Description
Spare Parts for Lam Research Plasma Etcher:
| 1 | 605-017016-100 PCB,STEPPER MOT DR,CHP |
| 2 | 605-017034-004 CPU,VME,68030 |
| 3 | 605-093406-001 MDL,I/O SER AND PRL |
| 4 | 605-093605-001 MDL,DGTL,I/O xVME-240 |
| 5 | 605-094988-001 ASSY,PCB,LASER,VCE |
| 6 | 605-095490-001 ASSY,PCB,WSO,VCE |
| 7 | 644-099462-001 RLY,SSR,QUAD,25A |
| 8 | 645-009920-001 SWITCH OVERTEMP |
| 9 | 645-092897-006 SW,FL,WTR,PVC |
| 10 | 660-007612-001 POWER SUPPLY +24VDC @ 40 AMP |
| 11 | 660-007613-001 POWER SUPPLY TRIPLE +5 +15 +15 |
| 12 | 660-091820-001 POWER SUPPLY, 24VDC |
| 13 | 660-091821-001 POWER SUPPLY, +5, +15, -15 VDC |
| 14 | 660-098040-001 PWR SPLY/FLTR BD 5/24/+-12,15V |
| 15 | 660-098076-003 PWR,SPLY,MOD,8 OUT |
| 16 | 660-900361-001 PWR SPLY,1 OUT,24 VDC |
| 17 | 666-033100-002 CONT,TEMP 12-CHANNEL, ANAFAZE |
| 18 | 666-033100-003 TEMP.CNTLR.12CH.SPC.W/GFCI |
| 19 | 678-097859-003 HTR,V,FAST ACTING,ANGLE,PM |
| 20 | 678-098055-001 HTR,VLV,ISO,ANGLE,LOPRO |
| 21 | 678-360218-005 HTR,WLDMT,EXH,1.3K L/S TMP |
| 22 | 678-360290-001 HTR, Iso Valve Standoff |
| 23 | 685-008769-001 ELEVATOR, WAFER (HINE) |
| 24 | 685-095314-011 PR SW,100 TORR,KF16,EMC CMPLNT |
| 25 | 685-097330-002 MNMTR,2STPT,100 DEG C,KF16,10T |
| 26 | 685-097978-001 MNMTR,100DEG,KF16,RT ANG,10 T |
| 27 | 685-140283-012 MATCH,2MHZ,2.5KW,VI,4520XL |
| 28 | 685-901230-010 MDL,SPECTROGRAPH,SD1024 G,IEP |
| 29 | 713-011203-001 COVER 90deg ENTRANCE LO |
| 30 | 713-011205-001 COVER,180deg EXIT LOADLOCK |
| 31 | 713-330918-600 SHLD,HT,MANOM SIDE,CHMBR |
| 32 | 713-330920-600 SHLD,HT SIDE,ADPTR PL |
| 33 | 713-330920-601 SHLD,HT SIDE,ADPTR PL |
| 34 | 713-330921-600 |
| 35 | 713-331216-003 NUT, RETAINING |
| 36 | 713-491502-001 HOSE,CLG,PREFMD,UPR MATCH,IN |
| 37 | 713-491503-001 HOSE,CLG,PREFMD,UPR MATCH,OUT |
| 38 | 714-330455-001 STRAP,CNDCT,V/I PRB#1 |
| 39 | 714-330456-001 STRAP,CNDCT,V/I PRB #2 |
| 40 | 714-495015-001 LINER,CHMBR,TRNSN MANF |
| 41 | 715-011492-006 HOLDER,WAFER 6″ STRIPPER |
| 42 | 715-011593-002 PLATE SEAL UPPER ELECTRODE |
| 43 | 715-011622-101 LFTR,WFR 4-PIN FLEX |
| 44 | 715-011622-120 LFTR,WFR 4-PIN FLEX |
| 45 | 715-011622-201 LFTR,WFR 4-PIN FLEX ULTEM |
| 46 | 715-011825-001 PLATE,LOWER END,REACTION CHMBR |
| 47 | 715-028459-001 PLATE, LOWER END |
| 48 | 715-028532-002 RING, COOLING,8″ ELECTROSTATIC |
| 49 | 715-028780-002 PL,LWR END,PMP MANF |
| 50 | 715-030319-001 COV,SCR,BOT GAS R,BSR |
| 51 | 715-031518-002 PLT,WIN CHMBR W/ MONO MTG |
