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Tegal Spare Parts

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Please contact us for the availability for the following Tegal Spare Parts. They are subject to prior sale without notice. Appreciate your time!

[Pls use “CTRL+F  “key button to search the model/key word you are interested in. If you can not find your wanted part, you can also check on our Ebay Store at the link here.]

The items are subject to prior sale without notice. These items are only for end users.

PN Location QTY Unit Price (USD$)
20-001-043 TGL-3-11 1 $25.00
29-146-001 TGL-3-11 8 $55.00
30-070-002 TGL-3-11 2 $55.00
30-096-001 TGL-3-11 1 $18.00
30-096-003 TGL-3-11 1 $18.00
30-131-002 TGL-3-11 1 $18.00
30-231-001 TGL-3-11 1 $18.00
30-235-003 TGL-3-11 1 $18.00
30-251-001 TGL-3-11 3 $35.00
31-001-001 TGL-4-11 1 $45.00
31-002-001 TGL-4-11 4 $45.00
31-165-001 TGL-4-11 2 $680.00
31-232-001 TGL-4-11 4 $450.00
31-277-001 TGL-4-11 1 $45.00
31-319-001 TGL-4-11 1 $299.00
31-362-001 TGL-4-11 1 $245.00
33-027-002 TGL-4-11 1 $125.00
33-028-001 TGL-4-11 1 $65.00
33-041-002 TGL-4-11 1 $115.00
33-104-001 TGL-4-11 1 $1,450.00
33-167-004 TGL-5-11 11 $35.00
33-212-001 TGL-5-11 1 $45.00
33-333-004 TGL-5-11 3 $380.00
33-337-001 TGL-5-11 1 $550.00
33-342-001 TGL-5-11 1 $95.00
38-019-001 TGL-5-11 10 $25.00
38-020-001 TGL-5-11 1 $45.00
39-021-001 TGL-6-7 2 $15.00
39-028-001 TGL-6-7 1 $15.00
39-113-003 TGL-6-7 9 $12.00
39-115-001 TGL-6-7 4 $5.00
39-142-002 TGL-6-7 8 $15.00
39-256-001 TGL-6-7 1 $15.00
39-340-002 TGL-7-7 10 $12.00
39-350-002 TGL-8-7 22 $12.00
39-352-100 TGL-8-7 8 $22.00
39-360-002 TGL-8-7 4 $35.00
39-376-001 TGL-8-7 40 $1.00
39-379-001 TGL-8-7 10 $15.00
39-409-001 TGL-8-7 10 $25.00
39-420-002 TGL-8-7 20 $15.00
39-424-001 TGL-8-7 0 N/A
39-428-001 TGL-8-7 3 $12.00
39-429-001 TGL-9-7 2 $12.00
39-436-001 TGL-9-7 3 $12.00
39-437-001 TGL-9-7 2 $12.00
39-443-001 TGL-9-7 3 $12.00
39-450-001 TGL-9-7 9 $12.00
39-459-003 TGL-9-7 3 $65.00
39-524-001 TGL-9-7 3 $12.00
39-533-001 TGL-9-7 5 $12.00
39-561-001 TGL-9-7 5 $16.00
39-563-001 TGL-9-7 7 $12.00
39-707-001 TGL-8-8 8 $12.00
39-710-001 TGL-8-8 10 $12.00
39-711-001 TGL-8-8 4 $12.00
39-717-001 TGL-8-8 40 $12.00
39-725-001 TGL-8-8 1 $25.00
39-726-001 TGL-8-8 1 $25.00
40-003-001 TGL-1-6 2 $12.00
40-242-001 TGL-2-6 1 $25.00
40-256-001 TGL-2-6 1 $25.00
40-283-04M TGL-2-6 1 $380.00
40-286-001 TGL-2-6 3 $3.00
40-287-001 TGL-2-6 1 $8.00
40-289-001 TGL-2-6 3 $380.00
40-290-001 TGL-2-6 6 $8.00
40-294-003 TGL-2-6 0 N/A
40-309-001 TGL-2-6 8 $12.00
40-349-001 TGL-2-6 11 $12.00
40-366-001 TGL-2-6 3 $18.00
40-374-003 TGL-2-6 19 $25.00
40-374-004 TGL-3-6 30 $29.00
40-392-001 TGL-4-6 1 $25.00
40-395-001U TGL-4-6 2 $380.00
40-425-001 TGL-4-6 3 $25.00
40-425-002 TGL-4-6 2 $25.00
40-516-006 TGL-4-6 1 $450.00
40-730-001 TGL-4-6 3 $5.00
40-731-001 TGL-4-6 3 $5.00
40-926-001 TGL-4-6 98 $12.00
41-037-001 TGL-4-6 4 $5.00
41-046-001 TGL-4-6 3 $25.00
41-047-002 TGL-4-6 4 $12.00
41-098-001 TGL-4-6 1 $15.00
41-103-001 TGL-4-6 5 $25.00
41-112-001 TGL-4-6 15 $20.00
41-115-001 TGL-4-6 5 $5.00
41-118-001 TGL-4-6 20 $4.00
41-118-002 TGL-4-6 8 $4.00
41-118-003 TGL-4-6 4 $4.00
41-127-001 TGL-4-6 5 $12.00
41-136-003 TGL-5-6 10 $25.00
41-136-004 TGL-5-6 10 $25.00
41-137-001 TGL-5-6 14 $12.00
41-172-001 TGL-5-6 5 $8.00
41-176-001 TGL-5-6 6 $8.00
41-177-001 TGL-5-6 4 $15.00
41-189-001 TGL-5-6 11 $5.00
41-206-001 TGL-5-6 12 $11.00
41-207-001 TGL-5-6 4 $12.00
42-331-002 TGL-2-5 1 $12.00
42-335-002 TGL-2-5 1 $12.00
42-346-002 TGL-2-5 12 $12.00
42-360-001 TGL-2-5 8 $9.00
42-446-001 TGL-2-5 17 $12.00
42-449-001 TGL-2-5 4 $12.00
42-454-001 TGL-2-5 2 $12.00
42-456-002 TGL-2-5 10 $35.00
42-493-001 TGL-2-5 20 $12.00
42-501-001 TGL-2-5 10 $25.00
42-509-002 TGL-2-5 1 $15.00
42-509-003 TGL-2-5 4 $12.00
42-513-002 TGL-3-5 9 $35.00
42-532-001 TGL-3-5 18 $11.00
42-535-001 TGL-4-5 10 $12.00
42-553-001 TGL-4-5 11 $11.00
42-583-002 TGL-4-5 1 $12.00
42-663-001 TGL-4-5 6 $35.00
42-730-001 TGL-4-5 9 $25.00
42-790-001 TGL-4-5 2 $12.00
44-068-006 TGL-4-5 2 $25.00
44-290-001 TGL-4-5 8 $15.00
44-332-001 TGL-4-5 8 $25.00
44-340-001 TGL-4-5 1 $35.00
44-366-001 TGL-4-5 8 $25.00
44-369-002 TGL-4-5 1 $12.00
44-397-001 TGL-4-5 7 $8.00
44-432-002 TGL-4-5 6 $18.00
46-115-002 TGL-4-5 40 $5.00
46-272-003 TGL-4-5 3 $12.00
46-316-001 TGL-4-5 1 $35.00
46-323-001 TGL-4-5 1 $35.00
46-469-002 TGL-4-5 7 $18.00
46-475-001 TGL-5-5 9 $15.00
46-492-001 TGL-5-5 1 $12.00
46-511-001 TGL-5-5 9 $8.00
46-571-001 TGL-5-5 18 $28.00
46-577-001 TGL-5-5 1 $25.00
46-618-002 TGL-5-5 4 $9.00
49-007-001 TGL-5-5 10 $9.00
49-019-001 TGL-5-5 4 $9.00
49-020-001 TGL-5-5 20 $8.00
49-025-001 TGL-5-5 12 $12.00
49-031-001 TGL-5-5 1 $12.00
49-046-002 TGL-5-5 15 $8.00
52-045-001 TGL-2-7 1 $15.00
52-046-001 TGL-2-7 9 $15.00
52-047-002 TGL-2-7 2 $8.00
52-048-001 TGL-2-7 13 $8.00
52-054-001 TGL-2-7 6 $4.00
52-058-002 TGL-2-7 5 $8.00
52-058-006 TGL-2-7 15 $4.00
52-059-001 TGL-2-7 9 $15.00
52-060-001 TGL-2-7 9 $15.00
52-062-001 TGL-2-7 2 $4.00
52-063-001 TGL-2-7 9 $8.00
54-001-001 TGL-2-7 40 $1.00
54-001-002 TGL-2-7 40 $1.00
56-009-001 TGL-3-7 9 $11.00
56-039-001 TGL-3-7 40 $12.00
56-042-001 TGL-3-7 40 $16.00
57-028-001 TGL-3-7 2 $25.00
59-011-001 TGL-3-7 10 $12.00
80-095-001 TGL-2-2 1 $55.00
80-095-007 TGL-2-2 6 $110.00
80-095-010 TGL-2-2 1 $250.00
80-095-012 TGL-2-2 3 $250.00
80-095-017 TGL-2-2 1 $400.00
80-095-019 TGL-2-2 2 $400.00
80-095-025 TGL-2-2 8 $120.00
80-095-049 TGL-2-2 2 $168.00
80-095-057 TGL-2-2 5 $150.00
80-095-063 TGL-2-2 6 $168.00
80-095-090 TGL-2-2 1 $15.00
80-095-107 TGL-3-2 1 $499.00
80-095-108 TGL-3-2 2 $45.00
80-095-117 TGL-3-2 2 $78.00
80-095-185 TGL-3-2 2 $150.00
80-095-195 TGL-3-2 1 $499.00
80-095-196 TGL-3-2 3 $120.00
80-095-197 TGL-3-2 1 $780.00
80-095-205 TGL-3-2 6 $120.00
80-095-220 TGL-4-2 2 $150.00
80-095-255 TGL-4-2 1 $499.00
80-095-256 TGL-4-2 5 $110.00
80-101-006 TGL-4-2 1 $120.00
80-107-003 TGL-4-2 1 $1.00
80-127-022 TGL-4-2 40 $1.00
80-127-023 TGL-4-2 20 $1.00
80-127-042 TGL-4-2 20 $1.00
80-127-063 TGL-4-2 20 $1.00
80-127-101 TGL-4-2 20 $1.00
80-127-102 TGL-4-2 40 $1.00
80-127-104 TGL-4-2 40 $1.00
80-127-105 TGL-4-2 40 $1.00
80-127-122 TGL-5-2 40 $1.00
80-127-123 TGL-5-2 40 $1.00
80-127-124 TGL-5-2 40 $1.00
80-127-141 TGL-5-2 40 $1.00
80-127-142 TGL-5-2 40 $1.00
80-127-143 TGL-5-2 40 $1.00
80-127-144 TGL-5-2 40 $1.00
80-127-147 TGL-5-2 40 $1.00
80-127-161 TGL-5-2 40 $1.00
80-127-162 TGL-5-2 40 $1.00
80-127-163 TGL-5-2 40 $1.00
80-127-164 TGL-5-2 40 $1.00
80-127-167 TGL-5-2 40 $1.00
80-127-183 TGL-5-2 40 $1.00
80-127-262 TGL-5-2 40 $1.00
80-127-273 TGL-5-2 40 $1.00
80-127-321 TGL-5-2 40 $1.00
80-127-325 TGL-5-2 40 $1.00
80-127-343 TGL-5-2 40 $1.00
80-127-350 TGL-5-2 40 $1.00
80-127-361 TGL-5-2 40 $1.00
80-127-362 TGL-5-2 40 $1.00
80-127-363 TGL-5-2 40 $1.00
80-127-364 TGL-5-2 40 $1.00
80-127-367 TGL-2-3 8 $3.00
80-127-368 TGL-2-3 20 $1.00
80-127-369 TGL-2-3 14 $1.00
80-127-370 TGL-2-3 20 $1.00
80-127-371 TGL-2-3 11 $1.00
80-127-383 TGL-2-3 40 $1.00
80-127-384 TGL-2-3 40 $1.00
80-127-385 TGL-2-3 300 $1.00
80-127-386 TGL-2-3 40 $1.00
80-127-421 TGL-2-3 5 $1.00
80-127-523 TGL-2-3 40 $2.00
80-127-542 TGL-2-3 40 $1.00
80-127-561 TGL-2-3 40 $1.00
80-127-562 TGL-2-3 40 $1.00
80-127-565 TGL-2-3 60 $1.00
80-127-641 TGL-3-3 40 $1.00
80-127-642 TGL-3-3 40 $1.00
80-127-824 TGL-3-3 30 $1.00
80-127-825 TGL-3-3 40 $1.00
80-127-827 TGL-3-3 40 $1.00
80-127-828 TGL-3-3 40 $1.00
80-128-065 TGL-3-3 40 $1.00
80-128-143 TGL-3-3 40 $1.00
80-128-170 TGL-3-3 40 $1.00
80-150-011 TGL-3-3 40 $5.00
80-150-016 TGL-3-3 40 $5.00
80-150-061 TGL-3-3 40 $3.00
80-150-116 TGL-3-3 1 $1.00
80-150-131 TGL-3-3 14 $5.00
80-150-151 TGL-3-3 14 $1.00
80-150-172 TGL-4-3 3 $3.00
80-150-176 TGL-4-3 30 $1.00
80-150-184 TGL-4-3 40 $1.00
80-150-206 TGL-4-3 40 $1.00
80-150-207 TGL-4-3 40 $1.00
80-151-181 TGL-4-3 40 $1.00
80-151-185 TGL-4-3 40 $1.00
80-152-003 TGL-4-3 20 $1.00
80-152-004 TGL-4-3 20 $1.00
80-152-006 TGL-4-3 20 $1.00
80-152-008 TGL-4-3 20 $1.00
80-153-002 TGL-5-3 20 $1.00
80-153-004 TGL-5-3 20 $1.00
80-159-002 TGL-5-3 20 $1.00
80-162-001 TGL-5-3 20 $1.00
80-162-002 TGL-5-3 40 $1.00
80-162-003 TGL-5-3 40 $1.00
80-162-005 TGL-5-3 40 $1.00
80-162-006 TGL-5-3 40 $1.00
80-162-007 TGL-5-3 40 $1.00
80-163-001 TGL-5-3 40 $1.00
80-163-002 TGL-5-3 40 $1.00
80-163-003 TGL-5-3 40 $1.00
80-163-004 TGL-1-4 40 $2.00
80-163-005 TGL-1-4 40 $2.00
80-163-006 TGL-1-4 40 $3.00
80-165-002 TGL-1-4 40 $2.00
80-165-003 TGL-1-4 40 $2.00
80-165-004 TGL-1-4 40 $2.00
80-165-005 TGL-1-4 40 $2.00
80-165-008 TGL-1-4 20 $5.00
80-165-014 TGL-1-4 40 $2.00
80-165-025 TGL-1-4 30 $2.00
80-165-026 TGL-1-4 40 $2.00
80-165-027 TGL-2-4 30 $2.00
80-165-035 TGL-2-4 40 $2.00
80-165-036 TGL-2-4 30 $2.00
80-170-002 TGL-2-4 25 $4.00
80-170-003 TGL-2-4 40 $5.00
80-170-013 TGL-2-4 18 $8.00
80-170-018 TGL-2-4 30 $12.00
80-170-025 TGL-2-4 6 $15.00
80-170-028 TGL-2-4 3 $15.00
80-170-028A TGL-2-4 25 $20.00
80-170-029 TGL-2-4 10 $20.00
80-170-042 TGL-2-4 40 $12.00
80-170-043 TGL-2-4 4 $15.00
80-172-042 TGL-2-4 40 $6.00
80-172-048 TGL-3-4 40 $6.00
80-172-049 TGL-3-4 40 $6.00
80-172-050 TGL-3-4 40 $6.00
80-172-052 TGL-3-4 40 $6.00
80-172-058 TGL-3-4 40 $6.00
80-192-074 TGL-3-4 4 $25.00
80-192-112 TGL-3-4 3 $25.00
80-192-116 TGL-3-4 15 $8.00
80-192-133 TGL-3-4 1 $25.00
80-192-139 TGL-3-4 55 $3.00
80-192-153 TGL-3-4 3 $8.00
80-192-153SS TGL-3-4 40 $6.00
80-192-155 TGL-4-4 10 $9.00
80-192-159 TGL-4-4 15 $12.00
80-192-162 TGL-4-4 1 $25.00
80-192-163 TGL-4-4 2 $25.00
