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Airco Temescal BJD-1800 Filament Evaporator–Cryo Pumped

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Description

Please contact us for the availability of the Airco Temescal BJD-1800 Filament Evaporator–Cryo Pumped used Semiconductor Equipment.

Manufacturer Airco Temescal
Model BJD-1800
Description Filament Evaporator–Cryo Pumped
Vacuum System Cryo Pumped
Vacuum System CTI Cryotorr 8
CTI compressor, Water cooled
Helium lines and CTI regeneration controller
Base pressure in the clean chamber will be in 10-8 Torr range after extended pump down time.
Film Thickness Monitor Yes
Other Information Source Chamber
18″ Dia x 18″ High, water cooled, 304 stainless steel
Source Tray

  • 18″ Dia flat plate with 10 1″ dia. feedthrough ports
    Source Configuration
  • 2 crystal holders with shutters
  • 1 EMI EMS 7.5V 600A DC Power Supply
  • 2 Inficon feedthroughs with air
  • 2 Oscillators
  • 1 Inficon IC 5 Deposition Controller
  • Granville Philips 307 Gauge Controller with process control
Power Requirements 208 V     70.0 A     60 Hz     3 Phase

The items are subject to prior sale without notice. These items are only for end users.

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