Description
Semiconductor Equipment Spare Parts Service
Valid: These are only for end users. Subject to prior sale without notice. Appreciate your time!
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
| Etching | |||
| No. | Manufacturer | Description | Model |
| 1 | Fusion | UV Stablizer | Fusion 150PC |
| 2 | Lam Research | Oxide Etcher | Auto-etcher 590 |
| 3 | Lam Research | Oxide Etcher | Rainbow 4520 |
| 4 | Tegal | Asher | Tegal 915 |
| 5 | Tegal | Oxide Etcher | Tegal 903e |
| 6 | Tegal | Poly/Nitride Etcher | Tegal 901e |
| Masking | |||
| No. | Manufacturer | Description | Model |
| 1 | Codonics | Printer | VP-95 II |
| 2 | DNS | DNS 629 | SSW-629-B |
| 3 | DNS | Transformer | |
| 4 | DNS | Temp & Humidity Controller | 60A, 80A |
| 5 | Now Technologies | 400ml Resist Reservoir w/ level monitor | |
| 6 | Semix | SOG | TR6132U |
| 7 | SVG | SVG Track w/OAI exposure | 1 Coater / 1 Developer |
| Diffusion/Thin Film | |||
| No. | Manufacturer | Description | Model |
| 1 | Omega | X-Y Recorder | 595 |
| 2 | TEL | Furnace Remote Control Pad | GP230-LG II-HT |
| 3 | Kokusai | Furnace, oxide | DD-813V |
| 4 | TEL | Furnace, poly | Alpha-805CN |
| 5 | SGL Carborn | susceptor, 6″ for Epi | |
| Wet Process | |||
| No. | Manufacturer | Description | Model |
| 1 | Modutek | Wafer Cleaning Sink w/ Dump Rinser | |
| 2 | Semitool | Single Rinse/Dryer w/ TC20, 328 controller | ST260D |
| 3 | Semitool | Solvent Cleaner | WST 406 MG |
| Metrology and Inspection | |||
| No. | Manufacturer | Description | Model |
| 1 | AG Associate | Heat Pulse | 210/M |
| 2 | KLA/Tencor | Alpha Step 200 | AS-200 |
| 3 | Nanometrics | Thickness measurement | 010-0180 |
| 4 | Nanometrics | Nanospec 200 Thickness Measurement | AFT 200 |
| 5 | Rudolph | Ellipsometer | EL III 2C & 5C |
| RF Generator | |||
| No. | Manufacturer | Description | Model |
| 1 | ENI | Controllable ENI RF Generator | AP 400B |
| 2 | ENI | ENI RF Generator | OEM 6 |
| Chiller | |||
| No. | Manufacturer | Description | Model |
| 1 | Accurate Gas Control | Temperature controller for Tegal | 354C |
| 2 | Neslab | Chiller | EN 350 |
| 3 | Neslab | Chiller | RIE 111 |
| 4 | Neslab | Chiller | FTC-350 |
| 5 | VWR System | 1170 | |
| 6 | Julabo | Chiller | FC 1000S |
| 7 | Tegal Chiller | ||
| Other Fab Supply | |||
| No. | Manufacturer | Description | Model |
| 1 | EMPAK | Mask Holder for MPA | B80-60-01A |
| 2 | Entegris | Mask Holder | H92-6025PL |
| 3 | Entegris | 6″ Mask Holder, 250 Thk Bayon | H92-6025-108-5413 |
| 4 | Fluoroware | Mask Holder | H92-6001PW |
| 5 | Fluoroware | Teflon Cassettes, 6″ | A182-60MB |
| 6 | Fluoroware | Teflon Cassettes, 6″ | A194-60MB |
| 7 | H-Square | Wafer Transfer | WT6H |
| 8 | H-Square | 4″ Metal Cassetts | MC-4-P or MC-4 |
| 9 | H-Square | 6″ Metal Cassetts | SQ22766-X |
| 10 | H-Square | 6″ Metal Cassetts | 285-8HC |
| 11 | H Square | Metal Cassette | R-E |
| 12 | Instruments | Chart Recorder | 156 |
| 13 | Sony Video | Graphic Printer | UP-850 |
| 14 | Terra Universial | Vibration Isolation Table | |
Other Parts
| 1 | ADVANCED ENERGY RF 30 S POWER SUPPLY |
| 2 | ALCATEL | ADIXEN APS007 VACUUM PUMP |
| 3 | ALCATEL PASCAL 1005 SD PUMPS |
| 4 | AMAT | APPLIED BACCINI TEMPO LAB TOOLSOLAR CELL PRINTING & DRYING LINE,2016 |
| 5 | ANEST IWATA & VARIAN SCROLL PUMPS |
| 6 | CHROMA 61501 AC SOURCES & PROGRAMMABLE POWER SUPPLIES (QTY) |
| 7 | CTI-CRYOGENICS 9600 CRYO-COMPRESSOR |
| 8 | DESPATCH ECOSPHERE MODEL EC519 ENVIROMENTAL OVEN |
| 9 | DR. SHENK GLASS INSPECTION SYSTEMS (2) |
| 10 | EDWARDS QPD 40 & QPD 80 VACUUM PUMPS LARGE (QTY) |
| 11 | ENI MATCH NETWORK-25D MATCHING NETWORK CONTROLLERS (5) |
| 12 | ENVIROTRONICS MODEL SH27-C-R CHAMBER |
| 13 | FERROTEC e-BEAM | DEPOSITION SYSTEM FOR PARTS |
| 14 | GRANVILLE PHILLIPS 307 & 340 VACUUM GAUGE CONTORLLERS (QTY) |
| 15 | GRANVILLE PHILLIPS 370 STABIL-ION CONTROLLERS (3) |
| 16 | HASKRIS LX2A2 RECIRCULATING CHILLER |
| 17 | INFICON TRANSPECTOR |
| 18 | INFICON UL1000 FAB LEAK DETECTOR SPECTROMETER (PARTS-MACHINE) |
| 19 | IPC BRANSON ASHER & NAPCO 8100-TD ETCHER |
| 20 | LEYBOLD HERAEUS COMVIA IT23 & PENNINGVAC PM 31 CONTROLLERS |
| 21 | LEYBOLD HERAEUS TRIVAC VACUUM PUMPS |
| 22 | NESLAB HX-150 RECIRCULATING CHILLERS |
| 23 | ONTO | RUDOLPH | AUGUST AXI-930 ADVANCED MACRO WAFER INSPECTION SYSTEM |
| 24 | RFPP POWER SUPPLIES & RF50S RF POWER SUPPLIES |
| 25 | SEC SEMICONDUCTOR EQUIPMENT CORP MOD 860 EAGLE OMNI-BONDER |
| 26 | SEREN AUTOMATIC MATCHING NETWORK CONTROMLLERS (3) |
| 27 | SINGULUS SILEX II MODULAR AUTOMATED WET PROCESSING SYSTEM |
| 28 | SOLAR CELL MULTIPLE ZONE REFLOW CURING LINE |
| 29 | SORENSON DCS60-18E & DLM 60-10 POWER SUPPLIES |
| 30 | TAZMO TAZMO MANUAL DIE SLIT COATER | THIN FILM COATING SYSTEM |
| 31 | THERMIONICS E-BEAM GUNS | SOURCES |
| 32 | TPS THERMAL PRODUCTS SOLUTIONS | BLUE M IGF-6680-G-MP550 INERT GAS OVEN |
| 33 | ULVAC VDN601 VACUUM PUMP WITH NB300A BLOWER PACKAGE |
| 34 | VAT VALVES – HUGE SELECTION OF VAT VALVES |
| 35 | VEECO – DEKTAK V 200-Si PROFILOMETER |
| 36 | WISCONSIN OVEN COMPANY SPC-34-HTS/109 REFLOW OVEN |
| 37 | YAMATO DKN602 DRYING OVENS |
SS6188-1-20230918 and SS6188W
