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Thin Film Processing Equipment and tools

Thin Film Processing Equipment and tools

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Please contact us if you are interested in the following  Thin Film Processing Equipment and tools. The Thin Film Processing Equipment and tools are only for end users and are subject to prior sale without notice. Appreciate your time.

Equip Code Name Type
1 110 C Oven Other
16 4″ (Old) Electron Beam Evaporation System Evaporation
32 62700 Eurotherm Furnace Other
36 790 Plasmatherm #1 PECVD PECVD
39 80+ PECVD PECVD
46 90 C Oven Other
65 AET RTP RTP
101 Aixtron Black Magic graphene CVD furnace Other
102 Aixtron MOCVD – III-Nsystem Other
103 Aixtron MOCVD – III-Vsystem Other
104 AJA ATC 2200 UHV Sputtering System Sputter
105 AJA ATC Orion 8 UHV Sputtering System Sputter
106 AJA DC Sputter Deposition Tool Sputter
107 AJA Evaporator Evaporation
109 AJA Orion 8 Sputter System Sputter
110 AJA Phase II J Sputtering System Sputter
111 AJA RF Sputter Deposition Tool Sputter
112 AJA Sputter Deposition Sputter
113 AJA Sputtering System Sputter
114 AJA Sputtering System Sputter
115 AJA Sputtering System Sputter
116 ALD ALD
117 ALD ALD
118 ALD ALD
119 ALD1 ALD
120 ALD2 ALD
121 ALDE1 ALD
124 AllWin 610 Rapid Thermal Annealer RTA/RTP
133 Amod Evaporator Evaporation
134 Amorphous Silicon LPCVD System CVD
143 Angstrom EvoVac Electron Beam Evaporator Evaporation
144 Angstrom Nexdep Thermal E-Beam Evaporator Evaporation
145 Angstrom Sputter System Sputter
146 Annealsys Rapid Thermal Processor RTA/RTP
150 Applied Mateiral’s P5000 PECVD
151 Applied Materials Centurion Epitaxial System Other
157 Arradiance ALD ALD
166 AST 280 RTA Annealing
168 Atmosphere Oxidation System (tube 21) Oxidation
169 Atmosphere Oxidation System (tube 22) Oxidation
170 Atmosphere Oxidation System (tube 23) Oxidation
171 Atmosphere Oxidation System (tube 24) Oxidation
179 Atomic Layer Deposition ALD
180 Atomic Layer Deposition ALD
181 Atomic Layer Deposition ALD
182 Atomic Layer Deposition System (ALD) Oxidation
183 Atomic Layer Deposition System (ALD) ALD
184 Atomic Layer Deposition System (ALD) ALD
185 Atomic Layer Deposition System (ALD) ALD
187 ATV PEO 603 Oxidation
206 Ball Mixer Other
222 Batter Tester Other
224 Belt Furnace Annealing
226 Beneq TFS200 Atomic Layer Deposition ALD
240 Black Magic PECVD PECVD
242 Blue M Programmable Oven Other
244 Boron Disk Doping (Tylan Furnace D2) Doping
245 Boron Doping – Bank D-1 Doping
246 Boron Doping Furnace (BBr3) Doping
248 Brewer CEE 100 Spin Coat System Spin Coating
282 Cambridge NanoTech ALD ALD
283 Cambridge NanoTech Plasma ALD – Metal (left) ALD
284 Cambridge NanoTech Plasma ALD – Oxide (right) ALD
285 Cambridge NanoTech S200 ALD
286 Cambridge Nanotech/Ultratech Savannah ALD
291 Carbolite Tube Furnace Other
292 Carbon Nanotube/Graphene Furnace CVD
309 CHA E-beam evaporator Evaporation
310 CHA E-beam evaporator Evaporation
311 CHA E-beam Evaporator Evaporation
312 CHA E-beam Evaporator 1 (dielectrics) Evaporation
313 CHA E-beam Evaporator 2 (metals) Evaporation
314 CHA Evaporator Evaporation
325 CMOS Wet Oxide -Bank E-2 Oxidation
351 Cooke Thermal Evaporator Evaporation
352 Copper Plating Plating
355 CPA Sputter System Sputter
379 CTRLayer Anti-Reflective Coater Evaporation
