Main Maker

SUSS MA6/BA6

Description

SUSS MA6/BA6 MASK ALIGNER

Location: CA, U.S.A.

These are  subject to prior sale. These are only for end user. Appreciate your time.

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

  • Model: MA6 / BA6
  • Manufacturer: Suss MicroTec
  • Wafer Size: Currently configured for 150mm Diameter Wafers.
  • Topside (TSA) Alignment
  • Backside (BSA) Alignment
    – Suss DVM6 Microscope
  • CIC 500 Power Supply
  •  Capable of Hard, Soft, Vacuum Contact  with proper tooling.
  • 1500W Lamphouse
  • Vibration Isolation Table (for Suss MA6)
  • 150mm Chuck included
  •  7×7 Maskholder included
  • System Power: 230V, 50/60 Hz
  • Objectives
  • UV400 splitfield Optics (for 365nm and 405nm exposure)
  •  Operations Manual for Suss MA6 Mask Aligner

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SS7270-1-2-1-1 and SS7270W

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers