Description
Please contact us for the availability of the CHA Industries SEC-1000-RAP Electron Beam Evaporator used Semiconductor Equipment.
| Manufacturer | CHA Industries |
| Model | SEC-1000-RAP |
| Description | Electron Beam Evaporator |
| Vacuum System | Cryo Pumped |
| Load Lock Included | No |
| E Beam Power Supply |  |
| High Voltage Maximum | 8 kV |
| Number of Guns Controlled | 1 |
| Lateral/Longitudinal Beam Sweep | Temescal Sweep Control |
| Electron Source Type | Six Pocket |
| Crucible Size | 15.00 cc (0.92 cu in) |
| Vacuum System | CTI 10 Cryopump LN2 Cold Trap Model MPT-300 Molecular Sieve Mechanical Pump Trap (100 Watt) CTI 8500 Compressor Edwards E2M40 Mechanical Pump |
| Gas Inputs | One |
| Gas Input Control | Other |
| Substrate Heaters | Yes |
| Film Thickness Monitor | Yes |
| Other Information | Auto-Tech II Valve Sequence Control Motorized Hoist Assembly, 1/2HP Six Pocket Ebeam Source–Temescal STIH-270-2MB6 Inficon XTC Deposition Process Controller, Two Crystals Installed Temescal CV 8 Ebeam Power Supply, 8kV output 6kW Substrate Heater Supply w/ 6kW Heater Array (2) Single Resistance Sources w/ 2kW Power Supply 8.5″ Dia. Flat Plate Planetary Fixturing With Spring Clip Specimen Retainers–Temescal Series TP-2 25.5″ Stainless Steel Bell Jar , Water Cooled, (1) Viewport, (2) 2-3/4″ CF Flanges Manual Shutter Assembly Manual Pocket Rotation Serpentine Cryocoil Assembly NB: The ION Tech power supply photoed is NOT included. |
| Power Requirements | 120/208 V 110.0 A 60 Hz 3 Phase |
The items are subject to prior sale without notice. These items are only for end users.
SS5732
