | |
| 454 | Part Number 2920-000008 |
| DESC : Printer paper, 32 column clean room | |
| MODEL: 1000 990 | |
| 455 | Part Number 10-28-00121 |
| DESC : Probe block for 1500, 1700 steppers, standard round probes | |
| MODEL: 1500 1700 | |
| 456 | Part Number 8202-000203 |
| DESC : Screw, 2-56 x 1/4″ socket head Stainless | |
| MODEL: 1000 1100 1500 1700 990 | |
| 457 | Part Number 57-08-04666 |
| DESC : Sensor, pressure, digital | |
| MODEL: 1500 1700 | |
| 458 | Part Number 1000-104785 |
| DESC : Shipping package for steppers with external HP332 or HP362 computer towers | |
| MODEL: 1500 1700 | |
| 459 | Part Number 1000-104784 |
| DESC : Shipping package for steppers with internal HP 9826 computers. | |
| MODEL: 1000 1100 990 | |
| 460 | Part Number 58-08-04682 |
| DESC : SMC Multiconnector manifold assembly | |
| MODEL: 1500 1700 | |
| 461 | Part Number 57-08-04657 |
| DESC : Switch, Vacuum, Digital, Chuck | |
| MODEL: 1500 1700 | |
| 462 | Part Number 57-08-04656 |
| DESC : Switch, Vacuum, Digital, Reticle | |
| MODEL: 1500 1700 | |
| 463 | Part Number 57-08-04658 |
| DESC : Switch, Vacuum, Digital, Rowbar | |
| MODEL: 1500 1700 | |
| 464 | Part Number 0556-635800 |
| DESC : Upper servo cable | |
| MODEL: 1500 1700 | |
| 465 | Part Number 0556-636100 |
| DESC : Upper theta cable | |
| MODEL: 1500 1700 990 | |
| 466 | Part Number 0556-636000 |
| DESC : UT Pneumatic Cable | |
| MODEL: 1500 1700 | |
| 467 | Part Number 0556-690300 |
| DESC : UT System Cable | |
| MODEL: 1500 1700 | |
| 468 | Part Number 0526-568410 |
| DESC : Vacuum Regulator, 0-30 inches | |
| MODEL: 1000 990 | |
| 469 | Part Number 57-08-06066 |
| DESC : Valve, 24VDC, Pressure / Vac, No Oil, Dynamco PN D2X413 | |
| MODEL: 1500 1700 6700 | |
| 470 | Part Number 57-08-04668 |
| DESC : Valve, needle, mini | |
| MODEL: 1500 1700 Saturn | |
| 471 | Part Number 57-08-04650 |
| DESC : Valve, pneumatic, popup chuck | |
| MODEL: 1500 1700 | |
| 472 | Part Number 1500TABLER |
| DESC : Work table for right side of stepper, 1500/1700 | |
| MODEL: 1500 1700 | |
| 473 | Part Number 98626-66501 |
| DESC : HP9826 RS232 board | |
| MODEL: 1000 1100 990 | |
| 474 | Part Number 0584-700668 |
| DESC : 1500/1700 Reticle stage | |
| MODEL: 1500 1700 | |
| 475 | Part Number 11-08-03836-M |
| DESC : Air cylinder for 1500 reticle stage | |
| MODEL: 1500 1700 | |
| 476 | Part Number 0586-701413 |
| DESC : assy,Drive Ramp, left diddler | |
| MODEL: 1500 1700 2700 4700 | |
| 477 | Part Number 0586-701412 |
| DESC : assy,drive ramp,right diddler | |
| MODEL: 1500 1700 Saturn | |
| 478 | Part Number 2502-000025 |
| DESC : Ball bearing for reticle finger | |
| MODEL: 1000 1100 1500 1700 990 | |
| 479 | Part Number 0556-633400 |
| DESC : Edge Switch Assy for model 1100 | |
| MODEL: 1100 | |
| 480 | Part Number 01-08-01665 |
| DESC : Reticle Finger assembly Rev B, Extended travel | |
| MODEL: 1000 1100 1500 1700 | |
| 481 | Part Number 0505-241100 |
| DESC : Reticle Finger assembly | |
| MODEL: | |
| 482 | Part Number 1064-700434 |
| DESC : Reticle finger prism guard | |
| MODEL: 1500 1700 | |
| 483 | Part Number 1026-580700 |
| DESC : Reticle Finger shaft, ring type | |
| MODEL: 1000 1100 1500 1700 990 | |
| 484 | Part Number 1056-596300 |
| DESC : Reticle Finger shaft, screw type | |
| MODEL: 1000 1100 1500 1700 990 | |
| 485 | Part Number 0586-701362 |
| DESC : Reticle slider assembly (bfl) | |
| MODEL: 1500 1700 2700 | |
| 486 | Part Number 1024-514200 |
| DESC : Reticle Slider Assy (wfl) | |
| MODEL: 1000 1100 990 | |
| 487 | Part Number 01-08-00200 |
| DESC : Reticle clamp left bearing assembly | |
| MODEL: | |
| 488 | Part Number 0529-546202 |
| DESC : Reticle Slider striker plate 1500, 1700 | |
| MODEL: 1500 1700 | |
| 489 | Part Number 0529-546201 |
| DESC : Reticle Slider striker plate 990,1000, 1100 | |
| MODEL: 1000 1100 1500 990 | |
| 490 | Part Number 0504-958621 |
| DESC : Reticle Stage Cover | |
| MODEL: 1000 1100 990 | |
| 491 | Part Number TK10-495 |
| DESC : Tazmo robotic autoloader for 8″ substrates. | |
| MODEL: 1000 1100 1500 1700 990 | |
| 492 | Part Number 0556-593100 |
| DESC : Vacuum switch | |
| MODEL: 1100 1500 1700 | |
| 493 | Part Number ALR1000B42 |
| DESC : Autouniformity reticle ALR1000 Rev B V042, used | |
| MODEL: 1000 1100 1500 1700 990 | |
| 494 | Part Number SDTR1-0A |
| DESC : SEI Diagnostic Test Reticle, 3 field | |
| MODEL: 1000 1100 1500 1700 990 | |
| 495 | Part Number VBSTR |
| DESC : Visual Blind Step Test Reticle for visual and automated blindstep check. | |
| MODEL: 1000 1100 1500 1700 990 | |
| 496 | Part Number VTGR-1A |
| DESC : Visual Test Gamma Reticle | |
| MODEL: 1000 1100 1500 1700 990 | |
| 497 | Part Number VTGR-2A |
| DESC : Visual Test Gamma Reticle | |
| MODEL: 1000 1100 1500 1700 990 | |
| 498 | Part Number VTLSR-125A |
| DESC : Visual Test Light Scattering Reticle | |
| MODEL: 1000 1100 1500 1700 990 | |
| 499 | Part Number VTLSR-1A |
| DESC : Visual Test Light Scattering Reticle | |
| MODEL: 1000 1100 1500 1700 990 | |
| 500 | Part Number VTLSR-20A |
| DESC : Visual Test Light Scattering Reticle | |
| MODEL: 1000 1100 1500 1700 990 | |
| 501 | Part Number VTR2F |
| DESC : Visual Test Reticle, 2 field | |
| MODEL: 1000 1100 1500 1700 990 | |
| 502 | Part Number 9787-002003 |
| DESC : Telebyte Line Modem | |
| MODEL: 1000 1100 1500 1700 990 | |
| 503 | Part Number 9787-002004 |
| DESC : Worthington Barcode Package | |
| MODEL: 1000 1100 1500 1700 990 | |
| 504 | Part Number 0526-700001 |
| DESC : 400 step theta drive assy baseplate | |
| MODEL: 1000 990 | |
| 505 | Part Number 01-15-08295 |
| DESC : Assembly, Pad, Vac, WTC | |
| MODEL: 4700 6700 Titan Saturn | |
| 506 | Part Number 01-15-04611 |
| DESC : Assembly, theta drive, xy stage | |
| MODEL: 4700 6700 Titan Saturn | |
| 507 | Part Number 02-15-05062 |
| DESC : Assy, End effector, Robot, 4″-8″ | |
| MODEL: 4700 6700 Titan Saturn | |
| 508 | Part Number 01-08-00962-03 |
| DESC : pedestal | |
| MODEL: 1000 1100 1500 1700 990 | |
| 509 | Part Number 01-08-03694-03 |
| DESC : Chuck, 3 inch, Oblong Megafrosty, stainless steel | |
| MODEL: 1000 1100 1500 1700 990 | |
| 510 | Part Number 0606-000003 |
| DESC : Chuck, 3 inch round aluminum small hole pattern ( 0.6″) | |
| MODEL: 1000 1100 1500 1700 990 | |
| 511 | Part Number 01-08-03694-04 |
| DESC : Chuck, 4 inch, Oblong Megafrosty, stainless steel | |
| MODEL: 1000 1100 1500 1700 990 | |
| 512 | Part Number 01-05-00186 |
| DESC : Chuck, 4 inch round aluminum, 0.6″ mount hole pattern | |
| MODEL: 1000 1100 990 | |
| 513 | Part Number 0606-000004-DSA |
| DESC : Chuck, 4 inch, round DSA Chuck | |
| MODEL: 1000 1100 1500 1700 990 | |
| 514 | Part Number 01-08-01720-03 |
| DESC : Chuck, 5 inch, Oblong aluminum, 0.6″ hole pattern | |
| MODEL: 1000 1100 1500 1700 990 | |
| 515 | Part Number 01-08-03694-05 |
| DESC : Chuck, 5 inch, Oblong Megafrosty, stainless steel | |
| MODEL: 1000 1100 1500 1700 990 | |
| 516 | Part Number 01-08-03279-03 |
| DESC : Chuck, 5 inch, Oblong , stainless steel, small hole pattern | |
| MODEL: 1000 1100 1500 1700 990 | |
| 517 | Part Number 01-06-00072 |
| DESC : Chuck, 5 inch round aluminum | |
| MODEL: 1000 1100 990 | |
| 518 | Part Number 01-06-00072-SS |
| DESC : Chuck, 5 inch round stainless steel | |
| MODEL: 1000 1100 1500 1700 990 | |
| 519 | Part Number 01-08-03694-06-CO |
| DESC : Chuck, 6 inch, Oblong Megafrosty, stainless steel, Center OAT | |
| MODEL: 1000 1100 1500 1700 990 Titan | |
| 520 | Part Number 01-08-03279-04 |
| DESC : Chuck, 6 inch, Oblong stainless steel, 0.6″ hole pattern | |
| MODEL: 1000 1100 1500 1700 990 | |
| 521 | Part Number 01-05-00189 |
| DESC : Chuck, 6 inch round aluminum, 0.65″ (16.5mm) hole pattern | |
| MODEL: 1000 1100 990 | |
| 522 | Part Number 01-05-00189-SSL |
| DESC : Chuck, 6 inch round stainless steel, 1″ hole spacing | |
| MODEL: 1000 1100 990 | |
| 523 | Part Number 01-05-00189-SS |
| DESC : Chuck, 6 inch round stainless steel, .6″ hole spacing | |
| MODEL: 1000 1100 990 | |
| 524 | Part Number 01-15-04766-08 |
| DESC : Chuck, 8 inch | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 525 | Part Number 01-08-00963-08 |
