TYTAN 4600 Layout

A typical TYTAN system is comprised of three main modules: Load Station  with Control Systems, Heater Section, GAS/ VACUUM/ EXHAUST HANDLING, CONTROL & DATA COLLECTION SYSTEMS etc.

• Load Station:
  • The furnace heater cabinet contains heater canisters, heater power modules and a forced air-to-water heat exchanger. Heater canisters can be selected to match the desired wafer size and are designed for optimum recovery performance. Heater power modules are designed for adequate heater power, ease of maintenance and replacement. The heater cabinet also contains the over-temperature sensors with independent power supplies for alarm and shut down in the event of excess temperature conditions. Radiation heat shields are provided to protect sensitive components in the gas/source cabinet. The thermal plug design yields radial and lateral temperature uniformity of better than ±0.5 °C throughout the temperature flat zone. Although the system is operated at much lower temperatures, we use this number for the required power capacity for a 4-stack system. The actual power consumption for wafer processing typically remains at about 50 to 60 % the maximum required power capacity. TYTAN systems outperform in energy efficiency thanks to its unique design features.
    • Flat zone length: 18″
    • Temperature uniformity: ±0:5 °C
    • Power exchanger: forced air to cooling water
    • Maximum power consumption per tube: 10.2 kVA at 1100 °C
    • Thermocouple R-type
    • TCU temperature resolution: ±0.1 °C
    • Temperature accuracy:
      • ±0:5 °C for 300 – 1300 °C
    • Temperature range: 300 – 1300 °C
    • Closed-tube cool down rates:
      • 13 °C/min for 1300-1100 °C
      • 8 °C/min for 1100-900 °C
      • 5 °C/min for 900-700 °C
      • 3 °C/min for 700-500 °C
    • Recovery time at 450 °C: 30 min
    • Temperature stabilization time at full load:
      • 20 min at 450 °C
      • 15 min at 1,000 °C
• Heater Section  :
  • The load station can be equipped with HEPA vertical or horizontal laminar flow units. The cantilever, non-contact wafer loader, is driven by a vibration-free variable speed motor. The short heater guarantees minimum deflection for wafer loads up to high temperature. Stainless steel scavengers are installed for the safe disposal of exhaust process gases.
    • Laminar flow: vertical or horizontal
    • Cleaniness: Class 10 or better
    • Wafer loading/unloading: Cantilever
    • Boat loader drive:
      • Motor type: DC
      • Drive speed: 1″ to 25″/min (25 to 625 mm/min)
      • Drive resolution: 0:04″ or 1 mm
• GAS/VACUUM/EXHAUST HANDLING  :
  • In a TYTAN system, each stack is individually supported by a Gas/Vacuum/Exhaust handling system designated to the stack. In other words, failure of a stack will never interfere with the processes being performed in other stacks.
  • The source cabinet contains all gas controls and distribution manifolds. Vacuum pumps may be installed in the source cabinet or on separate pump stands at the customer’s option. Two different size source pump cabinets are available.
  • Shut off valves are incorporated into each gas line and gas panel. Point of use filters are installed for all process gases. Pumps of different capacities and makes are available.
