Description
The following Semiconductor Spare Parts are only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
| 1 | ULVAC | 1014896 | Viewport EPD |
| 2 | ULVAC | 1016689 | GDS-Shield |
| 3 | ULVAC | 1016698 | Bottom Ring |
| 4 | ULVAC | 1018517 | Baffle |
| 5 | ULVAC | 1018518 | Top Ring 2 Sections |
| 6 | ULVAC | 1019020 | Top Plate |
| 7 | ULVAC | 101980/1016738 | Bottom Plate (Combined Parts) |
| 8 | ULVAC | 2301700 | TUBE, CERAMIC |
| 9 | ULVAC | 2301856 | RING, CERAMIC, ASIQ |
| 10 | AXCELIS | 17208240 | TE Aaperature |
| 11 | AXCELIS | 17164510 | TE Insulator |
| 12 | AXCELIS | 17174410 | TE Insulator |
| 13 | AXCELIS | 392171 | Sapphire Tube |
| 14 | AXCELIS | 47402 | Quartz Lenz UV Backed |
| 15 | AXCELIS | 412961 | Disk Sapphire |
| 16 | AXCELIS | 280241 | Heater Window/Lower Quartz Plate |
| 17 | AXCELIS | 405241 | Heater Window/Quartz Plate Lower Sapphire Coated |
| 18 | AXCELIS | 396041 | Tube Quartz Cooling |
| 19 | AXCELIS | 281401 | Quartz Tube |
| 20 | AXCELIS | 203669 | Bulb H Mod 200 PCU |
| 21 | AXCELIS | 405231 | Sapphire Pin |
| 22 | AXCELIS | 401261 | Orifice Sapphire |
| 23 | AXCELIS | 472811 | Baffle Cooling Heater Window |
| 24 | AXCELIS | 478401 | Showerhead Upper Shielded |
| 25 | AXCELIS | 479312 | Showerhead 8″ |
| 26 | AXCELIS | 313806 | Thermocuple Assy |
| 27 | AXCELIS | 319371 | Assy Magnetron Water Cooled |
| 28 | AXCELIS | 47404 | Quartz Plate |
| 29 | Tel | ES1D10-309946-12 | Ring Focus Silicon |
| 30 | Tel | 1810-221471-24 | Showerhead |
| 31 | Tel | 3D05-100010-11 | Shower Head Electrode Cover |
| 32 | Tel | 1D10-101551-11 | Baffle Plate 8″ |
| 33 | Tel | 1D10-101475-11 | Baffle Plate 8″ |
| 34 | Tel | 1D10-202988-11 | DRM2 Cover Bellows 8″ |
| 35 | Tel | 1D10-202204-12 | Electrode Upper Vespel Insert W/Monitor |
| 36 | Tel | 1D10-100670-13 | Electrode Upper |
| 37 | Tel | 1D10-201429-15 | Electrode Upper |
| 38 | Tel | 1D10-100854-15 | DRM2 Baffle Plate |
| 39 | Tel | 1D10-303124-21 | DRM2 Shield Depo |
| 40 | Tel | 1D10-303124-21-CT | Shield Depo |
| 41 | Tel | 1D10-303124-21-CT | Shield Depo |
| 42 | Tel | 1810-221584-12 | Upper Cooling Plate |
| 43 | Tel | 1810-221471-24 | Electrode, Si 100% |
| 44 | Tel | 1D10-302209-14 | Focus Ring Si |
| 45 | Tel | 1D05-300161-11 | Support Shield Depo Q-S1 |
| 46 | Tel | 1D05-200020-11 | Shield Depo QU-A-3 |
| 47 | Tel | 1D05-200033-11 | Support Shield Depo Q-S5 |
| 48 | Tel | 1D05-400022-14 | Window Shield Depo |
| 49 | Tel | 1D05-300162-70H CT | Focus Ring Quartz |
| 50 | Tel | 1D05-300162-11 | Focus Ring Quartz |
| 51 | Tel | 1D10-407114-11 | Kapton Sheet Window |
| 52 | Tel | 1D10-406500-11 | Pin Window Peelc B-1 |
| 53 | Tel | 1D10-406499-11 | Sapphire Window |
| 54 | Tel | 1D10-309697-11 | Window DEP P-1 (Hole) |
| 55 | Tel | 1D05-400022-14 | Window Shield Depo (DRM 2) |
| 56 | Tel | 1D10-404285-11 | Pin Adjust |
| 57 | Tel | 1D10-401935-12 | Screw Blind A (DRM 2) |
| 58 | Tel | 1D10-401106-12 | Plug Thin (DRM 2) |
| 59 | Tel | 1D10-402088-11 | Plug SR (DRM 2) |
| 60 | Tel | 1D10-403927-11 | Plug Thick (DRM 2) |
| 61 | Tel | 1D10-302057-11 | JIG Gap |
| 62 | Tel | 1D10-405256-22 | Screw for Upper Quartz Flat (88DD) |
| 63 | Tel | 1D10-406675-11 | Vespel plug for Focus Ring (88DD) |
| 64 | Tel | 1D10-406875-11 | Pin Support Q-S1 (88DD) |
| 65 | Tel | 1D10-405257-11 | Washer Kapton A (88DD) |
| 66 | Tel | 3D10-201235-13 | Plate, Cooling C912-240-0.2 (HT) |
| 67 | Tel | 3D10-100844-11 | Plate, Shiled (TE GND FLAT) |
