Description
AIXTRON 2000HT MOCVD SYSTEM
Nitride Configuration (GaN)
Planetary Reactor with Gas Foil Rotation
Throughput: 7 X 2″ wafers.
RF Cooling Wafers
Gases used: N2, H2, SiH4, HCI, and NH3
Contains: (7) MO BATHS, (4) LAUDA-S RM6, (3) NESLAB RTE-111
MO used: TMGa, TMAI, Cp2Mg, TEGa, TMln,
PC Controller
HP VECTRA PC.
Reactor Temperature Gauge: Eurotherm
Reactor Pressure Gauge: MKS 600 Controller.
Pressure Balance Gauge: Eurotherm
Temperature Control System: Luxtron 100C Optical Fiber.
Braun AIX 2000HT Glove Box with Siemens
SIMATIC Opt 7 Control
Huttinger Big 80/50 Generator
Valid Time: Subject to prior sale without notice.
SS171559004478/171559014035