Description
Please contact us for the availability of the PSK Tera 21 used semiconductor plasma asher Plasma clean Plasma descum equipment.
Wafer Size: 12 inch. Configuration: EFEM: ATM RORZE(RA7L018) Robot, Loadport: 3 x RORZE(RV201) TM:NIDEC SANKYO ROBOT, 2 x Process Chamber 4 x MKS RPS System, 4 x MKS Astex FI20160-1, 4 x ENI-NOVA-25A.
The items are subject to prior sale without notice. These items are only for end users.
SS5684W