80-192-164 TGL-4-4 1 $25.00
80-192-165 TGL-4-4 2 $25.00
80-192-168 TGL-4-4 4 $25.00
80-192-169 TGL-5-4 20 $18.00
80-192-182 TGL-5-4 2 $18.00
80-195-031 TGL-5-4 3 $6.00
80-195-055 TGL-5-4 25 $12.00
80-195-096 TGL-5-4 20 $3.00
80-195-105 TGL-5-4 2 $6.00
80-195-111 TGL-5-4 12 $3.00
80-195-119 TGL-5-4 2 $6.00
80-195-120 TGL-5-4 1 $18.00
80-195-132 TGL-5-4 2 $35.00
80-195-133 TGL-5-4 1 $9.00
80-195-149 TGL-5-4 2 $9.00
80-195-153 TGL-3-7 16 $2.00
80-195-154 TGL-3-7 20 $1.00
80-195-156 TGL-3-7 6 $5.00
80-195-158 TGL-3-7 2 $5.00
80-195-159 TGL-3-7 13 $12.00
80-195-160 TGL-3-7 10 $25.00
80-195-161 TGL-3-7 10 $18.00
80-195-162 TGL-4-7 16 $15.00
80-195-166 TGL-4-7 9 $25.00
80-195-167 TGL-4-7 3 $25.00
80-195-168 TGL-4-7 75 $18.00
80-195-169 TGL-4-7 30 $21.00
80-195-181 TGL-4-7 23 $12.00
80-195-191 TGL-4-7 18 $3.00
80-195-199 TGL-4-7 25 $18.00
80-195-221 TGL-4-7 4 $25.00
80-195-238 TGL-4-7 16 $3.00
80-195-239 TGL-4-7 1 $15.00
80-195-259 TGL-5-7 11 $3.00
80-195-278 TGL-5-7 3 $25.00
80-195-285 TGL-5-7 25 $6.00
80-195-285SS TGL-5-7 20 $9.00
80-195-287 TGL-5-7 8 $19.00
80-195-310 TGL-5-7 35 $3.00
80-195-312 TGL-5-7 40 $3.00
80-195-316 TGL-5-7 1 $15.00
80-195-323 TGL-5-7 4 $25.00
80-195-325 TGL-5-7 5 $25.00
80-195-357 TGL-5-7 1 $12.00
80-197-001 TGL-1-8 5 $15.00
80-197-004 TGL-1-8 1 $95.00
80-197-013 TGL-1-8 2 $25.00
80-197-014 TGL-1-8 1 $95.00
80-197-032 TGL-1-8 6 $95.00
80-197-038 TGL-1-8 2 $15.00
80-197-040 TGL-1-8 1 $12.00
80-197-041 TGL-1-8 1 $50.00
80-197-046 TGL-1-8 2 $45.00
80-197-049 TGL-1-8 2 $25.00
80-198-033 TGL-1-8 1 $25.00
80-198-045 TGL-1-8 1 $555.00
80-198-055 TGL-1-8 4 $12.00
80-198-056 TGL-2-8 2 $5.00
80-198-089 TGL-2-8 2 $125.00
80-200-024 TGL-2-8 20 $2.00
80-200-040 TGL-2-8 4 $25.00
80-200-057 TGL-2-8 10 $5.00
80-200-075 TGL-2-8 1 $12.00
80-200-087 TGL-2-8 80 $2.00
80-200-104 TGL-2-8 4 $12.00
80-200-122 TGL-2-8 20 $2.00
80-200-183 TGL-2-8 20 $2.00
80-200-185 TGL-2-8 17 $5.00
80-200-187 TGL-3-8 10 $35.00
80-200-188 TGL-3-8 37 $55.00
80-200-195 TGL-3-8 18 $5.00
80-200-210 TGL-3-8 1 $2.00
80-200-275 TGL-3-8 20 $25.00
80-200-302 TGL-3-8 20 $1.00
80-200-304 TGL-4-8 5 $75.00
80-200-305 TGL-4-8 2 $8.00
80-200-344 TGL-4-8 115 $2.00
80-200-396 TGL-4-8 15 $4.00
80-200-422 TGL-4-8 2 $12.00
80-202-005 TGL-4-8 40 $5.00
80-202-010 TGL-4-8 40 $5.00
80-202-027 TGL-4-8 18 $5.00
80-202-034 TGL-4-8 40 $5.00
80-202-043 TGL-5-8 15 $5.00
80-202-046 TGL-5-8 9 $5.00
80-202-060 TGL-5-8 7 $25.00
80-202-061 TGL-5-8 20 $5.00
80-202-073 TGL-5-8 18 $5.00
80-202-083 TGL-5-8 6 $8.00
80-202-095 TGL-5-8 500 $1.00
80-202-110 TGL-5-8 20 $25.00
80-202-111 TGL-5-8 11 $5.00
80-202-112 TGL-1-9 10 $25.00
80-202-113 TGL-1-9 10 $25.00
80-202-125 TGL-1-9 9 $25.00
80-202-126 TGL-1-9 12 $18.00
80-202-127 TGL-1-9 8 $12.00
80-202-128 TGL-1-9 15 $6.00
80-202-129 TGL-1-9 14 $6.00
80-202-130 TGL-1-9 20 $6.00
80-202-131 TGL-1-9 6 $9.00
80-202-148 TGL-1-9 5 $12.00
80-202-154 TGL-1-9 25 $6.00
80-202-155 TGL-2-9 10 $25.00
80-202-156 TGL-2-9 9 $25.00
80-202-183 TGL-2-9 6 $18.00
80-202-186 TGL-2-9 20 $35.00
80-202-188 TGL-2-9 4 $18.00
80-202-190S TGL-2-9 6 $45.00
80-202-212 TGL-2-9 15 $6.00
80-202-214 TGL-2-9 12 $25.00
80-202-219 TGL-2-9 20 $6.00
80-202-227 TGL-2-9 6 $9.00
80-202-234 TGL-2-9 20 $6.00
80-202-236 TGL-2-9 4 $9.00
80-202-238 TGL-3-9 18 $6.00
80-202-239 TGL-3-9 2 $9.00
80-202-242 TGL-3-9 2 $9.00
80-202-243 TGL-3-9 2 $9.00
80-202-244 TGL-3-9 20 $18.00
80-202-246 TGL-3-9 10 $25.00
80-202-247 TGL-3-9 10 $25.00
80-202-248 TGL-3-9 10 $25.00
80-202-250 TGL-3-9 8 $25.00
80-202-252 TGL-3-9 15 $25.00
80-202-253 TGL-3-9 15 $25.00
80-202-256 TGL-3-9 15 $25.00
80-202-272 TGL-3-9 20 $6.00
80-202-274 TGL-4-9 20 $6.00
80-202-284 TGL-4-9 8 $25.00
80-202-289 TGL-4-9 10 $25.00
80-202-290 TGL-4-9 3 $25.00
80-202-291 TGL-4-9 10 $3.00
80-202-293 TGL-4-9 8 $6.00
80-202-294 TGL-4-9 8 $25.00
80-202-295 TGL-4-9 6 $25.00
80-202-296 TGL-4-9 10 $18.00
80-202-298 TGL-4-9 6 $25.00
80-202-301 TGL-4-9 5 $25.00
80-202-302 TGL-4-9 10 $18.00
80-202-312 TGL-4-9 20 $3.00
80-202-313 TGL-4-9 20 $3.00
80-202-317 TGL-5-9 8 $18.00
80-202-319 TGL-5-9 4 $18.00
80-202-321 TGL-5-9 10 $6.00
80-202-327 TGL-5-9 10 $18.00
80-202-328 TGL-5-9 2 $45.00
80-202-338 TGL-5-9 8 $18.00
80-202-341 TGL-5-9 20 $45.00
80-202-350 TGL-5-9 9 $45.00
80-202-361 TGL-5-9 2 $18.00
80-202-362 TGL-5-9 16 $1.00
80-202-367 TGL-5-9 8 $1.00
80-202-389 TGL-5-9 20 $6.00
80-202-390 TGL-5-9 20 $6.00
80-202-391 TGL-5-9 4 $9.00
80-202-392 TGL-5-9 6 $18.00
80-202-393 TGL-1-10 15 $45.00
80-202-394 TGL-1-10 2 $9.00
80-202-396 TGL-1-10 10 $18.00
80-202-397 TGL-1-10 10 $9.00
80-202-404 TGL-1-10 7 $6.00
80-202-405 TGL-1-10 6 $9.00
80-202-408 TGL-1-10 8 $9.00
80-202-410 TGL-1-10 10 $9.00
80-202-411 TGL-1-10 10 $45.00
80-202-413 TGL-1-10 10 $45.00
80-202-432 TGL-1-10 2 $45.00
80-202-434 TGL-1-10 4 $6.00
80-202-436 TGL-1-10 8 $18.00
80-202-440 TGL-1-10 3 $20.00
80-202-471 TGL-1-10 4 $25.00
80-202-494 TGL-1-10 1 $9.00
80-210-009 TGL-2-10 20 $5.00
80-300-001 TGL-2-10 11 $5.00
80-305-001 TGL-2-10 40 $5.00
80-305-002 TGL-2-10 18 $5.00
80-305-003 TGL-2-10 40 $5.00
80-305-004 TGL-2-10 30 $5.00
80-305-005 TGL-2-10 15 $5.00
80-305-011 TGL-2-10 40 $5.00
80-320-005 TGL-2-10 40 $5.00
80-320-006 TGL-2-10 10 $25.00
80-330-006 TGL-2-10 15 $5.00
80-370-008 TGL-3-10 1 $25.00
80-370-010 TGL-3-10 2 $25.00
80-380-040 TGL-3-10 15 $5.00
80-400-025 TGL-3-10 40 $5.00
80-400-042 TGL-3-10 40 $5.00
80-400-049 TGL-3-10 40 $5.00
80-400-057 TGL-3-10 40 $5.00
80-400-061 TGL-3-10 40 $5.00
80-400-063 TGL-3-10 40 $5.00
80-400-065 TGL-3-10 40 $5.00
80-400-066 TGL-3-10 40 $5.00
80-400-068 TGL-3-10 40 $5.00
80-400-073 TGL-3-10 40 $5.00
80-400-077 TGL-3-10 40 $5.00
80-400-084 TGL-3-10 40 $5.00
80-400-090 TGL-4-10 40 $5.00
80-400-091 TGL-4-10 40 $5.00
80-400-092 TGL-4-10 40 $5.00
80-400-096 TGL-4-10 40 $5.00
80-400-097 TGL-4-10 40 $5.00
80-400-099 TGL-4-10 40 $5.00
80-401-006 TGL-4-10 40 $5.00
80-401-008 TGL-4-10 40 $5.00
80-401-014 TGL-4-10 40 $5.00
80-401-017 TGL-4-10 40 $5.00
80-402-042 TGL-4-10 40 $5.00
80-402-044 TGL-4-10 40 $5.00
80-402-049 TGL-4-10 40 $5.00
80-402-073 TGL-4-10 40 $5.00
80-405-015 TGL-4-10 40 $5.00
80-415-006 TGL-5-10 40 $5.00
80-415-007 TGL-5-10 40 $5.00
80-415-008 TGL-5-10 40 $5.00
80-415-009 TGL-5-10 40 $5.00
80-415-012 TGL-5-10 40 $5.00
80-415-013 TGL-5-10 40 $5.00
80-415-014 TGL-5-10 40 $5.00
80-415-018 TGL-5-10 40 $5.00
80-415-021 TGL-5-10 40 $5.00
80-415-026 TGL-5-10 40 $5.00
80-415-028 TGL-5-10 40 $5.00
80-415-034 TGL-5-10 40 $5.00
80-415-035 TGL-5-10 40 $5.00
80-415-036 TGL-5-10 40 $5.00
80-450-021 TGL-5-10 40 $5.00
80-450-030 TGL-5-10 40 $5.00
80-500-002 TGL-6-3 8 $5.00
80-500-008 TGL-6-3 2 $12.00
80-505-001 TGL-6-3 1 $15.00
80-510-001 TGL-6-3 40 $1.00
80-510-013 TGL-6-3 40 $1.00
80-510-015 TGL-6-3 20 $1.00
80-510-016 TGL-6-3 8 $5.00
80-510-023 TGL-6-3 40 $1.00
80-520-001 TGL-6-3 40 $1.00
80-520-014 TGL-6-3 40 $1.00
80-520-013 TGL-6-3 40 $1.00
80-520-015 TGL-6-3 40 $1.00
80-520-023 TGL-6-3 40 $1.00
80-530-001 TGL-6-3 40 $1.00
80-530-012 TGL-6-3 40 $1.00
80-530-018 TGL-7-3 40 $1.00
80-530-023 TGL-7-3 40 $1.00
80-530-032 TGL-7-3 40 $1.00
80-530-036 TGL-7-3 40 $1.00
80-530-061 TGL-7-3 40 $1.00
80-530-064 TGL-7-3 40 $1.00
80-530-079 TGL-7-3 40 $1.00
80-530-080 TGL-7-3 40 $1.00
80-530-087 TGL-7-3 40 $1.00
80-530-090 TGL-7-3 40 $1.00
80-530-093 TGL-7-3 40 $1.00
80-530-105 TGL-7-3 1 $5.00
80-530-106 TGL-7-3 25 $1.00
80-530-109 TGL-7-3 1 $5.00
80-530-113 TGL-7-3 3 $5.00
80-530-128 TGL-7-3 8 $5.00
80-530-131 TGL-7-3 66 $1.00
80-530-133 TGL-8-3 15 $2.00
80-530-135 TGL-8-3 15 $2.00
80-530-137 TGL-8-3 15 $2.00
80-530-162 TGL-8-3 15 $2.00
80-530-174 TGL-8-3 15 $2.00
80-561-011 TGL-8-3 3 $25.00
80-620-006 TGL-8-3 12 $1.00
80-620-021 TGL-8-3 9 $1.00
80-620-024 TGL-8-3 9 $2.00
80-640-018 TGL-8-3 40 $1.00
80-640-019 TGL-8-3 5 $1.00
80-645-003 TGL-8-3 1 $6.00
80-645-011 TGL-8-3 2 $45.00
80-645-014 TGL-8-3 1 $45.00
80-645-021 TGL-8-3 2 $45.00
80-650-001 TGL-8-3 9 $35.00
80-650-029 TGL-6-4 3 $15.00
80-650-030 TGL-6-4 7 $25.00
80-650-031 TGL-6-4 4 $15.00
80-650-036 TGL-6-4 1 $45.00
80-650-047 TGL-6-4 11 $5.00
80-650-053 TGL-6-4 4 $25.00
80-660-012 TGL-6-4 10 $125.00
80-670-018 TGL-6-4 10 $5.00
80-671-006 TGL-6-4 1 $25.00
80-671-007 TGL-6-4 2 $12.00
80-671-012 TGL-6-4 2 $12.00
80-671-034 TGL-7-4 2 $12.00
80-671-056 TGL-7-4 1 $12.00
80-671-057 TGL-7-4 2 $12.00
80-671-058 TGL-7-4 10 $12.00
80-671-059 TGL-7-4 11 $25.00
80-671-064 TGL-7-4 6 $2.00
80-671-065 TGL-7-4 6 $2.00
80-671-066 TGL-7-4 7 $2.00
80-671-066G TGL-7-4 12 $2.00
80-671-067 TGL-7-4 2 $12.00
80-671-068 TGL-7-4 6 $6.00
80-671-069 TGL-7-4 12 $3.00
80-671-070 TGL-8-4 3 $6.00
80-671-071 TGL-8-4 9 $6.00
80-671-072 TGL-8-4 2 $6.00
80-678-004 TGL-8-4 23 $6.00
80-678-011 TGL-8-4 6 $5.00
80-678-013 TGL-8-4 2 $125.00
80-678-029 TGL-8-4 1 $125.00
80-679-001 TGL-8-4 8 $5.00
80-679-012 TGL-8-4 4 $5.00
80-680-028 TGL-8-4 4 $25.00
80-680-021 TGL-8-4 30 $15.00
80-680-032 TGL-8-4 3 $35.00
80-680-040 TGL-8-4 6 $6.00
80-680-056U TGL-6-5 3 $15.00
80-680-095 TGL-6-5 2 $25.00
80-680-100 TGL-6-5 12 $15.00
80-680-144 TGL-6-5 3 $75.00
80-680-163 TGL-6-5 18 $75.00
80-700-009 TGL-6-5 10 $6.00
80-700-010 TGL-6-5 7 $15.00
80-700-012 TGL-6-5 10 $55.00
80-700-046 TGL-6-5 40 $1.00
80-700-124 TGL-6-5 2 $5.00
80-700-125 TGL-6-5 18 $1.00
80-700-127 TGL-6-5 40 $1.00
80-700-128 TGL-6-5 40 $1.00
80-700-131 TGL-7-5 40 $1.00
80-700-132 TGL-7-5 40 $1.00
80-700-133 TGL-7-5 11 $1.00
80-700-143 TGL-7-5 1 $1.00
80-700-144 TGL-7-5 20 $1.00
80-700-146 TGL-7-5 13 $1.00
80-700-150 TGL-7-5 30 $1.00
