Description
Please contact us for the availability of the Trion Technology Oracle Plasma Etch 200mm used Semiconductor Equipment.
| Manufacturer | Trion Technology |
| Model | Oracle |
| Wafer Size Range |  |
| Minimum | 50 mm |
| Maximum | 200 mm |
| Set Size | 200 mm |
| Number of Chambers | 1 |
| Process Capabilities | Oxide Etch |
| Chamber 1 Description | RIE Dielectric Etch Phantom III RIE Reactor |
| Controller Type | PC Controller Type |
| Elevator Type | Brooks Automation VCE 6 |
| Process Gases | CF4, CHF3, Ar, O2 |
The items are subject to prior sale without notice. These items are only for end users.
SS5732
