Description
Material: Super K-SiC
Made in: Asia
Applications: RTP carrier/susceptor
Size: 2 inch, 3 inch, 4inch, 5 inch, 6 inch, 8 inch. Customized.
Lead time: TBD
Sintered SiC (SSiC), Si Infiltrated SiC (SiSiC)
and Microstructural Controlled SiC (Super K-SiC)
Tested: Super K SiC RTP susceptor for 60C/sec from RT to 1200C without breaking.
| ITEM | UNIT | SSiC | SiSiC | Super K-SiC |
| Density | g/cm3 | 3.10 | 3.02 | 2.70 |
| Porosity | % | 3 | <0.1 | 15% |
| Flexural Strength | MPa | 450 (20oC)
450 (1200 oC) |
250 (20oC)
230 (1200 oC) |
100(20oC)
120 (1200 oC) |
| Young’s Modulus | GPa | 420 (20oC)
420 (1200 oC) |
330 (20oC)
300 (1200 oC) |
280(20oC)
260 (1200 oC) |
| Fracture Toughness | MPa. m1/2 | 4 | 3.4 | 2.8 |
| Hardness | Kgf/mm2 | 2,300 | 2,000 | 1,800 |
| Thermal Shock Resistance | DToC | 350 | 450 | 800 |
| Thermal Conductivity | W/m. oK | 126 | 45 | 36 |
| Thermal Expansion | 10-6/oK | 4 | 4.5 | 3.2 |
| Specific Heat | (J/Kg. oK ) | 700 | 820 | 960 |
| Max. Serve Temp. | oC | 2,000 | 1,300 | 2000 |
SS5624