| 52 | 715-031984-003 FR,WDO CHMBR |
| 53 | 715-032012-004 PL,WDO CHMBR,CAPTIVE HDW,A6 |
| 54 | 715-032012-006 PL,WDO CHMBR,CAPTIVE HDW |
| 55 | 715-038653-004 R,CLG,FUJ PERIMETER PIN |
| 56 | 715-130080-006 HLDR,WFR 6″”,TP,W/ALIGN HL |
| 57 | 715-130080-008 HLDR,WFR 8″”,RDC PKT,W/ALIGN |
| 58 | 715-130092-006 HLDR,WFR,6″”,ARM,EXIT,W |
| 59 | 715-130092-008 HLDR,WFR,8″”,ARM,EXIT,W/ALIG HL |
| 60 | 715-330106-003 HSG,MDL RCTN CHMBR,FXD GAP |
| 61 | 715-330180-001 ELCTD,BOT,FXD GAP ESC,LOW TEMP |
| 62 | 715-330394-002 BRKT,CHMBR,LIN,9400W/ PLENUM |
| 63 | 715-330445-002 PL,ADPTR,UPR MATCH,HNG |
| 64 | 715-330445-008 PL, ADPTR, UPR MATCH,DFM |
| 65 | 715-330445-600 PL,ADPTR,UPR MTCH |
| 66 | 715-330451-001 COIL,OUT SEG,12 IN OD |
| 67 | 715-330451-103 COIL,OUT SEG,12IN OD,IEP MOD |
| 68 | 715-330454-101 BAR,CNDCT,COIL |
| 69 | 715-330745-003 HSG,BELLOWS,IMP ALIGN |
| 70 | 715-330746-002 ROD,PLNGR |
| 71 | 715-330768-600 BLK,OFF,BAC |
| 72 | 715-330773-003 COV,TOP,LWR CHAMBER HSG |
| 73 | 715-330825-006 LNR,CHMBR,AL,EXTND,ALL |
| 74 | 715-331131-002 HSG,MDL RCTN CHMBR,FXD GP-SHLD |
| 75 | 715-331217-001 SCR,THUMB,RTNG,BSR BELLOWS |
| 76 | 715-331218-001 BELLOWS COLLAR NUT |
| 77 | 715-360268-002 PL,CHMBR TO VLV |
| 78 | 715-370861-010 ORF,CYL,55HOLES DIA.052 O-RIN |
| 79 | 718-492608-001 MOD,PWR SPLY,VME,ALLI 6 |
| 80 | 765-008372-001 ENCODER, SHAFT |
| 81 | 766-009923-001 VALVE, TEFLON, AIR ACTUATED |
| 82 | 766-090688-003 PNEUMATIC DELAY TIMER, 3.0 SEC |
| 83 | 766-091744-005 VALVE,AIR-ACTVT,BKS ER, COMPRN |
| 84 | 768-090455-001 SWITCH,VACUUM 1/4VCR,31 TORR A |
| 85 | 768-090914-001 SWITCH,VACUUM,1/4VCR |
| 86 | 770-090142-002 CYL,AIR,DBL ROD END |
| 87 | 771-095389-001 XDCR,CONN,HPS 907,W/NWIG |
| 88 | 772-096269-901 RGLTR,MICRO,SST,VCR,M/ |
| 89 | 775-007784-001 FLTR,WAFERGARD,PTFE,VCR,MALE |
| 90 | 778-091827-001 CNTRLR,ANAFAZE,MLS16-LAM 1.00 |
| 91 | 778-091827-102 CONT,TEMP,MLS16 W/HAL PCB |
| 92 | 795-495384-001 CA,FIBER OPTIC,BIFURCATED,72″ |
| 93 | 796-006057-001 VALVE, THROTTLE-KF50 |
| 94 | 796-006238-001 CONTROLLER, THROTTLE VALVE |
| 95 | 796-006238-002 CONT,THROTTLE VLV,AC2,LO-PRESS |
| 96 | 796-019591-003 MNMTR,100 MT,DEP TRAP,KF16-KF1 |
| 97 | 796-060721-002 VLV, DIAPH, LP, NC, 1/4″ FFVCR |
| 98 | 796-091975-003 V,ANGLE,FAST ACT,NW40,1 PORT |
| 99 | 796-093064-040 VLV,ANGLE,PNEU,ALUM,SER 26 |
| 100 | 796-093088-007 CONT,ADAPT PRESS VLV,SER 64 |
| 101 | 796-094363-001 VLV,ANGLE,LOPRO,ISO FLG,1.50 |
