Typical NANOTECHNOLOGY Lab Fab Equipment

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Typical NANOTECHNOLOGY Lab Fab Equipment

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The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

1 3D Printer – Prusa I3 MK3S (PLA/ABS/PETG) (FlexFill/Ninjaflex)
2 3D Printer – Prusa SL1 (tough resin) (flexible resin)
3 Advanced Imaging PC
4 Angstrom Glovebox – Inert PureLab HE
5 Assorted spinners and hot plates
6 Atomic Force Microscope – Bruker Dimension Icon
7 Atomic Layer Deposition (ALD) – PicoSun R-200
8 ATOMIC LAYER DEPOSITION SYSTEM,ALD Equipment: SAVANNAH S200-ALD
9 Confocal Raman Microscope – Thermo Scientific DXR
10 Dicing Saw – Disco DAD3220
11 Dual Beam Focused Ion Beam – Scanning Electron Microscope (FIB-SEM) – FEI Helios NanoLab G3 CX
12 Electron Beam Lithography System – Raith eLiNE
13 Electroplating System – Nickel – Silicon Valley Wafer Plating: The Immersion – Beaker-on-a-Stick System
14 Evaporator Equipment: Airco FC-1800
15 Evaporator Equipment: CHA Evaporator
16 Evaporator Equipment: CHA Mark 50
17 Evaporator Equipment: Temescal BJD-1800
18 Evaporator Equipment: Temescal FC-1800
19 Evaporator Equipment: Temescal FC-1800
20 Evaporator Equipment: TES FC-1800
21 Evaporator Equipment: Varian 3120 E-Beam
22 Fourier Transform Infrared Spectroscopy (FTIR) with photoelastic modulator – Bruker Tensor 27
23 ICP DRIE Equipment: STS ICP Bosch Process
24 ICP DRIE Equipment: STS ICP HRM
25 ICP DRIE Equipment: STS ICP Multiplex
26 Inspection Microscope – Nikon LV100
27 Laser Writer – Heidelberg Instruments μPG 101
28 Laser Writer – Heidelberg Instruments μPG 101
29 Layout Editor Software – Tanner L-Edit
30 Mask Aligner  – Karl Suss MA-6
31 Mask Aligner  – Karl Suss MA-6
32 Mask Aligner – Karl Suss MA-6
33 Metrology: Awgage-150,Allwin21
34 Metrology: Gaertner L117
35 Metrology: KLA Tencor P6
36 Metrology: KLA Tencor P-7
37 Metrology: Microscope AFX-II
38 Metrology: ResMap 178
39 Metrology: Sloan Dektak II
40 Metrology: Tencor Mgage-200
41 Metrology: Tencor Mgage-300
42 Metrology: Tencor Sonogage 200
43 Microfluidic Flow Control System – Fluigent LineUp Series
44 Microscope – Nikon Optical Microscope with Digital Image Capture & Transfer Station
45 Microscope – Olympus Optical Microscope with Digital Image Capture
46 Multimode Deposition Chamber – Angstrom Amod – Combined e-beam, Resistive & Sputter Deposition Chamber
47 NanoAssemblr – Pecision NanoAssemblr Benchtop
48 NanoSight – Malvern Panalytical Nanosight NS300
49 Nitrogen Glovebox  – Mbraun Unilab Workstation
50 Optical Stereomicroscope – Motic SMZ 168 TLED, Moticam 5+
51 Optical Stereomicroscope – Motic SMZ 168 TLED, Moticam 5+
52 PDMS Aligner – ThorLabs motion control, DinoLite Optics
53 PECVD – Trion Orion II
54 PECVD:  PlasmaTherm 700
55 PECVD: PlasmaLab 80 Plus
56 PECVD: Plasmalab 80+ DPCVD
57 PECVD: PlasmaTherm 720
58 PECVD: PlasmaTherm 790
59 PECVD: STS PECVD
60 Photoplotter – Bungard Filmstar-PLUS Small
