Description
Please contact us for the availability of the Plasma-Therm VLR 700 VLR-PM1-ICRB-PM PECVD used Semiconductor Equipment.
| Manufacturer | Plasma-Therm |
| Model | VLR 700 VLR-PM1-ICRB-PM |
| Wafer Size Range |  |
| Minimum | 50 mm |
| Maximum | 200 mm |
| Set Size | 100 mm |
| Number of Chambers | 1 |
| Process Capabilities | Nitride Depostion |
| Chamber 1 Description | 13.5″ Electrode Gas Delivery
|
| Controller Type | PC Controller Type |
| Temperature Control | T/C |
| External Cooling | Water Cooled |
| Accessories | Leybold Pump Package Neslab HX 75 Chiller |
| Other Information | Computer #1 dual boot VxWorks Wind River Systems 5.3.1 BSP version 1.1/1 and Windows 3.11 System Monitor VLR v.1.10Computer #2 NT4, Versaworks 2.5 |
The items are subject to prior sale without notice. These items are only for end users.
SS5732
