Description
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR
Model: TYTAN 4600 ATMOSPHERIC PLCVD, TYTAN MINI SERIES for diffusion, oxidation and LPCVD applications
Specifications {TYSTAR GUARANTEED PROCESS SPECIFICATIONS}:
- Maximum number of tubes 4
- Number of heat zones 3
- Flat zone 18″ (457 mm)
- Wafer size: round 6″ (150 mm)
- Wafer Thickness: For standard wafers, For non-standards, please contact us.
- Process temperature up to:
- 1150 C for non-contact boat loaders
- 1300 C with SiC internal components
- Wafer/boat handling
- boat/tube transfer fully automatic
- loading/unloading/transfer/stocker fully automatic (optional)
- Wafer Load capacity
- 100 wafers per tube for atmospheric processes
- 50 wafers per tube for low pressure processes
- System Dimensions (WxDxH):
- without footings and blower module 127″ x 30″ x 82″ (3.23 mx 0.76 mx 2.08 m )
- footings add 2” to the height.
- blower module adds 18” to the height.
- Estimated weights
- Load station: 1,200 lbs (544 kg)
- Heater section: 2,400 lbs (or 1,088 kg)
- Gas cabinet: 900 lbs (or 408 kg)
The trademarks of the equipment and parts contained on this page belong to the Original Equipment Manufacturers.
