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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
Electroglas
F.E.I.
Gasonics
Glow-Research
HP Agilent
Hitachi
KLA-Tencor
Lam Research
Matrix
MRC
NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
Tegal
Temescal
TES
Tystar
USIC -Wafers
Pumps
Chillers
Si Wafer Carriers
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SemiStar Corp. Semiconductor Equipment Parts Service

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Quartz Ceramic Silicon

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AG Associates Ceramic Shield

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7310-2904-03 or 7310-2904-06

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Super K-SiC RTP Susceptor

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Quartz for Furnace LPCVD

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Tegal Chamber Parts

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AMAT Chamber Parts

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Slip Free Ring

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AG Quartz Tube Tray

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Customized Quartz, Ceramic Silicon

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Sintered SiC (SSiC) Susceptor Tray

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AMAT Quartz, Ceramic Silicon

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Lam Research Novellus Gasonics

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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AG Associates Ceramic Shield

7310-2904-03 or 7310-2904-06

Super K-SiC RTP Susceptor

Quartz for Furnace LPCVD

Tegal Chamber Parts

AMAT Chamber Parts

Slip Free Ring

AG Quartz Tube Tray

Customized Quartz, Ceramic Silicon

Sintered SiC (SSiC) Susceptor Tray

AMAT Quartz, Ceramic Silicon

Lam Research Novellus Gasonics