| 102 | 796-094747-002 VLV,2 STG,L PF,NW 25,1.5 IN |
| 103 | 796-095595-001 V,ANL,ISO,2.5″ |
| 104 | 796-096550-001 MANOM,MINI-BARATRON,20T,10RA |
| 105 | 796-098290-002 CONT,ADAPT,PRESS VLV,SER 65 |
| 106 | 797-900918-003 UPC 8130 50sccm He |
| 107 | 799-095435-001 ASSY,ARM,R.H.,VCE |
| 108 | 799-095459-001 ASSY,ARM,L.H.,VCE |
| 109 | 799-550204-001 DR,ASSY,LIP,VCE4 |
| 110 | 799-550204-001 ROBOT,MAG-7 |
| 111 | 799-550225-001 ASSY,ROT DR VCE |
| 112 | 799-550236-001 PLATF,ASSY,VCE-4 |
| 113 | 799-550530-001 ASSY,WFR ROT MDL |
| 114 | 799-550628-001 ROBOT,MAG-7 |
| 115 | 799-550630-001 DUAL ARM ASSY,MAG 7 |
| 116 | 810-015932-001 ASSY PCB DIR AUTOTUNE |
| 117 | 810-015987-101 | ASSY,PCB,TCP AUTOTUNE |
| 118 | 810-017003-005 | ASSY,PCB,DIP,HIGH FREQU |
| 119 | 810-017004-001 ASSY, PCB, SOLENOID, INTERLOCK |
| 120 | 810-017004-004 ASSY,PCB,SOL INTLK,LOW PWR DRV |
| 121 | 810-017006-001 ASSY PCB TEMP SENSOR |
| 122 | 810-017007-001 ASSY, PCB, CONVECTRON TUBE |
| 123 | 810-017008-001 ASSY PCB TEMP SENSOR AMP |
| 124 | 810-017012-001 ASSY PCB HEARTBEAT |
| 125 | 810-017012-002 ASSY PCB HEARTBEAT |
| 126 | 810-017016-001 ASSY STEPPER PCB MOTOR DRIVE |
| 127 | 810-017018-002 ASSY, PCB, GAP MOTOR CONTROLLER |
| 128 | 810-017021-001 | ASSY PCB LIFTER FILTER |
| 129 | 810-017031-004 | ASSY, PCB, ADIO |
| 130 | 810-017033-003 ASSY, PCB, SRAM 512K |
| 131 | 810-017034-004 ASSY,PCB,VME,68030 |
| 132 | 810-017034-005 ASSY,PCB,VME,68030 PM |
| 133 | 810-017034-300 ASSY,PCB-CPU6,68010, CLASSIC |
| 134 | 810-017034-810 ASSY,PCB,VME,68030 PM 8MB |
| 135 | 810-017035-002 ASSY PCB SASI (MOD) |
| 136 | 810-017035-010 ASSY,PCB,SASI INTFC |
| 137 | 810-017038-002 PCB SERIAL I/O-2 |
| 138 | 810-017082-004 | ASSY,PCB,16 CHAN HTR CNTRL |
| 139 | 810-017083-001 ESC RF FILTER PCB |
| 140 | 810-017086-018 | ASSY,PCB,ESC PWR SPLY CONFIG |
| 141 | 810-017086-118 | ASSY,PCB,ESC PWR SPLY CONFIG |
| 142 | 810-017093-001 ASSY, PCB, GAP MOTOR CONTROLLER |
| 143 | 810-017094-001 ASSY,PCB,GAP BREAKOUT |
| 144 | 810-017094-002 ASSY,PCB,GAP BREAKOUT |
| 145 | 810-017095-004 ASSY,PCB,I/O MB,ENVS EXP |
| 146 | 810-017095-010 ASSY,PCB,I/O,MTHBD,030,ESC-OK |
| 147 | 810-017096-001 ASSY,PCB,SLOT 1,I/O MOTHE |
| 148 | 810-017388-003 | ASSY,PCB,VME ETHERNET ADRS |
| 149 | 810-034806-105 | ASSY,PCB,HALO/VCI INTRF-6 |
| 150 | 810-034817-003 | ASSY,PCB,ISI INTFC T_MATCH,PM |
| 151 | 810-034821-006 | ASSY,PCB,PM,CPU,ETHERNET/RF MTH |
| 152 | 810-190549-003 | ASSY,PCB,GND FLT INT |
