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SemiStar Corp. Semiconductor Equipment Parts Service

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Karl Suss

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Suss MA100e

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SUSS MicroTec / KARL SUSS MA8/BA8

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Karl Suss FC 250 Die Bonder

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Semiconductor Equipment Parts

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Karl Suss PA 200 Prober

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Mask Aligner and parts

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Karl Suss FC 150 Flip Chip Bonder

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Semiconductor Equipment Parts

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Wafer Probe Tester Metrology

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Karl Suss RA120M

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SUSS MA6/BA6

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KARL SUSS / MICROTEC MA 6 Mask aligner

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Suss MA100e

SUSS MicroTec / KARL SUSS MA8/BA8

Karl Suss FC 250 Die Bonder

Semiconductor Equipment Parts

Karl Suss PA 200 Prober

Mask Aligner and parts

Karl Suss FC 150 Flip Chip Bonder

Semiconductor Equipment Parts

Wafer Probe Tester Metrology

Karl Suss RA120M

SUSS MA6/BA6

KARL SUSS / MICROTEC MA 6 Mask aligner