Description
The following Tegal parts are only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
| 1 | 37-221-001 | Tegal 1903E | Upper Electrode |
| 2 | 37-221-003 | Tegal 1903E | Upper Electrode |
| 3 | 40-788-616 | Tegal 901E | Centering ESC 6″ Bnded Genhre |
| 4 | 39-680-003 | TSI-TG80003 | Electrode Conehead |
| 5 | 40-140-001 | RING INSUL CER | |
| 6 | 40-140-003 | RING INSUL CER 99.5 | |
| 7 | 40-395-001 | RING, FLAT 6″ CERAMIC | |
| 8 | 40-395-001 | RING 6″ CASTELLATED W/ FLAT CUTAWAY | |
| 9 | 40-395-002 | Ring, Ceramic, 125C, Castellated | |
| 10 | 40-395-003 | RING 4″ CASTELLATED W/ FLAT CUTAWAY | |
| 11 | 40-575-003-C | Ring, Ceramic Nest, Flat Ring | |
| 12 | 40-576-003-C | Ring Ceramic Focus, Castellated | |
| 13 | 39-344-002 | Tegal 901 | Shower Head |
| 14 | 40-395-001 | ||
| 15 | 40-788-616 | ||
| 16 | 40-869-002 | ||
| 17 | 80-202-357 | O-Ring | O-Ring |
| 18 | 37-222-002 | Cooling Plate | |
| 19 | 39-733-004 | 901e Lower Electrode | |
| 20 | 39-735-003 | 903e Lower Electrode | |
| 21 | 39-735-004 | 903e Lower Electrode | |
| 22 | 39-741-009 | 903e Lower Electrode | |
| 23 | 39-741-010 | 903e Lower Electrode | |
| 24 | 39-741-026 | 903e Lower Electrode | |
| 25 | 39-927-007 | 903e Lower Electrode | |
| 26 | 39-927-008 | 903e Lower Electrode | |
| 27 | 40-260-001 | Window Sapphire | |
| 28 | 40-826-001 | Quartz | Shield Ion Stripper Quartz |
| 29 | 19684-2 | Washer Spacer .56 OD x .19 ID | |
| 30 | 37-221-002 | Tegal 1903E | Upper Electrode |
| 31 | 40-140-003 | Ceramic | Ring Insulator Ceramic |
| 32 | 40-516-005 | Ring Macor RAD Comp 4′ T/16XX | |
| 33 | 39-735-002 | 903e Lower Electrode | |
| 34 | 39-741-002 | Lower Electrode Anodized | |
| 35 | 39-927-022 | 903e Lower Electrode 6″-Flat-Ano | |
| 36 | 40-822-002 | Tegal | Focus Ring Quartz Tegal |
ID-SS5302-2ND
S