380 CtrLayer SDS Sputter
383 CVC DC Sputterer Sputter
384 CVC E-Beam Evaporator 1 Evaporation
385 CVC E-Beam Evaporator 2 — Instructional Center Evaporation
386 CVC Sputter Deposition Sputter
387 CVD FirstNano Graphene Furnace 1 CVD
388 CVD FirstNano Graphene Furnace 2 CVD
389 CVD FirstNano SiGe Nanowire Furnace CVD
390 CVD Reactor CVD
400 DC Sputter System Sputter
401 DC Sputtering System Sputter
419 Denton 502A Thermal Evaporator Evaporation
420 Denton Discovery – RF/DC Sputterer Sputter
421 Denton Discovery 18 Sputter System Sputter
422 Denton Discovery 2 Sputter
423 Denton Discovery 635 Sputter System Sputter
424 Denton E-Beam Evaporator Evaporation
425 Denton Explorer – E-beam Evaporator Evaporation
426 Denton Explorer 14 Sputter
427 Denton Infinity Evaporation
428 Denton Thermal Evaporator Evaporation
429 deposition: KJL Evaporator Evaporation
430 deposition: Oerlikon Univex Sputter Sputter
432 Develop Track Other
444 Diffusion Furnace Doping
475 Drive-In Anneal / Re-Oxidation (Tylan Furnace D4) Annealing
476 Dry Oxidation (Tylan Furnace D3) Oxidation
477 Dry Oxide-CMOS-CVD – Bank E-1 Oxidation
491 E-beam Evaporator Evaporation
492 E-beam evaporator Evaporation
493 E-beam Evaporator Evaporation
498 E-Beam Thermal Evaporator Lesker PVD 75 (PVD-02) Evaporation
502 EBE Evaporation
503 Ebeam evaporator Evaporation
506 Ebeam/Sputter Deposition System Sputter
508 EBL CEE Spinner Spin Coating
520 Edwards thermal evaporator Other
522 Electrode Fabricator Annealing
523 Electroless Plating Line Plating
525 Electrolytic Plating Line Plating
527 Electron Beam Evaporator Evaporation
528 Electron Beam Evaporator Evaporation
529 Electron Beam Evaporator Evaporation
538 Electroplating Bench Plating
539 Electroplating Hood – Au Plating
540 Electroplating Hood – Cu Plating
541 Electroplating Hood – Ni Plating
542 Electroplating Process Bench Other
558 Emitech K575X Sputter Coater Sputter
572 EVAP1 Evaporation
573 EVAP1 Evaporation
574 EVAP2 Evaporation
575 EVAP2 Evaporation
576 EVAP3 Evaporation
579 EVG 101 Resist Spray Coater Spray Coating
580 EVG 101 Spin Coater Spin Coating
623 Fiji Atomic Layer Deposition ALD
624 Fiji Atomic Layer Deposition ALD
639 First Nano carbon nanotube CVD furnace Other
655 Forming Gas Anneal (Tylan Furnace C4) Annealing
658 Forming Gas Anneal of High-K Dielectrics (Tylan Furnace C1) Annealing
659 Forming gas furnace Annealing
677 FURN2-Tube1 Annealing
678 FURN2-Tube2 Oxidation
679 FURN2-Tube3 Annealing
680 Furnace Oxidation
681 Furnaces and Controllers Lindberg Oxidation
700 GEMStar ALD and Pulsed CVD ALD
702 General Furnace Oxidation
703 General Material Anneal 1 – Bank A-1 Annealing
708 Glove Box Other
715 Gold Plating Plating
718 GSI PECVD PECVD
731 HD-PCVD PECVD
732 Headway Manual Resist Spinner Spin Coating
735 Headway Spinner I Spin Coating
736 Heatpulse 210T Rapid Thermal Annealing System Annealing
737 Heatpulse 610 Annealing
755 HEX Deposition system Other
805 Hummer V Sputter Coater Evaporation
807 Hybrid Thin Film Deposition System Other
817 IBS/e Other
836 Innotec ES26C E-Gun Evaporator Evaporation
846 Intermediate Coating Platform Other
848 IntlVac Nanochrome I Evaporator System Evaporation
849 IntlVac Nanochrome I Sputter System Sputter
852 Ion assist E-beam Evaporator Evaporation
867 IR Image Furnace Other
898 JetFirst RTP RTP
