Main Maker

Semitool Paragon ECD Plating System

Description

The “Semitool Paragon ECD Plating System” is  only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

– Model: Paragon
– 2 FOUP WIP
– Set up for 300mm Wafers
– 1 Anneal Chamber
– 1 ULVAC Metrology Unit
– 2 CFD Chambers with In-Situ Rinse
– CFD Tank Includes: RTA Probe, Pump, Heating/Cooling Coils, Bleed Bath Recovery
– 2 Capsule Chambers with Cooling Coils, Heated N2, 1 Sample Port
– 1 Tank Equipped with AMCS Connections
– Bulk Fill Capable for 3 Chemistries
– Facilities Connections on Underside of Tool
– 480VAC, 125A, 50/60Hz

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