| DESC : Chuck, 8″, round aluminum, large hole pattern | |
| MODEL: 1500 1700 | |
| 526 | Part Number 01-08-00962-08 |
| DESC : Chuck, 8 inch, Oblong Megafrosty, aluminum | |
| MODEL: 1500 1700 | |
| 527 | Part Number 1056-690700-095 |
| DESC : Modified Chuck spacer, 0.095″ thick | |
| MODEL: 1000 1100 990 | |
| 528 | Part Number 0606-002001 |
| DESC : Chuck spacer and adapter for large hole chucks | |
| MODEL: 1000 1100 1500 1700 | |
| 529 | Part Number 1025-588500 |
| DESC : Detent Plate | |
| MODEL: 1000 990 | |
| 530 | Part Number 0556-652600 |
| DESC : Extended theta bearing with post | |
| MODEL: 1000 1100 1500 1700 990 | |
| 531 | Part Number 0454-323486 |
| DESC : Flagpole Inverter Upgrade Kit | |
| MODEL: 1000 990 | |
| 532 | Part Number 1006-454802 |
| DESC : Flagpole Theta Stage Lower spider refurbishment | |
| MODEL: 1000 990 | |
| 533 | Part Number BS-0000N1 |
| DESC : Leniar ball slide for theta drive assby | |
| MODEL: 1100 1500 1700 | |
| 534 | Part Number 5107-000016 |
| DESC : Limit switch for theta stage drive | |
| MODEL: 1100 1500 1700 990 | |
| 535 | Part Number 23-08-04665 |
| DESC : low vac pressure regulator, 0 to 29 psi | |
| MODEL: 1100 1500 1700 | |
| 536 | Part Number SE-000043 |
| DESC : Theta drive motor connector for theta home reset | |
| MODEL: 1000 | |
| 537 | Part Number 1006-450402 |
| DESC : Pedestal, Theta stage | |
| MODEL: 1000 990 | |
| 538 | Part Number 1006-450402-S |
| DESC : Pedestal, Theta stage, for both square and round chucks | |
| MODEL: 1000 990 | |
| 539 | Part Number 0556-687600 |
| DESC : PMT / WAS 400 step stepper motor, single shaft | |
| MODEL: 1000 1100 1500 1700 990 | |
| 540 | Part Number WTC-PEDESTAL |
| DESC : Replacement pedestal with spacers for various thickness wafers | |
| MODEL: 1100 1500 1700 | |
| 541 | Part Number 0454-323485 |
| DESC : Rolling Diaphragm Upgrade Kit | |
| MODEL: 1000 990 | |
| 542 | Part Number 0505-364300 |
| DESC : short theta bearing with post | |
| MODEL: 1000 1100 1500 1700 990 | |
| 543 | Part Number 1056-656715 |
| DESC : Spring loaded plunger set screw | |
| MODEL: 1000 990 | |
| 544 | Part Number 0506-245101 |
| DESC : Stepper motor assy, 200 step | |
| MODEL: 1000 990 Saturn | |
| 545 | Part Number 0504-428674 |
| DESC : Theta bearing spring assb | |
| MODEL: 1000 1100 1500 1700 990 | |
| 546 | Part Number 01-08-00762 |
| DESC : Theta Home Switch Assembly | |
| MODEL: 1100 1500 1700 | |
| 547 | Part Number SE-000040 |
| DESC : Connector, Theta Home Switch, 2 male plugs | |
| MODEL: 1000 | |
| 548 | Part Number 01-08-00763 |
| DESC : Theta Limit Switch Assembly | |
| MODEL: 1100 1500 1700 | |
| 549 | Part Number 0506-364600 |
| DESC : Theta link pin | |
| MODEL: 1000 990 | |
| 550 | Part Number 01-08-00616 |
| DESC : Theta link pin | |
| MODEL: 1100 1500 1700 | |
| 551 | Part Number 2522-110203 |
| DESC : Theta Motor Coupling , model 1000 400 step mtr | |
| MODEL: 1000 990 | |
| 552 | Part Number 2522-110204 |
| DESC : Theta Motor Coupling , model 1100, 1500, 1700, OEM ID .187″ x .250″, OD 0.787″, L=1.0″ | |
| MODEL: 1100 1500 1700 | |
| 553 | Part Number 1006-249001 |
| DESC : Theta Stage 200 step lead screw | |
| MODEL: 1000 990 | |
| 554 | Part Number 0526-700331 |
| DESC : Theta Stage 400 step drive assembly | |
| MODEL: 1000 990 | |
| 555 | Part Number 1006-249000 |
| DESC : Theta Stage 400 step lead screw | |
| MODEL: 1000 990 | |
| 556 | Part Number 1056-656700 |
| DESC : Theta Stage 400 step Split Nut | |
| MODEL: 1000 990 | |
| 557 | Part Number 0556-687300 |
| DESC : Theta Stage 400 step stepper motor for model 1000 | |
| MODEL: 1000 990 | |
| 558 | Part Number 52-02-00170 |
| DESC : Theta Stage Diaphragms, Rolling, set of 6 | |
| MODEL: 1000 990 | |
| 559 | Part Number 10-08-04743 |
| DESC : Theta Stage Flexture for Flagpole Inverter | |
| MODEL: 1000 990 | |
| 560 | Part Number 0526-700332 |
| DESC : Theta stage leadscrew bearing | |
| MODEL: 1000 990 | |
| 561 | Part Number 1006-454801 |
| DESC : Theta Stage Lower spider refurbishment | |
| MODEL: 1000 990 | |
| 562 | Part Number 1006-859785 |
| DESC : Theta Stage Lower Spider Refurbishment for steppers with electronic focus systems | |
| MODEL: 1100 1500 1700 | |
| 563 | Part Number 10-08-01143 |
| DESC : Theta stage replacable insert | |
| MODEL: 1100 1500 1700 | |
| 564 | Part Number 0556-691500 |
| DESC : Theta stage ribbon cable A for model 1100/1500/1700 steppers J205 | |
| MODEL: 1100 | |
| 565 | Part Number 0556-691600 |
| DESC : Theta stage ribbon cable B for model 1100/1500/1700 steppers J206 | |
| MODEL: 1100 | |
| 566 | Part Number 0556-691560 |
| DESC : Theta stage umbilical cabel A/B with flexible tubing | |
| MODEL: 1100 1500 1700 | |
| 567 | Part Number 1015-532600 |
| DESC : Theta Stage V-Bearing | |
| MODEL: 1000 1100 1500 1700 990 | |
| 568 | Part Number 0556-700856-R |
| DESC : Theta stepper motor 200 step geared drive, Replaces 0556-700856 | |
| MODEL: 1100 1500 1700 990 | |
| 569 | Part Number 0516-460900 |
| DESC : Umbilical cable, includes aluminum mounting brackets | |
| MODEL: 1000 990 | |
| 570 | Part Number 01-15-04766-06 |
| DESC : Wafer chuck assembly, 6″ | |
| MODEL: 4700 6700 Titan Saturn | |
| 571 | Part Number 0509-296501 |
| DESC : 0-15 PSI 3″ precision pressure gauge | |
| MODEL: 1000 1100 1500 1700 990 | |
| 572 | Part Number 1001-000047 |
| DESC : 10x Objective for stage scope | |
| MODEL: 1000 1100 1500 1700 990 | |
| 573 | Part Number NRC |
| DESC : 6″ Nikon reticle cassette holder for use in Ultratech 4700-2244i | |
| MODEL: 4700 6700 Titan Saturn | |
| 574 | Part Number 1001-000048 |
| DESC : 80x Objective for stage scope | |
| MODEL: 1000 1100 1500 1700 990 | |
| 575 | Part Number 0509-350800 |
| DESC : Air Bag Fill Tool. | |
| MODEL: 1000 1100 1500 1700 | |
| 576 | Part Number PMT-WAS |
| DESC : alignment scope | |
| MODEL: 1000 1100 1500 1700 990 | |
| 577 | Part Number 1007-987456 |
| DESC : Bondhus hex wrench set with ball end | |
| MODEL: 1000 1100 1500 1700 990 | |
| 578 | Part Number 0606-200003 |
| DESC : CxCy tool for 3″ oblong megafrosty chuck ( specify W[1], Semi or Jeida wafer) | |
| MODEL: 1500 1700 | |
| 579 | Part Number 0606-200004 |
| DESC : CxCy tool for 4″ oblong megafrosty chuck ( specify W[1], Semi or Jeida wafer) | |
| MODEL: 1500 1700 | |
| 580 | Part Number 0606-200005 |
| DESC : CxCy tool for 5″ oblong megafrosty chuck ( specify W[1], Semi or Jeida wafer) | |
| MODEL: 1100 1500 1700 | |
| 581 | Part Number 06-08-01988 |
| DESC : CxCy tool for 6″ oblong megafrosty chuck ( specify W[1], Semi or Jeida wafer) | |
| MODEL: 1500 1700 | |
| 582 | Part Number 0606-376663 |
| DESC : Cy Cx Ring Tool, 3″ | |
| MODEL: 1100 1500 1700 | |
| 583 | Part Number 0606-376664 |
| DESC : Cy Cx Ring Tool, 4″ | |
| MODEL: 1100 1500 1700 | |
| 584 | Part Number 0606-376665 |
| DESC : Cy Cx Ring Tool, 5″ | |
| MODEL: 1100 1500 1700 | |
| 585 | Part Number 0606-376666 |
| DESC : Cy Cx Ring Tool, 6″, for round chucks | |
| MODEL: 1100 1500 1700 | |
| 586 | Part Number 0606-376668 |
| DESC : Cy Cx Ring Tool, 8″ | |
| MODEL: 1100 1500 1700 | |
| 587 | Part Number 2602-000027 |
| DESC : Filter Wratten Gel Blue | |
| MODEL: 1000 1100 1500 1700 990 | |
| 588 | Part Number 2602-000026 |
| DESC : Filter Wratten Gel Green | |
| MODEL: 1000 1100 1500 1700 990 | |
| 589 | Part Number FDK-32 |
| DESC : Force Gage, 0-32 ounces | |
| MODEL: 1000 1100 1500 1700 990 | |
| 590 | Part Number 5401-000020 |
| DESC : Force Gage, 0-60 pounds | |
| MODEL: 1000 1100 1500 1700 990 | |
| 591 | Part Number 420-LIM |
| DESC : GR Labs probe for Optical Associates Incorporated model 358 light intensity meter | |
| MODEL: 1000 1100 1500 1700 990 | |
| 592 | Part Number 0509-313900 |
| DESC : Height gauge reference, 2″ to 8″ | |
| MODEL: 1000 1100 1500 1700 990 | |
| 593 | Part Number 0509-313900-2244 |
| DESC : Height gauge, Benchmarks, Toolsteel | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 594 | Part Number XYSTAGEKIT |
| DESC : Hose and barb kit for repairing XY stage pnumatics | |
| MODEL: 1000 1100 1500 1700 990 | |
| 595 | Part Number 1007-651478 |
| DESC : Ignition wrench set | |
| MODEL: 1000 1100 1500 1700 990 | |
| 596 | Part Number 0605-541287 |