| 153 | 810-330490-001 | ASSY,PCB,FLTR,ESC |
| 154 | 810-370540-005 | ASSY,PCB,CONN BRKOUT |
| 155 | 810-370749-001 | ASSY,PCB,INTLK,PM |
| 156 | 810-370749-101 | ASSY,INTLK PCB,ND,SW,NEG |
| 157 | 810-370845-001 | ASSY,INTLK PCB,ND,SW,NEG |
| 158 | 810-370845-002 | ASSY,INTLK PCB,ND,UNSW,NEG |
| 159 | 810-492524-001 | ASSY,PCB,SIG TWR,TM,MUXI/O |
| 160 | 810-492571-002 | ASSY,PCB,XPRT MUX I/O |
| 161 | 810-492571-003 ASSY,PCB,XPRT MUX I/O |
| 162 | 810-492740-001 | ASSY, PCB, LL PMP INTFC |
| 163 | 810-550033-001 PCB, SGL, CCD, CARR |
| 164 | 810-707183-001 | ASSY,PCB,ENGENUITY |
| 165 | 810-707183-011 | ASSY,PCB,ENGENUITY |
| 166 | 810-707183-012 | ASSY,PCB,ENGENUITY |
| 167 | 839-006528-001 WLDMT,MANOMTR,ISO SYS,AIRLOCK |
| 168 | 839-013517-001 WLDMNT, SOFT PUMP-DOWN |
| 169 | 839-013517-002 WLDMNT, SOFT PUMP-DOWN |
| 170 | 839-013521-001 VALVE ISO 1 1/2 MODIFICATION |
| 171 | 839-013900-001 WELDMNT MOD VALVE ISO 4″ |
| 172 | 839-013901-001 WLDMT MOD VALVE THROTTLE |
| 173 | 839-014757-030 WELDMENT,GAS FEED |
| 174 | 839-024453-100 WLDMT,VAC LN,CLAMPING/COOLING |
| 175 | 839-029227-100 WLDMT,HE LINE W/MANO ADAPTER |
| 176 | 839-031766-001 BELLOWS,LIFTER |
| 177 | 839-032766-002 ASSY, TC, J-TYPE, LOW TE |
| 178 | 839-140291-001 WLDMT,MANOM ISO SYS,AL |
| 179 | 839-330266-003 WLDMT,PENNING GAUGE |
| 180 | 839-330268-002 WLDMT,AUX CHMBR PORT,KF-25 VLV |
| 181 | 839-330268-003 WLDMT,AUX CHMB PT,ISO SYS,ALLI |
| 182 | 839-330423-001 WLDMT, NUPRO, MANO, ISO |
| 183 | 839-330743-003 BLWS,BTM,ROD LFTR |
| 184 | 839-330906-002 WLDMT,PRCS GAS,CHMBR,TOP GAS |
| 185 | 839-330906-910 WLDMT,PRCS GAS LINE,CHMBR,9600 |
| 186 | 839-331154-003 WLDMT, MANF BLOCK, TOP GAS |
| 187 | 839-331155-001 WLDMT,TOP GAS DISTRN |
| 188 | 839-331158-003 WLDMT,FLG,CHMBR INL,TOP |
| 189 | 839-350005-002 WLDMT,HE EVAC,LWR MTCHBX,LG |
| 190 | 839-360141-001 WLDMT, A0V 90, He CLG |
| 191 | 839-360142-001 WLDMT, A0V 90A, 93, He CLG |
| 192 | 839-360161-001 WLDMT,LINE,He EVAC,He |
| 193 | 839-360162-001 WLDMT,LINE,He EVAC,AOV 92,10RA |
| 194 | 839-360169-001 WLDMT,TMP N2/AOV 85 |
| 195 | 839-360218-001 WLDMT,MANF,TMP,EXH-1000L |
| 196 | 839-360243-002 WLDMT,EVAC LINE,He,RGHG MANF |
| 197 | 839-360247-004 MANF ASSY,RGHG BYP,UNIV |
| 198 | 839-360299-001 WLDMT,MANF,EXTN,ISO VLV |
| 199 | 839-360313-002 ASSY,WLDMT,TMP N2,AOV 14 |
| 200 | 839-440672-001 WLDMT,VAC,PORT,ALLI |
| 201 | 839-440829-002 WLDMT,MNFLD,CHMBR MANOM,4520XL |