80-700-153 TGL-7-5 30 $1.00
80-700-154 TGL-7-5 18 $1.00
80-700-155 TGL-7-5 20 $1.00
80-700-156 TGL-7-5 30 $1.00
80-700-160 TGL-7-5 1 $5.00
80-700-161 TGL-8-5 20 $1.00
80-700-162 TGL-8-5 15 $1.00
80-700-163 TGL-8-5 20 $1.00
80-700-164 TGL-8-5 15 $1.00
80-700-166 TGL-8-5 30 $1.00
80-700-167 TGL-8-5 20 $1.00
80-700-172 TGL-8-5 23 $1.00
80-700-174 TGL-8-5 50 $1.00
80-700-177 TGL-8-5 40 $1.00
80-700-178 TGL-8-5 40 $1.00
80-700-180 TGL-8-5 40 $1.00
80-700-185 TGL-8-5 3 $5.00
80-700-186 TGL-8-5 40 $1.00
80-700-188 TGL-6-6 24 $1.00
80-700-198 TGL-6-6 40 $1.00
80-700-199 TGL-6-6 40 $1.00
80-700-201 TGL-6-6 10 $2.00
80-700-203 TGL-6-6 40 $1.00
80-700-205 TGL-6-6 12 $1.00
80-700-206 TGL-6-6 10 $1.00
80-700-214 TGL-6-6 15 $1.00
80-700-215 TGL-6-6 35 $1.00
80-700-218 TGL-6-6 19 $1.00
80-700-219 TGL-6-6 40 $1.00
80-700-220 TGL-6-6 30 $1.00
80-700-221 TGL-7-6 4 $2.00
80-700-222 TGL-7-6 30 $1.00
80-700-230 TGL-7-6 40 $1.00
80-700-231 TGL-7-6 40 $1.00
80-700-236 TGL-7-6 20 $1.00
80-700-250 TGL-7-6 20 $1.00
80-700-254 TGL-7-6 12 $1.00
80-700-259 TGL-7-6 40 $1.00
80-700-259A TGL-7-6 25 $1.00
80-700-261 TGL-7-6 40 $1.00
80-700-265 TGL-7-6 40 $1.00
80-700-292 TGL-7-6 20 $1.00
80-700-293 TGL-8-6 12 $1.00
80-700-294 TGL-8-6 30 $1.00
80-700-358 TGL-8-6 15 $1.00
80-700-359 TGL-8-6 20 $1.00
80-700-418 TGL-8-6 40 $1.00
80-700-419 TGL-8-6 30 $1.00
80-700-585 TGL-8-6 3 $1.00
80-750-038 TGL-8-6 40 $1.00
80-753-001 TGL-8-6 100 $1.00
80-753-004 TGL-8-6 40 $1.00
80-753-064 TGL-8-6 40 $1.00
80-780-001 TGL-8-6 12 $1.00
80-812-040 TGL-8-6 13 $45.00
80-888-062 TGL-8-6 8 $75.00
81-006-010 TGL-1-11 1 $499.00
81-006-012 TGL-1-11 1 $499.00
81-006-024 TGL-1-11 1 $499.00
81-006-031 TGL-1-11 1 $499.00
81-007-015 TGL-1-11 10 $5.00
81-007-063 TGL-1-11 1 $45.00
81-007-099 TGL-1-11 3 $95.00
81-007-107 TGL-1-11 5 $18.00
81-007-137 TGL-1-11 7 $25.00
81-007-138 TGL-1-11 1 $25.00
81-007-145 TGL-1-11 3 $9.00
81-007-146 TGL-1-11 3 $25.00
81-101-014 TGL-1-11 1 $5.00
81-101-017 TGL-2-11 2 $5.00
81-101-018 TGL-2-11 2 $5.00
81-105-207 TGL-2-11 12 $9.00
81-105-209 TGL-2-11 1 $45.00
81-105-217 TGL-2-11 1 $45.00
81-105-227 TGL-2-11 3 $15.00
81-105-232 TGL-2-11 6 $15.00
81-105-235 TGL-2-11 3 $12.00
81-200-021 TGL-2-11 1 $45.00
81-200-022 TGL-2-11 1 $45.00
81-200-056 TGL-2-11 2 $5.00
83-002-001 TGL-1-12 1 $35.00
83-003-001 TGL-1-12 1 $35.00
83-004-002 TGL-1-12 1 $3.00
83-011-007 TGL-1-12 2 $6.00
83-042-001 TGL-1-12 2 $125.00
83-084-001 TGL-1-12 2 $6.00
83-096-001 TGL-1-12 1 $125.00
83-124-001 TGL-1-12 3 $18.00
83-161-001 TGL-1-12 1 $12.00
83-176-001 TGL-1-12 20 $1.00
83-176-002 TGL-1-12 8 $1.00
83-176-003 TGL-1-12 12 $1.00
83-176-004 TGL-1-12 6 $1.00
83-176-005 TGL-2-12 8 $1.00
83-178-001 TGL-2-12 6 $1.00
93-027-003 TGL-3-12 2 $45.00
93-028-001 TGL-3-12 1 $45.00
93-033-005 TGL-3-12 1 $45.00
93-033-006 TGL-3-12 40 $35.00
93-044-001 TGL-3-12 2 $3.00
93-118-002 TGL-3-12 3 $45.00
93-137-002 TGL-3-12 4 $45.00
93-219-001 TGL-3-12 3 $5.00
93-220-001 TGL-3-12 1 $25.00
93-498-002 TGL-3-12 5 $45.00
93-523-003 TGL-3-12 1 $12.00
94-020-001 TGL-4-12 1 $5.00
94-131-003 TGL-4-12 5 $12.00
94-144-002 TGL-5-12 1 $5.00
94-144-002A TGL-5-12 30 $1.00
94-176-001 TGL-5-12 13 $1.00
94-212-001 TGL-5-12 1 $5.00
94-316-001 TGL-5-12 4 $25.00
94-450-001 TGL-5-12 4 $5.00
98-019-001 TGL-5-12 8 $25.00
98-125-008 TGL-5-12 50 $25.00
98-172-003 TGL-5-12 300 $25.00
98-203-001 TGL-5-12 40 $25.00
98-209-001 TGL-5-12 120 $25.00
98-223-002 TGL-5-12 40 $25.00
98-224-001 TGL-5-12 15 $25.00
98-246-001 TGL-5-12 40 $25.00
98-247-002 TGL-5-12 40 $25.00
98-309-001 TGL-5-12 40 $25.00
1 03601-22-040 Display Assy For Tegal 901e Tegal 903e Plasma Etcher DU-2-6/5-001
2 064-0002 Ceramic Ring, 4″, for Tegal 901e Tegal 903e Plasma Etcher
3 065-0008 1/4 hose barb valve in line,coupling insert for Tegal 901e Tegal 903e
4 0990-95026 Vacuum Switch for Matrix 105 Plasma Asher Descum
5 0992-30034 Coil, RF Output Inductor for Matrix 105 Plasma Asher Descum
6 0992-40375 Electrode, Full Mesh Ground for Matrix 105 Plasma Asher Descum
7 0992-60126 Chuck ceramic ring for Matrix 105 Plasma Asher Descum
8 0992-60135 Ceramic Pin for Matrix 105 Plasma Asher Descum
9 0992-60147 Quartz Chamber for Matrix 105 Plasma Asher Descum
10 0992-60253-1 Baffle for Matrix 105 Plasma Asher Descum
11 0992-70284 Clamp, Quartz Chamber for Matrix 105 Plasma Asher Descum
12 0994-30034 #10 Nylon Washer for Matrix 105 Plasma Asher Descum
13 0994-60005 O-ring for Matrix 105 Plasma Asher Descum
14 0994-60006 O-ring for Matrix 105 Plasma Asher Descum
15 0994-60007 O-ring for Matrix 105 Plasma Asher Descum
16 0994-60050 O-ring for Matrix 105 Plasma Asher Descum
17 0994-60063 O-ring for Matrix 105 Plasma Asher Descum
18 0995-16521 Valve,Clippard,24V LP,Door/Pin for Matrix 105 Plasma Asher Descum
19 0995-16527 Clippard Valve for Matrix 105 Plasma Asher Descum
20 0995-99788 Adjustable Band Clamp, Matrix for Matrix 105 Plasma Asher Descum
21 1116-40601 Tegal 1513e Assembly Lower Electrode Spare Part
22 1E-011 Tegal Spare Part, Bellow
23 2100-0007-1000-002 AW-Etch-1000-002 PCB AWM-E-5-2-008
24 28F6518F ASM28F6519 28F6520 PCB DS-4-11-003
25 31-233-006 Assy., Loader Spatula for Tegal 901e Tegal 903e Plasma Etcher
26 33-295-001 A Tegal Spare Part
27 39-535-003 Tegal Spare Part
28 39-562-001 Tegal Spare Part
29 39-732-001 Collar Pin for Tegal 9013 903e Plasma etcher
30 39-793-001 Tegal Top Electrode Raines Technologies
31 40-215-001 Tegal Spare Part
32 40-297-001 Quartz Pin for Tegal 903e Tegal 901e
33 40-297-002 Quartz Pin, for Tegal 901e Tegal 903e Plasma Etcher
34 40-329-002 Tegal Spare Part
35 40-375-001 PAD ISOLATION for Tegal 9013 903e Plasma etcher
36 50-056-001 SCREW LEAD ELEV for Tegal 9013 903e Plasma etcher
37 50590-01 ISS 1 SN 18026 TEGAL PCB
38 50590-01 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-6-001
39 50590-01 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-7-001
40 50590-01 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-8-001
41 56-042-001 NUT ELEV for Tegal 901e Tegal 903e Plasma Etcher
42 690-5349-002 W/ 690-8048-002 Pneumatic Controller , Tegal DS-5-13-001
43 74LS 160A Or 74LS160A 5.22 , Original For TEGAL 901e Tegal 903e Tegal Equipm
44 80-080-054 CYLINDER DBL-PVT MT 10S, 1-1/16B,Tegal 901e Tegal 903e Plasma Etcher
45 80-080-062 Pneu Spring, EAA Tegal 901e Tegal 903e Plasma Etcher
46 80-080-065 Cylinder for Tegal 901e Tegal 903e Plasma Etcher
47 80-080-072 Cylinder for Tegal 901e 903e Plasma etcher
48 80-095-137 D PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-4-5-002
49 80-095-256 Pin Lifter Fiber Optic Cable Tegal Spare Part
50 80-095-278 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-6-2-003
51 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-4-4-002
52 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-4-6-001
53 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-4-6-002
54 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-4-7-001
55 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-4-8-001
56 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-4-9-001
57 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-6-1-001
58 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-6-1-002
59 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-6-1-003
60 80-095-278 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-6-2-001
61 80-095-278 Rev 10 RW Tegal 901e Tegal 903e Main Control Board PCB AWM-G-5-1-001
62 80-095-278 RW 3Tegal 901e Tegal 903e Main Control Board PCB AWM-G-5-1-004
63 80-095-278 RW 3Tegal 901e Tegal 903e Main Control Board PCB AWM-G-5-1-005
64 80-095-278 RW B Tegal 901e Tegal 903e Main Control Board PCB AWM-G-5-1-003
65 80-095-278 RW Tegal 901e Tegal 903e Main Control Board PCB Tegal Spare Parts
66 80-095-278 RW Tegal 901e Tegal 903e Main Control Board PCB Tegal Spare Parts
67 80-095-278 Tegal 901e Tegal 903e Main Control Board PCB AWM-G-5-1-002
68 80-095-278 Tegal 901e Tegal 903e Main Control Board PCB AWM-G-5-1-005
69 80-095-278 Tegal 901e Tegal 903e Main Control Board PCB AWM-G-5-1-006
70 80-095-278 Tegal 901e Tegal 903e Main Control Board PCB Profacture AWM-G-5-3-001
71 80-095-278 Tegal 901e Tegal 903e Main Control Board PCB Profacture AWM-G-5-3-002
72 80-095-278 Tegal 901e Tegal 903e Main Control Board PCB Profacture AWM-G-5-3-003
73 80-095-278RW PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-6-2-002
74 80-095-278RW PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DT-6-3-001
75 80-095-794 UPC,N2,225SCCM ,Tegal 901e Tegal 903e Plasma Etcher
76 80-197-013 VALVE TGL 3WAY-TAC2 NC BRS for Tegal 901e Tegal 903e Plasma Etcher
77 80-198-054 Valve, EVO-3M-24 for Tegal 901e Tegal 903e Plasma Etcher
78 80-200-121 BBRG FLG DSHLD 1/4B for Tegal 901e Tegal 903e Plasma Etcher
79 80-200-127 Bearing for Tegal 901e Tegal 903e Plasma Etcher
80 80-200-144 Bushing Ball, 3/8B for Tegal 901e Tegal 903e Plasma Etcher
81 80-200-340 RING EXT 1/4SFT .025THK SST for Tegal 901e 903e Plasma etcher
82 80-200-342 Band Cont Fem 125pin for Tegal 901e 903e Plasma etcher
83 80-202-291 Tegal Spare Part
84 80-202-327 Tegal Spare Part
85 80-202-357 O RIng for Tegal 903e Tegal 901e
86 81-007-138 Bellow for Tegal equipment
87 83-096-001 VAC Valve VCR FTG, 180degree,Tegal 901e Tegal 903e Plasma Etcher
88 83-096-002 VAC Valve VCR FTG, 90 degree,Tegal 901e Tegal 903e Plasma Etcher
89 93-229-005B RF Cable, to chuck, 24″ , for Tegal 901e Tegal 903e Plasma Etcher
90 94-287-002 Tegal 1513e Switch , Differential Spare Part
91 99-046-001 MEC-1 TEGAL PCB 98-046-001 REV A