| DESC : Lapping plate for flattening chucks | |
| MODEL: 1000 1100 1500 1700 990 | |
| 597 | Part Number 1001-KIT |
| DESC : laser guide alignment kit, Includes cutoff allen wrenches and laser tab | |
| MODEL: 1000 1100 1500 1700 990 2700 4700 6700 Titan | |
| 598 | Part Number B-3-LEADSCREWLUBRICANT |
| DESC : Lead screw lubricant for theta and WAS slider leadscrews | |
| MODEL: 1000 1100 1500 1700 990 2700 4700 6700 Titan Saturn | |
| 599 | Part Number 01-05-6586 |
| DESC : Lens Height adjustment tool for model 1100 / 1000 lens assemblies | |
| MODEL: 1500 1700 | |
| 600 | Part Number 01-05-6587 |
| DESC : Lens Height adjustment tool for model 1500 / 1700 lens assemblies | |
| MODEL: 1500 1700 | |
| 601 | Part Number 01-05-6588 |
| DESC : Lens Rotation adjustment tool for model 1500 / 1700 lens assemblies | |
| MODEL: 1500 1700 | |
| 602 | Part Number 0529-557700 |
| DESC : Lens test microscope | |
| MODEL: 1000 1100 1500 1700 990 | |
| 603 | Part Number 4601-000002 |
| DESC : Lens tissue, 7″ x 10″, 500 sheets | |
| MODEL: 1000 1100 1500 1700 990 | |
| 604 | Part Number 4601-000001 |
| DESC : Lens tissue, 7″ x 4″, 500 sheets | |
| MODEL: 1000 1100 1500 1700 990 | |
| 605 | Part Number 555-LIM |
| DESC : Light Intensity Meter and probe | |
| MODEL: 1000 1100 1500 1700 990 | |
| 606 | Part Number 555-LIMP |
| DESC : Light Intensity probe for model 555 meter | |
| MODEL: 1000 1100 1500 1700 990 | |
| 607 | Part Number 555-LIMP-SC |
| DESC : Light Intensity probe with mounting screws. | |
| MODEL: 1000 1100 1500 1700 990 | |
| 608 | Part Number 840-000001 |
| DESC : LVDT Head | |
| MODEL: 1000 1100 1500 1700 990 | |
| 609 | Part Number 842-000001 |
| DESC : LVDT Meter/Gauge AMP | |
| MODEL: 1000 1100 1500 1700 990 | |
| 610 | Part Number 845-000001 |
| DESC : LVDT Stand | |
| MODEL: 1000 1100 1500 1700 990 | |
| 611 | Part Number 0519-487800 |
| DESC : Motor Clamp | |
| MODEL: 1000 1100 1500 1700 990 | |
| 612 | Part Number 358LIM-CAL |
| DESC : OAI Meter Calibration | |
| MODEL: 1000 1100 1500 1700 990 | |
| 613 | Part Number 306LIM-CAL |
| DESC : OAI Meter Calibration, model 306 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 614 | Part Number 311LIM-CAL |
| DESC : OAI Meter Calibration, Model 311 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 615 | Part Number OAI358R |
| DESC : OAI model 358 conversion, exposure meter and 420nm probe | |
| MODEL: 1000 1100 1500 1700 990 | |
| 616 | Part Number 358LIM |
| DESC : Optical Associates Incorporated Light intensity meter | |
| MODEL: 1000 1100 1500 1700 990 | |
| 617 | Part Number 1003-341290 |
| DESC : Optical Flat | |
| MODEL: 1000 1100 1500 1700 990 | |
| 618 | Part Number 0556-203847 |
| DESC : Pocket Columnator | |
| MODEL: 1000 1100 1500 1700 990 | |
| 619 | Part Number 1024-611194 |
| DESC : Reticle slider gage blocks | |
| MODEL: 1000 1100 1500 1700 990 | |
| 620 | Part Number RSA-10001100 |
| DESC : Reticle stage Adjustment Tool | |
| MODEL: 1000 1100 1500 1700 990 | |
| 621 | Part Number 0598-814865 |
| DESC : Reticle Stage Height Adjustment Kit for Big Field Lens | |
| MODEL: 1000 1100 1500 1700 990 | |
| 622 | Part Number 0101-273645 |
| DESC : Servo Extender Board with cable | |
| MODEL: 1000 1100 1500 1700 990 | |
| 623 | Part Number 1004-345430 |
| DESC : Servo Motor Leveling Tool | |
| MODEL: 1000 1100 1500 1700 990 | |
| 624 | Part Number 0509-354700 |
| DESC : Shim Kit | |
| MODEL: 1000 1100 1500 1700 990 | |
| 625 | Part Number 1028-580300 |
| DESC : Stage Signature Absolute Position Plate | |
| MODEL: 1000 1100 1500 1700 990 | |
| 626 | Part Number 7001-000067 |
| DESC : timing belt for elevator motor, 3″, 4″, 5″, 6″ with motor mounted underneath platform. 67 tooth belt | |
| MODEL: 1000 1100 1500 1700 990 Saturn | |
| 627 | Part Number 7001-000075 |
| DESC : timing belt for elevator motor, 6″ with motor mounted above bottom platform, 75 tooth belt | |
| MODEL: 1000 1100 1500 1700 Saturn | |
| 628 | Part Number WAS-01 |
| DESC : Wafer Alignment system scope | |
| MODEL: 1100 1500 1700 | |
| 629 | Part Number 10-20-02834B |
| DESC : XY Stage Microscope System for 2244 body steppers | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 630 | Part Number 0525-596500 |
| DESC : Adjustable Guide Bearing, Y axis | |
| MODEL: 1000 1100 1500 1700 990 | |
| 631 | Part Number 0525-358900 |
| DESC : Air Bearing, Fixed, Guideway, Y axis | |
| MODEL: 1000 1100 1500 1700 990 | |
| 632 | Part Number 0535-577400 |
| DESC : Air Bearing, Long | |
| MODEL: 1000 1100 1500 1700 990 Saturn | |
| 633 | Part Number 0535-577300 |
| DESC : Air Bearing, Medium | |
| MODEL: 1000 1100 1500 1700 990 Saturn | |
| 634 | Part Number 0535-577200 |
| DESC : Air Bearing, Short | |
| MODEL: 1000 1100 1500 1700 990 Saturn | |
| 635 | Part Number 50-08-04162 |
| DESC : Airpot, ring type, | |
| MODEL: 1000 1100 1500 1700 990 | |
| 636 | Part Number 2533-000056 |
| DESC : Airpot, screw type | |
| MODEL: 1000 1100 1500 1700 990 | |
| 637 | Part Number 0504-694587 |
| DESC : Aluminum Guiderail for model 1000 steppers | |
| MODEL: 1000 1100 990 | |
| 638 | Part Number 1005-233121 |
| DESC : Anchor, Drive Rod X | |
| MODEL: 1000 1100 1500 1700 990 | |
| 639 | Part Number 1005-233122 |
| DESC : Anchor, Drive Rod Y | |
| MODEL: 1000 1100 1500 1700 990 | |
| 640 | Part Number 1005-233202-10 |
| DESC : Drive Rod X, 10″ Length | |
| MODEL: 1000 1100 1500 1700 990 | |
| 641 | Part Number 1005-233202-11 |
| DESC : Drive Rod X, 11″ Length | |
| MODEL: 1000 1100 1500 1700 990 | |
| 642 | Part Number 1005-233101 |
| DESC : Drive Rod Y | |
| MODEL: 1000 1100 1500 1700 990 | |
| 643 | Part Number 01-20-02646-01P |
| DESC : Front focus actuator assembly | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 644 | Part Number 01-15-08968-06 |
| DESC : Front focus actuator assembly, extended range | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 645 | Part Number 0556-654100 |
| DESC : Guide bearing, Adj, Left, 8″ | |
| MODEL: 1100 1500 1700 | |
| 646 | Part Number 0556-654300 |
| DESC : Guide bearing, Adj, Right, 8″ | |
| MODEL: 1100 1500 1700 | |
| 647 | Part Number 0556-654000 |
| DESC : Guide bearing, Fixed, Left, 8″ | |
| MODEL: 1100 1500 1700 | |
| 648 | Part Number 0556-654200 |
| DESC : Guide bearing, Fixed, Right, 8″ | |
| MODEL: 1100 1500 1700 | |
| 649 | Part Number 01-20-02646-03P |
| DESC : Left focus actuator assembly | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 650 | Part Number 01-15-08968-04 |
| DESC : Left focus actuator assembly, extended range | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 651 | Part Number 2244XYSTG |
| DESC : Linear xy stage for 2244 body steppers | |
| MODEL: 4700 6700 Titan Saturn | |
| 652 | Part Number 2244RTA |
| DESC : Reticle transport arm for 2244 body steppers | |
| MODEL: 4700 6700 Titan Saturn | |
| 653 | Part Number 01-20-02646-02P |
| DESC : Right focus actuator assembly | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 654 | Part Number 01-15-08968-05 |
| DESC : Right focus actuator assembly, extended range | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 655 | Part Number 01-20-04822 |
| DESC : Sensor, Autouniformity, g-h | |
| MODEL: 4700 6700 Titan Saturn | |
| 656 | Part Number 0515-410799 |
| DESC : Servo Motor Armature | |
| MODEL: 1000 1100 1500 1700 990 | |
| 657 | Part Number 50-02-00334 |
| DESC : Servo Motor Brush, Inland (price increase as of 4/15/2021 due to covid related vendor cost increase) | |
| MODEL: 1000 1100 1500 1700 | |
| 658 | Part Number 3501-000013 |
| DESC : Servo Motor Brush, Magtech (Discontinued) | |
| MODEL: 1000 1100 1500 1700 990 | |
| 659 | Part Number 01-02-00330 |
| DESC : Servo Motor, Inland style | |
| MODEL: 1000 1100 1500 1700 990 4700 | |
| 660 | Part Number 0515-410700 |
| DESC : Servo Motor, Magtech style (Discontinued) | |
| MODEL: 1000 1100 1500 1700 990 | |
| 661 | Part Number SEI-UFSTAND |
| DESC : Uniformity probe stand for screw down probe | |
| MODEL: 1000 1100 1500 1700 990 | |
| 662 | Part Number 1056-602000 |
| DESC : X drive rod connector | |
| MODEL: 1000 1100 1500 1700 990 | |
| 663 | Part Number 1004-500230 |
