Description
Please contact us for the availability of the used Plasmatherm VLR ICP semiconductor process Equipment.
Plasmatherm VLR ICP Cassette to Cassette System, (1) LM-TM: Single Load lock with single end effector, (2) VLR ICP modules,Configured for 150mm wafer with ESC chuck,PM1 & PM2 configuration: (4) MFCs,VAT PM5 Throttle valve controller, Leybold 1000C turbo pump with NT20 controller,ENI 600W RF Power supply for lower electrode with matchwork and tunner, Advanced Energy RFPP 10M RF power supply for upper electrode with AM10 matchwork and tunner,Heated chamber walls with 6 zone controller,Soffie Class III Laser endpoint on PM2,Windows OS with Plamatherm Versaworks software, 208V, 30A 60Hz.
The items are subject to prior sale without notice. These items are only for end users.
SS5512