Lam Rainbow 4520

Lam Research Rainbow 4520 Envision Software ESC 150MM Tool, Lam Rainbow 4520

Lam Rainbow 4520 Envision Software ESC 150MM Tool, totally refurbished back to OEM Specifications.

The Lam Research Rainbow 4520 Standalone System is a single wafer, vacuum load-locked low pressure oxide etch system for etching 0.5um Contact holes at aspect ratios of <4:1. This system features a low pressure main chamber for anisotropic etching of dielectric films with low conductance manifold, pick and place wafer transport system with non-wafer contact optical alignment, flat or notch orientation and active temperature control of upper and lower electrodes. The process makes use of a low polymer forming chemistry for high selectivity to polysilicon. The system can also include a Monochromator for automatic endpoint on exposed oxide.

Features

• Single Wafer Etching
• Wafer Temperature Control
• Variable Gap Spacing
• Parallel Plate Reactor
• Inductive RF Auto Tuning
• Simple and Efficient Design

Applications:

• Contact Etch
• Planarization
• Via Etch
• Trench Mask Etch
• Pad Etch

Benefits:

• Individual Wafer Etch for Repeatable Results
• Reduced Loading Effects
• Profile Control
• Extended Over Etch Capable
• End Point Detector
• Wide Process Window
• Proven Oxide Etch Technology
• Fast, Accurate RF Tuning for Precise Etch Rate Control
• Reduced Defect Densities
• Ease of Maintenance
• Low Cost Of Ownership