900 Jipelec Rapid Thermal Processor RTA/RTP
928 Key High Thermal Evaporator Evaporation
937 KJL_south cleanroom Sputter
952 Kurt Lesker Electron Beam Evaporation System Evaporation
972 Laurell Manual Resist Spinner Spin Coating
973 Laurell Spin Processor with Wet Station Spin Coating
974 Laurell Spinner Spin Coating
975 Laurell Spinner Spin Coating
991 Lesker E-beam Evaporator – Soft-Lithography Evaporation
992 Lesker Nano 36 (PVD01) Evaporation
993 Lesker PVD 75 (PVD-03) Sputter
994 Lesker PVD 75 (PVD-04) Evaporation
995 Lesker PVD 75 Evaporator Evaporation
996 Lesker PVD 75 Sputterer Sputter
997 Lesker PVD75 #1 Sputter Deposition Sputter
998 Lesker PVD75 #2 ZnO Sputter deposition Sputter
999 Lesker PVD75 #3 E-beam evaporator Evaporation
1000 Lesker PVD75 #4 E-beam evaporator Evaporation
1001 Lesker Sputter Evaporation
1004 Lindberg Furnace Annealing
1005 Lindberg Furnace 1 (CMOS Sintering Tube) Other
1006 Lindberg Furnace 2 (Polymer Curing Tube) Other
1007 Lindberg Furnace 3 (Oxidation Tube) Other
1008 Lindberg Furnace 4 (Polymer Curing Tube) Other
1009 Lindburg Blue M Ovens Annealing
1020 Low Pressure Chemical Vapor Deposition System (tube 32) CVD
1021 Low Pressure Chemical Vapor Deposition System (tube 33) CVD
1025 LPCVD Oxidation
1026 LPCVD BPSG CVD
1027 LPCVD CMOS N+ Polysilicon – Bank D-3 CVD
1028 LPCVD CMOS Nitride – Bank E-4 CVD
1029 LPCVD Low Temperature Oxide (LTO) – Bank B-3 CVD
1030 LPCVD MRL furnaces CVD
1031 LPCVD N+/P+ Polysilicon – Bank C-4 CVD
1032 LPCVD Nitride – B4 CVD
1033 LPCVD P+polysilicon CVD- Bank D-4 CVD
1034 LPCVD TEOS Oxide- Bank C-3 CVD
1035 LPCVD Undoped Polysilicon – Bank E-3 CVD
1039 Magnetron Sputtering Coating Sputter
1050 Manual Spin Coater Spin Coating
1076 Mass-Selected Ion Deposition System – Electrospray Source Other
1087 Metallica Sputter System Sputter
1088 Metalorganic Vapor Deposition System CVD
1138 Mini Tystar Tube 1 Oxidation
1139 Mini Tystar Tube 2 Oxidation
1140 Mini Tystar Tube 3 Oxidation
1141 Mini-Brute Furnace Annealing
1146 MOCVD Reactor CVD
1147 Modulab Evaporator Evaporation
1149 Molecular Beam Epitaxy MBE
1150 Molecular Beam Epitaxy (MBE) MBE
1151 Molecular Beam Epitaxy, Multi-source MBE
1153 Molecular Vapor Deposition CVD
1154 MOS Clean Anneal 2 – Bank B-1 Annealing
1157 MOS Metal Anneal 3 -Bank C-1 Annealing
1158 MOS Metal Anneal 4 -Bank C-2 Annealing
1160 MRC 944 Sputtering Tool Sputter
1162 MRL 1414 Diffusion Furnace Oxidation
1163 MRL boron diffusion Doping
1164 MRL Furnace – Tube 3 Oxidation
1165 MRL Furnace – Tube 4 Annealing
1166 MRL furnaces Annealing
1167 MRL Oxidation Oxidation
1220 Nexx PECVD PECVD
1222 Neytech Furnace Other
1233 Novellus Concept II PECVD PECVD
1240 Oerlikon Sputter Sputter
1266 Orion V Sputter
1267 Orion V Sputter
1268 Orion VIII Sputter
1271 OVEN1 Annealing
1272 OVEN2 Other
1273 OVEN4 Annealing
1274 OVEN5 Other
1275 OVEN6 Other
1279 Oxford ALD FlexAL ALD
1289 Oxford PECVD PECVD
1290 Oxford PECVD PECVD
1291 Oxford Plasma Lab 100 PECVD
1309 Paralyne Deposition System Other
1311 PARYL1 Evaporation
1312 Parylene Coater Other
1313 Parylene Coater Other
1314 Parylene Coater Other
1315 Parylene Deposition CVD
1319 PdR Atomic Layer Deposition ALD
1320 PDS 2010 Parylene Coater Other
1325 PEALD ALD
1326 PECVD PECVD
1327 PECVD1 PECVD
1328 PECVD1 PECVD
1329 PECVD2 PECVD
1330 PECVD; Diamond PECVD
1339 PGSTAT ALD
1344 phosphorous diffusion Doping
1345 Phosphorus Disk Doping (Tylan Furnace C3) Doping
1346 Phosphorus Doping – Bank D-2 Doping
1361 Photoresist Spinner/Thermal Bench Spin Coating
1381 Plasma CVD TEOS Oxide CVD
1382 Plasma Enhanced Chemical Vapor Deposition PECVD
1383 Plasma Enhanced Chemical Vapor Deposition (PECVD) PECVD
1389 Plasma Therm PECVD PECVD
1396 Plasma-enhanced Chemical Vapor Deposition System PECVD
1398 Plasma-Therm Apex SLR HDPCVD CVD
1402 Plasma-Therm Vision 310 PECVD PECVD
1403 PlasmaQuest PECVD
1404 Plasmatech CVD CVD
1407 PlasmaTherm Shuttlecock PECVD System PECVD
1408 PlasmaTherm Versaline HDP VCD System PECVD
1409 Plating Station 1 Plating
1410 Plating Station 2 Plating
1411 Plating Station 3 Plating
1412 Plating Station 4 Plating
1413 PLD Other
1414 POCL3 MRL furnaces Doping
1416 Polaron Evaporation
1419 Polyimide Curing Oven Other
1455 Pulsed Laser Deposition Other
1456 Pulsed Laser Deposition System Other
1457 Pulsed-CVD Other
1460 PVD 75 Sputter Deposition Sputter
1461 PVD Filament Evaporator (Instructional Lab) Evaporation
1462 PVD75 Filament Evaporator Evaporation
1463 PVD75 RF Sputterer Sputter
1497 Rapid Thermal Annealer RTA/RTP
1498 Rapid Thermal Annealer RTA/RTP
1499 Rapid Thermal Annealer RTA/RTP
1500 Rapid Thermal Annealer RTA/RTP
1501 Rapid Thermal Annealer RTA/RTP
1502 Rapid Thermal Annealer RTA/RTP
1503 Rapid Thermal Annealer Other
1504 Rapid Thermal Annealer 1 RTA/RTP
1505 Rapid Thermal Annealer 2 RTA/RTP
1506 Rapid Thermal Annealing System RTA/RTP
1507 Rapid Thermal Processing (RTP) RTA/RTP
1508 Rapid Thermal Processing System RTA/RTP
1509 Rapid Thermal Processor RTA/RTP
1510 Rapid Thermal Processor RTA/RTP
1511 Rapid Thermal Processor – AG 8108 RTA/RTP
1527 Resistive Heated Evaporation Evaporation
1529 Reynolds Plating Bench Plating
1535 ReynoldsTech Polymer Vapor Deposition Other
1536 RF-PECVD CVD
1537 RF/DC Sputter deposition Sputter
1558 Roll-to-Roll Coater Other
1560 RTA – AG610a RTA/RTP
1561 RTA – AG610b RTA/RTP
1562 RTA-Clean RTA/RTP
1563 RTA-Metals RTA/RTP
1564 RTA1 RTA/RTP
1571 Sandvik/MRL Annealing
1572 Sandvik/MRL Annealing
1573 Sandvik/MRL Annealing
1574 Sandvik/MRL Annealing
1576 Savanah ALD ALD
1577 Savannah Atomic Layer Deposition Sputter
1578 Savannah Atomic Layer Deposition System ALD
1579 Savannah/Plasma Cleaner in Glovebox System ALD
1585 SC4500 Even-Hour Evaporator Evaporation
1586 SC4500 Odd-Hour Evaporator Evaporation
1601 Schmid APCVD CVD
1612 Screen Printers Annealing
1614 SCS G3P8 Spin Coater — Instructional Center Spin Coating
1615 SCS G3P8 Spin Coater 1 (small pieces) Spin Coating
1616 SCS G3P8 Spin Coater 2 – Pettit Spin Coating
1617 SCS G3P8 Spin Coater 3 – Inorganic Spin Coating
1618 SCS Parylene coater Other
1619 SCS Parylene Coater Other
1630 SEMCON electroplating Plating
1644 Sharon E-Beam Evaporator Evaporation
1645 Sharon Thermal Evaporator TE-3 Evaporation
1646 Sharon Thermal Evaporator TE-4 Evaporation
1647 Sharon Thermal Evaporator TE-5 Evaporation
1655 Silicon Dioxide LPCVD System CVD
1656 Silicon Nitride LPCVD System CVD
1662 Singe Oven Other
1687 South KJL Sputter
1698 Spin Coater Spin Coating
1699 Spin Coater Spin Coating
1700 Spin Coater 1 Spin Coating
1701 Spin Coater 2 Spin Coating
1708 Spin Track Spin Coating
1727 SPUT2 Sputter
1728 SPUT3 Sputter
1733 Sputter deposition Sputter
1734 Sputter Deposition System Sputter
1735 Sputter-Lesker Sputter
1736 Sputtering Sputter
1737 Sputtering System (Large) Sputter
1738 Sputtering System (Small) Sputter
1739 Sputtering System – 3 target Sputter
1740 Sputtering System – 6 target Sputter
1745 SSI RTP RTP
1746 Stand Alone Glovebox Spin Coating
1747 Static Platform Other
1748 Steam Oxidation (Furnace D1) Oxidation
1752 STF1200 Oxidation and Annealing Furnace Oxidation
1768 STS PECVD PECVD
1769 STS PECVD 2 PECVD
1770 STS PECVD 3 PECVD
1772 STS Plasma Enhanced CVD PECVD
1783 Sulfurization furnace Other
1786 Surrey CNT NanoGrowth Other
1787 Suss AltaSpray Spray Coater Spray Coating
1801 SVG Resist Coat Tracks 1&2 Spin Coating
1802 SVG Resist Develop tracks 1&2 Other
1807 TANG Sputter
1808 Tank Mixer Annealing
1815 Technotron-ASTeX Other
1816 Technotron-ASTeX Other
1817 Technotron-ASTeX Other
1828 Temescal BJD 1800 Ebeam Evaporator (1) Evaporation
1829 Temescal BJD 1800 Ebeam Evaporator (2) Evaporation
1831 Tempress boron diffusion Doping
1832 Tempress Furnace Oxidation
1833 Tempress Metal Anneal Annealing
1834 Tempress Oxidation Oxidation
1835 Tempress phosphorus diffusion Doping
1844 TFM2.1200 Vapor Phase Deposition System CVD
1846 TFT LPCVD LT41(low temp oxide) Bank A-3 CVD
1847 TFT Polysilicon – Bank A-4 CVD
1848 TFT Wet/Dry Oxide -Bank A-2 Oxidation
1852 Thermal Deposition #1 (Digital Interface) Evaporation
1853 Thermal Deposition #2 (Analog Interface) Evaporation
1854 Thermal Evaporator Evaporation
1855 Thermal Evaporator Evaporation
1856 Thermal Evaporator Denton Vacuum Explorer 14 Evaporation
1857 Thermal Evaporator (Bell Jar) Evaporation
1858 Thermal Oxidation Oxidation
1860 Thermco LPCVD Low Temperature Oxide CVD
1861 Thermco LPCVD Poly 1/2 CVD
1862 Thermco Oxidation Furnace Oxidation
1868 Thermo LPCVD Nitride CVD
1873 Thermoevaporator Evaporation
1880 Thin Film Processing Spin Coating
1885 Thinky Mixer Other
1923 Tystar Bank1 Low Temp Silicon Dioxide Oxidation
1924 Tystar Bank1 Non-Metal Anneal Annealing
1925 Tystar Bank1 Polysilicon Annealing
1926 Tystar Bank1 Silicon Nitride CVD
1927 Tystar Bank2 Metal Anneal Annealing
1928 Tystar Bank2 TEOS Silicon Dioxide Oxidation
1929 Tystar Bank2 Wet/Dry Oxidation Oxidation
1930 Tystar LPCVD nitride Other
1931 Tystar LPCVD polysilicon Other
1932 Tystar Mini-Tytan 4600 Furnace System CVD
1933 Tystar Nitride Furnace 1 Doping
1934 Tystar Nitride Furnace 2 Doping
1935 Tystar Nitride Furnace 3 Oxidation
1936 Tystar Nitride Furnace 4 Other
1937 Tystar Oxidation Furnace Oxidation
1938 Tystar Poly Furnace 1 Annealing
1939 Tystar Poly Furnace 2 Oxidation
1940 Tystar Poly Furnace 3 Other
1941 Tystar Poly Furnace 4 Other
1942 Tystar TEOS Deposition CVD
1952 Ultratech/Cambridge Fiji G2 Plasma-Enhanced ALD ALD
1953 Ultratech/Cambridge Savannah ALD System ALD
1955 Ultron UH-102 UV Curing Oven Resist Processing
1957 Ulvac Mini-Annealer Annealing
1959 Unaxis PECVD PECVD
1962 Unifilm Sputterer Sputter
1966 UT PTL-LPCVD-Nitride CVD
1967 UT PTL-LPCVD-Polysilicon CVD
1968 UT PTL-LTO CVD
1975 Vapor treatment system Other
1992 Veeco Thermal Evaporator Evaporation
2042 Wet/Dry Oxide – Bank B-2 Oxidation
2106 YES Prime Oven Other
2110 YES-310TA Vapor Prime and Image Reversal Oven Resist Processing

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