Description
Please contact us for the availability of the following used Trion Minilock RIE Plasma Etcher RIE Single Wafer Plasma Metal Etcher Semiconductor Equipment.
| Manufacturer | Trion Technology |
| Model | Minilock |
| Wafer Size Range | |
| Set Size | 200 mm |
| Controller Type | PC Controller Type |
| Loadlock | |
| Loadlock Yes/No | YES |
| Number of Gas Inputs | Four Gas |
| Process Gases | O2, CF4, Cl2, BCl3 |
| Other Information |
|
The items are subject to prior sale without notice. These items are only for end users.
SS5880

