Description
Please contact us for the availability of the Oxford Instruments Plasmalab 80 Plus 200mm used Semiconductor Equipment.
| Manufacturer | Oxford Instruments |
| Model | Plasmalab 80 Plus |
| Wafer Size Range |  |
| Maximum | 200 mm |
| Process | Reactive Ion Etch |
| Controller Type | PC Controller Type |
| Software Revision Level | PC2000 Version 1.7A |
| RF Generator Model | Dressler 300Watt, 13.56MHz |
| Automatch Text | Oxford OPT AMU |
| Number of Gas Inputs | Three Gas |
| Process Gases | CF4, O2, Ar |
The items are subject to prior sale without notice. These items are only for end users.
SS5732
