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CAL-STAR 400 FLOW CALIBRATOR

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Description

Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR


 

Model: CAL-STAR 400 MASS FLOW CALIBRATOR

CAL-STAR 400 MASS FLOW CALIBRATOR info for your reference.

The Tystar CAL-STAR 400 Mass Flow Calibrator is a portable, secondary standard test instrument designed for easy field calibration of all commercially available mass flow meters and mass flow controllers with standard pin configuration.

The CAL-STAR 400 includes four precision Mass Flow Meters (Flow Standards) with selected ranges from 0 to 10 slpm as reference units. The reference Mass Flow Meters are calibrated with traceability to NIST Standards.

The CAL-STAR 400 comes with an optional Windows-based data collection software which inputs data obtained in real-time to a built-in spreadsheet program. The data can be represented in graphical form for further analysis and evaluation. For each flow calibration, a graph is created which compares the test unit with the standard readout. The test data are transferred to a word processor where a calibration document is generated. The CALSTAR 400 data collection software has a user friendly menu for easy access to new and previously saved calibration data.

Controls & Functions

  • ON/OFF Power Switch
  • Flow Standard/Test Unit Display Switch
  • Flow Standard Selection Switch
  • Auto-Zero Switch
  • Set Point Selection Digital Switch
  • Test Unit Electrical Connection
  • Gas Inlet/Outlet Frttings
  • 5-Digital Set Point/Flow Digital Display Meter

Performance

  • Standard Ranges: 0 – 200 seem
    0 -1 slpm
    0- 5 slpm
    0 -10 slpm
  • Other ranges at request
  • Accuracy +/-1.0% of full scale
  • Repeatability +/-0.2% of full scale
  • Settling Time <1.5 seconds
  • Linearity +/-0.5% of full scale
  • Gas Pressure 10-60 psig (69-413 kPa)
  • Temperature 0 … 50°C

Electrical

  • Input Power: 115 VAC/.77 A or 230 VAC/1.2 A

Mechanical

  • Gas Fittings: 1/4″ Face Seal, (VCR) inlet and oulet
  • Gas Tubing: 316L SS/15u in. Ra
  • Leak Integrity: <10-9 atm cm3/sec He

Dimensions

  • Height: 7.0″ I 185 mm
  • Width: 16.5″ / 420 mm
  • Depth: 12.6″ I 320 mm
  • Weight: 43 lbs/ 19 kg

Tystar is a leading manufacturer of horizontal Low Pressure Chemical Vapor Deposition (LPCVD) diffusion furnaces and specialized Chemical Vapor Deposition (CVD) systems for the semiconductor industry. Our process tools have served research, engineering, and production of integrated circuits, MEMS, optoelectric devices, and other semiconductor materials for over 50 years.

The trademarks of the equipment and parts contained on this page belong to the Original Equipment Manufacturers.

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The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers