Description
Ultratech Stepper UltraStep 1500 Big Field 1:1 Projection Stepper System Wafer.
- Lens- 1.0mm
- Illumination field size- 39×18
- Light pipe type- flys eye
- Field size- 30×18
- Reticle Stage type- 3×5
- Computer type- 362
- HPL, OS Rev-7.3.2, A.4.1 Rev D
- Air probe type- Round
- Edge switch- Optical
- Theta stage type- Standard
- Wafer chuck size- Type-5″ Round
- Loader Type- Automation 5″
Condition: It was complete,working, however due to lack of power supply unable to fully test. Sold As-Is. Complete,working,functional test or refurbished conditions are optional at extra cost.
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-SS380-e
