Description
Please contact us for the availability of the LAM Research Lam Rainbow 4420 used Semiconductor Equipment.
| Manufacturer | LAM Research Corp. |
| Model | 4420 |
| Wafer Size Range |  |
| Set Size | 200 mm |
| Process | Polysilicon Etch |
| Software Revision Level | 2.2 |
| End Point Detection | Photodiode 405 and 520 |
| RF Generator Model | 1350 MHz Minimatching |
| Number of Gas Inputs | Eight Gas |
| Process Gases | CL2, Ar, O2, CF4, He, CHF3, SF6 |
The items are subject to prior sale without notice. These items are only for end users.
SS5732
