semiconductor equipment and parts-Tegal

Description

Please contact us for the availability of the following used semiconductor equipment and parts-Tegal

[Pls use “CTRL+F “key button to search the model/key word you are interested in]

The items are subject to prior sale without notice. These items are only for end users.

1	6 sets of Tegal 903e, complete, working, 6 inch, we sell them at AS IS.
2	2 Semi-Parts SPI-99-224-001 Center Sensor, CSN-1, PCB, Tegal 99-224-001, 410501
3	2 Tegal 59-011-001, Linkage Top PL Latch, 416899
4	2 Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board, 409774
5	23 Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole, 329146
6	3592 GCA Tegal 6663514 Circulating System (-15C-to +85C)
7	4 Tegal 80-680-059 RF Bulkhead Connector 414628
8	5 Tegal 55-005-001 Drive Loader Belt 329147
9	901E Monthly PM O-ring kit, Tegal P/N
10	93-220-001 REV.A
11	99-173-008 /RFG-8 GENERATOR BOARD / TEGAL
12	BURKS 81-007-145 SEAL PUMP TEGAL SEAL 1/2 TEPOLITE TGL-1013 PHANTOM 407098
13	CABLE MTCH NTWK
14	Carrier ring 4 inch, Tegal P/N
15	Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E
16	Curved indexer block, Tegal P/N 8100-1091
17	CVC FILAMENT EVAPORATOR < 18 DIAMETER X 28″ PYREX BELL JAR >
18	DC POWER DISTRIBUTION
19	DIRECTIONAL POWER DETECTOR MODEL 3008
20	EDWARDS MF100 OUTLET MIST FILTER, P/N A46203000
21	Endpoint cable, Fiber Optic, Tegal P/N 80-207-159
22	EPROM Firmware Load/Unload, Tegal P/N 26-003-001
23	FRONT PANEL INTERFACE BOARD
24	G119148 Tegal Plasmaline 421 & 421RFG Plasma Barrel Etcher w/RF Generator
25	GAS INTERFACE BOARD
26	H140024 Tegal Plasma Etcher System
27	Integrated Circuit Support ICS-40-297-002 Quartz Pin, Tegal 40-297-002, 410475
28	Kit Bellows Assy NW40
29	Lot of 10 Tegal 80-202-189, O-R Viton 7, 1/4ID 1/8W, D70, 410521
30	LOT OF 2 NEW – Tegal Quartz PIN P/N 40-297-001
31	LOT OF 3 NEW TEGAL 80-200-144 BALL BUSHING BEARING 3/8″ BORE 5/8″ OD
32	Lot of 3 Tegal 41-137-001, Chuck, BTTM Flag 903, 410518
33	LOT OF 5 NEW FOAMEX WILSHIRE HT4753 ULTRASOLV SPONGES
34	Lot of 5 Tegal 80-202-190, O-R Viton 10, 1/2ID 3/16W, D70, 410520
35	LOT OF 6 NEW TEGAL 80-200-121 DOUBLE SHIELD BEARING FLANGE
36	Lot of 9 Tegal 55-006-001, Loader Belt, 410505
37	Manifold weldment, 3 line with ultratorr fitting, Tegal P/N 33-091-001
38	Manifold weldment, 4 line with ultratorr fitting, Tegal P/N
39	March Plasmod RF Amp board, Plasma etcher, plasma asher, plasma system
40	March/Tegal Plasmod & GCM-200 Etcher System March Instruments
41	MATCHING NETWORK INTERFACE
42	MEMORY AND BAUD EXPANSION PCB
43	MOTOR, Belt drive Barber Coleman, Tegal P/N
44	New listing CollabRx/Tegal CD1043-00601 Industrial Main Controller Control Module/Plug-In
45	New listing DACSCAN 80-095-278 RW Controller for Tegal 90Xe Etchers
46	New listing MBE-4 PCB FOR TEGAL 9XXe CONTROLLERS PN: 99-207-004
47	New listing Tegal 901e Plasma Etcher
48	New listing Tegal 903e Sensor Interface Spatula SIS-5 99-200-005 M300353
49	NEW Sealed – TEGAL INTERFACE BOARD 99-173-003
50	NEW TEGAL 40-140-003 CERAMIC SHOWER HEAD SHOWERHEAD RING
51	NEW TEGAL 99-80184-02 vacuum sensor PCB board assy
52	Parts for Tegal 901e Tegal 903e etc.Sell as 1 lot.
53	PCB, Process Control, Tegal P/N 99-019-02
54	PCB, Sensor with cables, Tegal P/N 99-089-001
55	PCB, TEGAL Main, Tegal P/N 99-114-001, 99-117-001
56	PCB, Tegal P/N 99-095-001
