Description
The PVA TePla 400 INLINE MICROWAVE PLASMA SYSTEM is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
Location: Asia
Quantity: 1 set available
Condition: Used. We can sell them at : (1) AS IS condition, (2) Complete, working, functional test condition.
Info from websites on the system for your reference only.
PVA TePla AG Plasma system 400 is a low-pressure microwave plasma system for cleaning advanced chip packages prior to die attach, wire bond and encapsulation. The electrode-free energy feeding is the key factor for processing substrates in their original, unslotted magazines. Microwaves of 2.45GHz are simply applied through a window in the wall of the vacuum chamber producing a largely extended plasma there.
Specifications and Configurations:
Make: Technics Plasma GmbH (PVA TePla AG)
Model: 400 Inline (PS400)
Type: Microwave Plasma Cleaner
Configured with Leybold Ruvac Rotary Vane Pump, Leybold Ruvac WSU 251 PFPE Roots Blower Booster Vacuum Pump
ID-SS380EB
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