Description
Please contact us for the availability of the Plasma-Therm 790 ICP used Semiconductor Equipment.
| Manufacturer | Plasma-Therm |
| Model | 790 ICP |
| Wafer Size Range |  |
| Minimum | 50 mm |
| Maximum | 200 mm |
| Controller Type | PC Controller Type |
| High Vacuum Pump | Leybold 361C |
| Roughing Pump | Leybold D40BCS |
| RF Generator Model | RFPP RF20M & RF5S |
| Automatch Text | RFPP AM-20 & AM-5 |
| Number of Gas Inputs | Three Gas |
The items are subject to prior sale without notice. These items are only for end users.
SS5732
