Description

Model: TCP9600 SE SOLD

Category: Plasma Etch

Original Equipment Manufacturer: Lam Research

Condition: Bagged & Skidded in Warehouse

Process: Metal Etcher

Wafer Size: 8-inch

Valid Time: Subject to prior sale

Vintage: 2000

Serial Number:2630R

Software Version: Version E1.5-released

CIM: N/A

Inspection: Against appointment after PO and payment.

MxP Poly Chamber Hardware Configuration:

1. Configuration = TCP 9600SE
2. Vintage = 25/10/00
3. Serial Number = 2630R
4. Condition = cold shutdown
5. Potential to use as spare parts tool

Tool/ Model : TCP 9600SE
System Manufacture: Lam Research
System Overview Remark
General Information Selected Option
Software Envision 1.5 with Light Pen
Process METAL ETCH
Platform Type Rainbow Stand-alone TCP 9600SE
Wafer Specification Selected Option
Wafer Size 200mm
Wafer Shape SNNF
Chamber Type/Location Selected Option
Main Chamber TCP 9600SE
Enterance Loadlock Standard Entrance Loadlock Chamber
Exit Loadlock DSQ Chamber with 8″ Paddle
APM Chamber 2 APM DI Nozzles, N2 splayer
Transporter Selected Option
Load Station Belt type shuttle
Indexers 38A Hine indexers
Wafer Alinger Universal
Main Chamber Remark
Chamber Options Selected Option
Upper Chamber Body TCP 9600se
Gap 6CM Upper Chamber fixed gap
Process Kit None process-kit included
Electrostatic Chuck Type 8″ Bi-Polar ESC
Turbo Pump ALCATEL 1300M with Controller
Pressure Manometer Millipore 100mT
Pressure Controller VAT Gate Valve/ PM7 Pressure Controller
End Point Detector Heated Port with Dual Channels (261.8nm/ 703nm)
Matchers Auto Tuner/ T matcher for Upper, 8 Turn RF Coil Matcher for Bias
Generators On Board AE-1250 for Upper and Bias Chamber
Helium Back side Cooling 50sccm UPC (Unit 8130)
ADIO Boards
Main Board
ESC power supply
16 channel heater controller
PLL Chamber Remark
Chamber Options Selected Option
Chamber Auto tune DSQ strip module
Funnel 8″ Quartz funnel
Paddle 8″ Heated Paddle
MxP Poly Chamber Hardware Configuration
Pressure Controller AC2 Pressure Controller
Pressure Manometer MKS 10Torr
WVDS Auto fill WVDS Controller
WVDS Temperature controllwer Auto temp controller
Cooling Fan Hinged DSQ stripper with high flow cooling fan
Vapor Controller Tylan 500sccm H2O Controller
RF Tuner 8 Tune RF Coil Matcher (DIP-PCB RF tuner)
RF Generator On Board AE-1250
APM Chamber Remark
Module Options Selected Option
Heater Controller 853-015771-001
Spinner 853-015759-102
N2 Sparyer None
DI Water nozzles Hot/ Cold high water flow nozzles
Obital Gas Box Remark
Gas Line Configuration Selected Option
Line 1 Gas CL2
Line 2 Gas Bcl3
Line 3 Gas Ar
MFC Size 200sccm (Unit 1660)
Line 4 Gas CF4
Line 5 Gas N2
Line 6 Gas O2
Line 7 Gas CF4
Line 8 Gas H20

Faulty Part List > EMCP*01 Part List:

1 Transporter Exit Loadlock DSQ Chamber with 8″ Paddle 1
2 Transporter APM Chamber 2 APM DI Nozzles, N2 splayer 1
3 Transporter Wafer Alinger Universal 1
4 Main Chamber Electrostatic Chuck Type 8″ Bi-Polar ESC 1
5 Main Chamber Pressure Manometer Millipore 100mT 1
6 Main Chamber End Point Detector Heated Port with Dual Channels (261.8nm/ 703nm) 1
7 Main Chamber Matchers Auto Tuner/ T matcher for Upper, 8 Turn RF Coil Matcher for Bias 1
8 Main Chamber Generators On Board AE-1250 for Upper and Bias Chamber 2
9 Main Chamber Helium Back side Cooling 50sccm UPC (Unit 8130) 1
10 Main Chamber ADIO Boards 8
11 Main Chamber Main Board 1
12 Main Chamber ESC power supply 1
13 Main Chamber 16 channel heater controller 2
14 PLL Chamber Paddle 8″ Heated Paddle 1
15 PLL Chamber WVDS Auto fill WVDS Controller 1
16 PLL Chamber Vapor Controller Tylan 500sccm H2O Controller 1
17 PLL Chamber RF Generator On Board AE-1250 1
18 PLL Chamber Heater Controller 853-015771-001 1
19 PLL Chamber Spinner 853-015759-102 1