92 99-046-602 REV C MEC-2 TEGAL PCB 98-046-001 REV C
93 99-103-001 REV E LMB-1 TEGAL PCB 98-103-001 REV A
94 99-104-001 LMC-1 TEGAL PCB 98-104-001
95 99-106-001 REV D ATS-1 TEGAL PCB 98-106-001 REV B
96 99-111-001, AST-1, TEGAL PCB
97 99-114-001 REV B MMC-1 TEGAL PCB 98-114-001 REV A
98 99-118-001 REV B RFL-1TEGAL PCB 98-118-001 REV 1 A
99 99-121-001 REV B TEGAL PCB 98-121-001 REV A
100 99-125-004 REV D FPI-4 TEGAL PCB 98-125-002 REV A
101 99-125-004 REV G FPI-4 TEGAL PCB 98-125-004 REV B
102 99-125-004 Tegal 901e Tegal 903e PCB AWM-G-5-1-010
103 99-125-008 REV C FPI-8TEGAL PCB 98-125-008 REV B
104 99-126-003 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-13-002
105 99-126-003 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-14-001
106 99-126-003 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-1-002
107 99-126-003B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-1-001
108 99-126-005 D PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-17-001
109 99-126-005 E W/ 99-206-001 D PCB For Tegal 901e Tegal 903e Plasma DS-5-5-001
110 99-126-005 J PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-5-002
111 99-126-005 P W/ 99-206-001 D PCB For Tegal 901e Tegal 903e Plasma DS-5-4-002
112 99-126-005 PCB For Tegal 901e Tegal 903e DS-2-3-001
113 99-126-005 PCB For Tegal 901e Tegal 903e DS-2-3-002
114 99-126-005 PCB Tegal 901e Tegal 903e AWM-G-5-3-008
115 99-126-006 F PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-17-002
116 99-126-006 G PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-15-002
117 99-126-006 G PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-16-001
118 99-126-006 PCB Tegal 901e Tegal 903e AWM-G-5-3-009
119 99-128-002 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-9-001
120 99-128-002 TEGAL PCB 98-128-002 REV 4
121 99-128-002B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-6-001
122 99-128-003 REV E ISR-3 TEGAL PCB 98-128-003 REV 1
123 99-129-003 PCB For Tegal 901e Tegal 903e DS-2-4-001
124 99-129-003 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-5-001
125 99-129-003 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-5-002
126 99-129-004 ? PCB For Tegal 901e Tegal 903e DS-2-2-001
127 99-129-004 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-10-002
128 99-129-004 REV F SHI-4 Tegal PCB 98-129-004 REV A
129 99-138-001 A PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-10-001
130 99-138-001 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-11-001
131 99-138-001 Tegal 901e Tegal 903e PCB AWM-G-5-1-008
132 99-138-001 TEGAL PCB 98-138-001 REV 2
133 99-138-002 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-6-001
134 99-138-004 C PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-8-001
135 99-138-004 F PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-9-003
136 99-138-004 Tegal PCB 98-138-004
137 99-139-001B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-9-002
138 99-139-001B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-2-002
139 99-139-002B PCB For Tegal 901e Tegal 903e Plasma Etcher DU-2-7-002
140 99-139-002B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-1-002
141 99-142-001 Tegal PCB 98-142-001
142 99-165-003 A PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-6-003
143 99-165-003 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-5-003
144 99-165-003 F PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-7-003
145 99-172 Tegal PCB 98-172-001 REV A
146 99-172 Tegal PCB 98-172-001 REV2
147 99-172-001 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-8-002
148 99-172-001 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-9-001
149 99-172-001 REV S IMN-1 98-172-001 REV A, Tegal 901e, Tegal 903e
150 99-172-002 , IMN-3 ,Tegal PCB ,98-172-001
151 99-172-002 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-7-002
152 99-172-002 Tegal 901e Tegal 903e AWM-G-5-3-007
153 99-172-003 , IMN-3 ,Tegal PCB ,98-172-003
154 99-172-003 REV F IMN-3 98-172-003 REV B, Tegal 901e, Tegal 903e
155 99-172-003 Tegal 901e Tegal 903e AWM-G-5-3-006
156 99-173-002B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-4-003
157 99-173-002B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-1-003
158 99-173-003 Tegal PCB
159 99-173-004 D PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-14-002
160 99-173-004 D PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-3-002
161 99-173-004 D PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-4-001
162 99-173-004 PCB For Tegal 901e Tegal 903e Plasma Etcher DU-2-7-003
163 99-173-004 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-5-002
164 99-173-004 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-5-003
165 99-173-004 REV D RFG-4 Tegal PCB 98-173-003 REV B
166 99-173-004 Tegal PCB 98-173-003
167 99-173-005 A PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-15-001
168 99-173-005 A PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-2-001
169 99-173-005 REV A RFG-5 Tegal PCB 98-173-005 REVA
170 99-173-005B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-9-003
171 99-173-008 C PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-6-002
172 99-173-008 C PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-7-002
173 99-173-008 C PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-8-002
174 99-173-008 C PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-6-002
175 99-173-008 Tegal 901e Tegal 903e PCB AWM-G-5-1-007
176 99-173-008/c Tegal 901e Tegal 903e PCB AWM-G-5-1-009
177 99-181-001 B EPD-1PCB Tegal 901e Tegal 903e Item CD 1010 ? AWM-G-5-3-005
178 99-181-002 D EPD-0 PCB Tegal 901e Tegal 903e Item CD 1010 ? AWM-G-5-3-004
179 99-181-002 PCB For Tegal 901e 903e Plasma Etcher Etching DS-5-9-002
180 99-181-002 REV L EPD-2 Tegal PCB ENDPOINT DETECTOR
181 99-181-005B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-8-002
182 99-186-001 REV 2A ATT-1 and 98-186-001 Tegal PCB
183 99-186-002 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-1-001
184 99-186-002B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-4-004
185 99-187-001B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-4-002
186 99-187-002 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-12-001
187 99-187-002 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-13-001
188 99-187-002 REV A ATO-2 and 98-187-002 REV 1 Tegal PCB
189 99-187-002B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-2-003
190 99-190-002 REV A PMF-2 and 98-190-002 REV A Tegal PCB
191 99-195-003 Tegal 1513e PCB, Switch Assembly Spare Part
192 99-196-001 6 ATI-2 and 98-196-001 REV 2 Tegal PCB
193 99-196-001 J and 98-196-001 REV C Tegal PCB
194 99-196-002 P ATI-2 and 98-196-001 REV C Tegal PCB
195 99-196-002 P ATI-2 and 98-196-001 REV E Tegal PCB
196 99-196-002 PCB For Tegal 901e Tegal 903e DS-2-5-001
197 99-196-002 PCB For Tegal 901e Tegal 903e DS-2-5-002
198 99-196-002 REV E ATI-2 and 98-196-001 REV B Tegal PCB
199 99-196-002 REV K ATI-2 and 98-196-001 REV C Tegal PCB
200 99-196-002 REV W ATI-2 and 98-196-001 REV C Tegal PCB
201 99-196-002 REV W ATI-2 and 98-196-001 REV F Tegal PCB
202 99-197-001 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-11-001
203 99-200-001 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-3-002
204 99-200-001 REV 4 SIS-1 PCB TEGAL 98-200-001 REV 2 (1).JPG
205 99-200-001B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-2-002
206 99-200-001B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-5-001
207 99-200-003 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-10-002
208 99-200-003 PCB For Tegal 901e Tegal 903e DS-2-1-001
209 99-200-003 PCB For Tegal 901e Tegal 903e DS-2-2-002
210 99-200-003 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-2-7-001
211 99-200-003 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-2-001
212 99-200-003 REV B SIS-3 PCB TEGAL 98-200-002 REV 1 Tegal
213 99-200-003 REV C SIS-3 PCB TEGAL 98-200-002 REV 1 Tegal
214 99-200-003B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-6-002
215 99-200-003B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-7-001
216 99-200-003B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-2-001
217 99-200-004 REV C SIS-4 PCB TEGAL 98-200-001 REV 2
218 99-200-005 A PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-3-001
219 99-200-005 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-1-001
220 99-200-005 PCB For Tegal 901e Tegal 903e DS-2-1-002
221 99-200-005 PCB For Tegal 901e Tegal 903e DS-2-4-002
222 99-200-005 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-2-6-001
223 99-200-005 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-2-6-002
224 99-200-005 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-2-7-002
225 99-200-005 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-3-001
226 99-200-005 REV B SIS-5 PCB TEGAL 98-200-002 REV 1
227 99-200-005 REV E SIS-5 PCB TEGAL 98-200-002 REV 1
228 99-200-005 REV G SIS-5 PCB TEGAL 98-200-002 REV 1
229 99-200-005 REV H SIS-5 PCB TEGAL 98-200-002 REV 1
230 99-200-005 REV H SIS-5 PCB TEGAL 98-200-002 REV A
231 99-200-005 REV J SIS-5 PCB TEGAL 98-200-002 REV A
232 99-200-005B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-7-002
233 99-200-005B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-8-001
234 99-206–001 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DU-2-8-002
235 99-206-001 D PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-11-002
236 99-207-004 A PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DU-2-9-002