| 202 | 839-460038-001 WLDMT,BELLOWS,FEEDTHRU |
| 203 | 839-460152-006 WLDMT,ELCTD,STP CHMBR |
| 204 | 839-480111-003 WLDMT,INLET,GAS LINE,4520 A6 |
| 205 | 839-480293-002 ASSY,MANF,TMP EXH,ALCATEL |
| 206 | 839-482199-003 WLDMT,VLV,VENT,LEFT, ORF,ALLI 6 |
| 207 | 839-495013-001 LINER,CHMBR,VAT 65,TR |
| 208 | 839-495013-002 LINER,CHMBR,VAT 65,TRNSN MANF |
| 209 | 843-010364-001 KIT,RAINBOW GAP REBUILD |
| 210 | 853-001983-011 ASSY ENDPT DET – DUAL |
| 211 | 853-011141-003 ASSY BRAKE RF GAP |
| 212 | 853-011142-001 ASSY MOTOR RF GAP |
| 213 | 853-011168-002 ASSY,GAP DR MOT PTCTR & B/O |
| 214 | 853-012100-003 ASSY ARM HOUSING |
| 215 | 853-012123-001 ASSY,ARM DRIVE,HARMONIC |
| 216 | 853-012123-002 ASSY,ARM DRIVE,HARMONIC |
| 217 | 853-012123-003 ASSY,ARM DRIVE,HARMONIC |
| 218 | 853-012123-004 ASSY,ARM DRIVE,HARMONIC |
| 219 | 853-012123-500 ASSY,ARM DRIVE,HARMONIC |
| 220 | 853-012230-002 ASSY, GATE, INR |
| 221 | 853-012500-002 ASSY,EDGE SNSR |
| 222 | 853-012500-003 ASSY,EDGE SNSR |
| 223 | 853-012525-001 ASSY LIFTER/SPINNER |
| 224 | 853-012525-002 ASSY,LFTR/SPNR,1.50 DIA |
| 225 | 853-012550-001 ASSY WAFER SHUTTLE |
| 226 | 853-012600-001 ASSY INDEXER SEND |
| 227 | 853-012600-002 ASSY INDEXER RECEIVE |
| 228 | 853-013541-002 ASSY THROTTLE VALVE, HTD |
| 229 | 853-013542-002 ASSY ISOLATION VALVE, HTD |
| 230 | 853-013671-601 Assembly, 20 POS VLV, Fix Gap, 9600 |
| 231 | 853-013672-001 ASSY SOLENOID VALVE |
| 232 | 853-013720-003 ASSY SPINNER 4600 |
| 233 | 853-015130-002 ASSY RF MATCH GEAR DRIVEN |
| 234 | 853-017163-001 ASSY RF SWITCH BOX |
| 235 | 853-017230-001 ASSY POWER SUPPLY QUAD |
| 236 | 853-017340-001 ASSY, RESISTOR, HEATSINK |
| 237 | 853-017340-002 ASSY, RESISTOR, HEATSIN |
| 238 | 853-017370-003 ASSY,PWR SPLY,GAP DR |
| 239 | 853-025054-701 ASSY, HSG, ESC, ABC, PWR, SPLY, 4520, A6 |
| 240 | 853-025903-001 ASSY BASE PL CORES AUTOTUNEIII |
| 241 | 853-025903-002 ASSY,BASE PL,LOFAT |
| 242 | 853-031758-001 ASSY, MANIFOLD PENNING GAGE |
| 243 | 853-031764-001 ASSY, LIFTER, BELLOWS |
| 244 | 853-032190-006 ASSY,UPR MATCH,F/G,6″ |
| 245 | 853-032190-008 ASSY,UPR MATCH,F/G,8″ |
| 246 | 853-032190-306 ASSY,UPR MATCH,F/G, 6 Turn Coil |
| 247 | 853-032294-002 ASSY,T-MATCH,9400 SE |
| 248 | 853-032294-003 ASSY,T-MATCH,XTND RNG W/OPROBE |
| 249 | 853-032908-001 ASSY, ISO ANGLE VALVE 1 1/2 HT |
| 250 | 853-032938-001 ASSY, BYPASS ROUGHING MAN, HTD |
| 251 | 853-032983-001 ASSY, ISLTN ANGLE VALVE, HTD |
| 252 | 853-033887-001 ASSY,CONT,WVDS |
