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Semiconductor Spare Parts

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Description

The following Semiconductor Spare Parts are  only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

1 ULVAC 1014896 Viewport EPD
2 ULVAC 1016689 GDS-Shield
3 ULVAC 1016698 Bottom Ring
4 ULVAC 1018517 Baffle
5 ULVAC 1018518 Top Ring 2 Sections
6 ULVAC 1019020 Top Plate
7 ULVAC 101980/1016738 Bottom Plate (Combined Parts)
8 ULVAC 2301700 TUBE, CERAMIC
9 ULVAC 2301856 RING, CERAMIC, ASIQ
10 AXCELIS 17208240 TE Aaperature
11 AXCELIS 17164510 TE Insulator
12 AXCELIS 17174410 TE Insulator
13 AXCELIS 392171 Sapphire Tube
14 AXCELIS 47402 Quartz Lenz UV Backed
15 AXCELIS 412961 Disk Sapphire
16 AXCELIS 280241 Heater Window/Lower Quartz Plate
17 AXCELIS 405241 Heater Window/Quartz Plate Lower Sapphire Coated
18 AXCELIS 396041 Tube Quartz Cooling
19 AXCELIS 281401 Quartz Tube
20 AXCELIS 203669 Bulb H Mod 200 PCU
21 AXCELIS 405231 Sapphire Pin
22 AXCELIS 401261 Orifice Sapphire
23 AXCELIS 472811 Baffle Cooling Heater Window
24 AXCELIS 478401 Showerhead Upper Shielded
25 AXCELIS 479312 Showerhead 8″
26 AXCELIS 313806 Thermocuple Assy
27 AXCELIS 319371 Assy Magnetron Water Cooled
28 AXCELIS 47404 Quartz Plate
29 Tel ES1D10-309946-12 Ring Focus Silicon
30 Tel 1810-221471-24 Showerhead
31 Tel 3D05-100010-11 Shower Head Electrode Cover
32 Tel 1D10-101551-11 Baffle Plate 8″
33 Tel 1D10-101475-11 Baffle Plate 8″
34 Tel 1D10-202988-11 DRM2 Cover Bellows 8″
35 Tel 1D10-202204-12 Electrode Upper Vespel Insert W/Monitor
36 Tel 1D10-100670-13 Electrode Upper
37 Tel 1D10-201429-15 Electrode Upper
38 Tel 1D10-100854-15 DRM2 Baffle Plate
39 Tel 1D10-303124-21 DRM2 Shield Depo
40 Tel 1D10-303124-21-CT Shield Depo
41 Tel 1D10-303124-21-CT Shield Depo
42 Tel 1810-221584-12 Upper Cooling Plate
43 Tel 1810-221471-24 Electrode, Si 100%
44 Tel 1D10-302209-14 Focus Ring Si
45 Tel 1D05-300161-11 Support Shield Depo Q-S1
46 Tel 1D05-200020-11 Shield Depo QU-A-3
47 Tel 1D05-200033-11 Support Shield Depo Q-S5
48 Tel 1D05-400022-14 Window Shield Depo
49 Tel 1D05-300162-70H CT Focus Ring Quartz
50 Tel 1D05-300162-11 Focus Ring Quartz
51 Tel 1D10-407114-11 Kapton Sheet Window
52 Tel 1D10-406500-11 Pin Window Peelc B-1
53 Tel 1D10-406499-11 Sapphire Window
54 Tel 1D10-309697-11 Window DEP P-1 (Hole)
55 Tel 1D05-400022-14 Window Shield Depo (DRM 2)
56 Tel 1D10-404285-11 Pin Adjust
57 Tel 1D10-401935-12 Screw Blind A (DRM 2)
58 Tel 1D10-401106-12 Plug Thin (DRM 2)
59 Tel 1D10-402088-11 Plug SR (DRM 2)
60 Tel 1D10-403927-11 Plug Thick (DRM 2)
61 Tel 1D10-302057-11 JIG Gap
62 Tel 1D10-405256-22 Screw for Upper Quartz Flat (88DD)
63 Tel 1D10-406675-11 Vespel plug for Focus Ring  (88DD)
64 Tel 1D10-406875-11 Pin Support Q-S1 (88DD)
65 Tel 1D10-405257-11 Washer Kapton A (88DD)
66 Tel 3D10-201235-13 Plate, Cooling C912-240-0.2 (HT)
67 Tel 3D10-100844-11 Plate, Shiled (TE GND FLAT)