237 99-207-004 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-16-002
238 99-207-004 REV A MBE-4 PCB TEGAL 98-207-004 REV A Tegal
239 99-207-004 REV C MBE-4 PCB TEGAL 98-207-004 REV B Tegal
240 99-209-001 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-11-002
241 99-209-001 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-12-002
242 99-209-001 REV C PCB ADM-1 TEGAL 98-209-001 REV A , Tegal 901e, Tegal 903e
243 99-209-001 REV E PCB ADM-1 TEGAL 98-209-001 REV A , Tegal 901e, Tegal 903e
244 99-209-001 REV F PCB ADM-1 TEGAL 98-209-001 REV 1 , Tegal 901e, Tegal 903e
245 99-209-001 REV F PCB ADM-1 TEGAL 98-209-001 REV A, Tegal 901e, Tegal 903e
246 99-209-001B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-4-001
247 99-209-001B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-3-9-001
248 99-214-002 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-10-001
249 99-214-002 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-9-002
250 99-214-002 REV 5 PCB TEGAL 98-214-002 REV 2 , Tegal 901e, Tegal 903e
251 99-214-003 REV A PCB TEGAL 98-214-002 REV A , Tegal 901e, Tegal 903e
252 99-214-003 REV C PCB TEGAL 98-214-002 REV A , Tegal 901e, Tegal 903e
253 99-214-003 REV G PCB TEGAL 98-214-002 REV 2, Tegal 901e, Tegal 903e
254 99-214-003 REV H PCB TEGAL 98-214-002 REV C , Tegal 901e, Tegal 903e
255 99-246-003 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-8-003
256 99-247-002 B PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-4-001
257 99-247-002 D PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-3-001
258 99-247-002 D PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-3-002
259 99-247-002 K PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-2-002
260 99-247-002 M ? PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-1-002
261 99-247-002 M PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-4-002
262 99-278-004 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-4-10-003
263 99-287-001 REV C SST 98-287-001 REV A, TEGAL CORP , Tegal 901e, Tegal 903e
264 99-287-003 PCB For Tegal 901e Tegal 903e Plasma Etcher Etching DS-5-7-001
265 99-309-001 Rev B OSI-1 98-309-001 Rev A 42-730-001 Rev B 93-318-001 Tegal
266 AC Power Supply AC Service Item CE 1004-001001, Tegal 901e 903e Etcher DQ-5-010
267 AC Power Supply AC Service Item CE 1004-00402 , Tegal 901e 903e Etcher DQ-5-005
268 AC Power Supply AC Service Item CE 1004-00402, Tegal 901e 903e Etcher DQ-5-007
269 AC Power Supply AC Service Item CE 1004-00402, Tegal 901e 903e Etcher DQ-5-008
270 AC Power Supply AC Service Item CE 1004-00901 , Tegal 901e 903e Etcher DQ-5-006
271 AC Power Supply AC Service Item CE 1004-00901, Tegal 901e 903e Etcher DQ-5-009
272 AC Service CF 1004 For Tegal 901e 903e AWD-D-3-2-12
273 AD2020 406 , Original For TEGAL 901e Tegal 903e Tegal Etcher
274 AD7541JN 8719, Original For TEGAL 901e Tegal 903e Tegal Etcher
275 Am27128DC 8411LPP AMD , Original For TEGAL 901e Tegal 903e Tegal Etcher
276 Bay-Tec 80-055-437 For Tegal? ID-AWS-K-2-002
277 C9-344-AW Upper Electrode for Tegal 901e 903e Plasma etcher
278 CD 1011-00301 Display W/ 99-125-004 , 03601-22-040 Tegal 901e 903e DS-5-15-001
279 CD 1011-00303 Display W/ 99-125-008, 03601-22-040 Tegal 901e 903e DT-5-2-001
280 CD 1049-00100 Display W/ 99-126-003 , 03601-22-040 Tegal 901e 903e DS-5-17-001
281 CD 1049-00102 Display W/ 99-125-003 ,Tegal 901e 903e DT-5-3001
282 CD 1049-00102 Display W/ 99-126-003 D, 03601-22-040 Tegal 901e 903e DS-5-12-001
283 CD1151-00102 /99-249-002 PCB For Tegal 901e Tegal 903e Plasma Etcher DT-4-3-001
284 CD1151-00102 /99-249-002 PCB For Tegal 901e Tegal 903e Plasma Etcher DT-4-4-001
285 CD1151-00102 /99-249-002 PCB For Tegal 901e Tegal 903e Plasma Etcher DU-2-7-001
286 CD1151-00102 /99-249-002 PCB For Tegal 901e Tegal 903e Plasma Etcher DU-2-8-001
287 CD1151-00102 /99-249-002 PCB For Tegal 901e Tegal 903e Plasma Etcher DU-2-9-001
288 CD1151-00102 W/ 99-249-002 For Tegal 901e Tegal 903e Plasma Etcher DT-5-1-001
289 CD1151-00102? 99-249-002 PCB For Tegal 901e Tegal 903e Plasma Etcher DT-4-1-001
290 CD1151-00102? 99-249-002 PCB For Tegal 901e Tegal 903e Plasma Etcher DT-4-2-001
291 CD1151-00201 /99-249-002 PCB For Tegal 901e Tegal 903e Plasma Etcher DT-4-5-001
292 CE1004-00901 Power Supply. for Tegal 901e Tegal 903e Plasma Etcher
293 Control Panel For Tegal 901e Tegal 903e Plasma Etcher Etching DT-6-10-001
294 CW1003-W00137 Wafer Transfer W/99-247-002 PCB For Tegal 901e 903e DQ-1-008
295 CW1078 W00262 Wafer Transfer W/99-200-006 PCB For Tegal 901e 903e DQ-1-004
296 CW1078-40401 Wafer Transfer W/99-274-003 PCB For Tegal 901e 903e DQ-1-006
297 CW1078-40401 Wafer Transfer W/99-274-003 PCB For Tegal 901e 903e DQ-1-007
298 CW1078-40401 Wafer Transfer W/99-275-003 PCB For Tegal 901e 903e DQ-1-005
299 CW1078-60401 Spatula Drive, Module 6” for Tegal 901e Tegal 903e Plasma Etcher
300 CW1105-00202 Carriage Assy. for Tegal 901e Tegal 903e Plasma Etcher
301 DC Power Supply Item CEL 1005-00202 For Tegal 901e 903e DQ-1-010
302 DC Power Supply Item CEL 1005-00202 For Tegal 901e 903e DQ-1-012
303 DC Power Supply Item CEL 1005-00302 For Tegal 901e 903e DQ-1-011
304 DC Power Supply Item CEL1005-00101 For Tegal 901e 903e DQ-1-009
305 DC Power Supply Item CEL1005-00202RW For Tegal 901e 903e DQ-013
306 Digital Monitor VT420 For Tegal 901e 903e AWG-1-3-002
307 Display 99-125-004 ,EEE FLIP 03601-22-040 ?Tegal 901e 903e Etcher DQ-5-015
308 Display 99-125-008, EEE FLIP 03601-22-040 ?Tegal 901e 903e Etcher DQ-5-014
309 Display 99-125-008, EEE FLIP 03601-22-040 Tegal 901e 903e Etcher DQ-5-012
310 Display 99-125-008, EEE FLIP 03601-22A-040 Tegal 901e 903e Etcher DQ-5-013
311 Display Item CD 1011 -00301 With 99-125-004 /008 Tegal PCB AWM-G-5-1-011
312 ENDPT DET CD1151-00102 & Display 99-125-008,Tegal 901e 903e Etcher DQ-5-011
313 For Tegal 901e Tegal 903e ? Gas Line ID-AWS-032-002
314 For Tegal 901e Tegal 903e ? Gas Line ID-AWS-032-003
315 For Tegal Equipment PN 80-041-000 Spring
316 For Tegal Equipment PN 80-041-001 Graphite Control 10548338
317 For Tegal Equipment PN 80-041-003 Graphite Controls 10548312
318 For Tegal Equipment PN TGL-42-100-001
319 For Tegal Equipment PN TGL-42-185-003
320 For Tegal Equipment PN TGL-42-271-005
321 For Tegal Equipment PN TGL-42-281-001
322 For Tegal Equipment PN TGL-42-282-002
323 For Tegal Equipment PN TGL-42-282-003
324 For Tegal Equipment PN TGL-42-285-002
325 For Tegal Equipment PN TGL-42-293-001
326 For Tegal Equipment PN TGL-42-307-001
327 For Tegal Equipment PN TGL-42-328-002
328 For Tegal Equipment PN TGL-80-055-048
329 For Tegal Equipment PN TGL-80-080-028
330 For Tegal Equipment PN TGL-80-080-029
331 For Tegal Equipment PN TGL-80-080-031
332 For Tegal Equipment PN TGL-80-080-036
333 For Tegal Equipment PN TGL-80-080-038
334 For Tegal Equipment PN TGL-80-080-041
335 For Tegal Equipment PN TGL-80-080-054
336 For Tegal Equipment PN TGL-80-080-085
337 For Tegal Equipment PN TGL-80-080-093
338 For Tegal Equipment PN TGL-80-127-167
339 For Tegal Equipment PN TGL-80-127-183
340 For Tegal Equipment PN TGL-80-127-262
341 For Tegal Equipment PN TGL-80-127-273
342 For Tegal Equipment PN TGL-80-127-321
343 For Tegal Equipment PN TGL-80-127-325
344 For Tegal Equipment PN TGL-80-127-343
345 For Tegal Equipment PN TGL-80-127-350
346 For Tegal Equipment PN TGL-80-127-361
347 For Tegal Equipment PN TGL-80-127-362
348 For Tegal Equipment PN TGL-80-127-363
349 For Tegal Equipment PN TGL-80-127-364
350 For Tegal Equipment PN TGL-80-127-365
351 For Tegal Equipment PN TGL-80-127-366
352 For Tegal Equipment PN TGL-80-163-004
353 For Tegal Equipment PN TGL-80-163-005
354 For Tegal Equipment PN TGL-80-163-006
355 For Tegal Equipment PN TGL-80-165-002
356 For Tegal Equipment PN TGL-80-165-003
357 For Tegal Equipment PN TGL-80-165-004
358 For Tegal Equipment PN TGL-80-165-005
359 For Tegal Equipment PN TGL-80-165-008
360 For Tegal Equipment PN TGL-80-165-014
361 For Tegal Equipment PN TGL-80-165-025
362 For Tegal Equipment PN TGL-80-165-026
363 For Tegal Plasma Equipment PN TGL-40-003-002
364 For Tegal Plasma Equipment PN TGL-40-005-001 O Ring
365 For Tegal Plasma Equipment PN TGL-40-007-001
366 For Tegal Plasma Equipment PN TGL-40-011-001
367 For Tegal Plasma Equipment PN TGL-40-012-001
368 For Tegal Plasma Equipment PN TGL-40-017-002
369 For Tegal Plasma Equipment PN TGL-40-044-001
370 For Tegal Plasma Equipment PN TGL-40-053-001
371 For Tegal Plasma Equipment PN TGL-40-065-001
372 For Tegal Plasma Equipment PN TGL-40-102-002
373 For Tegal Plasma Equipment PN TGL-40-169-001
374 For Tegal Plasma Equipment PN TGL-40-177-001
375 For Tegal Plasma Equipment PN TGL-40-178-001
376 For Tegal Plasma Equipment PN TGL-40-230-001
377 For Tegal Plasma Equipment PN TGL-50-014-001
378 For Tegal Plasma Equipment PN TGL-50-016-001
379 For Tegal Plasma Equipment PN TGL-50-022-001
380 For Tegal Plasma Equipment PN TGL-50-039-001
381 For Tegal Plasma Equipment PN TGL-51-084-001
382 For Tegal Plasma Equipment PN TGL-51-092-001
383 For Tegal Plasma Equipment PN TGL-51-106-001
384 For Tegal Plasma Equipment PN TGL-51-114-001
385 Front Control Panel Display CD 1011 For Tegal 901e 903e AWD-D-3-2-4
386 Gas Delivery Item CG 1015-00500 W/ 99-126-005 ,Tegal 901e 903e Etcher DQ-4-004
387 Gas Delivery Item CG 1015-00504 W/ 99-126-006 Tegal 901e 903e Etcher DQ-4-005
388 Gas Delivery Item CG 1145-W00493 W/ 99-126-005 ,Tegal 901e 903e Etcher DQ-4-003
389 Gas Delivery Item CG 1145-W00948 W/ 99-126-006 ,Tegal 901e 903e Etcher DQ-4-008
390 Genuine Sloan A-36-A Closet Kit ID-AWM-A-3–4-003
391 GLFPF3000VFM4 Pall Gaskleen 2020783 For Tegal 901e Tegal 903e Etcher DT-3-10-001
392 HPS Corp. Boulder Co. 1104404 ? CC04404 ? For Tegal Etcher
393 Item CR1113-00301 RF Matching Network For Tegal 901e 903e DQ-2-001
