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Semiconductor Spare parts

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Description

1
0040-01784 ISOLATOR RF DXZ FLOURINE GENERATOR APPLIED MATERIALS
2 0200-01798 LIFT PIN CERAMIC APPLIED MATERIALS
3 0200-09129 CHAMBER RF INSULATOR, LAMP HEATED, CERAMIC APPLIED MATERIALS
4 0200-10157 LINER JUNCTION, CERAMIC SIN DXZ APPLIED MATERIALS
5 0200-10163 CERAMIC DXZ ISOLATOR APPLIED MATERIALS
6 0200-10284 CERAMIC LIFT PIN APPLIED MATERIALS
7 0200-10445 SHADOW RING, QUARTZ 200MM APPLIED MATERIALS
8
0200-10446 8″ SILICON INSERT RING APPLIED MATERIALS
9 0200-35623 INSERT RING, SILICON, 6″ APPLIED MATERIALS
10 0200-76068 SHADOW RING QUARTZ 150MM APPLIED MATERIALS
11 0386-186-001 PLASMA BOWL CERAMIC VEECO
12 112368E01 QUADRANT CLAMP SUPPORT RING SPTS
13
112550D01 QUADRANT CLAMP SECTOR SPTS (ANODIZED ALUMINUM)
14 15-00475-00 INSULATOR GAS FEED THRU TOP PLATE CERAMIC NOVELLUS
15 15-032014-00 Window, Quartz, Etch Resistant, Novellus Concept 1 and Concept 2
16
15-053394-01 FORK FINGER, CERAMIC NOVELLUS
17 15-053394-02 FORK FINGER, NOVELLUS
18 15-110411-00 Window, Sapphire, for Novellus Concept 1 and Concept 2 Sequel Altus
19 15-11606-00 INSULATOR GAS DIST, NOVELLUS
20 15-158185-00 INJECTOR TUBE, NOVELLUS
21 15-309288-00 CERAMIC FORK FINGER, NOVELLUS
22 158752 SHIELD RING COVER CERAMIC 200 CO/PL SPTS
23 18-015517 Thermawave 8X8 X/Y Stage Assembly,  with 90 day warranty.
24 189386 SPTS Ceramic Chamber Liner
25 2043002 PLATEN SHIELD CERAMIC 100 TD ESC SPTS
26 2045051 CLAMP RING CERAMIC 98-1.5 100.CFT 32.5 E SPTS
27 2053834 EDGE EXCLUSION RING CERAMIC SPTS
28 2-39-55386 VACUUMLESS END EFFECTOR CERAMIC DNS
29 2-J3-33094 IH VACUUM ARM CERAMIC END EFFECTOR DNS
30 2-J3-33095 IH VACUUM ARM RT CERAMIC END EFFECTOR DNS
31 322306 FINGERS CLAMP 150MM RING CERAMIC SPTS
32 324014 100MM TOP SHIELD CERAMIC SPTS
33 324015 LOWER SHIELD CERAMIC SPTS
34 52-0375 CERAMIC END EFFECTOR KLA
35 60-00012-00 Novellus Cylinder, Pneumatic, Cassette Door.
36 713-028553-103 CONFINEMENT RING, CERAMIC, 200mm
37 716-000941-001 PLATE PLASMA DISPERSION QUARTZ LAM
38 716-006721-001 INSULATOR RING CERAMIC
39 716-006753-001 INSULATOR CERAMIC RING LAM
40 716-011563-161 CLAMP RING CERAMIC 150MM
41 716-011764-281 CLAMP WAFER CERAMIC
42 716-028028-004 UPPER ELECTRODE CLAMP RING CERAMIC
43 716-028123-003 RING FILLER CERAMIC
44 716-028716-241 100MM CLAMP RING CERAMIC
45 716-041983-011 CERAMIC CHAMBER LINER LAM
46 716-140068-001 RING FOCUS CERAMIC 6″
47 716-140069-002 PLATE UPPER INSULATOR CERAMIC ESC 6″
48 716-140118-001 FOCUS RING CERAMIC 4528
49 716-140139-001 HOT EDGE RING CERAMIC
50 716-140163-262 HOT EDGE RING CERAMIC
51 716309 SHIELD WAFER PIN ESC GAAS, 150mm, SPTS
52 716310 150MM CERAMIC WAFER SHIELD SPTS
53 716-330045-261 EDGE RING 6″ CERAMIC
54 716-330045-281 EDGE RING, 8″, CERAMIC
55 716-330167-245 100 MM CLAMP RING CERAMIC
56 716-330891-002 WINDOW TCP QUARTZ
57 716-330892-007 GAS DISPERSION PLATE, CERAMIC
58 716-330915-001 INSULATOR CERAMIC ESC 9600PTX
59 716-331099-001 EDGE RING 6″ FLAT TOP QUARTZ
60 716-331099-166 EDGE RING QUARTZ
61 716-460216-002 CERAMIC FOCUS RING
62 716-460216-002 CERAMIC FOCUS RING STRIPPER
63 Advanced Energy MDX 5K DC Magnetron Power Supply
64 Advanced Energy PDX 500 RF Generator 3156024-105C AE 325-375 kHz Plasma Ion Etch
65 AMAT 0010-04450 ASSY, SNNF 200MM SUB ZERO BESC W/MCA
66 AMAT 0100-00011 Chopper driver, Tested good. With 30 day warranty.
67 AMAT 0200-36649 PLATE, FINGER LIFT RING, 200mm PRODUCER, Original Equipment Mfg.
68 AMAT 300mm Adapter Source Ring, P/N 0200-01326
69 AMAT CDSEM 70202300000 Internal Gate Valve for SEMVision Cx
70 Amat Magnet Assembly 0010-20223 C,11.3″ TiN w/Rem Assy ‘M’ Made by Magic PVD CVD
71 Applied Materials 0021-09625 DPS Lower chamber Body.
72 Applied Materials, AMAT Shield Treatment Controller P/N 0010-20098
73 ASML Energy Sensor 4022-455-8282, AI-UV, SERV.455.82822, 200B, Specia, 451-09771
74 CDL-12S13 Tylan General Manometer 0-20 TORR LAM 685-092784-001
75 Comdel CX-2500 power Supply
76 Convectron Tube Interface Board, Lam 810-17007-001, 017007 853-017620 BD
77 DT302385 CERAMIC WINDOW SPTS
78 DT319142 INNER CERAMIC LINER/RING SPTS
79 DT319143 OUTER CERAMIC LINER/RING SPTS
80 ENI RF Generator OEM-12A-XL RF Power Supply
81 ETO RF Generator Controller, ABX-X355 Rev.H, AMAT 0190-02977, ABX-X385 Astex HDP
82 Filler Ring Ceramic BAC Back Actuator Clamp, LAM 716-330162-002 UHV Cleaned 9600
83 Focus Power Supply / Inverter pair 0090-90167, 0090-90215 AMAT 9200 9500 implant
84 Force Computers CPU SYS68K/SASI-1, p/n 300000, Same as LAM 810-017035-001, 17035
85 Force Computers SYS68K/CPU 880-12537-101.A3, Lam 810-017034-300.1 17034,
86
Gas Box Motherboard, Lam Research 810-017074-003, 17074, PCB, MB, Panel,
87 Gas Panel Purge Control Board, Lam Research 810-17030, 017030 PCB LRC Controller
88 General Scanning Inc. HM 400E, GSI Lumonics 269.328.00
89
Genmark Gencobot 4/3L Wafer Handling Robot, Automation, Ultratech 02-20-02123 IO
90 I/O Breakout Board Lam Research 810-17002-001 017002 IO BD PCB 4420 3335
91 Implanter Ion Source Front Plate, Titanium, Glemco 90203, AMAT PI9200, 9500 9000
92 Indramat Bleeder TBM 0540-90000 spin/scan controller AMAT 9000 9200 9500 implant
93 Indramat Power Supply TVM 1140-90022, dc servo drive AMAT 9000 9200 9500 implant
94
Indramat Scan motor, dc servo drive PI9200 Implanter AMAT 9000 9200 9500 Applied
95 Indramat Scan motor, type 2, servo drive dc PI9200 Implanter AMAT 9000 9200 9500
96 Indramat Spin Amp Controller TDM 0540-90014, servo AMAT 9000 9200 9500 implant
97 Interconnect Board, Lam Research 810-800459-006 Rev.A Backplane Ethernet
98
Ion Implant Flight Tube Liner, Insert 0020-95391 AMAT PI9200 9000 9500 Implanter
99 Ion Implant Silicon Coated Flight Tube Liner 0020-99021 X1 AMAT PI9200 9000 9500
100 Ion Implant, Graphite Arc Chamber, Bernas, AMAT 0020-01224 PI9200 9500 Implanter
101 Kensington Labs Model 8500 Rotary Satge, Stepper Motor, MEC 31-003158 Rev.B, CNC
102 KLA-Tencor 8100-XPS X-Y Stage Assembly Complete, 8100XPS CD-SEM Metrology 8100XP
103 KLA-Tencor DA Detector Amplifier Module, 720-06887-000 Rev.B, Rigg 02847, 8100XP
104 KLA-Tencor Gauge/Switch Interface Assembly 820-07076-000 Rev.A, 8100XP, 8100 XPS
105 KLA-Tencor HEPA Filtration Unit, 450-08503-000, Techsol, 009-97, Air Flow Filter
106 KLA-Tencor Lens Assy, Lower Octopole/Wein 720-17210-000, 8100-XPS CD-SEM, 8100XP
