Description
Please contact us for the availability of the used Steag MicroTech Marangoni Dryer.
200mm (8″) wafers, Top loading, Carrier Receiver for PFA cassettes, PVDF process tank with 2 sided overflow, Sliding Lid assembly with IPA/N2 diffuser, Quartz wafer comb, PFA coated lift arm, Resistivity monitor, Dual flow rate DI water manifold, Manually adjustable IPA flow meter, 2 IPA containers, PLC controller with LCD display, Multi-recipe controller with programmable lift rate, Poly pro top deck material.
SS5581