| DESC : x edge switch assy standard field | |
| MODEL: 1000 990 | |
| 664 | Part Number 1005-MIRX |
| DESC : X Stage Mirror | |
| MODEL: 1000 1100 1500 1700 990 | |
| 665 | Part Number 0516-461500 |
| DESC : XY Interconnect Cable | |
| MODEL: 1000 990 | |
| 666 | Part Number 3806-000005 |
| DESC : XY Stage Limit Switch | |
| MODEL: 1000 1100 1500 1700 990 | |
| 667 | Part Number 1005-233300 |
| DESC : Y drive rod connector | |
| MODEL: 1000 1100 1500 1700 990 | |
| 668 | Part Number 1005-MIRY |
| DESC : Y mirror for xy stage | |
| MODEL: 1000 1100 990 | |
| 669 | Part Number 2906-000008 |
| DESC : Vacuum Gauge for Stepper | |
| MODEL: 1000 1100 1500 1700 990 | |
| 670 | Part Number 0573-701391 |
| DESC : Solenoid Delay Driver Board | |
| MODEL: 1000 990 | |
| 671 | Part Number 2509-000041 |
| DESC : XYZ Adjuster for field aperture/Lamphouse model 1500/1700 | |
| MODEL: 1100 1500 1700 990 2700 | |
| 672 | Part Number 33-20-03995 |
| DESC : model 7080 step motor driver. | |
| MODEL: 1500 1700 2700 4700 6700 Titan Saturn | |
| 673 | Part Number LNR-BFL-R |
| DESC : Model 1500/1700 Lens Exchange, Refurbished. 1.0 or 1.2 um resolution | |
| MODEL: 1500 1700 | |
| 674 | Part Number HP5501B |
| DESC : Laser transducer for Ultratech steppers | |
| MODEL: 1000 1100 1500 1700 990 | |
| 675 | Part Number 0553-700974 |
| DESC : UTS Comparator board for model 1100, 1500, 1700 steppers | |
| MODEL: 1100 1500 1700 | |
| 676 | Part Number 03-08-03648 |
| DESC : MVS Limit Switch Board | |
| MODEL: 1500 1700 2700 4700 6700 | |
| 677 | Part Number 01-02-00004 |
| DESC : PMT slider | |
| MODEL: 1000 990 | |
| 678 | Part Number 0514-493857 |
| DESC : Titan SCSI 3.5″ Floppy Drive | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 679 | Part Number 01-08-00962-05 |
| DESC : Chuck, 5 inch, Oblong Megafrosty, Aluminum | |
| MODEL: 1000 1100 1500 1700 990 | |
| 680 | Part Number 0535-577001 |
| DESC : Air Bearing shoe for Long, Medium, and Short air bearings. | |
| MODEL: 1000 1100 1500 1700 990 | |
| 681 | Part Number 410LIM |
| DESC : GRLabs model 410 light intensity meter for Ultratech steppers with 420 UTS probe | |
| MODEL: 990 | |
| 682 | Part Number 04-08-01701 |
| DESC : Light pipe assy for 1500, 30×16 field size | |
| MODEL: 1000 1500 1700 990 | |
| 683 | Part Number 0454-323489 |
| DESC : Flagpole Inverter spider baseplate | |
| MODEL: | |
| 684 | Part Number 50-08-04654 |
| DESC : Vacuum Generator | |
| MODEL: 1500 1700 2700 | |
| 685 | Part Number 3803-000009 |
| DESC : Window, Mirror Cell | |
| MODEL: 1500 1700 | |
| 686 | Part Number 1009-406300 |
| DESC : Filter, Diffuser | |
| MODEL: 1500 1700 | |
| 687 | Part Number 1064-700653A |
| DESC : Left Crossmask and base, .40na, 100um | |
| MODEL: 1500 1700 | |
| 688 | Part Number 1064-700644A |
| DESC : Right Crossmask and base, .31na, 100um | |
| MODEL: 1500 1700 | |
| 689 | Part Number 1064-700645A |
| DESC : Left Crossmask and base, .31na, 100um | |
| MODEL: 1500 1700 | |
| 690 | Part Number 1064-700619 |
| DESC : Light Stop, Left HAMS .31 | |
| MODEL: 1500 1700 | |
| 691 | Part Number 1056-689701 |
| DESC : Alignment Detector shield, Left, HAMS | |
| MODEL: 1100 | |
| 692 | Part Number 1056-689700 |
| DESC : Alignment Detector shield, Right HAMS | |
| MODEL: 1100 | |
| 693 | Part Number 1064-700618 |
| DESC : Light Stop, Right HAMS .31 | |
| MODEL: 1500 1700 | |
| 694 | Part Number 0564-700633-80 |
| DESC : Crossmask assembly, Left HAMS, .31na, 80um legs | |
| MODEL: 1500 1700 | |
| 695 | Part Number 0564-700632-80 |
| DESC : Crossmask assembly, Right HAMS, .31na, 80um legs | |
| MODEL: 1500 1700 | |
| 696 | Part Number 01-08-03230 |
| DESC : Offset Chuck base, small hole pattern, frosty strip, Stainless Steel | |
| MODEL: 1100 1500 1700 | |
| 697 | Part Number 01-08-03230-01 |
| DESC : Offset Chuck wafer holder, 13mm square, aluminum | |
| MODEL: 1100 1500 1700 | |
| 698 | Part Number 01-08-03230-02 |
| DESC : Offset Chuck wafer holder, 2″ Round, Aluminum | |
| MODEL: 1100 1500 1700 | |
| 699 | Part Number 01-08-03230-01S |
| DESC : Offset chuck wafer holder, 13mm square, Stainless steel | |
| MODEL: 1100 1500 1700 | |
| 700 | Part Number 10-08-03230-02S |
| DESC : Offset Chuck wafer holder, 2″ round, Stainless Steel | |
| MODEL: 1100 1500 1700 | |
| 701 | Part Number 33-20-03996 |
| DESC : Model st-10 step motor driver | |
| MODEL: 1500 1700 | |
| 702 | Part Number 0514-562600 |
| DESC : Lamp house top assembly for model 1000 | |
| MODEL: 1000 990 | |
| 703 | Part Number 0514-562600 |
| DESC : Lamp house top assembly for model 1000 | |
| MODEL: 1000 990 | |
| 704 | Part Number 0524-561100 |
| DESC : Illuminator, Series II Widefield | |
| MODEL: 1000 990 | |
| 705 | Part Number 0556-700854 |
| DESC : Theta stepper motor 200 step geared drive assembly | |
| MODEL: 1100 1500 1700 | |
| 706 | Part Number 1064-700290 |
| DESC : Actinic Shutter Bumper | |
| MODEL: 1500 1700 | |
| 707 | Part Number 01-08-03230-02S |
| DESC : Offset Chuck wafer holder, 2″ Round, Stainless | |
| MODEL: 1100 1500 1700 | |
| 708 | Part Number 01-08-03230-04 |
| DESC : Offset Chuck wafer holder, 4″ Round Aluminum | |
| MODEL: 1100 1500 1700 | |
| 709 | Part Number 01-08-03230-16X7 |
| DESC : Offset Chuck wafer holder, 16x7mm, Aluminum | |
| MODEL: 1100 1500 1700 | |
| 710 | Part Number 1084-700715 |
| DESC : Air Probe Block for model 1500 lens | |
| MODEL: 1500 1700 | |
| 711 | Part Number 07-08-03850 |
| DESC : MVS Beam Splitter Prism. New glass only | |
| MODEL: 1500 1700 | |
| 712 | Part Number 05-20-03789 |
| DESC : MVS Flipper prism home switch cable | |
| MODEL: 1500 1700 | |
| 713 | Part Number GRSTDPRB-400 |
| DESC : GrLabs Standard Probe, calibrated for 400nm for MA6 aligner | |
| MODEL: | |
| 714 | Part Number 1006-231300 |
| DESC : Link Rod Post | |
| MODEL: 1100 1500 1700 | |
| 715 | Part Number 2902-000020 |
| DESC : HP 9826-226 Computer System | |
| MODEL: 1000 1100 990 | |
| 716 | Part Number 0564-700633-C |
| DESC : Crossmask, Glass only, Left HAMS, .31NA, Model 1500/1700 | |
| MODEL: 1500 1700 | |
| 717 | Part Number 5106-000010 |
| DESC : Cap Sensor Upgrade Kit for Automation Autoloaders | |
| MODEL: 1000 1100 1500 1700 990 | |
| 718 | Part Number 5106-000011 |
| DESC : Cap Sensor, with cord and plug | |
| MODEL: 1000 1100 1500 1700 | |
| 719 | Part Number 5106-000012 |
| DESC : Cap Sensor Board | |
| MODEL: 1000 1100 1500 1700 | |
| 720 | Part Number 5106-000013 |
| DESC : Cap Sensor Power Cable | |
| MODEL: 1000 1100 1500 1700 | |
| 721 | Part Number 5106-000014 |
| DESC : Output Elevator Stepper Motor, Single shaft | |
| MODEL: 1000 1100 1500 1700 990 | |
| 722 | Part Number 5106-000015 |
| DESC : Input Cap Sensor Mounting Bracket | |
| MODEL: 1000 1100 1500 1700 | |
| 723 | Part Number 5106-000016 |
| DESC : Output Cap Sensor Mounting Bracket with Spacer and Screw | |
| MODEL: 1000 1100 1500 1700 | |
| 724 | Part Number 01-08-03230A |
| DESC : Offset Chuck base, small hole pattern, frosty strip, Aluminum | |
| MODEL: 1100 1500 1700 | |
| 725 | Part Number 01-08-03230-02A |
| DESC : Offset Chuck wafer holder, 2″ Round, Aluminum | |
| MODEL: 1100 1500 1700 | |
| 726 | Part Number 01-08-03230-01A |
| DESC : Offset chuck wafer holder, 13mm square, Aluminum | |
| MODEL: 1100 1500 1700 | |
| 727 | Part Number 0000-002466 |
| DESC : HP9826 keyboard | |
| MODEL: 1000 1100 990 | |
| 728 | Part Number 03-20-01130-03 |
| DESC : BD. Transition, Stage Motor Driver | |
| MODEL: 4700 6700 Titan Saturn | |
| 729 | Part Number 03-20-01130-04 |
| DESC : BD. Transition, Stage Motor Driver | |
| MODEL: 4700 6700 Titan Saturn | |
| 730 | Part Number 1012-434400 |
| DESC : Elevator lead screw | |
| MODEL: 1000 1100 1500 1700 990 | |
| 731 | Part Number 0564-700668 |
| DESC : 1100 Reticle stage | |
| MODEL: 1500 1700 | |
| 732 | Part Number 01-08-01069 |
| DESC : Shutter driver box for single blade shutter, two connectors for exp and actinic shutter | |
| MODEL: 1500 1700 | |
| 733 | Part Number 19-17-00216 |
| DESC : UTS194C Reticle | |
| MODEL: 4700 6700 Titan Saturn | |
| 734 | Part Number 06-14-02752 |
| DESC : UTS 130G RevA Reticle | |
| MODEL: 1100 1500 1700 2700 4700 6700 | |
| 735 | Part Number 06-15-04271 |
| DESC : blank metal plate for robot | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 736 | Part Number 16-15-05508 |
| DESC : UTS 230D Reticle | |
| MODEL: 1100 1500 1700 2700 4700 6700 Titan Saturn | |
| 737 | Part Number 01-08-00962-06-CR |
| DESC : Chuck, 6 inch, Oblong Megafrosty, aluminum, Custom ring pattern | |
| MODEL: 1000 1100 1500 1700 990 | |
| 738 | Part Number LNR-WFL1000 |
| DESC : 1.25 um model 1000 widefield lens, Refurbished. | |
| MODEL: 1000 990 | |
| 739 | Part Number AP-A-B-1-N-187 |
| DESC : Axle pulley, automation, brass, single pulley, no taper, .187 ID | |
| MODEL: 1000 1100 1500 1700 990 | |
| 740 | Part Number CABLE-A- |
| DESC : 20 pin ribbon cable from autoloader to system driver board, 14′ with connectors | |
| MODEL: 1000 1100 1500 1700 990 | |
| 741 | Part Number SP-S-B-1-N-4 |
| DESC : Standoff Pulley assembly, Smart, Brass, 1 pulley, 0.4″ standoff | |
| MODEL: 1000 1100 1500 1700 990 | |
| 742 | Part Number 0506-125421 |
| DESC : PMT Window Assembly | |
| MODEL: 1000 990 | |
| 743 | Part Number 0506-125754 |
| DESC : PMT Shutter Assembly | |
| MODEL: 1000 990 | |
| 744 | Part Number 01-15-04766-06 |
| DESC : Titan chuck, 6″ | |
| MODEL: Titan | |
| 745 | Part Number USH250-SC |
| DESC : Lamp, Ushio | |
| MODEL: | |
| 746 | Part Number 10-1606-1339-L |
| DESC : Lamp for automation loader illuminated push button switch | |
| MODEL: 1000 1100 1500 1700 990 | |
| 747 | Part Number 01-20-02547 |
| DESC : Ellipsoidal Mirror for Titan / 4700 Stepper / SS3 | |
| MODEL: 4700 Titan Saturn | |
| 748 | Part Number 0556-635600 |
| DESC : Upper Alignment Cable Assy (ribbon cable to system driver board) | |
| MODEL: 1100 1500 1700 | |
| 749 | Part Number 0564-700274 |
| DESC : Power connector assy for illuminator lamp. Includes wiring and lamp ring | |
| MODEL: 1100 1500 1700 Saturn | |
| 750 | Part Number 2504-700266 |
| DESC : Top Hat O-Ring | |
| MODEL: 1500 1700 | |
| 751 | Part Number 0524-561 000 |
| DESC : Model 1000 light pipe assembly | |
| MODEL: 1000 990 | |
| 752 | Part Number 2510-000021 |
| DESC : Timing belt pulley with counterweight | |
| MODEL: 1000 1100 1500 1700 | |
| 753 | Part Number 0556-635700 |
| DESC : Upper illuminator cable (P2) | |
| MODEL: 1000 1100 1500 1700 | |
| 754 | Part Number 0556-642100 |
| DESC : Lower Illuminator cable (P2) | |
| MODEL: 990 | |
| 755 | Part Number AA-LFF-LED |
| DESC : Lower flat find board LED for automation autoloader | |
| MODEL: | |
| 756 | Part Number SDTR-VTW-1.0 |
| DESC : Custom Reticle: Fld1: SDTR-fld1, Fld2: Horizontal VTW, Fld3: Verticle VTW | |
| MODEL: | |
| 757 | Part Number 0556-701145 |
| DESC : Dual Independent Alignment Cable | |
| MODEL: 1100 1500 1700 | |
| 758 | Part Number 32-15-04702-REVA |
| DESC : Maxi Bar Barcode Scanner | |
| MODEL: 4700 6700 Titan Saturn | |
| 759 | Part Number 01-15-04744-E |
| DESC : Reticle swing arm motor | |
| MODEL: 4700 6700 Titan Saturn | |
| 760 | Part Number 0523-701008 |
| DESC : PMT Stage Safety Board | |
| MODEL: 1000 1100 1500 1700 | |
| 761 | Part Number 13-08-03648 |
| DESC : MVS L/R Home Switch PCB | |
| MODEL: 1500 1700 | |
| 762 | Part Number HA-UPR500D-LE |
| DESC : Lamp Power Supply, model HA500-DLE | |
| MODEL: 1000 1100 1500 1700 990 | |
| 763 | Part Number 04-08-03404 |
| DESC : Actinic shutter for MVS Illuminator | |
| MODEL: 1500 1700 | |
| 764 | Part Number 1002-564987 |
| DESC : Automation M380 Board Nylon Mount | |
| MODEL: 1000 1100 1500 1700 | |
| 765 | Part Number EPSON350-RIBBON |
| DESC : Printer Ink Ribbon Cartridge, Epson LX300, LX350 | |
| MODEL: 1000 1100 1500 1700 | |
| 766 | Part Number MVSOPTALN |
| DESC : Optical BenchMark Alignment of MVS Bridge | |
| MODEL: 1500 1700 2700 4700 6700 Titan | |
| 767 | Part Number 2502-000014 |
| DESC : Bearing, top and bottom elevator leadscrew, Smart Autoloader, 0.5 OD x 0.312 ID | |
| MODEL: 1000 1100 1500 1700 990 | |
| 768 | Part Number 01-15-02936A |
| DESC : MVS Motor, Left or Right | |
| MODEL: 1500 1700 2700 4700 | |
| 769 | Part Number PCHDSCSI |
| DESC : Hard disk SCSI drive for PC Controller series computers | |
| MODEL: 1000 1100 1500 1700 | |
| 770 | Part Number 1064-700618 |
| DESC : Alignment Detector shield, Right, HAMS Model 1500/1700 | |
| MODEL: 1500 1700 | |
| 771 | Part Number 1064-700619 |
| DESC : Alignment Detector shield, Left, HAMS Model 1500/1700 | |
| MODEL: 1500 1700 | |
| 772 | Part Number 7001-200100 |
| DESC : 9 pin Dsub connector with cable, Automation interface | |
| MODEL: 1000 1100 1500 1700 | |
| 773 | Part Number 1056-599000 |
| DESC : X Guide Way, Aluminum, Extended range | |
| MODEL: 1100 1500 1700 | |
| 774 | Part Number 1005-211600 |
| DESC : Y Guide Way, Granite | |
| MODEL: 1000 1100 1500 1700 990 | |
| 775 | Part Number 1005-236400 |
| DESC : X Guide Way, Aluminum | |
| MODEL: 1000 1100 990 | |
| 776 | Part Number MVSPRISMFLIP |
| DESC : Flipper prism replacement | |
| MODEL: 1500 1700 | |
| 777 | Part Number 0564-590401 |
| DESC : Reticle aperature mount with cooling modification | |
| MODEL: 1000 1100 | |
| 778 | Part Number COVER-1100-LEFT-TOP |
| DESC : Left top panel for pneumatics, model 1100. Acrylic, 1/4″, Transparent smoke,, with handle | |
| MODEL: 1100 | |
| 779 | Part Number COVER-1100-RIGHT-TOP |
| DESC : Right top panel for Laser transducer, model 1100. Acrylic, 1/4″, Transparent smoke,, with handle | |
| MODEL: 1100 | |
| 780 | Part Number COVER-1100-BACK-TOP |
| DESC : Back top panel covers Y laser and lens assy, model 1100. Acrylic, 1/4″, Transparent smoke, with 2 handles | |
| MODEL: 1100 | |
| 781 | Part Number COVER-1100-ELECTRONICS |
| DESC : Front Left Door for elec cardcage. OEM, New white powdercoat finish | |
| MODEL: 1100 | |
| 782 | Part Number COVER-1100-RETICLESTAGE |
| DESC : Front Reticle state/Illuminator cover. OEM, Used. | |
| MODEL: 1100 | |
| 783 | Part Number ODV76/K92111-P2 |
| DESC : Stepper motor for model 1100 camera system | |
| MODEL: 1100 | |
| 784 | Part Number 2503-000007 |
| DESC : Spacer Shaft Bearing | |
| MODEL: | |
| 785 | Part Number 0502-322100 |
| DESC : O-ring Idler | |
| MODEL: | |
| 786 | Part Number USH1003FAL3 |
| DESC : Lamp, Ushio | |
| MODEL: 4700 6700 Titan Saturn | |
| 787 | Part Number 07-08-03850-I |
| DESC : MVS Beam Splitter Prism. New glass installed in customer supplied fixture. | |
| MODEL: 1500 1700 | |
| 788 | Part Number 0564-700238 |
| DESC : Exposure shutter blade, model 1500/1700 | |
| MODEL: 1500 1700 2700 | |
| 789 | Part Number 01-08-00550 |
| DESC : Actinic shutter blade for model 1500/1700 steppers | |
| MODEL: 1500 1700 | |
| 790 | Part Number A241P |
| DESC : Fiber-Lite, A-241P, 150 Watt Power Supply MVS | |
| MODEL: 4700 6700 Titan Saturn | |
| 791 | Part Number LIS-7I-15 |
| DESC : 15 V +/- 5% Power Supply, 5.0 Amps@40C | |
| MODEL: 4700 6700 Titan Saturn | |
| 792 | Part Number LIS-3I-15 |
| DESC : 15 V +/- 5% Power Supply, 1.0 Amps@40C | |
| MODEL: 4700 6700 Titan Saturn | |
| 793 | Part Number 0556-642300 |
| DESC : Lower Alignment Cable (ribbon cable to system driver board) | |
| MODEL: 1500 1700 | |
| 794 | Part Number 2502-000023 |
| DESC : Bearing, MVS Flipper Prism | |
| MODEL: 1500 1700 | |
| 795 | Part Number 23-08-04652 |
| DESC : Pressure Regulator, 0 to 100 psi | |
| MODEL: 1100 1500 1700 Titan | |
| 796 | Part Number 420-LIM-CAL |
| DESC : Calibration of GR Labs probe for model 400-LIM meter | |
| MODEL: 1000 1100 1500 1700 990 | |
| 797 | Part Number A241L |
| DESC : Fiber-Lite, A-241L, 150 Watt MVS Lamp Housing | |
| MODEL: 1500 1700 Titan Saturn | |
| 798 | Part Number 1026-516901 |
| DESC : Reticle Finger Dogbone | |
| MODEL: 1000 1100 1500 1700 990 | |
| 799 | Part Number 1026-516902 |
| DESC : Reticle Finger Arm, Rev B | |
| MODEL: 1000 1100 1500 1700 990 | |
| 800 | Part Number PF-B194V |
| DESC : Exposure System Power Supply | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 801 | Part Number 03-15-04414 |
| DESC : Exposure System CPU with Interlock | |
| MODEL: 2700 4700 6700 Titan Saturn | |
| 802 | Part Number 03-20-02580 REV 3 |
| DESC : Shutter Driver M2000 | |
| MODEL: | |
| 803 | Part Number 03-08-01334 |
| DESC : PCB, Pnumatic panel model 1500 1700 | |
