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PSK Tera 21

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Please contact us for the availability of the  PSK Tera 21 used semiconductor plasma asher Plasma clean Plasma descum equipment.

Wafer Size: 12 inch. Configuration: EFEM: ATM RORZE(RA7L018) Robot, Loadport: 3 x RORZE(RV201) TM:NIDEC SANKYO ROBOT, 2 x Process Chamber 4 x MKS RPS System, 4 x MKS Astex FI20160-1, 4 x ENI-NOVA-25A.

The items are subject to prior sale without notice. These items are only for end users.

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