Description
Ulvac Technologies Enviro II Dual Chamber Advanced RF Strip System for 8″ Wafers
- Part No: Enviro II
- Configured for 200mm (8″) Wafers
- Date of Manufature: 03/27/2009
- Input: 3Ø , 208VAC, 50/60Hz, 86AChamber Specifications
- Process Chamber (Qty. 2)
- Load-Lock Cassette Chamber (Qty. 2)
- Loadlock Transfer Chamber VTS-6
- Wafer Heating System (Qty. 2)Installed Components
- ASTeX Part No: AX3060-10
- ASTeX Part No: AX3060-14
- ASTeX Part No: AX3153, 500W Load (Qty. 2)
- ASTeX Part No: FI20162-1, 3.0kW Mag Head (Qty. 2)
- ASTeX RF Generator Part No: FI20160-1, 3.0kW Generator
- Brooks Automation Cassette Elevator Part No: VCE-4 (Qty. 2)
- Brooks Automation Robot Part No: 001-7600-02, VacuTran 5
- Dell System Desktop Computer
- ENI RF Generator Part No: OEM-6B-01M3
- ENI RF Generator Part No: OEM-6B-01
- ENI Part No: MWH-5-06076
- ENI Part No: MWH-5-01M3
- Gateway 2000 DesktopComputer
- MKS Instruments Control Valve Part No: Type 153 (Qty. 2)
Condition: Unit pulled from a working service, however due to lack of power supply unable to fully test. Sold As-Is. Complete,working,functional test or refurbished conditions are optional at extra cost.
Valid time: Subject to prior sale without notice.
Contact us for more info pls. Appreciate your time.
ID-SS380-e