| MODEL: 1500 1700 | |
| 804 | Part Number ETS-VCA |
| DESC : Voice Coil Assembly | |
| MODEL: 1100 1500 1700 | |
| 805 | Part Number M160 |
| DESC : Comparator Connector and cable | |
| MODEL: 1000 990 | |
| 806 | Part Number LRS-55-24 |
| DESC : 24VDC power supply, 8 amps | |
| MODEL: 1000 1100 1500 1700 990 | |
| 807 | Part Number 01-08-01720-02 |
| DESC : Chuck, 4 inch, Oblong, Aluminum, 0.6″ hole pattern | |
| MODEL: 1000 1100 1500 1700 990 | |
| 808 | Part Number 0556-690100-G |
| DESC : Crossmask, glass only, .31NA, Left HAMS | |
| MODEL: 1100 | |
| 809 | Part Number 0556-698200-G |
| DESC : Crossmask, glass only, .31NA, Right HAMS | |
| MODEL: 1100 | |
| 810 | Part Number 01-08-00551 |
| DESC : Actinic shutter bearing, | |
| MODEL: | |
| 811 | Part Number 6805-000009 |
| DESC : Ceramic standoff for mercury arc lamp, 1.0L x 0.5D x 8/32 female threads both ends | |
| MODEL: 1100 1500 1700 | |
| 812 | Part Number 50000702-02 |
| DESC : Digi Intl AccelePort Xp PCI 8-port 8p | |
| MODEL: 1500 1700 | |
| 813 | Part Number 0553-700567 |
| DESC : Lower flat find board for automation autoloaders, 4″, 5″, 6″, short version | |
| MODEL: 1000 1100 1500 1700 | |
| 814 | Part Number 0606-000002 |
| DESC : Chuck, 2 inch round aluminum | |
| MODEL: 1000 1100 1500 1700 990 | |
| 815 | Part Number 2504-110015 |
| DESC : O-Ring, at cassette, Automation, 3/8″ ID x 1/2″ OD | |
| MODEL: | |
| 816 | Part Number 2504-106040 |
| DESC : O-Ring, Clear, 0.070 x 3.90ID, | |
| MODEL: 1000 1100 1500 1700 990 | |
| 817 | Part Number EML-TP-2 |
| DESC : Enhanced Multi-Manual Loader Top Plate, 2″ round substrates with major flat at 6’oclock | |
| MODEL: 1000 1100 1500 1700 990 | |
| 818 | Part Number 0512-435400 |
| DESC : O-Ring Idler Assembly, 6″ Input Conveyer Automation | |
| MODEL: | |
| 819 | Part Number EML-TP-OC-8 |
| DESC : Enhanced Manual Loader Top Plate, 8″ oblong chuck (7.75″ Diameter) | |
| MODEL: 1000 1100 1500 1700 990 | |
| 820 | Part Number 2920-000010 |
| DESC : Printer Paper, Continuous form, Cleanroom, 1700 sheets, 9.5″ x 11″, White | |
| MODEL: 1000 1100 1500 1700 990 | |
| 821 | Part Number 0556-599200 |
| DESC : Laser cable, Lower, to fast pulse converter | |
| MODEL: 1000 1100 1500 1700 990 | |
| 822 | Part Number 0556-682300 |
| DESC : Laser cable, Upper, 2 connectors to laserhead Excel 1001-A or HP5501B | |
| MODEL: 1000 1100 1500 1700 990 | |
| 823 | Part Number 50-02-00335 |
| DESC : Servo Motor Brush Connector, gold plated | |
| MODEL: 1000 1100 1500 1700 990 | |
| 824 | Part Number SE-000044 |
| DESC : Theta stage uniformity probe connector, 1M 1F | |
| MODEL: 1000 990 | |
| 825 | Part Number 1004-854789 |
| DESC : Lamp Power supply to lamphouse top power cable | |
| MODEL: 1000 990 | |
| 826 | Part Number 01-08-00962-06-NO |
| DESC : Chuck, 6 inch, Oblong Megafrosty, aluminum, , 1″ Mt Hole, frosty strip, no OAT | |
| MODEL: 1000 1100 1500 1700 990 | |
| 827 | Part Number 5107-000014 |
| DESC : Micro Switch with actuator for elevator cassette detection | |
| MODEL: 1000 1100 1500 1700 990 | |
| 828 | Part Number USH1000FA |
| DESC : Lamp, Ushio | |
| MODEL: | |
| 829 | Part Number 2505-000047 |
| DESC : Reticle door spring2505-000047 | |
| MODEL: 1500 1700 | |
| 830 | Part Number 0536-496915 |
| DESC : Binary interface cable, extended, for HP362 Computer Systems on external rack | |
| MODEL: 1000 1100 1500 1700 990 | |
| 831 | Part Number 01-08-00961 |
| DESC : Exposure Shutter assembly for model 1500/1700, Blade type. Requires 01-08-01069 shutter driver box | |
| MODEL: | |
| 832 | Part Number 01-08-00962-04 |
| DESC : Chuck, 4 inch, Oblong Megafrosty, Aluminum | |
| MODEL: 1100 1500 1700 | |
| 833 | Part Number 01-08-03279-02 |
| DESC : Chuck, 4 inch, Oblong , stainless steel, 0.6″ hole pattern | |
| MODEL: 1000 1100 1500 1700 990 | |
| 834 | Part Number UTS-TP-2-4-OB |
| DESC : Multimanual loader topplate, 2″ round and 4″ oblong megafrosty | |
| MODEL: 1000 1100 1500 1700 990 | |
| 835 | Part Number 01-08-00789 |
| DESC : Exposure Detector | |
| MODEL: 1500 1700 | |
| 836 | Part Number 0606-000002-TKUTS |
| DESC : Chuck, 2 inch round aluminum with cutout for Tazmo UTS loader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 837 | Part Number 1084-700716 |
| DESC : Air Probe Block for model Titan/Saturn lens | |
| MODEL: 4700 Titan Saturn | |
| 838 | Part Number 01-08-02205-08 |
| DESC : Chuck, 8 inch, Round Megafrosty, aluminum | |
| MODEL: 1500 1700 | |
| 839 | Part Number 2901-000018 |
| DESC : Temperature probe for model 900 and 1000 steppers | |
| MODEL: 1000 990 | |
| 840 | Part Number 1064-700653B |
| DESC : Right Crossmask and base, .40na, 100um | |
| MODEL: 1500 1700 | |
| 841 | Part Number 19-159-016 |
| DESC : Track interface cable, 9 pin DSUB connector | |
| MODEL: 1000 1100 1500 1700 990 | |
| 842 | Part Number 57-08-04601 |
| DESC : Valve, 24VDC, Dynamco, Single position, PN D2532KL0 | |
| MODEL: 1500 1700 | |
| 843 | Part Number 57-08-06066 |
| DESC : Valve, 24VDC, Pressure / Vac, Dynamco, PN D2X413-1 | |
| MODEL: 1500 1700 Titan | |
| 844 | Part Number 400PROBE-420 |
| DESC : Probe for model 400 meter, 420nm. Includes calibration to model 400 meter | |
| MODEL: 1000 1100 1500 1700 990 2700 4700 6700 Titan | |
| 845 | Part Number 400PROBE-365 |
| DESC : Probe for model 400 meter, 365nm | |
| MODEL: 1000 1100 1500 1700 990 2700 4700 6700 Titan | |
| 846 | Part Number 0559-700325 |
| DESC : AutoUniformity cable with sensor | |
| MODEL: 1000 1100 1500 1700 | |
| 847 | Part Number 04-08-05341 |
| DESC : Actinic shutter for MVS Illuminator | |
| MODEL: 1500 1700 | |
| 848 | Part Number 01-08-02205-06 |
| DESC : Actinic shutter for MVS Illuminator | |
| MODEL: | |
| 849 | Part Number 01-08-02205-06 |
| DESC : Chuck, 6 inch round Megafrosty, stainless steel, 1″ hole spacing | |
| MODEL: 1000 1100 990 | |
| 850 | Part Number 01-08-02201-06 |
| DESC : Chuck, 6 inch round Megafrosty, aluminum, 1″ hole spacing | |
| MODEL: 1000 1100 990 | |
| 851 | Part Number LP-1700-39X18 |
| DESC : Light pipe assy for 1700, diffuser, 39×18 field size | |
| MODEL: 1000 1500 1700 990 | |
| 852 | Part Number PMI-245 |
| DESC : Pen Motor Interface board, Model 245 | |
| MODEL: 1000 1100 1500 1700 | |
| 853 | Part Number 0606-200002 |
| DESC : CxCy tool for 2″ oblong megafrosty chuck ( specify W[1], Semi or Jeida wafer) | |
| MODEL: 1100 1500 1700 | |
| 854 | Part Number 01-08-03230-2-T |
| DESC : Offset Chuck, Tazmo, 2″, large hole pattern, frosty strip, Aluminum | |
| MODEL: 1100 1500 1700 | |
| 855 | Part Number APER-MVS-NW-39X18 |
| DESC : MVS quartz aperture, clear opening 42.5mm x 21.5mm, use for 39mm x 18mm fieldsize | |
| MODEL: 1000 1500 1700 Saturn | |
| 856 | Part Number 1010-345236 |
| DESC : Output Guide Block for 6″ Automation Autoloaders | |
| MODEL: 1000 1100 1500 1700 990 | |
| 857 | Part Number 5107-000014-C |
| DESC : Micro Switch with actuator and cable for elevator cassette detection | |
| MODEL: 1000 1100 1500 1700 990 | |
| 858 | Part Number 1000-104786 |
| DESC : Shipping package for 1500/1700 steppers with PC computer towers | |
| MODEL: 1500 1700 | |
| 859 | Part Number 01-08-03230-2 |
| DESC : Offset Chuck, 2″, large hole pattern, frosty strip, Aluminum | |
| MODEL: 1100 1500 1700 | |
| 860 | Part Number LP-1700-30X18 |
| DESC : Light pipe assy for 1700, diffuser, 30×18 field size | |
| MODEL: 1000 1500 1700 990 | |
| 861 | Part Number LP-1700-30X10 |
| DESC : Light pipe assy for 1700, diffuser, 30×10 field size | |
| MODEL: 1000 1500 1700 990 | |
| 862 | Part Number LP-1700-30X16 |
| DESC : Light pipe assy for 1700, diffuser, 30×16 field size | |
| MODEL: 1000 1500 1700 990 | |
| 863 | Part Number 01-06-01199 |
| DESC : Actinic shutter motor shaft clamp | |
| MODEL: | |
| 864 | Part Number 0606-000003-TKUTS |
| DESC : Chuck, 3 inch round aluminum with cutout for Tazmo UTS loader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 865 | Part Number 01-08-00588 |
| DESC : Magnetic aperture mount for model 1500 | |
| MODEL: 1500 1700 | |
| 866 | Part Number 0553-678501-3 |
| DESC : 3″ Lower Flat find board, Automation loader | |
| MODEL: 1000 1100 1500 1700 990 | |