394 Item CR1113-00301 W/ 31-086-004 /CR1044-302 Tegal 901e 903e DQ-2-013
395 Item CR1113-00301 W/ 31-086-004 /CR1124-00101 ,Tegal 901e 903e DQ-2-012
396 Item CR1113-00301 W/ 31-086-004 /CR1124-00701 ,Tegal 901e 903e DQ-2-011
397 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-002
398 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-003
399 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-004
400 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-005
401 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-006
402 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-007
403 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-008
404 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-009
405 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-010
406 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-015
407 Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-016
408 Item CR1113-00301RW W/ 31-086-004 /CR1124-01001 Tegal 901e 903e DQ-1-003
409 Item CR1113-00801RW W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-014
410 Kacon Signal Phone KSP-42T ID-AWM-A-3–4-011
411 MC6821P For Tegal PCB
412 MKS 122A-11063 Baratron 10 Torr For Tegal 901e Tegal 903e DS-3-13-001
413 MKS 122AA-00010AB Baratron 10 Torr For Tegal 901e Tegal 903e DS-2-8/9-001
414 MKS 122AA-00010AB Baratron 10 Torr For Tegal 901e Tegal 903e DS-3-10-001
415 MKS 122AA-00010BB Baratron 10 Torr For Tegal 901e Tegal 903e DS-2-10-003
416 MKS 122AA-00010BB Baratron 10 Torr For Tegal 901e Tegal 903e DS-2-12-002
417 MKS 127A-11356 Baratron 10 Torr For Tegal 901e Tegal 903e DS-3-12-001
418 MKS 127AA-00001B-S Baratron 10 Torr For Tegal 901e Tegal 903e DS-3-11-001
419 MKS 127AA-00010A Baratron 10 Torr For Tegal 901e Tegal 903e DS-3-12-002
420 MKS 127AA-00010A-SP016-88 Baratron 10 Torr For Tegal 901e Tegal 903e DS-3-13-002
421 MKS 127AA-00010E Baratron 10 Torr For Tegal 901e Tegal 903e DS-3-11-002
422 MKS 222BHS-A-A-10 Baratron 10 Torr For Tegal 901e Tegal 903e DS-2-10-002
423 Model ACG-10 ENI Power Systems RF Generator For Tegal 901e Tegal 903e
424 Model ACG-10B ENI Power Systems RF Generator For Tegal 901e Tegal 903e
425 Neslab Merlin M33 For Tegal 901e 903eb Refrigerated Recirculator D380C-021
426 Noah Precision Inc Model 2002 Tegal 901e Tegal 903e Chiller Circulator AWR-003
427 Noah Precision Inc Model 2002 Tegal 901e Tegal 903e Chiller Circulator AWR-004
428 PN 12S1038A Spare Parts, Varian?
429 PN 38-232-001 A For 6 Inch Tegal 901e 903e AWD-D-3-2-6-002
430 PN 39-344-002 Upper Electrode For Tegal 901e Tegal 903e Plasma Etcher DT-1-001
431 PN 46-273-001 A For 4 Inch Tegal 901e 903e AWD-D-3-2-7-001
432 PN 46-274-001 For Tegal 901e 903e AWD-D-3-2-5
433 PN 46-275-001 For 6 Inch Tegal 901e 903e AWD-D-3-2-6
434 PN 46-383-001 For 3 Inch Tegal 901e 903e AWD-D-3-2-7-002
435 PN 80-055-140 Tegal RF Power T-502S RF Products
436 PN CC1012-00101 Chamber Assembly Tegal 901e SN 11531
437 PN CC1106-00204 Chamber Assembly Tegal 901e SN 10903
438 PN CC1106-01101 Chamber Assembly Tegal 901e SN 11606
439 PN TGL-39-292-003 Tegal Spare Parts
440 PN TGL-39-292-003 Tegal Spare Parts
441 PN TGL-39-336-018 Tegal Spare Parts
442 PN TGL-39-341-005 Tegal 901e Spare Parts
443 PN TGL-39-344-001 Tegal Spare Parts
444 PN TGL-39-604-001 Tegal Spare Parts
445 PN TGL-39-622-001 Tegal Spare Parts
446 PN TGL-39-628-001 Tegal Spare Parts
447 PN TGL-39-633-001 Tegal Spare Parts
448 PN TGL-39-636-001 Tegal Spare Parts
449 PN TGL-39-637-001 Tegal Spare Parts
450 PN TGL-39-639-001 Tegal Spare Parts
451 PN TGL-39-654-001 Tegal Spare Parts
452 PN TGL-39-655-001 Tegal Spare Parts
453 PN TGL-39-659-001 Tegal Spare Parts
454 PN TGL-39-662-001 Tegal Spare Parts For Tegal 1500 Plasma Etcher
455 PN TGL-39-675-001 Tegal Spare Parts For Tegal 1500 Plasma Etcher
456 PN TGL-39-676-001 Tegal Spare Parts For Tegal 1500 Series Plasma Etcher
457 PN TGL-39-680-003 Tegal Spare Parts For Tegal Plasma Etcher
458 PN TGL-39-682-001 Tegal Spare Parts For Tegal Plasma Etcher
459 PN TGL-39-682-001 Tegal Spare Parts For Tegal Plasma Etcher
460 PN TGL-39-683-001 Tegal Spare Parts For Tegal Plasma Etcher
461 PN TGL-39-687-002 (?)Tegal Spare Parts For Tegal Plasma Etcher
462 PN TGL-39-689-001 Tegal Spare Parts For Tegal Plasma Etcher
463 PN TGL-39-694-001 Tegal Spare Parts For Tegal Plasma Etcher
464 PN TGL-39-696-001 Tegal Spare Parts For Tegal Plasma Etcher
465 PN TGL-39-699-001 Tegal Spare Parts For Tegal Plasma Etcher
466 PN TGL-39-700-007 Tegal Spare Parts For Tegal Plasma Etcher
467 PN TGL-39-735-003 Low Electrode Chuck 5 Inch Tegal Spare Parts
468 PN TGL-39-735-008 Low Electrode Chuck Tegal Spare Parts
469 PN TGL-39-750-001 Tegal Spare Parts
470 PN TGL-39-751-001 Tegal Spare Parts
471 PN TGL-39-757-003 Tegal Spare Parts
472 PN TGL-39-757-003 Tegal Spare Parts
473 PN TGL-39-758-001 Tegal Spare Parts
474 PN TGL-39-776-001 Tegal Spare Parts
475 PN TGL-39-804-001 Tegal Spare Parts
476 PN TGL-39-815-001 Tegal Spare Parts
477 PN TGL-39-815-003 Tegal Spare Parts
478 PN TGL-39-817-001 Tegal Spare Parts
479 PN TGL-39-819-001 Tegal Spare Parts
480 PN TGL-39-833-001 Tegal Spare Parts
481 PN TGL-39-847-002 Tegal Spare Parts
482 PN TGL-39-847-004 Tegal Spare Parts
483 PN TGL-39-848-003 Tegal Spare Parts 37-848-003 (?)
484 PN TGL-39-848-004 Tegal Spare Parts
485 PN TGL-39-848-005 Tegal Spare Parts
486 PN TGL-39-852-001 Tegal Spare Parts
487 PN TGL-39-852-002 RW Tegal Spare Parts
488 PN TGL-39-852-004 Tegal Spare Parts
489 PN TGL-39-853-002 Tegal Spare Parts
490 PN TGL-39-853-004 Tegal Spare Parts
491 PN TGL-39-854-001A Tegal Spare Parts
492 PN TGL-39-854-001B Tegal Spare Parts
493 PN TGL-39-854-001C Tegal Spare Parts
494 PN TGL-39-855-001 Tegal Spare Parts
495 PN TGL-39-856-001 Tegal Spare Parts
496 PN TGL-39-857-001 Tegal Spare Parts
497 PN TGL-39-858-001 ATegal Spare Parts
498 PN TGL-39-858-001 Tegal Spare Parts
499 PN TGL-39-860-001 ATegal Spare Parts
500 PN TGL-39-868-001 Tegal Spare Parts
501 PN TGL-39-869-001 Tegal Spare Parts
502 PN TGL-39-870-001 Tegal Spare Parts
503 PN TGL-39-872-001 Tegal Spare Parts
504 PN:33-085-002 Tegal 903e Tegal 901e Bellows Lower electode
505 PN:40-750-601 Tegal 6″ Focus Ring
506 PN:80-080-072 CYL, Dbl Ended 1/2S, 1 1/8B Tegal 901e Tegal 903e Plasma Etcher
507 PN:80-080-077 CYL, AIR 3/4 SFT 2.09s 2B, Tegal 901e Tegal 903e Plasma Etcher
508 Press/Vacum W/ATM SNSR CG1146-01301 ,Refurbished Tegal 901e 903e Etcher DQ-4-006
509 Press/Vacum W/ATM SNSR CG1146-W00876 Tegal 901e 903e Etcher DQ-4-007
510 Profacture Upgrade Kit 90x Windows PC Interface Tegal PCB AWM-G-5-1-012
511 Reaction Chamber CC 1026-00066 , Tegal 915 Plasma Etcher /Asher (?) SS380-7-2
512 Reaction Chamber CC 1026-00201 , Tegal 915 Plasma Etcher /Asher (?) SS380-7-1
513 Reaction Chamber CC1012-00101 Top Assembly For Tegal 901e 903e DQ-5-004
514 Reaction Chamber CC1106-01301 (?) Top Assembly For Tegal 901e 903e DQ-5-001
515 Reaction Chamber CC1106-01301 Top Assembly For Tegal 901e 903e DQ-5-002
516 Reaction Chamber CC1106-01301 Top Assembly For Tegal 901e 903e DQ-5-003
517 RF Matching RF Delivery CR 1044 For Tegal 901e 903e AWD-D-3-2-10
518 RF Matching RF Delivery CR 1044 For Tegal 901e 903e AWD-D-3-2-11
519 RF Matching RF Delivery CR 1044 For Tegal 901e 903e AWD-D-3-2-8
520 RF Matching RF Delivery CR 1044 For Tegal 901e 903e AWD-D-3-2-9
521 RF Plasma Products Model T-502S RF Generator CR1087-20101 Tegal ID-AWM-A-3-001
522 RF Plasma Products T-502 500W RF Generator For Tegal 901e 903e Etcher DQ-4-002
523 RF Plasma Products T-502S 500W RF Generator For Tegal 901e 903e Etcher DQ-4-001
524 Sexauer Plumbing Repair Products GTY 032540 Sloan Royal Closet Kit ID-AWM-A-3–4
525 ST069, 201SSTX86DBLC44 Braden Precision Bearings
526 Tegal 1513e AC Module Item CE 1028 Parts
527 Tegal 1513e AC Module Item CE 1028 Parts
528 Tegal 1513e Aligment Tools-Jigs ID-AWS-010
529 Tegal 1513e DC Module Item CE 1029 Parts
530 Tegal 1513e Gas Controller Item CG 1150 -00202 ID-AWS-012
531 Tegal 1513e Loft Assembly, Wafer,
532 Tegal 1513e Main Controller Item CD 1043-00205 ID-AWS-012
533 Tegal 1513e Main Controller Item CD 1043-00205RW ID-AWS-012
534 Tegal 1513e Matching Network Item CR 1031
535 Tegal 1513e Motor Controller Item CE 1093 Parts
536 Tegal 33-349-002 ID-AWS-L-1-2-007
537 Tegal 39-148-02 E ID-AWS-L-1-3-001
538 Tegal 39-341-006 D ID-AWS-L-1-3-001
539 Tegal 400 Plasma Etcher ID-AWSK-3-k-6-001
540 Tegal 40-244-002 A
541 Tegal 40-281-001 Spare Parts
542 Tegal 50574-01 Tegal CM1104-00402 CM1104-00403? Tegal PCB
543 Tegal 50590-01 Tegal CM1104-00402 CM1104-00403? Tegal PCB
544 Tegal 50590-01 Tegal CM1104-00402 Tegal PCB
545 Tegal 50590-01 Tegal CM1104-00403 Tegal PCB
546 Tegal 700 Tegal 701 Tegal 703 PCB
547 Tegal 80-055-182 Spare Parts
548 Tegal 80-095-223 Spare Parts
549 Tegal 801 803 701 703 Plasma Etcher Chuck 39-754-009 New AWM-C-5-5-001
550 Tegal 80-197-032 Spare Parts
551 Tegal 80-197-032 Spare Parts
552 Tegal 80-202-341 Spare Parts
553 Tegal 803 Plasma Etch Chuck ID-AWS-L-1-2-005
554 Tegal 80-679-008 Spare Parts
555 Tegal 81-007-138 Bellow Spare Parts
556 Tegal 83-126-003 PCB Spare Parts
557 Tegal 901e 903e Circulating System FC-1000-S Chiller AWD-D-2-10-014
558 Tegal 901e 903e Circulating System FC-1000-S Chiller AWD-D-2-10-015
559 Tegal 901e 903e Circulating System Neslab FTC-350 AWD-D-2-10-020
560 Tegal 901e 903e Circulating System Neslab RTE-100 AWD-D-2-10-021
561 Tegal 901e 903e Circulating System Neslab RTE-101 AWD-D-2-10-016
562 Tegal 901e 903e Circulating System Neslab RTE-101 AWD-D-2-10-017
563 Tegal 901e 903e Circulating System Neslab RTE-211 AWD-D-2-10-018
564 Tegal 901e 903e Circulating System Neslab RTE-9DD AWD-D-2-10-019
565 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-001
566 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-002
567 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-003
