Description
Refurbished Plasma-Therm Versaline ICP Etcher – 150mm / 6 Inch
SemiStar Corp. offers a refurbished Plasma-Therm Versaline ICP Etcher configured for 150 mm / 6-inch wafer processing. The system includes a dual vacuum loadlock, Brooks MAG 7 robotic wafer handling, ICP process module, seven process gas lines with Brooks GF125 mass flow controllers, Edwards turbomolecular pump, Ebara dry pump, SMC Thermo chiller, and dual RF generators.
The current gas configuration includes BCl3, Cl2, O2, Ar, SF6, N2, and He, providing a flexible ICP plasma etch hardware platform for process development and semiconductor manufacturing applications.
SemiStar will supply this Plasma-Therm Versaline system in refurbished working condition to OEM specifications with its current equipment configuration. The system will be inspected, cleaned, refurbished, repaired as necessary, and functionally tested before shipment.
Installation is optional. When installation is purchased and performed by SemiStar, the system can be supplied with a 6-month warranty according to the terms and scope defined in SemiStar’s official quotation.
Availability: This equipment is currently located in a warehouse in Texas, USA. It is offered to end users only and availability is subject to prior sale. Final configuration, refurbishment scope, installation, acceptance criteria, warranty, delivery schedule, and commercial terms are based on SemiStar’s official quotation.
Plasma-Therm Versaline ICP Etcher Configuration
| Item | Current Configuration |
|---|---|
| Manufacturer | Plasma-Therm |
| Platform | Versaline |
| System Type | ICP Etcher |
| Wafer Size | 150 mm / 6 inch |
| Transfer Module | 150 mm |
| Loadlock | Dual Vacuum Loadlock |
| Wafer Handling Robot | Brooks MAG 7 Robot |
| Process Module | ICP |
| Turbo Pump | Edwards STP-A1303CV |
| Dry Pump | Ebara SR20N |
| Chiller | SMC Thermo |
| RF Generator #1 | ENI GWM-24A |
| RF Generator #2 | MKS Elite |
| Current Location | Texas, USA |
Actual Gas / MFC Configuration
The available Plasma-Therm Versaline ICP system is currently equipped with seven process gas lines using Brooks GF125 mass flow controllers.
| Gas | MFC Range | MFC |
|---|---|---|
| BCl3 | 50 sccm | Brooks GF125 |
| Cl2 | 50 sccm | Brooks GF125 |
| O2 | 100 sccm | Brooks GF125 |
| Ar | 100 sccm | Brooks GF125 |
| SF6 | 50 sccm | Brooks GF125 |
| N2 | 100 sccm | Brooks GF125 |
| He | 100 sccm | Brooks GF125 |
ICP Etch Process Capability
The Plasma-Therm Versaline ICP platform uses an inductively coupled plasma process module with independent RF hardware to provide a flexible plasma etch platform. The actual process capability depends on the installed chamber configuration, gas chemistry, RF configuration, wafer material, mask, feature geometry, and process recipe.
The installed BCl3 / Cl2 gas capability provides hardware for chlorine-based ICP etch process development, while SF6 provides fluorine-based etch capability. The additional O2, Ar, N2, and He gas lines provide flexibility for process development, plasma conditioning, dilution, and other compatible applications.
Customers should provide their substrate material, film/material to be etched, wafer size, mask material, target etch depth, feature dimensions, desired sidewall profile, and other critical process requirements so SemiStar can review the application against the actual system configuration.
Key System Features
- Plasma-Therm Versaline ICP platform
- 150 mm / 6-inch wafer configuration
- Dual vacuum loadlock
- Brooks MAG 7 robotic wafer handling
- ICP process module
- Seven process gas lines
- Brooks GF125 mass flow controllers
- BCl3, Cl2, O2, Ar, SF6, N2, and He gas configuration
- Edwards STP-A1303CV turbomolecular pump
- Ebara SR20N dry pump
- SMC Thermo chiller
- ENI GWM-24A RF generator
- MKS Elite RF generator
Refurbished to OEM Specifications
SemiStar supplies this Plasma-Therm Versaline ICP Etcher in refurbished working condition to OEM specifications with its current system configuration. The objective of the refurbishment is to restore the equipment to proper operating condition while maintaining its original Plasma-Therm system architecture and installed configuration.
The refurbishment includes inspection and cleaning of the equipment; troubleshooting of electrical, mechanical, vacuum, RF, gas delivery, cooling, control, loadlock, and wafer-handling systems; repair or replacement of necessary components; vacuum system verification; RF generator testing; gas delivery and MFC testing; robot and loadlock operation testing; chiller verification; control system testing; and final functional testing.
Components will be repaired, refurbished, or replaced as necessary according to system condition and the final refurbishment scope. The completed system will be functionally tested prior to shipment.
Any customer-specific process testing, process qualification, or acceptance requirements must be defined separately in SemiStar’s official quotation.
Optional Installation and 6-Month Warranty
Installation is available as an optional service. SemiStar can provide equipment installation, startup, and functional verification at the end user’s facility according to the scope defined in the official quotation.
When the system is purchased with SemiStar installation, a 6-month warranty can be provided according to SemiStar’s warranty terms and the final quotation. Customer facility preparation, utilities, gases, exhaust, abatement, permits, and other site requirements remain the responsibility of the end user unless otherwise specifically included in the quotation.
Process and Application Review
Because ICP etch performance is application-specific, customers should provide detailed process requirements before ordering. Helpful information includes:
- Wafer / substrate material
- Wafer size
- Material or films to be etched
- Film thickness or target etch depth
- Mask material
- Minimum feature size
- Required sidewall profile
- Target etch rate
- Uniformity requirements
- Selectivity requirements
- Required process gases
- Other critical process requirements
SemiStar can review these requirements against the actual Versaline configuration before finalizing the equipment quotation.
Important Notes
- This Plasma-Therm Versaline ICP Etcher will be supplied in refurbished working condition to OEM specifications with its current configuration.
- The equipment is currently located in a warehouse in Texas, USA.
- This equipment is offered to end users only.
- Equipment availability is subject to prior sale.
- Installation is optional.
- A 6-month warranty can be provided when the equipment is purchased with SemiStar installation, subject to the warranty terms in SemiStar’s official quotation.
- Actual process capability and performance depend on substrate, material, mask, feature geometry, recipe, chamber condition, facilities, and process requirements.
- Specific process performance is not guaranteed unless explicitly included as an acceptance requirement in SemiStar’s official quotation.
- Customer-specific process development or qualification is not included unless specifically stated in the quotation.
- Final refurbishment scope, acceptance criteria, installation scope, warranty, delivery schedule, and commercial terms are based on SemiStar’s official quotation.
- All OEM names, trademarks, and model names belong to their respective owners.
- All website information is for reference only and is not a purchase specification. Final configuration, specifications, scope, price, and terms are based on SemiStar’s official quotation.
Request a Quote for Plasma-Therm Versaline ICP Etcher
Please contact SemiStar with your target application and process requirements. Include wafer size, substrate material, material to be etched, mask material, target etch depth, minimum feature size, required sidewall profile, required process gases, facility requirements, budget, and expected purchase timeline.
Current location: Texas, USA
Condition: Refurbished to OEM specifications with current configuration
Sale: End user only
Availability: Subject to prior sale
Installation: Optional
Warranty: 6 months when purchased with SemiStar installation, subject to quotation terms
Contact SemiStar
SS7464-20260810FOX