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Steag MicroTech Marangoni Dryer

Description

Please contact us for the availability of the used Steag MicroTech Marangoni Dryer.

200mm (8″) wafers, Top loading, Carrier Receiver for PFA cassettes, PVDF process tank with 2 sided overflow, Sliding Lid assembly with IPA/N2 diffuser, Quartz wafer comb, PFA coated lift arm, Resistivity monitor, Dual flow rate DI water manifold, Manually adjustable IPA flow meter, 2 IPA containers, PLC controller with LCD display, Multi-recipe controller with programmable lift rate, Poly pro top deck material.

 

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SS5581

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