568 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-004
569 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-005
570 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-006
571 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-007
572 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-008
573 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-009
574 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-010
575 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-011
576 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-012
577 Tegal 901e 903e Circulating System Precision Scientific Chiller AWD-D-2-10-013
578 Tegal 901e 903e Display 03601-22-040 Flip Tegal PCB 99-125-008 AWM-G-5-1-014
579 Tegal 901e 903e Display 03601-22-040 Flip Tegal PCB AWM-G-5-1-013
580 Tegal 901e 903e Tegal PCB 99-125-008 AWM-G-5-1-015
581 Tegal 901e 903e Tegal PCB 99-173-003 B RFG-3 AWM-E-5-2-007
582 Tegal 901e Chuck 6 Inch 39-733-004 ID-AWS-L-3-2-002
583 Tegal 901e Chuck 6 Inch 39-733-004 ID-AWS-L-3-2-004
584 Tegal 901e Ring For Chuck 6 Inch 39-733-004 ID-AWS-L-3-2-003
585 Tegal 901e Tegal 903e 30-225-004 Spatula Assembly 6” ID-AWS-L-3-3-003
586 Tegal 901e Tegal 903e 30-232-003 Shuttle Assembly ID-AWS-027
587 Tegal 901e Tegal 903e 39-848-004 Block Stage 6” Cat Whisker ID-AWS-L-3-3-001
588 Tegal 901e Tegal 903e 80-202-191 O-ring Viton ID-AWS-L-3-3-005
589 Tegal 901e Tegal 903e 80-202-192 O-ring Viton ID-AWS-L-3-3-004
590 Tegal 901e Tegal 903e 99-172-002 & 99-172-001 & 99-172-003
591 Tegal 901e Tegal 903e Chamber Assy 39-733-003 Rev B CW1109-50102 SN 17039
592 Tegal 901e Tegal 903e Chamber Assy CC1106-00204 SN 11396
593 Tegal 901e TEgal 903e Chamber Flange ID-AWS-L-3-2-001
594 Tegal 901e Tegal 903e Chamber Part Tegal Spare Parts
595 Tegal 901e Tegal 903e Chuck 30-735-019 A ID-AWM-E-5-2-001 6”
596 Tegal 901e Tegal 903e Chuck 30-735-019 A ID-AWM-E-5-2-002 6”
597 Tegal 901e Tegal 903e Chuck 39-733-002 E ID-AWS-036-001
598 Tegal 901e Tegal 903e Chuck 39-733-002 E ID-AWS-036-002
599 Tegal 901e Tegal 903e Chuck 39-733-003 H ID-AWS-035-005
600 Tegal 901e Tegal 903e Chuck 39-735-019 A ID-AWS-035-004
601 Tegal 901e Tegal 903e Chuck 39-741-004 H ID-AWS-035-003
602 Tegal 901e Tegal 903e Chuck 39-741-009 K ID-AWS-035-006
603 Tegal 901e Tegal 903e Chuck 39-741-009 K ID-AWS-035-007
604 Tegal 901e Tegal 903e Chuck 39-741-027 A ID-AWS-035-002
605 Tegal 901e Tegal 903e Chuck 39-927-022 C ID-AWS-035-001
606 Tegal 901e Tegal 903e Chuck 4 Inch ID-AWS-036-003
607 Tegal 901e Tegal 903e Chuck 5 Inch ID-AWS-035-008
608 Tegal 901e Tegal 903e Chuck A ID-AWM-E-5-2-003 6”
609 Tegal 901e Tegal 903e Chuck A ID-AWM-E-5-2-004 6”
610 Tegal 901e Tegal 903e Gas Line Has DLVY Item CG 1015 W/ 99-126-005 AWM-H-3-001
611 Tegal 901e Tegal 903e Gas Line Has DLVY Item CG 1145 ID-AWM-B-5-1
612 Tegal 901e Tegal 903e Gas Line Has DLVY Item CG 1145 ID-AWM-B-5-2
613 Tegal 901e Tegal 903e Gas Line Has DLVY Item CG 1145 ID-AWM-B-5-5
614 Tegal 901e Tegal 903e Gas Line Has DLVY Item CG 1145 ID-AWM-B-5-6
615 Tegal 901e Tegal 903e Gas Line Has DLVY Item CG 1145 ID-AWM-B-5-7
616 Tegal 901e Tegal 903e Gas Line Has DLVY Item CG 1145 ID-AWM-H-2-001
617 Tegal 901e Tegal 903e Gas Line ID-AWS-029-003
618 Tegal 901e Tegal 903e Gas Line ID-AWS-029-004
619 Tegal 901e Tegal 903e Gas Line ID-AWS-029-005
620 Tegal 901e Tegal 903e Gas Line ID-AWS-031-003
621 Tegal 901e Tegal 903e Gas Line ID-AWS-032-001
622 Tegal 901e Tegal 903e Main Control Board PN 80-095-278
623 Tegal 901e Tegal 903e Main Control Board PN 80-095-278 AWM-B-4-4-001
624 Tegal 901e Tegal 903e Main Control Board PN 80-095-278 AWM-B-4-4-002
625 Tegal 901e Tegal 903e Monitor , Used
626 Tegal 901e Tegal 903e O-ring For Gas Feed Through 3700-01360 ID-AWS-L-3-3-006
627 Tegal 901e Tegal 903e PCA, EOP Control Module 90-1045-01 REV G
628 Tegal 901e Tegal 903e PCB 80-095-278 Rev A DAC 2
629 Tegal 901e Tegal 903e PCB 99-126-006 REV D
630 Tegal 901e Tegal 903e PCB 99-138-003 REV A TMC-3
631 Tegal 901e Tegal 903e PCB 99-249-002 Rev K DEF-2
632 Tegal 901e Tegal 903e PCB DAC 80-095-278 With 99-207-004 A/K/C
633 Tegal 901e Tegal 903e PCB TEGAL PCB 99-247-002 REV.D SPI-2
634 Tegal 901e Tegal 903e Pneumatic Valve Assembly ID-AWS-033-001
635 Tegal 901e Tegal 903e Press/Vacuum W/ATM SNS Item CG 1146 ID-AWM-B-5-3
636 TEGAL 901E TEGAL 903E Tegal PCB 99-165-003 AESI-3
637 TEGAL 901E TEGAL 903E TEGAL PCB 99-173-008 REV C
638 TEGAL 901E TEGAL 903E Tegal PCB 99-249-002 RW  REV.N DEP-2
639 TEGAL 901E TEGAL 903E Tegal PCB 03601-22B-40
640 TEGAL 901E TEGAL 903E Tegal WAFER Transfer CW1002-6100
641 TEGAL 901E TEGAL 903E Tegal WAFER Transfer CW1002-6200RW
642 TEGAL 901E TEGAL 903E Tegal WAFER Transfer CW1078
643 TEGAL 901E TEGAL 903E Tegal WAFER Transfer CW1078 W00454
644 TEGAL 901E TEGAL 903E Tegal WAFER Transfer CW1078-40401
645 TEGAL 901E TEGAL 903E Tegal WAFER Transfer CW1078-50301
646 Tegal 901e Tegal 903e Top Electrode Cleaned AWM-C-4-1-004
647 Tegal 901e Tegal 903e Vacuum Assembly ID-AWM-B-5-4
648 Tegal 901e Tegal 903e Vacuum Line AWM-H-3-003
649 Tegal 901e Tegal 903e Vacuum Line ID-AWS-029-001
650 Tegal 901e Tegal 903e Vacuum Line ID-AWS-029-002
651 Tegal 901e Tegal 903e Vacuum Line ID-AWS-030-001
652 Tegal 901e Tegal 903e Vacuum Line ID-AWS-030-002
653 Tegal 901e Tegal 903e Vacuum Line ID-AWS-030-003
654 Tegal 901e Tegal 903e Vacuum Line ID-AWS-030-004
655 Tegal 901e Tegal 903e Vacuum Line ID-AWS-031-001
656 Tegal 901e Tegal 903e Vacuum Line ID-AWS-031-002
657 Tegal 901e Tegal 903e Vacuum Line Item CG 1014 AWM-H-3-002
658 Tegal 901e Tegal 903e Vacuum Pressure Line Item CG1180 AWM-H-3-004
659 Tegal 901e TEgal 903e Wafer Transfer CW1003 W00137 ID-AWS-L-2-001
660 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-1-002
661 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-1-003
662 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-1-004
663 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-1-005
664 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-2-004
665 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-2-005
666 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-2-006
667 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-2-007
668 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-2-008
669 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-7-2-009
670 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-L-2-002
671 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-L-2-003
672 Tegal 901e TEgal 903e Wafer Transfer CW1078 ID-AWS-L-3-001
673 Tegal 901e TEgal 903e Wafer Transfer CW1078-50301 ID-AWS-7-2-003
674 Tegal 901e TEgal 903e Wafer Transfer Profacture CW1078-60401 ID-AWS-7-2-001
675 Tegal 901e TEgal 903e Wafer Transfer Profacture CW1078-60401 ID-AWS-7-2-002
676 Tegal 901e Tegal 903e Wafer Transfer Shuttle 46-273-001 C ID-AWM-E-5-001 6”
677 Tegal 901e Tegal 903e Wafer Transfer Shuttle Assembly 46-273-001 C ID-AWS-034 4”
678 Tegal 901e Tegal 903e Wafer Transfer Shuttle Assembly 46-273-001 C ID-AWS-034 4”
679 Tegal 901e Tegal 903e Wafer Transfer Shuttle Assembly 46-273-001 C ID-AWS-034 6”
680 Tegal 901e Tegal 903e Wafer Transfer Shuttle Assembly ID-AWS-034
681 Tegal 901e Tegal 903e Wafer Transfer Shuttle Assembly ID-AWS-035
682 Tegal 901e Tegal 903e Wafer Transport Spatul CW1078-40401 RW CW13661 6 Inch
683 Tegal 903 901 E Wafer Process Counter ID-AWS-K-2-004
684 Tegal 903e Chuck
685 Tegal 903e Chuck 6 Inch, Black 39-927-008
686 Tegal 903e Chuck 6 Inch, Black 39-927-008?
687 Tegal 903e Tegal 901e 99-165-003 And 99-197-001 And Omron E2K-X4ME
688 Tegal 903e Tegal 901e Ceramic Ring For 4 Inch Chuck
689 Tegal 903e Tegal 901e Chuck 3 Inch PN 39-735-001 REV K
690 Tegal 903e Tegal 901e Chuck 5 Inch Anodized
691 Tegal 903e Tegal 901e Chuck 6 Inch
692 Tegal 903e Tegal 901e Chuck 6 Inch No Anodized
693 Tegal 903e Tegal 901e Chuck 6 Inch PN 39-735-019 REV A
694 Tegal 903e Tegal 901e Chuck PN 39-548-002 REV A 3 Inch
695 Tegal 903e Tegal 901e Chuck PN 39-733-004 REV L
696 Tegal 903e Tegal 901e Chuck PN 39-733-004 REV M 5 Inch
697 Tegal 903e Tegal 901e Chuck PN 39-735-002 REV K
698 Tegal 903e Tegal 901e Chuck PN 39-735-002 REV M
699 Tegal 903e Tegal 901e Chuck PN 39-735-002 With One O Ring
700 Tegal 903e Tegal 901e Chuck PN 39-735-020 Rev A. 6 Inch
701 Tegal 903e Tegal 901e Chuck PN 39-741-026 REV B
702 Tegal 903e Tegal 901e Chuck PN 39-741-026 Rev B 6 Inch
703 Tegal 903e Tegal 901e Nest 3 Inch
704 Tegal 903e Tegal 901e Nest 4 Inch 46-273-001 C
705 Tegal 903e Tegal 901e Nest 4 Inch Shorter
706 Tegal 903e Tegal 901e Nest 6 Inch
707 Tegal 903e Tegal 901e Nest PN 46-273-001 C
708 Tegal 903e Tegal 901e Power Supply Box AC Box
709 Tegal 903e Tegal 901e Ring PN 39-908-001
710 Tegal 903e Tegal 901e Shower Head 37-221-001 (TSI-TG221-001)
711 Tegal 903e Tegal 901e Shower Head OEM PN 39-680-003
712 Tegal 903e Tegal 901e Shower Head PN 37-221-001 REV H
713 Tegal 903e Tegal 901e Shower Head Profacture PRO-37-221-002 REV A Made In USA
714 Tegal 903e Tegal 901e Shuttle ARM 5 Inch PN 39-853-001 A
715 Tegal 903e Tegal 901e Shuttle ARM 5 Inch PN 39-853-001 A?
716 Tegal 903e Tegal 901e Shuttle ARM 6 Inch
717 Tegal 903e Tegal 901e UPP Electrode PN 39-188-002
718 Tegal 93-124-002 Cable AWD-D-3-1-13-007
719 Tegal 93-128-004 Rev E Cable RF
720 Tegal 99-126-005 A PCB Spare Parts
721 Tegal 99-129-006 RW PCB Spare Parts
722 Tegal 99-136-001 D PCB Spare Parts
723 Tegal 99-188-001 Rev A EPE-1 Tegal PCB
724 Tegal 99-206-001 Rev C GCP-1 Tegal PCB
725 Tegal 99-232-004 N PCB Spare Parts
726 Tegal 99-240-003 C PCB Spare Parts
727 Tegal 99-240-003 Rev B ETS-3 Tegal PCB
728 Tegal 99-244-001 Rev C PCB Spare Parts
729 Tegal 99-299-001 G PCB Spare Parts
730 TEGAL 9XX DAC-SCAN PCB TEGAL 901E TEGAL 903E TEGAL PCB 80-095-278
731 Tegal AC Service Item CE-1004-00901 SN 13212 Tegal Spare Parts
