Description
SPTS Trikon Sigma 200 fxp
Location: Europe
Condition: Lightly used, complete and working prior to de-installation
Process: Etch/PVD
Chambers: (Qty 3) Process Chambers
– HSE (Hot Sputter Etch)
– HiFill Ti/Tin (Titanium/Titanium Nitride)
– AL (Aluminum)
(Qty 2) Other
– Cooldown
– Vacuum Cassette
Qty (6) Pumps:
– Qty (3) CTI Cryo Pumps
– Qty (3) Edwards
Valid Time: Subject to prior sale without notice.
SS5578