| 68 | Tel | 3D10-101152-13 | Plate, Exhaust Y-AL |
| 69 | Tel | 3D10-101190-11 | Ring STM Shield Y-AL |
| 70 | Tel | 3D10-100845-11 | Shuttle BTM Type Y-AL |
| 71 | Tel | 3D10-302734-12 | Shield Depo (TE-GLEX45-FLAT) |
| 72 | Tel | 1D10-201588-12 | Upper Electrode W/Monitor |
| 73 | Tel | 1D10-202177-12 | Upper Electrode Vespel Insert |
| 74 | Tel | 1D10-303124-21 | DRM2 Depo Shield |
| 75 | Tel | 1D10-406499-11 | Sapphire Window |
| 76 | Tel | 1810-329157-11M | Modify Inner Focus Ring (SCCM) |
| 77 | Tel | ES1D10-310020-11 | Si Focus Ring |
| 78 | Tel | HDL99-040302R2 | Focus Ring 2 piece Ceramic Inner |
| 79 | Tel | 1105-200159 | Si Collar Ring |
| 80 | Tel | 1D10-100854-15 | DRM2 BAFFLE PLATE |
| 81 | Tel | 1D10-101398-11 | BAFFLE PLATE |
| 82 | Tel | 1D10-101475-11. | BAFFLE PLATE |
| 83 | Tel | 1D10-101551-11 | BAFFLE PLATE |
| 84 | Tel | 1D10-102848-13 | BAFFLE PLATE Y203 |
| 85 | Tel | 1D10-200734-14 | COVER BELLOW |
| 86 | Tel | 1D10-202177-12 | UPPER ELECTRODE, VESPEL INSERT |
| 87 | Tel | 1D10-201429-15 | UPPER ELECTRODE |
| 88 | Tel | 1D10-201588-12 | UPPER ELECTRODE W/MONITOR |
| 89 | Tel | 1D10-202204-12 | UPPER ELECTRODE, VESPEL INSERT, W/MONITOR |
| 90 | Tel | 1D10-202988-11 | DRM2 COVER BELLOW |
| 91 | Tel | 1D10-204418-12 | BELLOW COVER Y203 |
| 92 | Tel | 1D10-204419-12 | BELLOW COVER Y203 |
| 93 | Tel | 1D10-204338-13 | UPPER ELECTRODE Y203 |
| 94 | Tel | 1D10-303124-21 | DRM2 DEPO SHIELD |
| 95 | Tel | 1D10-309697-11 | DEPO WINDOW |
| 96 | Tel | 1D10-315183-15 | DEPO SHIELD Y203 |
| 97 | Tel | 1D10-406499-11 | Window Sapphire |
| 98 | Tel | 3M87-029068-16 | Showerhead (High Temp) 300mm |
| 99 | Tel | 3M10-150159-12 | Showerhead (Low Temp) 300mm |
| 100 | Tel | 3M10-352195-11 | Block (Low Temp) 300mm |
| 101 | Tel | 3M10-101634-11 | Low Plate 300mm |
| 102 | Tel | 3M10-101633-11 | Middle Plate 300mm |
| 103 | Tel | 3M10-313563-11 | Diffuser Tube 300mm |
| 104 | Tel | 3M10-410298-11 | Diffuser Tube 300mm |
| 105 | Tel | 3D10-404449-11 | Gaskets Type TEL Shin 12″ |
| 106 | Tel | 2L10-354181-11 | Gaskets Type TEL 4W/mk |
| 107 | Tel | 2L10-354527-11 | Gaskets Type TEL 2W/mk |
| 108 | Tel | 3D10-100280-11 | TE-12″ Silicon Cathode (H836) |
| 109 | Tel | 3D10-302020-11 | Vigus- 12″ Silicon Cathode (H912) |
| 110 | Tel | 3D10-250316-11 | Shin-12″ Silicon Cathode Inner (H1283) |
| 111 | Tel | 3D10-201579-11 | Shin-Electrode Upper T10-75-C708 |
| 112 | Tel | 3D10-201761-11 | Shin-Electrode Upper D38 (DM-SE) |
| 113 | Tel | 3D10-201784-11 | Shin-Electrode Upper D38 (DM-SE) |
| 114 | Tel | 3D10-202364-12 | Shin-Si CEL Inner (TE-T10-P-Laby) |
| 115 | Tel | 3D10-202175-11 | Shin-CEL Inner (TE-T10-P) |
| 116 | Tel | 3D10-201089-13 | Telius – 12″ Focus Ring |
| 117 | Tel | 3D10-200499-11 | Telius – 12″ Focus Ring |
| 118 | Tel | 3D10-201348-11 | Telius – 12″ Focus Ring |
| 119 | Tel | 3D10-201448-11 | Telius – 12″ Focus Ring |
| 120 | Tel | 3D10-201448-12 | Telius – 12″ Focus Ring |
| 121 | Tel | 3D10-201448-13 | Telius – 12″ Focus Ring |
| 122 | Tel | 3D10-200585-13 | Telius – 12″ Ring Shield Si |
| 123 | Tel | 3D10-101195-11 | Depo Shield |
| 124 | Tel | 3805-320070-B1 | Quartz Injector Straight |
| 125 | Tel | 3805-320072-B1 | Quartz Plug |
| 126 | Tel | 3805-420016-B1 | Quartz Guide |
| 127 | EBARA | C-3812-388-0001 | Retaining Ring 48GRV |
| 128 | ASM | 70055-00907E | Shower Plate SiH4 & TEOS 200mm ASM |
| 129 | ASM | 70055-70656C | Shower Plate (SiH4) 200mm ASM |
| 130 | MKS | FB13154 | Circular Torus |
ID-SS5302-2ND
S