| 867 | Part Number 0564-700632-C |
| DESC : Crossmask, Glass only, Right HAMS, .31NA, Model 1500/1700 | |
| MODEL: 1500 1700 | |
| 868 | Part Number 0606-100003 |
| DESC : CxCy tool for 3″ round chuck. ( specify W[1], Semi or Jeida wafer) | |
| MODEL: 1500 1700 | |
| 869 | Part Number 01-08-00962-06-CO |
| DESC : Chuck, 6 inch, Oblong Megafrosty, aluminum, 1″ Mt Hole, Center OAT | |
| MODEL: 1000 1100 1500 1700 990 | |
| 870 | Part Number 0556-635487 |
| DESC : Cable, Servo board to 944 stage amp | |
| MODEL: 1100 1500 1700 | |
| 871 | Part Number 0555-591500 |
| DESC : 64/32 Bit Read/Write Universal Cable | |
| MODEL: 1000 1100 1500 1700 990 | |
| 872 | Part Number WTR1100C |
| DESC : WTR 1100 Reticle Rev C | |
| MODEL: 1000 1100 1500 1700 | |
| 873 | Part Number 01-08-03855 REV-C |
| DESC : MVS Aperture Assembly | |
| MODEL: Saturn | |
| 874 | Part Number 60-06-00124 |
| DESC : 24vdc power relay for stepper 120vac input | |
| MODEL: 1500 1700 | |
| 875 | Part Number 0564-635701 |
| DESC : Lamp Cathode Socket | |
| MODEL: 1500 1700 | |
| 876 | Part Number 0564-635702 |
| DESC : Lamp Anode Socket | |
| MODEL: 1500 1700 | |
| 877 | Part Number 0564-635703 |
| DESC : Lamp Anode Insulator | |
| MODEL: 1500 1700 | |
| 878 | Part Number 0506-125432 |
| DESC : Right WAS window motor assembly, 1100 | |
| MODEL: 1100 | |
| 879 | Part Number 01-08-2-3-OFF |
| DESC : Offset Chuck Assembly, 1500/1700, 2″ and 3″ plates, Steel | |
| MODEL: 1500 1700 | |
| 880 | Part Number RBT-SCVK-CVS |
| DESC : 6 inch/8 inch Chuck Vacuum Solenoid | |
| MODEL: 1100 1500 1700 | |
| 881 | Part Number RBT-SCVK-CVBS |
| DESC : 108 Chuck Vacuum Bypass Solenoid | |
| MODEL: 1100 1500 1700 | |
| 882 | Part Number RBT-SCVK-CVBS-MT |
| DESC : 108 Chuck Vacuum Bypass Solenoid Mount | |
| MODEL: 1100 1500 1700 | |
| 883 | Part Number RBT-1024-548248 |
| DESC : System Driver P4 Piggyback board for Robotic Loader | |
| MODEL: 1100 1500 1700 | |
| 884 | Part Number RBT-PBB-CVS-CBL |
| DESC : Connecting cable, System driver piggyback board to Chuck Vac Solenoids | |
| MODEL: | |
| 885 | Part Number WDWEDWDEF |
| DESC : Connecting cable, System driver piggyback board to Chuck Vac Solenoids | |
| MODEL: | |
| 886 | Part Number 1032-11752 |
| DESC : 10-32 to 1/8″ hose barb-short, for chuck vacuum(pack of 10) | |
| MODEL: | |
| 887 | Part Number 1418-57631 |
| DESC : Tygon vacuum tubing | |
| MODEL: | |
| 888 | Part Number 1418-65978 |
| DESC : 4-way cross barb for 1/8″ ID hose | |
| MODEL: | |
| 889 | Part Number RBT-1024-673458 |
| DESC : IDIO Carrier board | |
| MODEL: | |
| 890 | Part Number SDSS |
| DESC : IDIO Carrier board | |
| MODEL: | |
| 891 | Part Number D-LE INTERLOCK |
| DESC : Interlock connectors for lamp power supply model D-LE | |
| MODEL: | |
| 892 | Part Number 01-15-07751 |
| DESC : Focus Actuator Assembly | |
| MODEL: 4700 Titan Saturn | |
| 893 | Part Number HYPCVR-BFL |
| DESC : Hypotenuse cover, unbent, for model 1500/1700 bigfield lens, 2 sections | |
| MODEL: 1500 1700 | |
| 894 | Part Number RBT-CHUCK-8N-6J |
| DESC : 8″ Notch / 6″ Jeida Robotic Wafer Chuck | |
| MODEL: 1500 1700 | |
| 895 | Part Number RBT-EE-8-6 |
| DESC : End Effector, 6″ and 8″ fork, Ceramic | |
| MODEL: 1100 1500 1700 | |
| 896 | Part Number 01-08-00960 |
| DESC : Conversion mounting plate for model 1500/1700 exposure shutter, blade type | |
| MODEL: 1500 1700 | |
| 897 | Part Number RFS |
| DESC : Reticle finger spring | |
| MODEL: 1100 1500 1700 | |
| 898 | Part Number 1087-987478-C |
| DESC : WAS slider, Coarse thread, used with 400 step motor | |
| MODEL: 1100 1500 1700 2700 | |
| 899 | Part Number SSP-A-D-1-N-0-D4.63 |
| DESC : Elevator Shoulder screw pulley assembly, Automation, Delrin, 1 pulley, 0.46″ diameter | |
| MODEL: 1000 1100 1500 1700 990 | |
| 900 | Part Number 2505-000048-3 |
| DESC : Tensioning Spring for theta stage, 3″ Length | |
| MODEL: 1100 1500 1700 | |
| 901 | Part Number 2505-000048-36 |
| DESC : Tensioning Spring for theta stage, 3.6″ Length | |
| MODEL: 1100 1500 1700 | |
| 902 | Part Number 10737L |
| DESC : 3 axis laser interferometer | |
| MODEL: 6700 Titan Saturn | |
| 903 | Part Number 1041-3201 |
| DESC : Backplane board for cardcage | |
| MODEL: 1000 1100 1500 1700 990 | |
| 904 | Part Number 1041A |
| DESC : Complete card cage | |
| MODEL: 1000 1100 1500 1700 990 | |
| 905 | Part Number 0563-700463 |
| DESC : Exposure Detector Board | |
| MODEL: 1500 1700 | |
| 906 | Part Number MVS-1500-1700 |
| DESC : Halogen Bulb Socket for MVS | |
| MODEL: 1500 1700 | |
| 907 | Part Number RBT-EE-SCREWS |
| DESC : Mounting screws for End Effector clamp | |
| MODEL: 1500 1700 | |
| 908 | Part Number RBT-BATT |
| DESC : 12vdc 2.5AH SLA battery | |
| MODEL: | |
| 909 | Part Number RBT-ILK |
| DESC : Cassette door interlock key | |
| MODEL: 1500 1700 | |
| 910 | Part Number 1004-421600 |
| DESC : Lamp Adapter, knurled know w/ 8/32 stud | |
| MODEL: 1500 1700 | |
| 911 | Part Number RBT-CXCY-WFR |
| DESC : 6 inch notched wafer | |
| MODEL: | |
| 912 | Part Number RBT-6IN-WCT |
| DESC : 6 inch wafer centering tool | |
| MODEL: | |
| 913 | Part Number RBT-SORTER |
| DESC : Wafer Sorter software upgrade for Robotic Loader | |
| MODEL: 1000 1100 1500 1700 | |
| 914 | Part Number SP-S-D-2-N-4 |
| DESC : Standoff Pulley assembly, Automation, Delrin, 2 pulley, 0.4″ standoff | |
| MODEL: 1000 1100 1500 1700 | |
| 915 | Part Number WAS-10X |
| DESC : 10 Eyepiece for WAS scope | |
| MODEL: 1000 1100 1500 1700 | |
| 916 | Part Number EML-TP-5-6 |
| DESC : Enhanced Multi-Manual Loader Top Plate, 5″ + 6″ slots | |
| MODEL: 1000 1100 1500 1700 990 | |
| 917 | Part Number 58-08-04682-18 |
| DESC : Multiconnector assembly, 1/8″ | |
| MODEL: 1500 1700 | |
| 918 | Part Number 58-08-04682-14 |
| DESC : Multiconnector assembly, 1/4″ | |
| MODEL: 1500 1700 | |
| 919 | Part Number EML-TP-4OC-6OC |
| DESC : Enhanced Multi-Manual Loader Top Plate, 4″ Oblong Chuck + 6″ Oblong Chuck | |
| MODEL: 1000 1100 1500 1700 990 | |
| 920 | Part Number 01-08-01720-04 |
| DESC : Chuck, 6 inch, Oblong aluminum, 1.0″ (25.4mm) mounting hole pattern, | |
| MODEL: 1000 1100 1500 1700 990 | |
| 921 | Part Number 0606-100004 |
| DESC : CxCy tool for 4″ round chuck ( specify W[1], Semi or Jeida wafer) | |
| MODEL: 1500 1700 | |
| 922 | Part Number 01-08-03694-06-NO |
| DESC : Chuck, 6 inch, Oblong Megafrosty, stainless steel, No OAT | |
| MODEL: 1000 1100 1500 1700 990 | |
| 923 | Part Number SETSCREW-PULLEY-440 |
| DESC : 3/32 x 4/40 set screw for automation autoloader pulleys | |
| MODEL: 1000 1100 1500 1700 990 | |
| 924 | Part Number 1056-596300-F |
| DESC : Reticle Finger shaft, screw type with flag | |
| MODEL: 1000 1100 1500 1700 990 | |
| 925 | Part Number RBT-LME-102-S1 |
| DESC : Patlite assy for Robot | |
| MODEL: 1100 1500 1700 | |
| 926 | Part Number DD |
| DESC : Patlite assy for Robot | |
| MODEL: | |
| 927 | Part Number 10780B |
| DESC : Laser Receiver, Hewlett Packard | |
| MODEL: 1000 1100 1500 1700 990 | |
| 928 | Part Number 10780A |
| DESC : Laser Receiver, Hewlett Packard | |
| MODEL: 1000 1100 1500 1700 990 | |
| 929 | Part Number 0556-954128 |
| DESC : Loader Elevator Drive Gear | |
| MODEL: 1000 1100 1500 1700 | |
| 930 | Part Number 01-08-SAP-2-4-6 |
| DESC : Chuck, 2″, 4″, 6″, for sapphire | |
| MODEL: Saturn | |
| 931 | Part Number 01-08-00586 |
| DESC : Field Aperture assy for model 1500/1700 | |
| MODEL: 1500 1700 | |
| 932 | Part Number 01-08-00585 |
| DESC : Prism Cooler for Field Aperture assy, model 1500/1700 | |
| MODEL: 1500 1700 | |
| 933 | Part Number 01-08-02205-04 |
| DESC : Chuck, 4 inch Round Megafrosty, Aluminum, Large hole pattern | |
| MODEL: | |
| 934 | Part Number RBT-TBLREF |
| DESC : L bracket for table height and rock gap | |
| MODEL: | |
| 935 | Part Number 01-08-00962-06-NS |
| DESC : Chuck, 6 inch, Oblong Megafrosty, aluminum, 1″ Mt Hole, No frosty strip | |
| MODEL: 1000 1100 1500 1700 990 | |
| 936 | Part Number 0586-701362-5X5 |
| DESC : Reticle slider assembly (bfl), 5×5 reticle | |
| MODEL: 1500 1700 2700 | |
| 937 | Part Number SE-000041 |
| DESC : Connector, Theta Limit Switch Assy, 2 female plugs | |
| MODEL: 1000 | |
