Description
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR
Model: TYTAN 4600 ATMOSPHERIC PLCVD, TYTAN MINI SERIES for diffusion, oxidation and LPCVD applications
- Atmospheric Wet Oxidations
- Flash vaporizer oxidation
- Pyrogenic oxidation
- Deionized water bubbler oxidation
- Atmospheric Dry Oxidation
- Silicon Nitride LPCVD
- Stoichiometric silicon nitride LPCVD
- Low-stress silicon nitride LPCVD
- Silicon Oxy Nitride LPCVD
- Polysilicon LPCVD
- Silane
- Disilane
- P-Doped Polysilicon LPCVD
- Low Temperature Oxide LPCVD
- P-Doped Low Temperature Oxide LPCVD (PSG)
- B/P-Doped Low Temperature Oxide LPCVD (BPSG)
- TEOS Oxide LPCVD
- High Temperature Oxide LPCVD
- Semi Insulating Polysilicon LPCVD
- Silicon Carbide LPCVD
- Silicon Germanium LPCVD
- Epitaxial Silicon LPCVD
- Atmospheric Anneal
- Carbon Nano Tube
- Carbon Nanowire
- Graphene
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