Description
Sold
Model: STS VPX w/ Bosch Process (very nice etch tool)
Location: California, USA.
Sales Type: Make offer / Bid
Sales condition :AS IS/WHERE IS. No Warranty. No Refund.
Photos: Please contact us with the below form. Appreciate your time.
Detail info we can provide.
A customer has a 2006 STS VPX etcher available for sale. It is an extremely nice unit that is still installed in the fab. The unit is a 2 chamber system, one Bosch process the other oxide. It is single load. Tech specs are as follows:
-Chamber 1: Si, SiO2, Si3N4, Ir, sPZT, Al2O3
-Chamber 2: Si, SiO2, Al2O3, PR
-Software version, 2016.2, new computers and software upgrade purchased last year
-Electrostatic chuck (both modules)
The items are subject to prior sale without notice. These items are only for end users.
SS5533