57	Photocell, Tegal P/N 80-500-007
58	POTTER & BRUMFIELD 80-650-030 12V 50/60HZ RELAY; 1/5HP, 10-AMP, 120VAC 1/3HP, 6-
59	PROFACTURE TEGAL ICG-6 Gas Interface Board
60	R136204 Tegal Plasmaline Barrel Etch Plasma System
61	RF Plasma Product Model: T-502S RF Generator <
62	RING INSULATOR CERAMIC .20-99.5%
63	RING INSULATOR CERAMIC 99.5
64	Semi Parts SPI-99-247-003ALT Spatula Inerface SPI-3, Tegal 99-247-003, 410390
65	Sensor, Cybeq, Siltec, Tegal P/N 0121-6260-100
66	Sensor, E4 Ring Present, Tegal P/N
67	SET OF O Ring Pin Qtz Pin collard Band cont for Lower Electrode
68	SET OF O-RING,ROD SAPPHIRE
69	Shaft, Tegal P/N 50-007-001
70	SHUTTLE INTERFACE BOARD WORKING
71	SHUTTLE INTERFACE PCB SST 3
72	Skan A Matic / Electro-Optical Systems Model: S28011 <
73	SMC / Tegal 98-008-01 Rev-B PCB Assy ULUSP-98008-01
74	Switch, Tegal P/N 80-678-004
75	Switch, Tegal P/N 80-678-014
76	TEGAL 421RFG Plasma Etcher
77	TEGAL 50566-02 AUX RF Controller Control Module Board 83-126-003
78	Tegal 803 Inline Automatic Plasma Etcher
79	Tegal 900E Cassette to Cassette Photoresist Strip/Backside Etching
80	Tegal 903e Plasma ETCHER Quartz Pins, Set of 6, 40-297-002
81	Tegal 98-244-001 Rev. A (original TEGAL board)
82	Tegal 99-385-006 REV B VCC-6 MARLE 2/96 Interface Board UPS Fast Shipping
83	Tegal 9XX Plasma ETCHER RF GASKET, 41-399-001
84	TEGAL # 83-126-002 Rev. B CONTROLLER AUX / RF 50566-02-ISS2 Original Board
85	TEGAL # 83-126-003 Rev. A CONTROLLER AUX / RF 50566-02-ISS2 Original Board
86	TEGAL # 83-126-003 Rev. B CONTROLLER AUX / RF 50566-02-ISS3 Original Board
87	TEGAL # 83-126-003 Rev. C CONTROLLER AUX / RF 50566-02-ISS5 Original Board
88	Tegal , RF Match
89	Tegal / ICS 9XX Plasma ETCHER 6″ CERAMIC RING CHUCK INSULATOR. ICS-40-395-001
90	Tegal / March PLASMOD 100 W Tabletop Plasma Reactor/Asher/Etcher System
91	Tegal 00755601 Temperature Display Board, PCB, 411210
92	TEGAL 211 PLASMA ASHER
93	Tegal 211 Plasma Asher Used
94	Tegal 29-501-001 Kit Retro Cool
95	Tegal 29-596-001 Convection Gauge
96	Tegal 31-406-003 Wafer Sensor Assembly VCE
97	Tegal 31-428-001 Wafer Sensor Emitter
98	Tegal 31-429-001 Wafer Sensor Detector
99	Tegal 33-509-002 Valves with Miscellaneous Plumbing SS-BN8FR8-C
100	Tegal 33-527-001 Bellow Chuck
101	Tegal 37-231-602 Chuck Ring
102	Tegal 37-389-001 Mirror
103	Tegal 39-341-005 / Profracture PRO-39-341-005
104	TEGAL 39-452-002A ARM UPPER LH DOOR T915
105	TEGAL 39-453-001 TEGAL ARM LOWER RH DOOR
106	TEGAL 39-453-002 TEGAL LOWER LH DOOR T915
107	Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum, 410358
108	Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum, 410360
109	Tegal 39-767-002 Insulator Coupling, 410423
110	TEGAL 39-958-001 TEGAL PULLEY TENSION DOOR T915
111	Tegal 40-140-003D, Ring, Insultator, Ceramic, 410361
112	Tegal 40-159-003 Sapphire Rod New Surplus
113	Tegal 40-297-001C
114	Tegal 40-328-007 Block Endpoint
115	Tegal 40-468-001 Window Upper MCR Sapphire
116	Tegal 40-588-003B Insulator Outer 95-00054A
117	Tegal 40-589-002 Cover Clamp
118	Tegal 40-606-004 Ceramic Liner
119	Tegal 40-657-001 Window Observation
120	Tegal 40-658-001 Window Scan Sensor
121	Tegal 40-753-004-3 Disc, Top Oblated Stripper
122	Tegal 41-238-008 RF Shield React Fill
123	Tegal 41-263-001 Flag Optic Sensor
124	TEGAL 415 PLASMA ASHER
125	TEGAL 42-401-001 Bracket Slide Rear LH T915
126	TEGAL 42-401-002 O-Ring, 235 V