| 253 | 853-033887-003 ASSY,CONT,WVDS,EMC |
| 254 | 853-033887-608 ASSY,CONT,WVDS |
| 255 | 853-034374-003 ASSY,LVL SW,TK |
| 256 | 853-140051-001 ASSY,LFTR CVL,OXD |
| 257 | 853-140051-101 ASSY,LFTR CYL,4520XL OXD R/B |
| 258 | 853-140232-004 ASSY,PWR FEED,4520XL 300 SER |
| 259 | 853-170181-100 ASSY,WLDMT,MXG MANF,LL |
| 260 | 853-170201-100 ASSY,HELIUM CONT,ADV |
| 261 | 853-250001-023 ASSY,RF MATCH,ESC,PK DET |
| 262 | 853-250001-121 ASSY,RF MATCH,ESC,4720,PEAK 2 |
| 263 | 853-330281-002 ASSY,RF SEN BOX,UPR MATCH |
| 264 | 853-330282-600 ASSY,RF SEN BOX,LWR MATCH,50 T |
| 265 | 853-330432-003 ASSY,MANOMETER,RCTN CHMBR |
| 266 | 853-330473-001 ASSY,PWR SPLY,ESC 9600 |
| 267 | 853-330476-001 ASSY,RF FILTER,ESC,9600 |
| 268 | 853-330583-080 ASSY,RF COIL,8 TURN,RD |
| 269 | 853-347282-001 ASSY,PRI L,HTD,WVDS,CONTD |
| 270 | 853-350012-001 ASSY,CHMBR BLST,HTD |
| 271 | 853-350019-004 ASSY,WLDMT,HE,EVAC/CHMR,ESC-BAC |
| 272 | 853-350024-003 ASSY,BHD,HTD,SHORT |
| 273 | 853-370726-001 ASSY,HTR CRTG,150W,W/CORD |
| 274 | 853-370741-001 OVERTEMP HARNESS, LWR |
| 275 | 853-370741-002 ASSY, HARN, OVERTEMP SW, LWR Z2 |
| 276 | 853-370741-003 ASSY, HARN, OVERTEMP SW, LWR TRNS |
| 277 | 853-412368-001 ASSY,BRKT,FBR OPTIC,ALLI 6 |
| 278 | 853-412484-001 ASSY,LID LIFT,ALLI 6 |
| 279 | 853-432079-002 ASSY,ALIGNER,ALLI 6 |
| 280 | 853-460443-003 ASSY,MANF,CHMBR MNMTR,STPR,ALL |
| 281 | 853-460937-001 ASSY,HTD,PRI LN,A6 |
| 282 | 853-461154-001 ASSY,LVL SW,TANK |
| 283 | 853-480102-001 ASSY,MANF,PNEU |
| 284 | 853-482268-001 ASSY,PNEU BLK,SMC,ALLI 6 |
| 285 | 853-492323-001 ASSY,TM CPU BD,MVME147 |
| 286 | 853-495474-001 ASSY,HARN,ESC HV DC |
| 287 | 853-495649-002 ASSY,ESC PWR SPLY,BICEP |
| 288 | 853-540066-005 ASSY,END PT DET (405/520) |
| 289 | 853-540253-003 ASSY,EDS,703nm/261.8nm FLTR |
| 290 | 853-550032-001 ASSY,SEAL,LT SCE |
| 291 | 853-550034-001 ASSY,ALNR ELEX |
| 292 | 853-550361-001 ASSY,AUTODOOR,VCE |
| 293 | Vat PM5 CONT,ADAPT PRESS VLV,SER 64 |
The items are subject to prior sale without notice. These items are only for end users. The trade mark belongs to Lam Research.
Location: USA
Photo is only for website page.
ID-SS6098-S-2
We also have the following Lam Research Plasma Etcher for sale.
- Lam Research Alliance A6 9600PTX/DFM 2×2 System
- Lam Research TCP 9400se
- Lam Research Alliance A6 9400PTX
- Lam Research Alliance A6 4520 System
- Lam Research 9400SE
- Lam Research Rainbow 4420
Lam Research Spare parts:
