Description
Please contact us for the availability of the following used Used PLASMATHERM 790 RIE Semiconductor Equipment Parts.
Condition: We sell it at refurbished condition.
Description for your reference.
- Electrode holds up to 8 inch wafer. This is a manual load system.
- Four (4) gas channels, but capable of running 8
- MKS 153D throttle valve
- RF5S RF generator, 500W output, with AMN5 matching network and controller
- ITR100 Ion Gauge
- System computer was upgraded to Windows 98 from WIN 3.1
- Standard Plasmatherm 790 SYSMON software which has built-in data logging, easy recipe building and editing
- Leybold TMP-361C turbo molecular pump with Leybold NT150/360 turbo controller
- Mechanical pump Edwards QDP40
- Neslab HX-75 Heat Exchanger for cooling Lower Electrode
The items are subject to prior sale without notice. These items are only for end users.
SS5248