Main Maker

Tel Lithius Pro C&D

Category: Tag:

Description

Tokyo Electron Ltd Lithius Pro Coater/Develeoper 300mm

  • Mainframe (COT/DEV)
  • Coater/Develeoper Tool
  • Software : 100.0.90.2
  • Process:ArF Dry
  • CIM: SECS/GEMSECS/GEM
  • Handler System CRA 1 , Handler System IRAM 1 , Handler System PRA 3
  • Factory Interface FOUP 5
  • Options System LynxOS / TE
  • Vintage: 2011
  • COT CABINET 1
  • Chiller Original 1
  • NONESYSTEM T/H CONTR. 1
  • RESIST CABINET 1
  • DEV. CABINET 1
  • A/C POWER

Location: Europe

Condition: We sell this item at  AS IS WHERE IS

Price: Make offer

These are  subject to prior sale. These are only for end user. Appreciate your time.

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

Please contact us for more information on the product:

Your Name*:

Your Email:

Your Message:

Captchac Codecaptcha

Submit:

SS4781-0-4-1-1-230304

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers