Description
The “Semitool Paragon ECD Plating System” is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
– Model: Paragon
– 2 FOUP WIP
– Set up for 300mm Wafers
– 1 Anneal Chamber
– 1 ULVAC Metrology Unit
– 2 CFD Chambers with In-Situ Rinse
– CFD Tank Includes: RTA Probe, Pump, Heating/Cooling Coils, Bleed Bath Recovery
– 2 Capsule Chambers with Cooling Coils, Heated N2, 1 Sample Port
– 1 Tank Equipped with AMCS Connections
– Bulk Fill Capable for 3 Chemistries
– Facilities Connections on Underside of Tool
– 480VAC, 125A, 50/60Hz
ID-SS380EB
S