61 Plasma Asher Descum equipment: AST Barrel Asher
62 Plasma Asher Descum equipment: AW-105R, Allwin21
63 Plasma Asher Descum equipment: AW-B3000,Allwin21
64 Plasma Asher Descum equipment: Branson/IPC 3000
65 Plasma Asher Descum equipment: Branson/IPC L3200
66 Plasma Asher Descum equipment: Gasonics Aura 1000
67 Plasma Asher Descum equipment: Gasonics Aura 2000
68 Plasma Asher Descum equipment: Gasonics Aura 3000
69 Plasma Asher Descum equipment: Gasonics Aura 3010
70 Plasma Asher Descum equipment: Gasonics L3510
71 Plasma Asher Descum equipment: March PX-250
72 Plasma Asher Descum equipment: Matrix 105
73 Plasma Asher Descum equipment: Matrix 205
74 Plasma Asher Descum equipment: Matrix 209S
75 Plasma Asher Descum equipment: Plasma Etch BT1
76 Plasma Asher Descum equipment: PlasmaEtch PE-100
77 Plasma Asher Descum equipment: Technics 2000
78 Plasma Asher Descum equipment: Technics PE-IIA
79 Plasma Cleaner – Fischione Model 1020
80 Plasma Etch   – Trion Minilock II
81 Plasma Etch  – Harrick Plasma PDC-32G Plasma Cleaner
82 Plasma Etch  – Oxford PlasmaPro 100 Cobra
83 Plasma Etch  – PVA TePla IoN Wave
84 Plasma Etch  – Trion Phantom II
85 Plasma Etch – Harrick Plasma PDC-32G Plasma Cleaner
86 Plasma Etch – Oxford PlasmaPro 100 Cobra
87 Plasma Etch – PVA TePla IoN Wave
88 Plasma Etch – Trion Phantom II
89 Plasma Etcher: AW-901eR,Allwin21
90 Plasma Etcher: AW-903eR
91 Plasma Etcher: Lam AutoEtch 490
92 Plasma Etcher: Lam AutoEtch 590
93 Plasma Etcher: Lam Rainbow 4420
94 Plasma Etcher: Matrix 303
95 Plasma Etcher: Matrix 403
96 Plasma Etcher: PlasmaTherm 700
97 Plasma Etcher: Tegal 901e
98 Plasma Etcher: Tegal 903e
99 Porous Silicon Etching System – AMMT MPSB 100
100 Probe Station – Micromanipulator 450PM, Keithley 4200A-SCS
101 Process Hood – Acid/Base
102 Process Hood – Develop
103 Process Hood – EBL
104 Process Hood – HF
105 Process Hood – Liftoff
106 Process Hood – Microfluidics
107 Process Hood – Miscellaneous
108 Process Hood – RCA Clean
109 Process Hood -Photoresist
110 Quartz Crystal Microbalance w/ Dissipation Monitoring (QCM-D) – Biolin Scientific Qsense E4
111 Rapid Thermal processing Equipment: AG Associates Heatpulse 210
112 Rapid Thermal processing Equipment: AG Associates Heatpulse 310
113 Rapid Thermal processing Equipment: AG Associates Heatpulse 410
114 Rapid Thermal processing Equipment: AG Associates Heatpulse 4100
115 Rapid Thermal processing Equipment: AG Associates Heatpulse 4100S
116 Rapid Thermal processing Equipment: AG Associates Heatpulse 4108
117 Rapid Thermal processing Equipment: AG Associates Heatpulse 610
118 Rapid Thermal processing Equipment: AG Associates Heatpulse 610I
119 Rapid Thermal processing Equipment: AG Associates Heatpulse 8108
120 Rapid Thermal processing Equipment: AG Associates Heatpulse 8800
121 Rapid Thermal processing Equipment: AnnealSys AS-One
122 Rapid Thermal processing Equipment: JETFIRST 100 -RTP
123 Rapid Thermal processing Equipment: JETFIRST 150 -RTP