127	TEGAL 42-402-001 Bracket Slide Front LH T915
128	TEGAL 42-402-002 Bracket Slide Front RH T915
129	TEGAL 50590 01
130	TEGAL 515 PLASMA ASHER (With Warranty)
131	Tegal 55-008-001
132	TEGAL 58-027-001
133	Tegal 701 Plasma Line match tune network
134	Tegal 701 Plasma Line RF Plasma RF Power Supply
135	TEGAL 80-055-104 Metric Strip Chart Paper Lot of 2
136	TEGAL 80-095-146 Transformer 220/115-24V AC Module T9156-P-1623420
137	Tegal 801 Inline Plasma Etcher
138	Tegal 80-127-823; Lot Of 17
139	Tegal 80-195-031
140	Tegal 80-198-054
141	Tegal 80-200-121
142	TEGAL 80-200-219 “SLIM-TRACK” BARNES ENG. CO.; SLIDE CHAMBER T915
143	Tegal 80-202-186, Timing Belt, 410368
144	Tegal 80-506-10
145	Tegal 80-700-012
146	Tegal 80-871-146, Cable, RF, W/N Connectors, 410525
147	Tegal 81-007-138 Bellow Plug for Plasma Etcher 900 Series
148	TEGAL 81-007-145 SEAL PUMP; TEGAL SEAL 1/2 TEPOLITE (80-095-397)
149	TEGAL 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER
150	Tegal 83-084-001
151	Tegal 900 Circuit boards Lot
152	Tegal 900 series upper Chamber, complete
153	Tegal 901e Etcher Plasma Etch Plasma Etcher Dry Etch
154	Tegal 903 Showerhead Profacture Pro-37-221-002 Electrode Upper 903E, 408766
155	Tegal 903 Showerhead Tech Star Industries TSI-TG221-002, Electrode Upper, 408768
156	Tegal 903E CW 1078-40203 Send/Receive Sender/Receiver Spatula Drive/Driver
157	Tegal 903e Etcher Plasma Etch Plasma Etcher Dry Etch
158	Tegal 903e IGC-5 PCB for Plasma Etcher 99-126-005
159	TEGAL 903E OXIDE ETCHER 150MM CHUCK AND SHUTTLE ASSEMBLY
160	Tegal 903e Pin for Plasma Etcher (40-297-002)
161	Tegal 93-137-009, RF Cable, 410522
162	Tegal 94-400-001, Harness Sensor, 410517
163	TEGAL 965 PLASMA ASHER
164	TEGAL 99-049-003 (Used, Cleaned, Tested 2 year warranty)
165	TEGAL 99-050-008 (Used, Cleaned, Tested 2 year warranty)
166	Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB, 410363
167	TEGAL 99-081-001 Gas control interface, GCS-1 PCB assy, used PCB board
168	TEGAL 99-081-001 Gas control interface, GCS-1 PCB board assy
169	TEGAL 99-082-003 gas control logic, GCL-3 PCB board assy
170	Tegal 99-096-09 DIP Board Rev. G Used Working
171	TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001 402645
172	Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001, 402644
173	TEGAL 99-112-001 Top display control, TDC-1 PCB board assy
174	Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005, 410365
175	Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006, 410366
176	Tegal 99-138-001 PCB Assembly, FAB 98-138-001, 411234
177	TEGAL 99-173-004 REV D RFG-4 RFG4 GENERATOR BOARD >
178	Tegal 99-173-004 PCB, RFG-4, RF Gen Interface, 410387
179	Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410336
180	Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410337
181	Tegal 99-186-001 Rev. 2A Interface Board Att-1 Used Working
182	Tegal 99-187-002 ATO-2 Interface Board PCB Rev. B Used Working
183	Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002, 410367
184	TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE. 411522
185	TEGAL 99-203-004 PCB MNP-4 MTCH NTWK
186	TEGAL 99-206-001 PCB AGCP-1 TEGAL 915
187	Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410333
188	Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410334
189	Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410335
190	Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410388