68 Tel 3D10-101152-13 Plate, Exhaust Y-AL
69 Tel 3D10-101190-11 Ring STM Shield Y-AL
70 Tel 3D10-100845-11 Shuttle BTM Type Y-AL
71 Tel 3D10-302734-12 Shield Depo (TE-GLEX45-FLAT)
72 Tel 1D10-201588-12 Upper Electrode W/Monitor
73 Tel 1D10-202177-12 Upper Electrode Vespel Insert
74 Tel 1D10-303124-21 DRM2 Depo Shield
75 Tel 1D10-406499-11 Sapphire Window
76 Tel 1810-329157-11M Modify Inner Focus Ring (SCCM)
77 Tel ES1D10-310020-11 Si Focus Ring
78 Tel HDL99-040302R2 Focus Ring 2 piece Ceramic Inner
79 Tel 1105-200159 Si Collar Ring
80 Tel 1D10-100854-15 DRM2 BAFFLE PLATE
81 Tel 1D10-101398-11 BAFFLE PLATE
82 Tel 1D10-101475-11. BAFFLE PLATE
83 Tel 1D10-101551-11 BAFFLE PLATE
84 Tel 1D10-102848-13 BAFFLE PLATE Y203
85 Tel 1D10-200734-14 COVER BELLOW
86 Tel 1D10-202177-12 UPPER ELECTRODE, VESPEL INSERT
87 Tel 1D10-201429-15 UPPER ELECTRODE
88 Tel 1D10-201588-12 UPPER ELECTRODE W/MONITOR
89 Tel 1D10-202204-12 UPPER ELECTRODE, VESPEL INSERT, W/MONITOR
90 Tel 1D10-202988-11 DRM2 COVER BELLOW
91 Tel 1D10-204418-12 BELLOW COVER Y203
92 Tel 1D10-204419-12 BELLOW COVER Y203
93 Tel 1D10-204338-13 UPPER ELECTRODE Y203
94 Tel 1D10-303124-21 DRM2 DEPO SHIELD
95 Tel 1D10-309697-11 DEPO WINDOW
96 Tel 1D10-315183-15 DEPO SHIELD Y203
97 Tel 1D10-406499-11 Window Sapphire
98 Tel 3M87-029068-16 Showerhead (High Temp) 300mm
99 Tel 3M10-150159-12 Showerhead (Low Temp) 300mm
100 Tel 3M10-352195-11 Block (Low Temp) 300mm
101 Tel 3M10-101634-11 Low Plate 300mm
102 Tel 3M10-101633-11 Middle Plate 300mm
103 Tel 3M10-313563-11 Diffuser Tube 300mm
104 Tel 3M10-410298-11 Diffuser Tube 300mm
105 Tel 3D10-404449-11 Gaskets Type TEL Shin 12″
106 Tel 2L10-354181-11 Gaskets Type TEL 4W/mk
107 Tel 2L10-354527-11 Gaskets Type TEL 2W/mk
108 Tel 3D10-100280-11 TE-12″ Silicon Cathode (H836)
109 Tel 3D10-302020-11 Vigus- 12″ Silicon Cathode (H912)
110 Tel 3D10-250316-11 Shin-12″ Silicon Cathode Inner (H1283)
111 Tel 3D10-201579-11 Shin-Electrode Upper T10-75-C708
112 Tel 3D10-201761-11 Shin-Electrode Upper D38 (DM-SE)
113 Tel 3D10-201784-11 Shin-Electrode Upper D38 (DM-SE)
114 Tel 3D10-202364-12 Shin-Si CEL Inner (TE-T10-P-Laby)
115 Tel 3D10-202175-11 Shin-CEL Inner (TE-T10-P)
116 Tel 3D10-201089-13 Telius – 12″ Focus Ring
117 Tel 3D10-200499-11 Telius – 12″ Focus Ring
118 Tel 3D10-201348-11 Telius – 12″ Focus Ring
119 Tel 3D10-201448-11 Telius – 12″ Focus Ring
120 Tel 3D10-201448-12 Telius – 12″ Focus Ring
121 Tel 3D10-201448-13 Telius – 12″ Focus Ring
122 Tel 3D10-200585-13 Telius – 12″ Ring Shield Si
123 Tel 3D10-101195-11 Depo Shield
124 Tel 3805-320070-B1 Quartz Injector Straight
125 Tel 3805-320072-B1 Quartz Plug
126 Tel 3805-420016-B1 Quartz Guide
127 EBARA C-3812-388-0001 Retaining Ring 48GRV
128 ASM 70055-00907E Shower Plate SiH4 & TEOS 200mm ASM
129 ASM 70055-70656C Shower Plate (SiH4) 200mm ASM
130 MKS FB13154 Circular Torus

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