Description
Plasmatherm SLR-770 ICP Shuttle Lock ICP Inductively Coupled Plasma Etch System
Please contact us if you are interested in the Plasmatherm SLR-770 ICP etcher equipment. We do not own the items. These items are only for end user. They are subject to prior sales without notice. First come, first serviced. Appreciate your time.
Wafer Size: 6 inch.
Vintage: 2001
Gases:PN2, CF4, O2, BCL3, CL2, PN2, CH4, AR, H2
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