732 Tegal AC Services Item CE-1004-00901 SN 12427 Tegal Spare Parts
733 Tegal AC SVCE EUR Item CE-1004-01001 SN 14471 Tegal Spare Parts
734 Tegal Bias Power Supply 80-095-164 ID-AWS-012
735 Tegal Chuck 37-139-001. (39-139-001?)
736 Tegal Chuck 39-336-018
737 Tegal FC-1000S 2500W 230/50 Tegal 901e Tegal 903e Chiller Circulator AWR-005
738 Tegal Item CD 1011 With 99-125-004 /008 & Flip 03600-22-040 AWM-G-5-2-001
739 Tegal Item CD 1011 With 99-125-004 /008 & Flip 03601-22-040 AWM-G-5-2-002
740 Tegal Item CD 1011 With 99-125-004 /008 & Flip 03601-22-040 AWM-H-1-001
741 Tegal Item CD 1011 With 99-125-004 AWM-G-5-2-003
742 Tegal Line Recorder 80-055-166 ID -AWM-B-4-2-002
743 Tegal Matching Network Item CR-1113-00301 SN 12165 Tegal Spare Parts
744 Tegal Matching Network Item CR-1113-00301 SN 13145 Tegal Spare Parts
745 TEGAL PCB 03600-22-040
746 TEGAL PCB 03601-22-040
747 Tegal PCB 98-044-002 / 99-044-002
748 TEGAL PCB 99-125-001 REV 7 FPJ-1
749 TEGAL PCB 99-126-005 IGC-5 REV H/A/J/G/E
750 TEGAL PCB 99-126-009 B IGC-9
751 Tegal PCB 99-165-001  REV 4 ESI-1
752 TEGAL PCB 99-172-001 REV 3 IMN-1
753 TEGAL PCB 99-172-002 REV B IMN-2
754 TEGAL PCB 99-173-005 A RFG-5
755 Tegal PCB 99-341-002 REV 3 SSI-2
756 Tegal PCB 99-345-001 REV A ID1-1
757 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-39-424-001 Rev A
758 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-39-733-003 Rev L
759 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-39-733-004 Rev k 5 Inch
760 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-39-900-001
761 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-39-908-001
762 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-39-926-001
763 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-51-147-001
764 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-51-148-001
765 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-51-150-001
766 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-51-151-001
767 Tegal plasma Etch Asher Equipment Spare Parts PN TGL-51-182-001
768 Tegal Plasma Etcher Asher Spare Parts PN 30-232-001 Tegal 901e Tegal 903e 4 Inch
769 Tegal Plasma Etcher Asher Spare Parts PN 39-954-001 Tegal 901e Tegal 903e 4 Inch
770 Tegal Plasma Etcher Asher Spare Parts PN 39-954-002 Tegal 901e Tegal 903e 5 Inch
771 Tegal Plasma Etcher Asher Spare Parts PN 41-175-001 Tegal 901e Tegal 903e 4 Inch
772 Tegal Plasma Etcher Asher Spare Parts PN TGL-39-929-001
773 Tegal Plasma Etcher Asher Spare Parts PN TGL-39-946-002 Rev 2
774 Tegal Plasma Etcher Asher Spare Parts PN TGL-39-954-003 Tegal 901e Tegal 903e 6”
775 Tegal Plasma Etcher Asher Upgrade Kit 29-208-001 Touchscreen Replacement
776 Tegal Press/Vacuum W/ATM SNS Item CG1146-01201 SN 13804 Tegal Spare Parts
777 Tegal RF Generator CR 1087-20101 RF Plasma Products T-502S ID-AWM-D-1-008
778 Tegal Spare Parts
779 Tegal Spare Parts
780 Tegal Spare Parts PN TGL-39-967-002
781 Tegal T-1000E DC Supply ID-AWS-012
782 Tegal WAFER Transfer CW1078 W00303RW
783 Tegal WAFER Transfer CW1078-40301
784 Tegal WAFER Transfer CW1078-50401
785 Tegal WAFER Transfer CW1078-60301
786 Tegal? Fabco-Air Inc E 521 Xk
787 Tek-Temp Instruments TKD200/5118IR Was For Tegal 903e Etcher Working AWR-031
788 Tek-Temp Instruments TKD200/5118T1 Was For Tegal 903e Etcher Working AWR-032
789 TeleVideo Systems 18A—D87?30062A For Tegal 901e 903e Monitor AWD-D-1-0-024
790 TGL-40-391-001 Tegal 905 Quartz Chamber Tegal Spare Parts
791 TGL-80-506-003 OPTICAL FILTER 520 NM endpoint Filter Tegal Spare Parts
792 TGL-80-506-008 OPTICAL FILTER 777 NM endpoint Filter Tegal Spare Parts
793 TGL-80-506-013 OPTICAL FILTER 750 NM endpoint Filter Tegal Spare Parts
794 TGL-99-002-004 Tegal PCB Tegal Spare Parts
795 TGL-99-003-002 Tegal PCB Tegal Spare Parts
796 TGL-99-005-001 Tegal PCB Tegal Spare Parts
797 TGL-99-008-001 Tegal PCB Tegal Spare Parts
798 TGL-99-013-001 Tegal PCB Tegal Spare Parts
799 TGL-99-037-001 Tegal PCB Tegal Spare Parts 99-037-01? Tegal 415 PCB
800 TGL-99-043-002 Tegal PCB Tegal Spare Parts 99-043-001
801 TGL-99-044-002 Tegal PCB Tegal Spare Parts
802 TGL-99-045-001 Tegal PCB Tegal Spare Parts
803 TGL-99-046-001 Tegal PCB Tegal Spare Parts
804 TGL-99-046-502 Tegal PCB Tegal Spare Parts
805 TGL-99-047-001 Tegal PCB Tegal Spare Parts
806 TGL-99-048-001 Tegal PCB Tegal Spare Parts
807 TGL-99-054-001 Tegal PCB Tegal Spare Parts
808 TGL-99-079-001 Tegal PCB Tegal Spare Parts
809 TGL-99-079-002 Tegal PCB Tegal Spare Parts
810 TGL-99-081-001 Tegal PCB Tegal Spare Parts
811 TGL-99-082-004 Tegal PCB Tegal Spare Parts
812 TGL-99-095-001 Tegal PCB Tegal Spare Parts
813 TGL-99-098-003 Tegal PCB Tegal Spare Parts
814 TGL-99-099-001 Tegal PCB Tegal Spare Parts
815 TGL-99-104-001 Tegal PCB Tegal Spare Parts
816 TGL-99-106-001 Tegal PCB Tegal Spare Parts
817 TGL-99-112-001 Tegal PCB Tegal Spare Parts
818 TGL-99-112-002 Tegal PCB Tegal Spare Parts
819 TGL-99-114-001 Tegal PCB Tegal Spare Parts
820 TGL-99-116-001 Tegal PCB Tegal Spare Parts
821 TGL-99-126-003 Tegal PCB Tegal Spare Parts
822 TGL-99-139-002 Tegal PCB Tegal Spare Parts
823 TGL-99-141-001 Tegal PCB Tegal Spare Parts
824 TGL-99-154-001 Tegal PCB Tegal Spare Parts
825 TGL-99-158-001 Tegal PCB Tegal Spare Parts
826 TGL-99-181-001 Tegal PCB Tegal Spare Parts
827 TGL-99-181-006 D Tegal PCB Tegal Spare Parts
828 TGL-99-186-002 Tegal PCB Tegal Spare Parts
829 TGL-99-186-002 Tegal PCB Tegal Spare Parts
830 TGL-99-190-002 Board Temp Monitor Tegal PCB Tegal Spare Parts
831 TGL-99-197-001 Board Sensor Slotted SSL-1 Tegal PCB Tegal Spare Parts
832 TGL-99-200-003 PCB Board Tegal PCB Tegal Spare Parts
833 TGL-99-206-001 PCB Board Tegal PCB Tegal Spare Parts
834 TGL-99-208-004 Tegal PCB Tegal Spare Parts
835 TGL-99-209-001 Tegal PCB Tegal Spare Parts
836 TGL-99-232-004 Tegal PCB Tegal Spare Parts
837 TGL-99-237-003 Tegal PCB Tegal Spare Parts
838 TGL-99-300-001 Tegal PCB Tegal Spare Parts
839 TGL-99-304-001 Tegal PCB Tegal Spare Parts
840 TGL-99-318-001 Tegal PCB Tegal Spare Parts
841 Theis Enterprises Computer With SW For Tegal 901e Tegal 903e Etcher, CS&S
842 Theis Enterprises SN 200454 Main Control Board For Tegal 901e Tegal 903e Etcher
843 TYLAN FC 280 N2 5 SLM MFC For Tegal 901e Tegal 903e Plasma Etcher DT-1-006
844 Tylan FC-2900M CHF3 / 50 SCCM For Tegal 901e Tegal 903e Plasma Etcher DT-1-021
845 Tylan FC-2900M SF6 / 20 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-023
846 Tylan FC-2900V He 200 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-030
847 TYLAN FC-2900V N2 / 20 SCCM MFC For Tegal 901e Tegal 903e Plasma Etcher DT-1-013
848 Tylan FC-2900V O2 / 15 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-032
849 Tylan FC-2900V O2 / 50 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-026
850 Tylan FC-2900V O2/ 25 SCCM For Tegal 901e Tegal 903e Plasma Etcher DT-1-020
851 Tylan FC-2900V SF6 / 20 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-025
852 Tylan FC-2900V SF6 / 50 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-031
853 Tylan PC-2900V SF6 / 100 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-028
854 Tylan pC-5900UB N2/ 2 SLM MFC For Tegal 901e Tegal 903e Etcher DT-1-024
855 Tylan PC-5900UV N2 / 400 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-027
856 Tylan PC-5900UV N2 / 500 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-029
857 Tylan VC-5900VU-55 N2/ 500 SCCM MFC For Tegal 901e Tegal 903e Etcher DT-1-022
858 UFC-1100 100 SCCM N2 For Tegal 901e Tegal 903e Plasma Etcher DT-1-004
859 UFC-1100 100 SCCM N2 For Tegal 901e Tegal 903e Plasma Etcher DT-1-005
860 UFC-1100 100 SCCM PH3/N2 For Tegal 901e Tegal 903e Plasma Etcher DT-1-003
861 UFC-1100 N2 50 SCCM For Tegal Plasma Asher Strip Etcher Unit Instruments Inc
862 UFC-1200 100 SCCM SiH2Cl2 For Tegal 901e Tegal 903e Plasma Etcher DT-1-002
863 UFC-1400A N2 50 SCCM For Tegal Plasma Asher Strip Etcher Unit Instruments Inc
864 Unit 8130 He 50 SCCM MFC 797-900918-001 For Tegal 901e Tegal 903e DT-1-015
865 UNIT UFC-1020 He 200 SCCM MFC For Tegal 901e Tegal 903e Plasma Etcher DT-1-009
866 UNIT UFC-1100 N2 50 SCCM MFC For Tegal 901e Tegal 903e Plasma Etcher DT-1-008
867 UNIT UFC-1100 N2 50 SCCM MFC For Tegal 901e Tegal 903e Plasma Etcher DT-1-011
868 UNIT UFC-1100A N2 50 SCCM MFC For Tegal 901e Tegal 903e Plasma Etcher DT-1-007
869 UNIT UFC-1200 N2 50 SCCM MFC For Tegal 901e Tegal 903e Plasma Etcher DT-1-010
870 UNIT UPC-1300 N2 2 SLM MFC For Tegal 901e Tegal 903e Plasma Etcher DT-1-012
871 Unit UPC-1300 N2/ 100 SCCM MFC For Tegal 901e Tegal 903e Plasma Etcher DT-1-014
872 UPC-1300 N2 225 SCCM For Tegal Plasma Asher Strip Etcher Unit Instruments Inc
873 Varian 00-674163-00 Anode Cap Spare Parts
874 Vecmar Computer Solutions Digital Monitor VT520 For Tegal 901e 903e AWG-1-1-002
875 VEXTA PH266L-33-A1 Stepping Motor For Tegal 901e Tegal 903e DS-2-12-001
876 VEXTA PH266L-33-A1 Stepping Motor For Tegal 901e Tegal 903e DT-3-2-001
877 VEXTA PH266L-33-A1 Stepping Motor For Tegal 901e Tegal 903e DT-3-4/5-001
878 VEXTA PH266L-33-A1 Stepping Motor For Tegal 901e Tegal 903e DT-3-8-001
879 VEXTA PH266L-33-A1 Stepping Motor For Tegal 901e Tegal 903e DT-3-9-001
880 VEXTA PH268-23 Stepping Motor For Tegal 901e Tegal 903e DS-2-10/11-001
881 VEXTA PH268-23 Stepping Motor For Tegal 901e Tegal 903e DT-3-1-001
882 Wafer Transfer CW1078 For Tegal 901e 903e AWD-D-3-2-13
883
Wires Cables For Tegal 901e 903e Plasma Etcher Etching DQ-2-017
884 Wires Cables For Tegal 901e 903e Plasma Etcher Etching DQ-2-018
885 Wires Cables For Tegal 901e 903e Plasma Etcher Etching DQ-2-019
886 Wires Cables W/ 99-142-001 For Tegal 901e 903e Plasma Etcher Etching DQ-2-020
887 Wires Cables W/99-172-003, 99-142-001 For Tegal 901e 903e Plasma DQ-5-017

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