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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
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Ekrubnano
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Oxford
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PlasmaTherm
Premtek
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SemiStar Corp. Semiconductor Equipment Parts Service

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PVD

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Varian Spare Parts

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Varian Spare Parts

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SCT/CHA MARK 50

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Evaporators Semiconductor Equipment

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Honeywell Sputtering Products 59Ti (Titanium) Target

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Johnson Matthey Sputtering Target

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Shrader Aluminum Sputtering Target

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Denton Vacuum DV502A

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Ted Pella EFFA Turbo II Evaporator

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Temescal SFIH-270-2 40cc electron beam source

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Kurt Lesker PVD75 ebeam and thermal deposition system

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Edwards Auto 500 electron beam evaporator

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

Varian Spare Parts

Varian Spare Parts

SCT/CHA MARK 50

Evaporators Semiconductor Equipment

Honeywell Sputtering Products 59Ti (Titanium) Target

Johnson Matthey Sputtering Target

Shrader Aluminum Sputtering Target

Denton Vacuum DV502A

Ted Pella EFFA Turbo II Evaporator

Temescal SFIH-270-2 40cc electron beam source

Kurt Lesker PVD75 ebeam and thermal deposition system

Edwards Auto 500 electron beam evaporator