    • MFC Type : MKS, Horiba, Brooks or Customer Specified
    • Bellows or diaphragm valves : Nupro (Swagelok) or equivalent
    • Gas control method : MFS 460 closed loop microprocessor control
    • Gas monitor : MFS 460 Electronic controller, tolerance bands and alarms
    • Tubing : S.S. 316L Ra 7 uin. finish or better, orbital welds
    • Leak rate : < 10-9 cm3 He/s
    • Membrane filters : 0.003 um at gas manifold and point of use
    • Toxic gas line purging : N2
    • Safety interlocks : EPROM based
  • The TYTAN gas panel comprises gas flow controllers that permit precise control, mixing, and blending of gases. Modular construction and compact design of the gas control system in connection with an advanced microprocessor-aided control provide for a stable and reliable production environment. The microprocessor-aided control allows for either manual or automatic control from a remote PC compatible controller unit. The safety interlocks, flow rates, tolerance bands, ratio control of gas mixtures, constant total gas flow of gas mixtures, variable gas flow as a function of temperature, and pressure can be all pre-programmed. The gas pipings are fabricated in a clean room environment using only pre-cleaned components with internally micro-polished, wetted, 316 L stainless steel tubings. VCR fittings and tubing are orbitally welded to ensure the ultimate gas purity, low particulate generation, and minimal maintenance requirements. Positive gas flow shut-off is accomplished with reliable pneumatic bellows sealed valves. Gas systems are Helium leak tested to 10-9 cm3/min. Prior to shipment, systems are purged with nitrogen and all gas connections are sealed
• CONTROL & DATA COLLECTION SYSTEMS
  • The TYTAN furnace control systems have been refined over the past few years to a high degree of perfection as a result of our pioneering efforts in  furnace control. Temperature sensing inside the process tube, adaptive temperature control algorithm, integration of gas controls, pressure control, timing and sequencing, and wafer loading/unloading have led to one of the most advanced control systems for furnace processing. All operator controls are placed in a control console including the FCS 10/30 Tube computer to the MFS-460 electronic gas controller, the temperature control unit (TCU) and the boat loader electronic controls.
  • Tube Controller : The FCS 10/30 Tube computer is the most advanced Tystar tube controller. It provides a programmable sequence and timing control of all system components. It communicates with other furnace control systems via RS 232 communication link. The FCS 10/30 permits communication with a host computer through a node controller and is completely compatible with the SEMI SECS I & II protocols. Menu driven recipe generation, editing and operation can be performed either at the tube level or from a remote terminal.
  • Temperature Control Unit : TCU is a microprocessor-driven closed loop control system, and uses an adaptive control algorithm to seek conditions for optimum recovery and steady state control. The TCU control parameters can be varied over a wide range. TCU accommodates different heater types, such as high temperature or low thermal mass heaters. TCU permits temperature control to the resolution of ±0.1 °C.
  • Gas Controllers : Tystar’s electronic gas controller, MFS 460, provides precise control and mixing of process gases used in the semiconductor manufacturing industry. Combined with a vaporizor, it can also control vapor flow rates and carrier gas flows of liquid source materials. The gas panels use compact, modular designs and are fabricated from 316 stainless steel with orbitally-welded joints and connections. They are leak tested to 10-8cm3/s with helium. MFS 460 provides safety interlocks and other critical gas control features. MFS 460 activates and controls up to 6 independent gas flow loops with individual mass flow controllers. For LPCVD systems, this unit performs system purge, leak check, and reactor chamber pressure read out. MFS 460 allows for both manual and automatic gas flow control. For automatic control, it can be interfaced with Tystar’s FCS 10. Gas interlocks, error bands, flow fault indication, gas flow ranges and gas combinations are configured in an EPROM definition file. The EPROM definition file can be modified by Tystar at any time later. The MFS 460 controller provides user programmable soft-start on any gas loop, self diagnostics with display of the fault condition, battery back up and gas or vapor flow totalizing.
  • Data Collection System: Tystar expanded TYTAN control software capability by adding the DCS-30 software package for supervisory control, automatic tube selection, and complete continuous data capture. The DCS 30 data capture collects all temperature, pressure, flow and boat loader data and displays them graphically for any heater zone or gas flow you choose. The system uses a (stand alone or networked) PC connected to the FCS 10/30 controller to collect data. The DCS 30 is geared toward a manufacturing environment and is meant to give information on furnace behavior on a run to run basis.
  • Other Control Related Units : Each TYTAN system comes with a number of other control and instrumental functions. Some of them are standard while the others are optional. A special pressure control system is incorporated for excellent wafer uniformities. CAL Star 400 Mass Flow Calibrator is a portable, secondary standard calibrator for all commercially available mass flow controllers and meters with better than one percent accuracy. It offers quick and easy calibration of mass flow devices. Standard flow ranges are up to 10 SLPM (Standard Liters Per Minute). Higher flow ranges are available. A Windows-based data collection software is also available. The Tystar MFC Tester is an inexpensive, light-weight, hand-held tester for mass flow devices. It’s compatible with all commercially available mass flow devices and displays set points, flow rates and control voltages to an accuracy of 0.02 %.