Description
Please contact us for the availability of the Surface Tech Sys MXP Multiplex ICP ASE HR used Semiconductor Equipment.
| Manufacturer | Surface Tech Sys |
| Model | MXP Multiplex ICP ASE HR |
| Wafer Size Range |  |
| Minimum | 50 mm |
| Maximum | 200 mm |
| Set Size | 150 mm |
| Process | Silicon Etch Bosch Process |
| Loadlock | |
| Loadlock Yes/No | YES |
| Loadlock Pump Manufacturer & Model | Edwards E2M40 |
| High Vacuum Pump | Pfeiffer MAG 2000 |
| Roughing Pump | Edwards IQMB250 & IQDP80 |
| RF Generator Model | ENI/ACG-3B and Advanced Energy RFG 3001 |
| Number of Gas Inputs | Four Gas |
| Process Gases | SF6, C4F8, O2, Ar |
| Chillers | |
| Number of Chillers | 1 |
| Chiller #1Manufacturer/Model | Huber/Unistat 140W |
| Accessories | ICP V2 – Balun coil Mechanical Clamp Helium Backside Cooling Carousel in MkIV MPX – 2 x 150mm wafers 3KW Source 300/30W platen E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2 |
| Other Information | Windows 2000 Bosch license Current Power Requirements: 400V , 50Hz, 40 Amp, 3 phase Unit can be configured for: 208/460, 60 Hz, 3 Phase. Please request at time of purchase. |
| CE Marked | YES |
| Year of Manufacture | 2003 |
The items are subject to prior sale without notice. These items are only for end users.
SS5732
