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OEMs: AG Associates
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SemiStar Corp. Semiconductor Equipment Parts Service

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Semiconductor equipment parts in Asia

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Denton Explorer 14

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SFI endeavor Sputtering tool

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STS Multiplex ICP DRIE

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AMAT TEL Novellus Varian Ceramic Heaters, MCA E-Chuck Assy

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O Rings

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KLA-Tencor SENSARRAY 2

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sputtering target

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FSI Excalibur 2000

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

Semiconductor equipment parts in Asia

Denton Explorer 14

Used Semiconductor Equipment

SFI endeavor Sputtering tool

STS Multiplex ICP DRIE

AMAT TEL Novellus Varian Ceramic Heaters, MCA E-Chuck Assy

O Rings

KLA-Tencor SENSARRAY 2

Semiconductor Equipment Spare Parts

Semiconductor Equipment Spare Parts

sputtering target

FSI Excalibur 2000