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MASS FLOW TESTER

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Description

Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR


Model: MASS FLOW DEVICE TESTER (MFC TESTER)

MASS FLOW DEVICE TESTER (MFC TESTER) info for your reference.

The Tystar MFC Tester is an inexpensive, hand held, lightweight instrument for the testing of most commercial Mass Flow Controllers and Mass Flow Meters (MFC’s) with a standard 20-pin card edge connector. The data are displayed on a large backlit LCD. A miniature rotary switch is used to select different test points of the Mass Flow Devices. At the back of the instrument is a Printed Circuit Board, PCB, with test points for manual purge or closing the valve of the MFC. It can be used remotely at some distance from the gas control panel, which is sometimes hard to reach. The MFC Tester can measure a number of the following voltages (Set Point, Flow Output, Valve, Zener, and Supply Voltages).

Specifications

  • Display : 0.4″/1.2 mm, Backlit LCD
  • Switch Positions : Off, Control, Output, Valve, Zener Diode,± 15 V
  • Maximum Voltage Range : ±20VDC
  • Accuracy : ±0.02% Full Scale
  • Sampling Rate : 2.5 per second
  • Supply Voltage : +5.00 VDC, (Regulated from MFC Power Supply)
  • Supply Current : 37 mA
  • Input Independence : 1 MΩ
  • Over-ranage Indication: 0- 50°C
  • Size : 3.8″ x 2.4″ x 1.0″ (96 x 61 x 25 mm)
  • Weight:  3.5 oz (100 g)

Tystar is a leading manufacturer of horizontal Low Pressure Chemical Vapor Deposition (LPCVD) diffusion furnaces and specialized Chemical Vapor Deposition (CVD) systems for the semiconductor industry. Our process tools have served research, engineering, and production of integrated circuits, MEMS, optoelectric devices, and other semiconductor materials for over 50 years.

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The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers