Description
Please contact us for the availability of the Denton DV-SJ/26 E-Beam Evaporator used Semiconductor Equipment.
| Manufacturer | Denton |
| Model | DV-SJ/26 |
| Description | E-Beam Evaporator, 4 Pocket |
| Vacuum System | Cryo Pumped |
| Load Lock Included | No |
| E Beam Power Supply |  |
| High Voltage Maximum | 8 kV |
| Number of Guns Controlled | 1 |
| Lateral/Longitudinal Beam Sweep | Temescal XYS 8 Sweep Control |
| Electron Source Type | Four Pocket |
| Crucible Size | 7.00 cc (0.43 cu in) |
| Vacuum System | CTI Cryogenics Cryotorr 10 CTI Cryogenics 8500 Compressor Manual Vacuum system controller |
| Gas Inputs | Two |
| Gas Input Control | Mass Flow Controllers |
| Substrate Heaters | Yes |
| Film Thickness Monitor | Yes |
| Other Information | Water cooled stainless steel chamber Substrate rotation(2) MKS 2259B Mass Flow Controllers – 100 sccm Inficon IC 6000 Deposition Controller High voltage glow discharge supply and controller. Glow discharge not installed in chamber. |
The items are subject to prior sale without notice. These items are only for end users.
SS5732