107 KLA-Tencor Picoammeter III, 720-06914-000, Pico Ammeter Faraday Cup 8100, 8100XP
108 KLA-Tencor, Piezo Voltage Controller, 720-00001-000, Rigg 8100 8100XP CD-SEM XPS
109 KLA-Tencor, S1 Condenser Lens Control, 720-09841-001 Rev.A, Wehnelt Power Supply
110 KSI Kaise System Inc.S1-1-1000 High Voltage Power Supply
111 Lam 713-002617-002 WDO,POLYCARB,CHMBR,DUAL SEAL,22.5″Dia; factory sealed package
112 LAM 839-013901-001 WLDMNT MOD VALVE THR MDVX-100BS11 TYLAN
113 LAM Research Focus Ring Wafer Clamp 8″ 716-011830-008 Rev4 TCP 9600/4400 Ceramic
114 Linear Transducer Scan Arm, 900 mm stroke, Tempsonics LDT AMAT 9000 9200 implant
115 MFC, AERA FC-D980C
116 MFC, AERA FC-D981C (5 Ra FC-D981SBC)
117 MFC, TYLAN FC-2900M
118
MFC, TYLAN/ MILLIPORE FC-2900V-4V
119 MFC, TYLAN/ MILLIPORE PC-5900U-55-10-4V
120 Mother Board Lam Research 810-34821-001 Rev.A, 034821 PM CPU Ethernet/RF MB 4420
121 Novellus 15-00043-02 Adjuster, Ceramic, Gas Plate, Concept One, Sequel
122 Novellus 15-00558-01 SHIELD,HTR STRAP,2.00 LG Ceramic Concept One, lot of 2
123 Novellus 15-00578-00 Sleeve, Flanged FEEDTHRU, Ceramic. Concept One
124 Novellus 15-00680-00 Sleeve, TC Ceramic, Concept One, Concept Two Sequel
125 Novellus 15-00731-00 BUSHING, KEYED Ceramic. Concept One, Concept Two Sequel
126 Novellus 20-00153-00 BALL, CERAMIC, 2.000 DIA. Concept One, Concept Two, Sequel
127 Novellus Concept 1 19-00130-00 PCB, Serial J.10 Port, RS232
128 Olympus MX50
129 Osaka Vacuum TD2001 Turbo Pump Controller, Magnetically Levitated Turbomolecular
130
Outer Ring 0200-01561MK, Modified 200mm Flat DPS Shadow Amat 01561 Ceramic Focus
131 Pfeiffer Vacuum Turbo Pump Controller TCP 600, PM C01 320, TCP600, 110/220V, 10A
132
Pre Accel PS / Inverter pair 0090-90164 0090-90216 20 kV AMAT 9200 9500 implant
133 Qty. 2, Parker Veriflo Diaphram Valve 944GSFSMM2.31 Toggle 944G Lock Out Tag Out
134 RCD151ZLAM FTS Systems chiller for Lam. Very clean! Only 26 hours on run meter.
135 RF Generator Model LP2000-400k
136 RF Shaped Window Lam Research 716-330121-001, New in sealed package.
137 RFPP RF20R
138 RFPP RF25M
139 Seiko Seiki Turbo Pump Control Unit STP-H1000 SCU-H1000L or H1000C Choice Vacuum
140
Seiko Seiki Turbo Pump Control Unit, STP-H1301L1 or H1301L1B Choice, SCU, Vacuum
141 SEMVision cX Defect Review System Interface, Stand Alone, Analysis, Inspection
142
SMC Vacuum Isolation Valve XLG-16-X1085, KF16, Position Switch, High Vac
143 Stepper Motor Driver Board, Lam 810-017016-001, 17016, Bd PCB Step Assy,
144 Temperature Controller 0190-01905 w/Watlow Anafaze CLS204 Amat Centura Loadlock
145 Therma-Wave 5241 X-Y-Z Stage, Newport TWI 45-021480, 1302, 2601, Opti-Probe 5240
146 Tosoh PCII Quartz Bell Jar, 805-566-QC-30-706, MA-18536, PIK-2, PCll, Quartzware
147 UNIT, MFC UFC 1100
148 UNIT, MFC UFC 1100A
149 UNIT, MFC UFC 1200A
150 UNIT, MFC UFC-1200
151 UNIT, MFC UFC-1660 METAL Z SEAL
152 UNIT, MFC UFC-1660 ULTRA CLEAN/METAL SEAL

Condition: TBD( NEW, Refurbished, Used, AS IS).

Valid time: Subject to prior sale without notice.

Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.

ID-SS380-e 

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