191	Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410389
192	TEGAL 99-247-003 REV D BOARD PCB >
193	Tegal 99-247-003/J Interface Board SPI-3 Used Working
194	Tegal 9XX Plasma Etcher STEPPER MOTOR RF MATCH, SPI-31-217-002-A, VEXTA PH266L33
195	Tegal CD-1039-00106RW Endpoint Detector w/ Cards 99-208-003 + 83-126-003
196	Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In
197	Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In
198	TEGAL CollabRx Indexer Module CW1048
199	Tegal Cooling Ring for Drie 3200 Tools
200	Tegal Corp Inline Automatic Wafer RF Plasma Etcher Untested As Is 803
201	Tegal Corp. Plasma Inline Etcher As Is for Parts 701
202	Tegal Corporation Plasma Inline 703, 703 RPPS, And 701 Etcher R314
203	Tegal elevator frame assembly
204	TEGAL Front Robot Loader interface
205	Tegal Inline Automatic Wafer RF Plasma Etcher As Is for Parts or Repair 803
206	Tegal March Plasmod 100 W Tabletop Plasma Reactor Asher Etcher System+Beaker
207	Tegal Model 421 Manual PCB 99-011-001
208	Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot, 1
209	Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot, Lot of 2
210	Tegal Model 421, 4″, 100 mm Aluminum Wafer Carrier, 25 Slot, 1
211	Tegal Model 421, 4″, 100 mm Aluminum Wafer Carrier, 25 Slot, Lot of 2
212	Tegal Model 901e / 903e Plasma Etcher COOLING PLATE, 37-222-02 REV A
213	Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS
214	Tegal Model 903e Plasma Etcher DC POWER DISTRIBUTION PCB, 99-142-001
215	Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS
216	Tegal Model 903e Plasma Etcher GAS INTERFACE PCB (ICG-6) 99-126-006
217	Tegal Model 903e Plasma Etcher PRESSURE SENSOR ATM, PRO 31-375-001, NOS
218	Tegal Model 903e Plasma Etcher RING INSULATOR CERAMIC CHAMBER, 40-140-003, NOS
219	Tegal Model 903e Plasma Etcher UPPER CHAMBER GROUND, PRO 29-464-001, NOS
220	Tegal Model 903e Plasma Etcher UPPER ELECTRODE PRO 37-221-002, NOS
221	Tegal Model 9XX Plasma Etcher COUPLING INSULATOR, 39-767-002, LOT OF 3
222	tegal nordson march plasma system super plasmod plasma etcher vacuum AMAT
223	Tegal P/N 31-165-006 Stepping Motor, Carrier
224	Tegal Part # 39-767-003 Rev.A Coupling,Insulator 9XX
225	Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE
226	Tegal PC Board 50566-02, p/n 83-126-003
227	TEGAL PC BOARD DUAL CHUCK SENSOR 99-223-002 – DSN-2 – MACH TEGALA – NEW
228	TEGAL PLASMA 903e Plasma Etcher with ENI ACG-10B RF Generator
229	TEGAL PLASMA ETCH, ELECTRODE, LOWER 39-735-002 REV.M
230	Tegal Plasmaline 411 Asher (Plasma Oven) Ar O2 Asher Etcher
231	Tegal Plasmaline 411 Asher Plasma Oven AR O2 Etcher
232	Tegal Plasmaline 515 Asher (Plasma Oven)
233	TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS! WORKING ? > J
234	Tegal Power Distribution Box – Hoffman Enclosure – 208 Volts 3 Phase
235	Tegal Quartz PIN P/N 40-297-001-E, NEW, 2 each
236	TEGAL RIE Etcher Reactive Ion Etch, ENI ACG-10 RF Generator, Thermo Neslab M75
237	Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400
238	Tegal SPI-80-080-054 Air Cylinder, 411434
239	Tegal SPI-99-247-003 SPI-3, Tegal 99-247-003,
240	Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 324878
241	Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea.
242	Tegal, PC Board – IGC-6, Gas Interface, p/n 99-126-006, Rev C
243	Unit/Tegal CHF3 80SCCM — UFC-1000 — Used
244	Vacuum valve, KF-40. Tegal P/N