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Plasmatherm SLR 720

Description

Please contact us for the availability of the Plasmatherm SLR 720 MF used semiconductor equipment.

RIE Reactive Ion Etch System. PC controller with graphical user interface. Single chamber unit with load lock. RF5S 500W, 13.56 MHz RF Generator. Turbo pump with roughing pump. Currently configured with four MFC, others may be added at additional price. 208V, 3 Ph, 60 Hz.

The items are subject to prior sale without notice. These items are only for end users.

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SS5626

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