| 938 | Part Number SE-000042 |
| DESC : Connector, Theta Limit Switch Assy, 1 Male 1 Female | |
| MODEL: 1000 | |
| 939 | Part Number RBT-EE-8-6-14A |
| DESC : End Effector, 6″ and 8″ fork, Ceramic, 1 vac port per fork, per drawing | |
| MODEL: 1100 1500 1700 | |
| 940 | Part Number LRS-53-24 |
| DESC : -24VDC power supply, 6.5 amps | |
| MODEL: 1000 1100 1500 1700 990 | |
| 941 | Part Number LRS-53-5 |
| DESC : 5 VDC power supply, 25 amps | |
| MODEL: 1000 1100 1500 1700 990 | |
| 942 | Part Number 0586-701363 |
| DESC : Reticle slider assembly Saturn | |
| MODEL: 1500 1700 2700 | |
| 943 | Part Number 01-08-00998-24 |
| DESC : Voice coil electronic theta stage for 1100/1500/1700 steppers. For repair, WTC and Popup theta stages may incur additional charges | |
| MODEL: 1100 1500 1700 | |
| 944 | Part Number 0556-688200 |
| DESC : Upper Alignment Cable to Optical Edge Switch board | |
| MODEL: 1100 1500 1700 | |
| 945 | Part Number 0556-688300 |
| DESC : Alignment Cable, Combined, from Alignment board to CRT, OESB | |
| MODEL: 1100 1500 1700 | |
| 946 | Part Number 6001-001601 |
| DESC : Extended power cable for 332/362 computers | |
| MODEL: 1000 1100 1500 1700 | |
| 947 | Part Number HPIB-EXTENDED |
| DESC : Extended HPIB cable for steppers with computers on carts | |
| MODEL: 1000 1100 1500 1700 | |
| 948 | Part Number 0556-688300 |
| DESC : CRT XYZ Extension cable for steppers with monitor installed in cart outside of stepper | |
| MODEL: | |
| 949 | Part Number TEK-620EXT |
| DESC : Extension 20v power cable for TEK-620 monitor ( for CRT mounted on cart) | |
| MODEL: | |
| 950 | Part Number 34-08-00500 |
| DESC : HP362 SCSI cable for Hard/Floppy disk | |
| MODEL: | |
| 951 | Part Number PUC-SPACER |
| DESC : Popup chuck spacer | |
| MODEL: 1100 1500 1700 | |
| 952 | Part Number 0566-700402 |
| DESC : Upper Illuminator cable, P2E, P2F, P2G | |
| MODEL: 1500 1700 | |
| 953 | Part Number 0556-642000 |
| DESC : Lower Servo Cable, P3 | |
| MODEL: 1100 1500 1700 | |
| 954 | Part Number 0556-688100 |
| DESC : Lower Alignment Cable to Alignment Controller Board | |
| MODEL: 1100 1500 1700 | |
| 955 | Part Number DC-CONTROLLER |
| DESC : Rotary controller for Digital Camera System | |
| MODEL: 1100 1500 1700 | |
| 956 | Part Number LIS-71-15 |
| DESC : Lambda Regulated power supply, +15vdc, 5Amps | |
| MODEL: Saturn | |
| 957 | Part Number FILTER.001UM |
| DESC : Chase filter for feeding 1500/1700 stepper | |
| MODEL: | |
| 958 | Part Number TEFTEC 0.1-10P3V |
| DESC : 10″ Teftec filter 0.1um for chase air to stepper | |
| MODEL: 1000 1100 1500 1700 990 | |
| 959 | Part Number ICS-10-D-1-N-6-V |
| DESC : 316SS Universal single cartridge housing | |
| MODEL: | |
| 960 | Part Number LP-1500-30X18 |
| DESC : Light pipe assy for 1500, Homoginizer, 30×18 field size | |
| MODEL: 1000 1500 990 | |
| 961 | Part Number DCS-1500 |
| DESC : Digital Camera System for model 1100/1500/1700 | |
| MODEL: 1100 1500 1700 | |
| 962 | Part Number 01-08-03694-06-RO |
| DESC : Chuck, 6 inch, Oblong Megafrosty, stainless steel, Right OAT, Customer provides strip | |
| MODEL: 1000 1100 1500 1700 990 Titan | |
| 963 | Part Number 01-08-00962-06-RO |
| DESC : Chuck, 6 inch, Oblong Megafrosty, aluminum, 1″ Mt Hole, Right OAT, Customer provides strip | |
| MODEL: 1000 1100 1500 1700 990 | |
| 964 | Part Number UTS-TP-3RJ-4OJ |
| DESC : Multimanual loader topplate, 3″ round/ 4″ oblong Jeida Wafers | |
| MODEL: 1000 1100 1500 1700 990 | |
| 965 | Part Number UTS-TP-3RS-4OS |
| DESC : Multimanual loader topplate, 3″ round/ 4″ oblong SEMI wafers | |
| MODEL: 1000 1100 1500 1700 990 | |
| 966 | Part Number RBT-COMPUTER |
| DESC : Robot Computer, tested and preconfigured | |
| MODEL: 1100 1500 1700 | |
| 967 | Part Number 04-18-02827-C |
| DESC : Assy, 2000/3000 Exposure shutter, converted from 0564-700237 model | |
| MODEL: 4700 6700 Titan Saturn | |
| 968 | Part Number WAS-MICROMETER-X |
| DESC : X axis micrometer for WAS microscope | |
| MODEL: 1100 1500 1700 2700 4700 | |
| 969 | Part Number A241L-DUAL-MVS-CABLE |
| DESC : Fiber optics cable, 5′ length | |
| MODEL: | |
| 970 | Part Number RBT-PREALIGNER-LPA58-3 |
| DESC : Prealigner, Logosol LPA58-3, Configured and tested for Stepper Equipment Robotic loader | |
| MODEL: | |
| 971 | Part Number 2522-110204-3125 |
| DESC : Theta Motor Coupling , model 1100, 1500, 1700, OEM ID ..3125″ x .250″, OD 0.787″, L=1.0″ | |
| MODEL: 1100 1500 1700 | |
| 972 | Part Number DC-PZA12 |
| DESC : Motorized Linear Actuator for Digital Camera System | |
| MODEL: 1100 1500 1700 | |
| 973 | Part Number DC-PZC200 |
| DESC : Motion Controller, Handheld | |
| MODEL: 1100 1500 1700 | |
| 974 | Part Number 380-EPROM-U3-B4 |
| DESC : OEM eprom for M380 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 975 | Part Number 380-EPROM-U4-B4 |
| DESC : OEM eprom for M380 | |
| MODEL: 1000 1100 1500 1700 990 | |
| 976 | Part Number LASERTAB |
| DESC : Laser alignment tab | |
| MODEL: 1000 1100 1500 1700 990 | |
| 977 | Part Number RBT-PRE-VAC-VALVE |
| DESC : Vacuum Solenoid for prealigner | |
| MODEL: 1100 1500 1700 | |
| 978 | Part Number 01-08-01720-09 |
| DESC : Chuck, 6 inch, Oblong aluminum, 0.6″ hole pattern | |
| MODEL: 1000 1100 1500 1700 990 | |
| 979 | Part Number DCS-FL50 |
| DESC : 50mm Focal Length plano convex lens for Digital Camera System | |
| MODEL: 1100 1500 1700 | |
| 980 | Part Number HA-UPR500E-LE |
| DESC : Lamp Power Supply, model HA500-E-LE | |
| MODEL: 1000 1100 1500 1700 990 | |
| 981 | Part Number A1473-66530 |
| DESC : LAN card for HP362 computer | |
| MODEL: 1000 1100 1500 1700 | |
| 982 | Part Number HP_9122C |
| DESC : High Density double disk drive | |
| MODEL: 1100 1500 1700 | |
| 983 | Part Number 362-CF-HD |
| DESC : Compact Flash based hard disk for HP362, 1 gig, SCSI interface | |
| MODEL: 1000 1100 1500 1700 | |
| 984 | Part Number 362-CF-FD |
| DESC : Compact Flash based floppy disk for HP362, SCSI interface, High Density Floppy. CF card removable | |
| MODEL: 1000 1100 1500 1700 | |
| 985 | Part Number BM-1517 |
| DESC : Damping Air Bag, 6.00″ Mount Hole Spacing | |
| MODEL: 1000 1100 1500 1700 | |
| 986 | Part Number 01-08-01165 |
| DESC : Reticle Finger assembly Rev D | |
| MODEL: 1000 1100 1500 1700 | |
| 987 | Part Number A241P-L |
| DESC : Fiber-Lite, A-241P + A241L, 150 Watt Power Supply with housing for MVS | |
| MODEL: 4700 6700 Titan Saturn | |
| 988 | Part Number 0559-700325-H |
| DESC : Autouniformity Cable mounting hardware | |
| MODEL: 1100 1500 1700 | |
| 989 | Part Number HA-08-01165 |
| DESC : Reticle finger Height Adjuster(01-08-01165) | |
| MODEL: 1000 1100 1500 1700 | |
| 990 | Part Number 1004-847521 |
| DESC : Threaded sleeve, Automation cassette plate leadscrew | |
| MODEL: 1000 1100 1500 1700 | |
| 991 | Part Number 1026-5169021 |
| DESC : Reticle Finger Arm, Rev D | |
| MODEL: 1000 1100 1500 1700 990 | |
| 992 | Part Number 0556-687601 |
| DESC : PMT / WAS 400 step stepper motor, Double Shaft. | |
| MODEL: 1000 1100 1500 1700 990 | |
| 993 | Part Number 1026-516900 |
| DESC : Reticle finger airpot holder | |
| MODEL: 1000 1100 990 | |
| 994 | Part Number HP-982ZAQ16-3.5 |
| DESC : HP 9826 Computer, includes GPIO board, HPL board, 3.5″ DSDD floppy drive | |
| MODEL: 1000 1100 990 | |
| 995 | Part Number 01-08-00998-24-PU |
| DESC : Voice coil electronic Pop-up theta stage for 1500/1700 steppers | |
| MODEL: 1100 1500 1700 | |
| 996 | Part Number 01-08-00201 |
| DESC : Reticle clamp piston | |
| MODEL: | |
| 997 | Part Number CABLE-AA-INT |
| DESC : Automation loader 20 pin interface cable | |
| MODEL: | |
| 998 | Part Number 1087-987478-F |
| DESC : WAS slider, Fine thread, used with 200 step motor | |
| MODEL: 1100 1500 1700 2700 | |
| 999 | Part Number HA040-4E1 |
| DESC : Humphery Air Valve, 28-100 psi | |
| MODEL: 4700 6700 Titan Saturn | |
| 1000 | Part Number A040E1 |
| DESC : Koganei Air Valve, 22W, 100pa | |
| MODEL: | |
| 1001 | Part Number NZSE2-T1 |
| DESC : SMC Vacuum Switch, 12/24vdc, -30hg | |
| MODEL: | |
| 1002 | Part Number HA040-4E2 |
| DESC : Humphery Air Valve, 28-100 psi | |
| MODEL: 4700 6700 Titan Saturn |
ID-OEM-1-2 SS10634W202404
