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AIXTRON 2000HT

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Description

AIXTRON 2000HT MOCVD SYSTEM

Nitride Configuration (GaN)

    Planetary Reactor with Gas Foil Rotation

    Throughput: 7 X 2″ wafers.

    RF Cooling Wafers

    Gases used: N2, H2, SiH4, HCI, and NH3

    Contains:  (7) MO BATHS, (4) LAUDA-S RM6, (3) NESLAB RTE-111

    MO used: TMGa, TMAI, Cp2Mg, TEGa, TMln,

    PC Controller

    HP VECTRA PC.

    Reactor Temperature Gauge: Eurotherm 

    Reactor Pressure Gauge: MKS 600 Controller.

    Pressure Balance Gauge: Eurotherm

    Temperature Control System: Luxtron 100C Optical Fiber.

    Braun AIX 2000HT Glove Box with Siemens

    SIMATIC Opt 7 Control

    Huttinger Big 80/50 Generator

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