124 Rapid Thermal processing Equipment: JETFIRST 200 RTP
125 Rapid Thermal processing Equipment: Jipelec Jetfirst 200
126 Rapid Thermal processing Equipment: MPT RTP-3000
127 Rapid Thermal Processor   –  SSI Solaris 150
128 Resistive Evaporator #1 – Angstrom Amod – Resistive Chamber
129 RIE Equipment: OXFORD 100 RIE
130 RIE Equipment: Oxford 133 RIE
131 RIE Equipment: PlasmaTherm 720
132 RIE Equipment: PlasmaTherm 790 RIE
133 RIE Equipment: SAMCO RIE 10 NR
134 Scanning Electron Microscope  – Zeiss Merlin with Gemini II Column
135 SCANNING ELECTRON MICROSCOPE , SEM: F.E.I.Quanta 200
136 SCANNING ELECTRON MICROSCOPE , SEM: HITACHI S-4700
137 Schlenk Line  – Dual Manifold Vacuum/Argon Line
138 Screen Printer – MTI EQ-SPC-2-LD
139 Solar Testing – Oriel Instruments 100W Xenon Lamp with AM 1.5G filter, Oriel Instruments Cornerstone 130 monochromater, Keithley 2400 SMU
140 Spectrophotofluorometer  – Jobin Yvon Fluorolog-3 FL3-111
141 Spectrophotometer – Agilent Technologies Cary 5000 UV-VIS-NIR
142 Spectroscopic Ellipsometer  – JA Woollam M-2000VI
143 Sputter Coater – Cressington 108
144 Sputter Deposition – AJA ATC-2200
145 Sputtering Deposition equipment: Allwin21 AccuSputter AW4450
146 Sputtering Deposition equipment: CPA S-Gun -Sputter
147 Sputtering Deposition equipment: Emscope SC-650
148 Sputtering Deposition equipment: MRC 603 693 TES
149 Sputtering Deposition equipment: MRC 603 Sputter
150 Sputtering Deposition equipment: MRC 643 -Sputter
151 Sputtering Deposition equipment: MRC 8671 Sputtering
152 Sputtering Deposition equipment: Perkin-Elmer 2400
153 Sputtering Deposition equipment: Perkin-Elmer 4400
154 Sputtering Deposition equipment: Perkin-Elmer 4450
155 Sputtering Deposition equipment: Temescal BJD-1800
156 Standard Oven  – Yamato Drying Oven DX 300
157 Standard Oven – Thermo Scientific Heratherm OGS60
158 Standard vacuum and general purpose ovens
159 Stylus Profilometer – Bruker Dektak 150
160 Stylus Profilometer – KLA Tencor P-7
161 Tester Instrument: HEWLETT PACKARD,Agilent HP 4062UX
162 Thermogravimetric Analyzer (TGA) – Instrument Specialists TGA-1000
163 Transmission Electron Microscope  – FEI Tecnai G2 Osiris S/TEM
164 Tube Furnace  – Lindberg Blue M (1″)
165 Tube Furnace  – Lindberg Blue M (1″)
166 Tube Furnace  – MTI OTF-1200X (4″)
167 Tube Furnace – MTI OTF-1200X (4″)
168 UV Ozone Cleaner  – Jelight M42
169 Vacuum Oven – Thermo Scientific Lindberg Blue M Model No. VO1218A
170 Vacuum Oven – Yield Engineering Systems (YES) 310TA HMDS Vapor-Prime & Image-Reversal Vacuum Oven
171 Wafer probe: Cascade PS-21
172 Wafer probe: Electroglas EG 1034
173 Wafer probe: Electroglas EG 2001
174 Wafer probe: Electroglas EG 4090u+
175 Wafer probe: Electroglas EG 4090X
176 Wax Printer – Xerox ColorQube 8570
177 Wire Bonder – Westbound Wedge 7476D
178 Zetasizer – Malvern Panalytical Advance Series Ultra (Red Label)

 

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The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers